Patents Examined by Eliza W Osenbaugh-Stewart
  • Patent number: 11117195
    Abstract: A High Energy Beam Processing (HEBP) system provides feedback signal monitoring and feedback control for the improvement of process repeatability and three-dimensional (3D) printed part quality. Electrons deflected from a substrate in the processing area impinge on a surface of a sensor. The electrons result from the deflection of an electron beam from the substrate. Either one or both of an initial profile of an electron beam and an initial location of the electron beam relative to the substrate are determined based on a feedback electron signal corresponding to the impingement of the electrons on the surface of the sensor. With an appropriate profile and location of the electron beam, the build structure is fabricated on the substrate.
    Type: Grant
    Filed: July 18, 2019
    Date of Patent: September 14, 2021
    Assignees: Howmedica Osteonics Corp.
    Inventors: Christopher J. Sutcliffe, Eric Jones, Hay Wong
  • Patent number: 11119060
    Abstract: Defect location accuracy can be increased using shape based grouping with pattern-based defect centering. Design based grouping of defects on a wafer can be performed. A spatial distribution of the defects around at least one structure on the wafer, such as a predicted hot spot, can be determined. At least one design based defect property for a location around the structure can be determined. The defects within an x-direction threshold and a y-direction threshold of the structure may be prioritized.
    Type: Grant
    Filed: February 25, 2018
    Date of Patent: September 14, 2021
    Assignee: KLA-Tencor Corporation
    Inventors: Jagdish Chandra Saraswatula, Martin Plihal
  • Patent number: 11110299
    Abstract: A particle beam therapy system delivers a particle beam for particle radiation therapy to a target volume in a patient from different treatment angles. The particle beam enters an active static magnetic field region perpendicularly to a magnetic field. Magnets and/or coils generate a cylindrically shaped magnetic field system with magnetic fields oriented axially in the magnetic field system. The active magnetic field region has an outer radial guiding field region and an inner radial bending field region, with an arc scan magnet system at an outer edge, a first number of coils generating a static magnetic guiding field that is predominantly effective in the outer radial guiding field region, and a second number of coils predominantly effective in an inner radial bending field region. A treatment control system controls the magnets and/or coils to guide the particle beam according to a treatment plan for the target volume of the patient.
    Type: Grant
    Filed: January 17, 2019
    Date of Patent: September 7, 2021
    Assignee: Paul Scherrer Institut
    Inventor: Jacobus Maarten Schippers
  • Patent number: 11114292
    Abstract: A linear ion trap system includes a linear ion trap having at least two discrete trapping regions for processing ions. An RF electrical potential generator produces two RF waveforms applied to a pair of pole electrodes of the linear ion trap forming a RF trapping field component to trap ions radially. A multi-output DC electrical potential generator produces a first set of multiple DC field components superimposed to the RF trapping field component and distributed across the length of the linear ion trap to control ions axially. A control unit is configured to switch the DC electrical potentials and DC field components collectively forming a first trapping region of the at least two discrete trapping regions that is populated with ions to alter ion potential energy from a first level to a second level, and to enable at least a first ion processing step in at least one of the first and second levels.
    Type: Grant
    Filed: July 10, 2019
    Date of Patent: September 7, 2021
    Inventors: Dimitris Papanastasiou, Emmanuel Raptakis
  • Patent number: 11079405
    Abstract: A method of detecting a ferroelectric signal from a ferroelectric film and a piezoelectric force microscopy (PFM) apparatus are provided. The method includes following steps. An input waveform signal is generated, wherein the input waveform signal includes a plurality of read voltage steps with different voltage levels. The input waveform signal to the ferroelectric film is applied. An atomic force microscope probe scans over a surface of the ferroelectric film to measure a surface topography of the ferroelectric film. A deflection of the atomic force microscope probe is detected when the input waveform signal is applied to a pixel of the ferroelectric film to generate a deflection signal. Spectrum data of the pixel based on the deflection signal is generated. The spectrum data of the pixel is analyzed to determine whether the spectrum data of the pixel is a ferroelectric signal or a non-ferroelectric signal.
    Type: Grant
    Filed: May 5, 2020
    Date of Patent: August 3, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Shan Hu, Dong Gui, Jang-Jung Lee
  • Patent number: 11072543
    Abstract: A water disinfection chamber includes one or more UVC LEDs. The chamber is constructed of Teflon or employs a Teflon PTFE liner to increase UV reflections through the volume of the chamber. LEDs are positioned in specific locations to both provide maximum UV intensity in the main fluid flow path and an angle to allow enough reflections to fill the chamber with UV light to disinfect the fluid flowing through the chamber. The chamber is scalable in size and in the number of LEDs employed including the number of rings where LEDs are located.
    Type: Grant
    Filed: May 23, 2018
    Date of Patent: July 27, 2021
    Assignee: Canopus Water Technologies, Inc.
    Inventor: Souheil Benzerrouk
  • Patent number: 11069509
    Abstract: The backside of a planar view lamella is prepared from a sample extracted from a workpiece. The sample includes multiple device layers and a substrate layer. After removing at least a part of the substrate layer covering a final device layer to obtain a sample surface, a region of interest (ROI) relative to the sample surface is alternately scanned with an electron beam and spontaneously etched until the final device layer within the ROI is exposed. One or more device layers may be removed from the sample backside after the final device layer is exposed to obtain the backside of the planar view lamella.
    Type: Grant
    Filed: March 16, 2020
    Date of Patent: July 20, 2021
    Assignee: FEI Company
    Inventors: James Clarke, Brian Routh, Jr., Micah LeDoux, Cliff Bugge
  • Patent number: 11069507
    Abstract: A sample carrier for in situ transmission electron microscopy (TEM) has a dielectric substrate with a conductive layer that forms a coplanar waveguide. The coplanar waveguide has a first and second leads formed by the conductive layer. The first lead is between an adjacent pair of second leads and is spaced from the second leads by a respective gap. The coplanar waveguide is configured to transmit an electrical signal to a specimen held by the sample carrier, in particular, an electrical signal having a frequency in the radio-frequency (RF) regime (3 kHz-300 GHz), for example, up to 100 GHz. The sample carrier may be mounted to a TEM sample holder, which supports the sample carrier within a vacuum chamber of the microscope and provides electrical connection between the leads of the sample carrier and an RF source external to the vacuum chamber.
    Type: Grant
    Filed: March 5, 2020
    Date of Patent: July 20, 2021
    Assignees: University of Maryland, College Park, Government of the United States of America, as represented by the Secretary of Commerce, National Institute of Standards and Technology
    Inventors: Michael Katz, Karl Schliep, June Lau, Jason J. Gorman
  • Patent number: 11069517
    Abstract: A system is disclosed for identifying precursor ions originating from an ion source device. A mass filter filters an ion beam by using a series of overlapping precursor ion mass selection windows across the precursor ion mass range. A mass analyzer analyzes the precursor ions of each precursor ion mass selection window of the series, producing a plurality of precursor ion spectra for the precursor ion mass range. A precursor ion is selected from the spectra. The intensities for the selected precursor ion are retrieved from the spectra and a trace is produced that describes how the intensity of the selected precursor ion varies with the location of the precursor ion mass selection window. The selected precursor ion is identified as a precursor ion originating from the ion source device if the trace includes a nonzero intensity for the m/z value of the selected precursor ion.
    Type: Grant
    Filed: February 1, 2018
    Date of Patent: July 20, 2021
    Assignee: DH Technologies Development Pte. Ltd.
    Inventor: Stephen Alexander Tate
  • Patent number: 11058894
    Abstract: To provide a particle beam therapy device that expands an irradiation field while avoiding an increase in size of a scanning unit or an irradiation device including the scanning unit. A shift unit 36 is provided downstream of a scanning unit 34. The shift unit 36 deflects a carbon beam as a particle beam to shift the irradiation field, thereby forming an expanded irradiation field. The shift unit 36 includes a first shift electromagnet 42 that shifts the irradiation field in a Y direction and a second shift electromagnet 44 that shifts the irradiation field in an X direction. The scanning unit is dynamically controlled, and the shift unit 36 is statically controlled.
    Type: Grant
    Filed: November 6, 2019
    Date of Patent: July 13, 2021
    Assignee: HITACHI, LTD.
    Inventors: Tomokazu Shimakura, Chihiro Nakashima, Satoshi Totake, Kazuo Tomida, Takeshi Fujita
  • Patent number: 11060822
    Abstract: An apparatus includes at least one transmitter configured to transmit wireless signals that create different localized heating in different portions of a scene. The different localized heating in the different portions of the scene is based on different moisture or liquid content within objects in the scene. The apparatus also includes at least one controller configured to control the at least one transmitter in order to control the different localized heating in the different portions of the scene and to create a desired thermal radiation pattern in the scene. The desired thermal radiation pattern in the scene may include a camouflage pattern that increases clutter in an infrared image, at least one temporary infrared marker, or at least one false shape in an infrared image. The desired thermal radiation pattern could reduce a contrast between a cold infrared background in the scene and one or more targets in the scene.
    Type: Grant
    Filed: February 17, 2020
    Date of Patent: July 13, 2021
    Assignee: Raytheon Company
    Inventor: Hooman Kazemi
  • Patent number: 11049705
    Abstract: The disclosure relates to a method of operating a secondary-electron multiplier in the ion detector of a mass spectrometer so as to prolong the service life, wherein the secondary-electron multiplier is supplied with an operating voltage in such a way that an amplification of less than 106 secondary electrons per impinging ion results, while the output current of the secondary-electron multiplier is amplified using an electronic preamplifier mounted close to the secondary-electron multiplier with such a low noise level that the current pulses of individual ions impinging on the ion detector are detected above the noise at the input of a digitizing unit. Further disclosed are the use of the methods for imaging mass spectrometric analysis of a thin tissue section or mass spectrometric high-throughput analysis/massive-parallel analysis, and a time-of-flight mass spectrometer whose control unit is programmed to execute such methods.
    Type: Grant
    Filed: March 20, 2019
    Date of Patent: June 29, 2021
    Inventors: Sebastian Böhm, Andreas Haase, Jens Höhndorf
  • Patent number: 11049627
    Abstract: A radiation treatment delivery system, includes a linear accelerator (LINAC) and a multileaf collimator (MLC), coupled with the distal end of the LINAC, wherein the MLC has two banks of leaves, organized into a plurality of opposing leaf pairs. The system further includes a processing device, operatively coupled to the LINAC and the MLC, to control the plurality of leaf pairs of the MLC such that for each of a plurality of radiation beam delivery positional sections corresponds to a range of radiation beam positions over a discrete time interval that constrains an overall treatment time and wherein each leaf pair of the plurality of opposing leaf pairs is open to a fixed opening for a fraction of time in the discrete time interval and closed for the remaining fraction of time in the discrete time interval, while a radiation beam of the radiation treatment system is active.
    Type: Grant
    Filed: April 7, 2020
    Date of Patent: June 29, 2021
    Inventors: Eric Schnarr, Hari Gopalakrishnan, Jari Toivanen, Matthew Orton
  • Patent number: 11043355
    Abstract: An ion milling apparatus includes a sample holder, a vacuum chamber, an evacuation section, a vacuum gauge, a heater, a gas inlet assembly, and a control section. The evacuation section vents gas in the interior space of the vacuum chamber. The vacuum gauge measures the pressure in the interior space of the vacuum chamber. The heater heats the sample holder. The gas inlet assembly admits a dry gas containing no moisture into the interior space of the vacuum chamber. When the pressure in the interior space has reached below a given pressure, the control section controls the gas inlet assembly based on information about the pressure in the interior space so as to admit the dry gas into the vacuum chamber.
    Type: Grant
    Filed: December 3, 2019
    Date of Patent: June 22, 2021
    Assignee: JEOL LTD.
    Inventor: Tsutomu Negishi
  • Patent number: 11031228
    Abstract: A mass spectrometry device according to one aspect of the invention includes: a sample stage on which a sample is placed and on which a sample support having a substrate, in which a plurality of through-holes passing from one surface thereof to the other surface thereof are provided, and a conductive layer, which covers at least a portion of the one surface which is not provided with the through-holes, is placed such that the other surface faces the sample; a laser beam application unit that controls application of a laser beam such that the laser beam is applied to an imaging target region on the one surface; and a detector that detects the sample ionized by the application of the laser beam in a state where a positional relation of the sample in the imaging target region is maintained.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: June 8, 2021
    Inventors: Yasuhide Naito, Masahiro Kotani, Takayuki Ohmura
  • Patent number: 11017978
    Abstract: An ion implanter having a beam park device on the way of a beamline through which an ion beam is transported toward a wafer is provided. The beam park device includes a pair of park electrodes which faces each other across the beamline, and a beam dump which is provided away from the beamline in a facing direction of the pair of park electrodes and on a downstream side of the pair of park electrodes in a beamline direction. At least one of the pair of park electrodes includes a plurality of electrode bodies which are disposed to be spaced apart from each other in a predetermined direction perpendicular to both a direction in which the beamline extends and the facing direction, and each of the plurality of electrode bodies extends from an upstream side toward the downstream side in the beamline direction.
    Type: Grant
    Filed: November 12, 2019
    Date of Patent: May 25, 2021
    Inventor: Takanori Yagita
  • Patent number: 11011368
    Abstract: A microwave excited ultraviolet lamp system with a data logging and retrieval circuit and method for operating the same. The data logging and retrieval circuit stores operational data in a cache memory using a FIFO data storage protocol. The contents of the cache memory are periodically copied to a larger removable memory so that the removable memory contains a relatively long historical record of the system operational parameters. The data logging and retrieval circuit includes a data port configured to load the contents of the cache memory into an external device when the device is coupled to the data port. A second data port allows the external device to supply power to the data logging and retrieval circuit so that data may be retrieved when the internal power supply is malfunctioning. Data stored in the removable memory may be protected so that it may only be accessed by authorized personnel.
    Type: Grant
    Filed: December 5, 2014
    Date of Patent: May 18, 2021
    Assignee: Nordson Corporation
    Inventors: James M. Borsuk, James M. Khoury, Edward C. McGhee, James C. Smith
  • Patent number: 11013097
    Abstract: A target droplet source for an extreme ultraviolet (EUV) source includes a droplet generator configured to generate target droplets of a given material. The droplet generator includes a nozzle configured to supply the target droplets in a space enclosed by a chamber. The target droplet source further includes a sleeve disposed in the chamber distal to the nozzle. The sleeve is configured to provide a path for the target droplets in the chamber.
    Type: Grant
    Filed: February 27, 2018
    Date of Patent: May 18, 2021
    Inventors: Wei-Chih Lai, Han-Lung Chang, Chi Yang, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng
  • Patent number: 11004651
    Abstract: Provided is a process for lamella thinning and endpointing that substitutes a series of automated small angle tilts for the motions in the conventional endpointing sequence. STEM images or through-surface BSE scans are acquired at each tilt. The results are analyzed automatically to determine feature depths, and an intervention request is made requesting a user decision based on marked-up images and summary information displayed.
    Type: Grant
    Filed: September 19, 2019
    Date of Patent: May 11, 2021
    Assignee: FEI Company
    Inventors: Roger Louis Alvis, Trevan R. Landin, Greg Clark
  • Patent number: 10993308
    Abstract: A method for generating light is provided. The method further includes measuring a period of time during which one of targets from a fuel target generator passes through two detection positions. The method also includes exciting the targets with a laser generator so as to generate plasma that emits light. In addition, the method includes adjusting at least one parameter of the laser generator according to the measured period of time, when the measured period of time is different from a predetermined value, wherein the parameter of the laser generator which is adjusted according to the measured period of time includes a frequency for generating a laser for illuminating the targets.
    Type: Grant
    Filed: November 1, 2019
    Date of Patent: April 27, 2021
    Inventors: Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng