Patents Examined by Eliza W Osenbaugh-Stewart
  • Patent number: 11953517
    Abstract: A large radius probe for a surface analysis instrument such as an atomic force microscope (AFM). The probe is microfabricated to have a tip with a hemispherical distal end or apex. The radius of the apex is the range of about a micron making the probes particularly useful for nanoindentation analyses, but other applications are contemplated. In particular, tips with aspect ratios greater than 2:1 can be made for imaging, for example, semiconductor samples. The processes of the preferred embodiments allow such large radius probes to be batch fabricated to facilitate cost and robustness.
    Type: Grant
    Filed: September 20, 2022
    Date of Patent: April 9, 2024
    Assignee: Bruker Nano, Inc.
    Inventor: Jeffrey Wong
  • Patent number: 11946945
    Abstract: A sample analyzing method and a sample preparing method are provided. The sample analyzing method includes a sample preparing step, a placing step, and an analyzing step. The sample preparing step includes an obtaining step implemented by obtaining an identification information; and a marking and placing step implemented by placing a sample carrying component having a sample disposed thereon into a marking equipment, allowing the marking equipment to utilize the identification information to form an identification structure on the sample carrying component, and placing the sample carrying component into one of the accommodating slots according to the identification information. The placing step is implemented by taking out the sample carrying component from one of the accommodating slots and placing the sample carrying component into an electron microscope equipment. The analyzing step is implemented by utilizing the electron microscope equipment to photograph the sample to generate an analyzation image.
    Type: Grant
    Filed: July 29, 2021
    Date of Patent: April 2, 2024
    Inventors: Keng-Chieh Chu, Tsung-Ju Chan, Chun-Wei Wu, Hung-Jen Chen
  • Patent number: 11946949
    Abstract: A method for demodulation including the following steps: exciting a vibrationally mounted, at least sectionally bar-shaped oscillating element for oscillating in the range of a resonance frequency of the oscillating element, wherein a temporally varying, in particular periodic, excitation signal is used for excitation, and wherein at least the temporal variation of the excitation signal is known or determined; detecting a modulated oscillation of the oscillating element by means of at least one sensor, wherein the sensor supplies a sensor measurement variable that varies versus time as a function of an amplitude and a phase of the modulated oscillation of the oscillating element. According to the present teaching, it is provided that the method includes the following step: generate a first comparison signal by amplitude modulating a known temporally varying, in particular periodic, demodulation signal by means of the temporally varying sensor measurement variable.
    Type: Grant
    Filed: November 12, 2019
    Date of Patent: April 2, 2024
    Inventors: Dominik Kohl, Mathias Poik, Georg Schitter
  • Patent number: 11939240
    Abstract: A sterilizing device includes a pipe having an inlet and an outlet and allowing fluid to move therethrough and a light source provided on one side of the pipe and providing light to the fluid. At least a portion of the pipe is provided in a spiral shape and the inlet and/or the outlet are arranged in a light emitting region.
    Type: Grant
    Filed: December 21, 2022
    Date of Patent: March 26, 2024
    Assignee: SEOUL VIOSYS CO., LTD.
    Inventors: Jae Young Choi, Shi Hyun Ahn, Ki Yon Park, Woong Ki Jeong, Kyu Won Han
  • Patent number: 11908694
    Abstract: In an example, a substrate is oriented to a target axis, wherein a residual angular misalignment between the target axis and a preselected crystal channel direction in the substrate is within an angular tolerance interval. Dopant ions are implanted into the substrate using an ion beam that propagates along an ion beam axis. The dopant ions are implanted at implant angles between the ion beam axis and the target axis. The implant angles are within an implant angle range. A channel acceptance width is effective for the preselected crystal channel direction. The implant angle range is greater than 80% of a sum of the channel acceptance width and twofold the angular tolerance interval. The implant angle range is smaller than 500% of the sum of the channel acceptance width and twofold the angular tolerance interval.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: February 20, 2024
    Assignee: Infineon Technologies AG
    Inventors: Moriz Jelinek, Michael Hell, Caspar Leendertz, Kristijan Luka Mletschnig, Hans-Joachim Schulze
  • Patent number: 11906546
    Abstract: Active cantilever probes having a thin coating incorporated into their design are disclosed. The probes can be operated in opaque and/or chemically harsh environments without the need of a light source or optical system and without being significantly negatively impacted by corrosion. The probes include a substrate that has a cantilever, a thermomechanical actuator associated with the cantilever, a piezoresistive stress sensor disposed on the cantilever, and a thin coating disposed on the cantilever and the piezoresistive stress sensor. The coating is bonded to the substrate, is thermally conductive, and has a low thermal resistance. Further, the thin coating is configured to have little to no impact on one or more of a mass of the active probe, a residual stress of the cantilever, or a stiffness of the active probe. Techniques for performing topography and making other measurements in an opaque and/or chemically harsh environment are also provided.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: February 20, 2024
    Assignees: Massachusetts Institute of Technology, Nano Analytik GMBH, Synsfuels Americas Corporation
    Inventors: Fangzhou Xia, Chen Yang, Yi Wang, Kamal Youcef-Toumi, Christoph Reuter, Tzvetan Ivanov, Mathias Holz, Ivo Rangelow
  • Patent number: 11899159
    Abstract: A beam injector may include a cathode emitter to emit electrons and an electrode to bias at least a portion of the electrons to remain on the cathode emitter and focus the emitted electrons into an electron beam. The beam injector may also include a resistor coupled between the cathode emitter and the electrode and configured to allow self-regulation of a voltage potential on the electrode based at least in part on a current of the electron beam.
    Type: Grant
    Filed: April 2, 2020
    Date of Patent: February 13, 2024
    Inventors: Jani Reijonen, Kevin McFarland
  • Patent number: 11892471
    Abstract: A device capable of simultaneous independent motion measurement of multiple probes in an atomic force microscope includes at least two cantilever arms arranged in parallel. The end of each cantilever arm is provided with a needle tip. The surface of each cantilever arm is provided with a grating structure with a periodic distribution rule for reflecting laser irradiated on the grating structure and receiving the laser through reflected light detectors. The discrimination and motion measurement includes the steps of irradiating the measurement laser of different wavelengths on the back surfaces of multiple probes through the same light path at the same time, adopting the grating structures of different feature sizes as physical labels of the multiple probes and reflecting high-order reflected light of the laser of different wavelengths by the grating structures at different angles to separate the light path.
    Type: Grant
    Filed: May 8, 2021
    Date of Patent: February 6, 2024
    Inventors: Lianqing Liu, Jialin Shi, Peng Yu
  • Patent number: 11890398
    Abstract: Invention relates to air cleaning systems, particularly to electric air cleaners, and may be used for decontamination of air in different industries. Invention is directed to attaining a technical effect of providing an air cleaning device, where air is cleaned owing to action of corona discharge streamers on air molecules and contamination particles. Technical effect is attained by air cleaning device that contains a high-voltage pulse generator, an outer electrode provided as a grounded metal tube, and an inner electrode rigidly secured along the tube axis by a fastening member and provided in form of a metal rod and configured so as pulsed corona discharge streamers are formed in between the inner and outer electrodes, wherein the inner electrode is spaced by a gap from an output electrode of high-voltage pulse generator and size of the gap assures breakdown of the gap with pulses formed by high-voltage pulse generator.
    Type: Grant
    Filed: July 12, 2023
    Date of Patent: February 6, 2024
    Inventors: Mikhail Aleksandrovich Meshchaninov, Dmitrii Yanovich Agasarov, Anton Viktorovich Sergeev
  • Patent number: 11894212
    Abstract: Embodiments of systems, devices, and methods relate to an electrode standoff isolator. An example electrode standoff isolator includes a plurality of adjacent insulative segments positioned between a proximal end and a distal end of the electrode standoff isolator. A geometry of the adjacent insulative is configured to guard a surface area of the electrode standoff isolator against deposition of a conductive layer of gaseous phase materials from a filament of an ion source.
    Type: Grant
    Filed: May 10, 2022
    Date of Patent: February 6, 2024
    Inventors: Christopher J. Killer, Vladislav Vekselman, Joshua Leuenberger
  • Patent number: 11894214
    Abstract: Embodiments may include methods, systems, and apparatuses for correcting a response function of an electron beam tool. The correcting may include modulating an electron beam parameter having a frequency; emitting an electron beam based on the electron beam parameter towards a specimen, thereby scattering electrons, wherein the electron beam is described by a source wave function having a source phase and a landing angle; detecting a portion of the scattered electrons at an electron detector, thereby yielding electron data including an electron wave function having an electron phase and an electron landing angle; determining, using a processor, a phase delay between the source phase and the electron phase, thereby yielding a latency; and correcting, using the processor, the response function of the electron beam tool using the latency and a difference between the source wave function and the electron wave function.
    Type: Grant
    Filed: October 24, 2022
    Date of Patent: February 6, 2024
    Inventors: Henning Stoschus, Stefan Eyring, Christopher Sears
  • Patent number: 11869744
    Abstract: A fluid metering system for gas independent pressure and flow control through an electron microscope sample holder includes: a pressure control system that supplies gas; an inlet line providing gas from the pressure control system to the sample holder; an outlet line receiving gas from the sample holder; and a variable leak valve that controls gas flow in the outlet line. The gas flows from an upstream tank of the pressure control system through the sample holder and variable leak valve to a downstream tank of the pressure control system due to the pressure difference of the two tanks as the variable leak valve meters flow in the outlet line. Flow rates are established by monitoring pressure changes at source and collection tanks of known volumes with gas independent pressure gauges. A method of directing the gas flow to a residual gas analyzer (RGA) is also presented.
    Type: Grant
    Filed: January 7, 2022
    Date of Patent: January 9, 2024
    Assignee: Protochips, Inc.
    Inventors: Franklin Stampley Walden, II, John Damiano, Jr., Daniel Stephen Gardiner, William Bradford Carpenter
  • Patent number: 11860188
    Abstract: Provided is a scanning probe microscope, and in particular, a scanning probe microscope capable of scanning a large area using a probe including a plurality of conductive tips and capable of simply generating a surface image of a sample with high resolution by recognizing only two binary states of contact/non-contact between the conductive tips and a surface of the sample.
    Type: Grant
    Filed: March 24, 2022
    Date of Patent: January 2, 2024
    Assignee: Industry-Academic Cooperation Foundation, Yonsei University
    Inventors: Wooyoung Shim, Gwangmook Kim
  • Patent number: 11860551
    Abstract: A method for detecting a rare stochastic defect, the method may include searching for a rare stochastic defect in a dense pattern of a substrate, wherein the rare stochastic defect is (a) of nanometric scale, (b) appears in a functional pattern of the substrate with a defect density that is below 10?9, and (c) appears in the dense pattern with a defect density that is above 10?7; wherein the dense pattern is a dense representation of the functional pattern that differs from the functional pattern by at least one out of (a) a distance between features of the dense pattern, and (b) a width of the features of the dense pattern; and estimating the occurrence of the rare stochastic defect within the functional pattern based on an outcome of the searching.
    Type: Grant
    Filed: August 13, 2021
    Date of Patent: January 2, 2024
    Assignee: Applied Materials Israel Ltd.
    Inventor: Guy Cohen
  • Patent number: 11852654
    Abstract: Illustrative embodiments provide an apparatus comprising a substrate comprising a cantilever, a bottom electrode on the substrate, a bottom piezoelectric transducer on the bottom electrode such that the bottom electrode is between the substrate and the bottom piezoelectric transducer, a middle electrode on the bottom piezoelectric transducer such that the bottom piezoelectric transducer is between the bottom electrode and the middle electrode, a top piezoelectric transducer on the middle electrode such that the middle electrode is between the bottom piezoelectric transducer and the top piezoelectric transducer, and a top electrode on the top piezoelectric transducer, such that the top piezoelectric transducer is between the middle electrode and the top electrode. Illustrative embodiments also provide a method of making the apparatus and a method of using the apparatus for atomic force microscopy.
    Type: Grant
    Filed: July 17, 2020
    Date of Patent: December 26, 2023
    Assignee: Board of Regents, The University of Texas System
    Inventors: Seyed Omid Reza Moheimani, Mohammad Mahdavi
  • Patent number: 11841274
    Abstract: The invention offers high resolution and accuracy for nanoscale device characterization from ultraviolet through microwave wavelengths. Instead of collecting light after emission in near-field that decays to far-field, the present invention directly couples the near-field waves to a polaritonic-coated probe. The polaritonic coating can be formed on an wavelength tuned optical fiber to receive the coupled emission and form polaritons, including plasmons, phonons, and magnons, using the polaritonic material. The polaritons propagate along the probe decay back into the fiber core without substantial losses to far-field and are transmitted to a detector, such as a spectroscope. The coupling of the near-field energy to emission detected through the tip apex of fiber can be expressed as emission spectra. Through mapping with other spatial points, multi-dimensional displays and other information can be provided. The resolution can be less than 100 nanometers, including an order of magnitude less than 100 nanometers.
    Type: Grant
    Filed: October 11, 2021
    Date of Patent: December 12, 2023
    Inventors: Zhenrong Zhang, Blake Birmingham, Khant Minn
  • Patent number: 11835548
    Abstract: In order to increase the order of a frequency of an AC signal to be applied between a vibration section and a sample to an order at substantially the same level as the order of a vibration frequency of the vibration section in measuring a vibration component of the vibration control section, a vibration component measuring device (2) includes: a vibration section (4); a first AC signal generator (20) configured to generate a first AC signal; a second AC signal generator (44) configured to generate a second AC signal having a frequency which is (a) more than one time and less than two times or (b) more than two times and less than three times as high as a frequency of the first AC signal; a signal applying section (14, 56) configured to apply the second AC signal between the vibration section and a sample (X); a vibration control section (10) configured to cause the vibration section to vibrate; and a measuring section (16, 18, 20, 22, 42, 44, 50) configured to measure a varying component of vibration of the v
    Type: Grant
    Filed: March 25, 2021
    Date of Patent: December 5, 2023
    Inventor: Yasuhiro Sugawara
  • Patent number: 11837431
    Abstract: The device includes a beam source for generating an electron beam, a beam guiding tube passed through an objective lens, an objective lens for generating a magnetic field in the vicinity of the specimen to focus the particles of the particle beam on the specimen, a control electrode having a potential for providing a retarding field to the particle beam near the specimen to reduce the energy of the particle beam when the beam collides with the specimen, a deflection system including a plurality of deflection units situated along the optical axis for deflecting the particle beam to allow scanning on the specimen with large area, at least one of the deflection units located in the retarding field of the beam, the remainder of the deflection units located within the central bore of the objective lens, and a detection unit to capture secondary electron (SE) and backscattered electrons (BSE).
    Type: Grant
    Filed: June 25, 2018
    Date of Patent: December 5, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Shuai Li, Zhongwei Chen
  • Patent number: 11815476
    Abstract: Crystallographic information of crystalline sample can be determined from one or more three-dimensional diffraction pattern datasets generated based on diffraction patterns collected from multiple crystals. The crystals for diffraction pattern acquisition may be selected based on a sample image. At a location of each selected crystal, multiple diffraction patterns of the crystal are acquired at different angles of incidence by tilting the electron beam, wherein the sample is not rotated while the electron beam is directed at the selected crystal.
    Type: Grant
    Filed: March 30, 2021
    Date of Patent: November 14, 2023
    Assignee: FEI Company
    Inventors: Bart Buijsse, Jaydeep Sanjay Belapure, Alexander Henstra, Michael Patrick Janus, Stefano Vespucci
  • Patent number: 11813371
    Abstract: A currency disinfecting assembly for sterilizing paper currency includes a cabinet that is comprised of an opaque material to inhibit light from passing therethrough. A plurality of holders is each disposed in an interior of the cabinet to accommodate paper currency. A plurality of light emitters is each coupled to the cabinet to emit light outwardly therefrom. Each of the light emitters is positioned inside of the cabinet to direct the light onto the paper currency. Moreover, each of the light emitters emits light in the ultraviolet spectrum to sterilize the paper currency.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: November 14, 2023
    Inventor: Jigar Patel