Abstract: An opto-electronic device that includes a source of a collimated beam of light, a reflector, and at least on partly reflective surface. The partly reflective surface may be a surface of a detector, or alternatively a surface of a partly reflective material behind which one or more detectors are positioned. The partial reflectivity of the surface is exploited to reflect the light beam several times to the same detector, or alternatively among several detectors. Illustrative applications of the device include a pulse sharpener, a touch screen, a serial-to-parallel converter and an opto-electronic switch.

Abstract: A detecting apparatus for performing an auto-teaching operation is used in a vertical heat treatment system to cause a controller for controlling movement of a wafer transfer arm to learn a unit of positional information about a wafer boat placed on a transfer station. The detecting apparatus has a base frame having a shape similar to a wafer and detachably mounted on a wafer holding place of the boat. On the base frame are a Z-sensor formed of an optical sensor of a reflection type, a pair of .theta.-sensors, and an X-sensor. The auto-teaching operation is performed by observing the transfer arm by the detecting apparatus while the detecting apparatus is placed on the wafer holding place of the boat.

Abstract: A CCD structure includes a substrate in which a plurality of buried channels have been formed and a heat conductor disposed transversely to the buried channels and defining a longitudinal direction. A first channel defines a channel direction. The heat conductor includes a first segment and a second segment separated by a gap from the first segment. The heat conductor further includes a tab connected to the first segment. In the structure the tab is characterized by an extent along a direction parallel to the longitudinal direction that is equal to an extent of the gap along the longitudinal direction, an extent along a direction perpendicular to the longitudinal direction that is equal to a width of the heat conductor, and a shape that is a parallelogram, preferrably a rectangle. In the structure the gap is characterized by a gap predetermined shape, size and orientation, and the tab is characterized by a tab predetermined shape, size and orientation.

Abstract: A non-switched, DC coupled vertical deflection circuit includes a source of a first DC supply voltage that is coupled to a first end terminal of a vertical deflection winding. An amplifier is energized by a second DC supply voltage having twice the magnitude of the first DC supply voltage and the same polarity. An output voltage of the amplifier having the same polarity of each of the first and second DC supply voltages is developed at a second end terminal of the deflection winding. The amplifier produces a deflection current at opposite polarities, during corresponding portions of a vertical trace interval.

Abstract: Apparatus and methods are disclosed for performing highly precise mark detection by obtaining a large signal as a result of the efficient capture of secondary electrons (SEs) emitted from a surface of a specimen. A charged-particle beam is directed at a location (e.g., a mark) on the specimen (e.g., reticle or wafer). SEs emitted from the location are detected using one or more secondary-electron collectors or detectors. To guide the SEs toward the secondary-electron collectors or detectors, a magnetic flux is created that extends radially outward in the vicinity of the surface of the specimen. E.g., an objective lens is situated above the specimen adjacent the specimen surface, and an electromagnetic lens is placed below the specimen adjacent the lower surface of the specimen. The magnetic fields produced by these lenses can be mutually repulsive to form a resultant magnetic flux near the upper surface of the specimen that extends radially outward parallel with the upper surface of the specimen.

Abstract: The present invention additionally comprises a method and apparatus for generating and mixing signals for frequency-domain lifetime and spectral fluorometry. The present invention comprises a plurality of signal generators that generate a plurality of signals where the signal generators modulate the amplitude and/or the frequency of the signals. The present invention uses one of these signals to drive an excitation signal that the present invention then directs and transmits at a target mixture, which absorbs the energy from the excitation signal. The property of fluorescence causes the target mixture to emit an emitted signal that the present invention detects with a signal detector. The present invention uses a plurality of mixers to produce a processor reference signal and a data signal. The present invention then uses a processor to compare the processor reference signal with the data signal by analyzing the differences in the phase and the differences in the amplitude between the two signals.

Abstract: An X-ray image detector has been disclosed comprising X-ray sensitive storage means for storing an X-ray image, which storage means emit image-wise modulated light when being stimulated, and a two-dimensional position sensitive gaseous photon detector. An image stored by the detector is read by line-wise stimulation of the X-ray sensitive storage means followed by measurement of the charges generated by the gaseous photon detector.

Abstract: An articulated reactor may comprise a generally rectangular member having a longitudinal axis, a transverse axis, an elongate inlet side, and an elongate outlet side. A raised portion extends along a direction that is generally parallel to the longitudinal axis and at least one slot extends from about the elongate outlet side to about the elongate inlet side. The slot forms at least two fingers the raised portions of which are biased against a roller associated with a scanner device when the scanner device is positioned adjacent the articulated reactor.

Abstract: A dynamic focusing apparatus is comprised of a parabaolic voltage generating device for generating a parabolic voltage VpbI across a capacitor 9M by applying a horizontal flyback pulse a series circuit of an inductor 8 and the capacitor, a coupling device 10 for supplying the parabolic voltage to a focus electrode "f" of a cathode-ray tube, the capacitor which includes a plurality of capacitors 9S, an electronic switching device 11 for selectively connecting some of the plurality of capacitors for a time duration corresponding to an approximate center of a horizontal period and for disconnecting the some of the plurality of capacitors for other duration, and a switching control device for controlling the electronic switching device.

Abstract: The invention provides method and apparatus for fast, accurate, and nondestructive imaging of defects and determining defect densities in solid materials including a semiconductor wafer. A wafer is illuminated on one side by an infrared (IR) source and a camera is placed on the other side of the wafer, to detect IR radiation that is transmitted through such wafer. The inventive method employs an imaging camera, e.g. a focal plane array camera, to image the so illuminated wafer. The wafer material must be substantially transparent in the camera bandwidth but can contain defects that absorb or scatter radiation in such bandwidth. Camera filters are used, for example, to select specific wavelengths or bands of wavelengths, to detect and image precipitates, subsurface defects, residual damage from polishing and other defects.

Abstract: A device for sensing a sudden stop of a machine is disclosed. A spring-biased weight wheel is selectively moved in response to a predetermined extent of inertia force. A beam shutter is connected to the weight wheel and is selectively inserted into an optical sensor, thus intercepting a light beam of the sensor and allowing the sensor to generate a sudden stop signal. The spring force for the weight wheel is adjustable by controlling the position of a movable support plate and so the sensitivity of the device is controllable. The device is only started in response to the predetermined extent of inertial force, thus being almost completely prevented from being unexpectedly started by normal operational vibrations or rotating motions of the machine.

Abstract: An apparatus and method to dynamically shape the projected energy profile of an electron beam and the energy distribution of an electron beam of a cathode ray tube to provide a single cathode ray tube the ability to display multiple image formats of varying resolutions, brightnesses and aspect ratios. In one embodiment, the invention contemplates the introduction of a shaping lens along the path of the electron beam comprising at least three electrodes. Voltages are selectively applied to the electrodes to dynamically and selectively vary the projected energy profile of an electron beam in a plane perpendicular to the longitudinal axis of the cathode ray tube.

Abstract: A laser beam transmitting system is provided comprising at least one target, a laser detection module, an optical system, a rotary encoder, a dither zone memory, and a controller. The optical system is arranged to generate a reference laser beam selectively in one of a search mode and a target dither mode and to direct a laser beam reflected from the target to the laser detection module. The search mode is characterized by movement of the reference beam through a rotational arc defined about a central rotational axis and the target dither mode is characterized by movement of the reference beam through a selected discrete portion of the rotational arc. The rotary encoder is arranged to produce a rotary signal indicative of a rotary position of the reference beam relative to the rotational arc.

Abstract: A circuit for controlling a horizontal focus signal improves picture quality, which has horizontal and vertical focus signal generating sections for generating parabola-shaped horizontal and vertical focus signals according to horizontal and vertical deflection signals, a high voltage generating section for receiving the dynamic focus signal, a DC power supply controlling section for detecting voltage supplied from an auxiliary coil of said high voltage generating means, and for generating a PWM signal to generate a DC power supply corresponding to a mode according to a voltage detected by an auxiliary coil of the high voltage generating section, a DC voltage varying section for generating a DC voltage corresponding to the mode according to the PWM signal, and a horizontal focus signal amplifying section for amplifying the horizontal focus signal according to the DC voltage of the DC voltage varying section to supply the amplified horizontal focus signal to a mixing section.

Abstract: The present invention relates to a method and system for optimizing the output of at least two electron guns in a cathode ray tube for aging the cathode ray tube during manufacture. The system comprises at least two electron guns located in the cathode ray tube and a memory configured to store an offset value that is representative of a difference between a maximum output level and a detected output level for each of the electron guns. The system further comprises a processor coupled to the memory. The processor generates a first scaled signal by adding a first signal representative of an input voltage corresponding to the detected output level of the first electron gun and an offset signal representative of the offset value, and a second scaled signal by adding a second signal representative of an input voltage corresponding to the detected output level of the second electron gun and the offset signal.

Abstract: When employing conventional ion implantation equipment, the peripheral edge of the wafer is contaminated by metallic ions generated from the collision of the accelerated ion beam with the disk that supports the target, namely a wafer. The present invention provides a magnet for forming a magnetic field which will repel the generated metallic ions. The magnet is disposed on the disk and surrounds the wafer to prevent the metallic ions from impinging the wafer.

Abstract: A CRT system is provided, preventing the resolution on a phosphor screen from degrading due to the characteristic or performance variation and/or deviation of an electron gun. The electron gun has cathodes for emitting R, G, and B electron beams. First and second focusing electrodes focus the electron beams onto a phosphor screen. A drive unit has a power supply for supplying first and second focusing voltages to the first and second focusing electrodes, respectively. The second focusing voltage is an ac voltage with a parabolic waveform. The first focusing voltage is a dc voltage generated by dividing the second focusing voltage with the use of a resistor. A difference between the first and second focusing voltages generates an electrostatic quadruple lens in a space between the first and second focusing electrodes.

Abstract: An optical position sensor comprises a linearity correction circuit 20 having ROM 22 in which a corresponding table between compensation values and respective rotational angular position of a rotational disk 51. The compensation values are obtained such that an actual relationship is measured between the rotational angular positions of the rotational disk 51 and the output B of a semiconductor position sensing device 54, deviation of the output B of the device 54 from a predetermined linearity relationship (A) is calculated, and compensation values are determined for eliminating the deviation of the output B of the device 54 at respective rotational angular positions of the rotational disk 51. The linearity correction circuit 20 retrieves a compensation value E from ROM 22 based on the output B of the device 54, and compensates the output A so as to produce the sensing output E which has a linearity relationship to the rotational angle of the rotational disk 51.

Abstract: A photo diode is connected to an input terminal of an amplifier to which a feedback resistor is connected. An output current of this photo diode flows from the output terminal side of the amplifier through the feedback resistor. The output of the photo diode converted into a voltage is given to the output terminal side of the amplifier. The feedback resistor is formed by a P-type resistor region provided in an N-type resistor land of a semiconductor substrate. In order to apply an inverse bias to the PN junction between the resistor land and resistor region, the resistor land is connected to the output terminal of the amplifier.

Abstract: A method of processing an electromagnetic signal received and contained completely within the bounds of a two dimensional signal detection array, is comprised of (a) determining a position of the signal in a large window on the detector array, (b) reducing the dimensions of the window by a predetermined ratio with the position of the signal at the center thereof, (c) locating the position of the signal in the reduced size window (d) repeating steps (b) and (c) until the window is a predetermined number of pixels in size, and (e) continuously monitoring the presence and location of the signal.