Patents Examined by Eliza W Osenbaugh-Stewart
  • Patent number: 12038455
    Abstract: The present disclosure provides a measuring method for measuring heat distribution of a specific space using an SThM probe, and a method and device for detecting a beam spot of a light source. The method according to an embodiment of the present disclosure is the measuring method for measuring heat distribution of a specific space, the measuring method includes: linearly moving a SThM probe that may measure a temperature change in the specific space; and calculating heat distribution of the specific space using continuous temperature change values obtained from the SThM probe during the moving step. According to the measuring method, and the method and device for detecting a beam spot of a light source, it is possible to map temperature distribution in a small space using a SThM probe and it is possible to accurately detect a beam spot using the temperature distribution.
    Type: Grant
    Filed: January 30, 2023
    Date of Patent: July 16, 2024
    Assignee: PARK SYSTEMS CORP.
    Inventors: Sang-il Park, Byoung-Woon Ahn, Ahjin Jo, Soobong Choi
  • Patent number: 12013415
    Abstract: A method of providing a MEMS device, such as an AFM probe, having a three-sided pyramidal protrusion is made using a multitude of MEMS method steps. To allow the reliable and speedy manufacture of such a MEMS device having a three-sided protrusion on a massive scale, wherein the protrusion has a relatively small half-cone angle and a single apex, a mold is used. The mold includes a sacrificial layer on top of a base substrate. The method of providing the MEMS device includes: providing an area at the first side of the mold which area comprises a pit with a layer of protrusion material, patterning the layer of protrusion material to the desired shape, and isotropically etching the sacrificial layer of the mold with an isotropic etchant capable of etching the sacrificial layer so as to separate the MEMS device from at least the base substrate of the mold.
    Type: Grant
    Filed: April 7, 2020
    Date of Patent: June 18, 2024
    Assignee: SMARTTIP BV
    Inventor: Edin Sarajlic
  • Patent number: 12007409
    Abstract: The invention offers high resolution and accuracy for nanoscale temperature mapping. Instead of collecting light after emission in near-field that decays to far-field, the present invention directly couples the near-field waves to a polaritonic-coated infrared probe. The polaritonic coating can be formed on an IR-tuned optical fiber to receive the coupled IR radiation and form polaritons, including plasmons or phonons, using the IR polaritonic material. The IR polaritons propagate along the probe decay back into the fiber core without substantial losses to far-field and are transmitted to a detector, such as a spectroscope. The coupling of the near-field energy to emission detected through the tip apex of fiber can be expressed as emission spectra. Through mapping with other spatial points, multi-dimensional displays and other information can be provided. The resolution can be less than 100 nanometers, such as at least an order of magnitude less than 100 nanometers.
    Type: Grant
    Filed: September 28, 2021
    Date of Patent: June 11, 2024
    Assignee: BAYLOR UNIVERSITY
    Inventors: Zhenrong Zhang, Blake Birmingham, Khant Minn
  • Patent number: 12002597
    Abstract: Methods and dispensers for dispensing atomic objects are provided. An example method for dispensing atomic objects includes sealing a reaction component at least partially coated with a composition comprising the atomic objects inside an oven; and, with the oven disposed within a pressure-controlled chamber, heating the composition to an atomizing reaction temperature to cause an atomizing chemical reaction to occur. The reaction component comprises a material that is a participant in the reaction. A result of the reaction is elemental atomic objects deposited on a depositing surface within the oven. The atomizing reaction temperature is greater than a dispensing threshold temperature. The method further comprises allowing the oven to cool below the dispensing threshold temperature; and heating the oven to a dispensing temperature to cause the elemental atomic objects to be dispensed from the oven through a dispensing aperture. The dispensing temperature does not exceed the dispensing threshold temperature.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: June 4, 2024
    Assignee: Quantinuum LLC
    Inventors: Mark Kokish, Nathaniel Burdick
  • Patent number: 11998763
    Abstract: A proton treatment system including a proton accelerator structured to generate a proton beam, a beamline pathway configured to direct the proton beam from the proton accelerator to at least one treatment room, a magnet assembly, including superconducting magnets, located in the beamline pathway and configured to transport the proton beam away from the accelerator into the at least one treatment room, an achromat, configured as an achromatic superconducting magnet assembly, that bends the proton beam away from the proton accelerator toward the at least one treatment room, and a collimator provided inside the achromat and configured to select the proton beam with desired energy levels.
    Type: Grant
    Filed: June 21, 2022
    Date of Patent: June 4, 2024
    Assignee: ProNova Solutions, LLC
    Inventors: Joseph C Matteo, Vladimir Derenchuk, Ron Moore, Jacob Shamblin, Aaron Jacques
  • Patent number: 11996276
    Abstract: An ion collector includes a plurality of segments and a plurality of integrators. The plurality of segments are physically separated from one another and spaced around a substrate support. Each of the segments includes a conductive element that is designed to conduct a current based on ions received from a plasma. Each of the plurality of integrators is coupled to a corresponding conductive element. Each of the plurality of integrators is designed to determine an ion distribution for a corresponding conductive element based, at least in part, on the current conducted at the corresponding conductive element. An example benefit of this embodiment includes the ability to determine how uniform the ion distribution is across a wafer being processed by the plasma.
    Type: Grant
    Filed: February 13, 2023
    Date of Patent: May 28, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Otto Chen, Chi-Ying Wu, Chia-Chih Chen
  • Patent number: 11992565
    Abstract: A sanitizing system for preventing the spread of harmful germs on food or beverage containers by utilizing a quick and compact UV sanitizing system. The doors of the pass-through chamber allow the customer to insert an un-sanitized container on the entry (“dirty”) side of the system, and the retail employee to remove the sanitized container from the exit (“clean”) side of the system without having to touch any other surface (doors, knobs, handles, etc.) than the container itself. The system utilizes movable UV light sources to minimize the time required for effective sanitizing.
    Type: Grant
    Filed: March 15, 2021
    Date of Patent: May 28, 2024
    Assignee: Redi Technology, Inc.
    Inventor: Laurence B. Sperry
  • Patent number: 11977097
    Abstract: The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.
    Type: Grant
    Filed: June 1, 2022
    Date of Patent: May 7, 2024
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Gabriel Baralia, Rainer Becker, Kinga Kornilov, Christof Baur, Hans Hermann Pieper
  • Patent number: 11978616
    Abstract: Components of scientific analytical equipment, such as electron multipliers and modifications thereto, for extending the operational lifetime or otherwise improving performance by way of improved construction. A detector includes one or more electron emissive surfaces and one or more detector elements configured to define on one side an environment internal the detector and on the other side an environment external the detector. The one or more detector elements are configured to inhibit or prevent flow of a gas from the environment external the detector to the environment internal the detector. Such detectors may be used in a mass spectrometry instrument, for example.
    Type: Grant
    Filed: May 6, 2019
    Date of Patent: May 7, 2024
    Assignee: ADAPTAS SOLUTIONS PTY LTD
    Inventors: Russell Jurek, David Dellagiacoma, Kevin Hunter
  • Patent number: 11961698
    Abstract: Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.
    Type: Grant
    Filed: June 10, 2021
    Date of Patent: April 16, 2024
    Assignee: ASML Netherlands B.V.
    Inventors: Christiaan Otten, Peter-Paul Crans, Marc Smits, Laura Del Tin, Christan Teunissen, Yang-Shan Huang, Stijn Wilem Herman Karel Steenbrink, Xuerang Hu, Qingpo Xi, Xinan Luo, Xuedong Liu
  • Patent number: 11961699
    Abstract: A charged particle beam device which prevents an appearance of a shading contrast due to azimuth discrimination and obtains a clear magnetic domain contrast image with a high resolution and a high throughput. The charged particle beam device includes an electron beam source; a sample stage; an objective lens configured to focus electron beams on a sample; a detector that is mounted on a charged particle beam source side with respect to the objective lens and separately detects secondary electrons emitted in azimuth angle ranges of two or more different azimuths for the same observation region; an image processing and image management device including an image processing unit configured to perform synthesis after performing shading correction and contrast adjustment on an image obtained by detecting a first emission azimuth and an image obtained by detecting a second emission azimuth; an image database; and an image display unit.
    Type: Grant
    Filed: December 25, 2018
    Date of Patent: April 16, 2024
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Hideo Morishita, Teruo Kohashi, Hiroyuki Yamamoto, Junichi Katane
  • Patent number: 11953517
    Abstract: A large radius probe for a surface analysis instrument such as an atomic force microscope (AFM). The probe is microfabricated to have a tip with a hemispherical distal end or apex. The radius of the apex is the range of about a micron making the probes particularly useful for nanoindentation analyses, but other applications are contemplated. In particular, tips with aspect ratios greater than 2:1 can be made for imaging, for example, semiconductor samples. The processes of the preferred embodiments allow such large radius probes to be batch fabricated to facilitate cost and robustness.
    Type: Grant
    Filed: September 20, 2022
    Date of Patent: April 9, 2024
    Assignee: Bruker Nano, Inc.
    Inventor: Jeffrey Wong
  • Patent number: 11946945
    Abstract: A sample analyzing method and a sample preparing method are provided. The sample analyzing method includes a sample preparing step, a placing step, and an analyzing step. The sample preparing step includes an obtaining step implemented by obtaining an identification information; and a marking and placing step implemented by placing a sample carrying component having a sample disposed thereon into a marking equipment, allowing the marking equipment to utilize the identification information to form an identification structure on the sample carrying component, and placing the sample carrying component into one of the accommodating slots according to the identification information. The placing step is implemented by taking out the sample carrying component from one of the accommodating slots and placing the sample carrying component into an electron microscope equipment. The analyzing step is implemented by utilizing the electron microscope equipment to photograph the sample to generate an analyzation image.
    Type: Grant
    Filed: July 29, 2021
    Date of Patent: April 2, 2024
    Assignee: MATERIALS ANALYSIS TECHNOLOGY INC.
    Inventors: Keng-Chieh Chu, Tsung-Ju Chan, Chun-Wei Wu, Hung-Jen Chen
  • Patent number: 11946949
    Abstract: A method for demodulation including the following steps: exciting a vibrationally mounted, at least sectionally bar-shaped oscillating element for oscillating in the range of a resonance frequency of the oscillating element, wherein a temporally varying, in particular periodic, excitation signal is used for excitation, and wherein at least the temporal variation of the excitation signal is known or determined; detecting a modulated oscillation of the oscillating element by means of at least one sensor, wherein the sensor supplies a sensor measurement variable that varies versus time as a function of an amplitude and a phase of the modulated oscillation of the oscillating element. According to the present teaching, it is provided that the method includes the following step: generate a first comparison signal by amplitude modulating a known temporally varying, in particular periodic, demodulation signal by means of the temporally varying sensor measurement variable.
    Type: Grant
    Filed: November 12, 2019
    Date of Patent: April 2, 2024
    Assignee: TECHNISCHE UNIVERSITÄT WIEN
    Inventors: Dominik Kohl, Mathias Poik, Georg Schitter
  • Patent number: 11939240
    Abstract: A sterilizing device includes a pipe having an inlet and an outlet and allowing fluid to move therethrough and a light source provided on one side of the pipe and providing light to the fluid. At least a portion of the pipe is provided in a spiral shape and the inlet and/or the outlet are arranged in a light emitting region.
    Type: Grant
    Filed: December 21, 2022
    Date of Patent: March 26, 2024
    Assignee: SEOUL VIOSYS CO., LTD.
    Inventors: Jae Young Choi, Shi Hyun Ahn, Ki Yon Park, Woong Ki Jeong, Kyu Won Han
  • Patent number: 11908694
    Abstract: In an example, a substrate is oriented to a target axis, wherein a residual angular misalignment between the target axis and a preselected crystal channel direction in the substrate is within an angular tolerance interval. Dopant ions are implanted into the substrate using an ion beam that propagates along an ion beam axis. The dopant ions are implanted at implant angles between the ion beam axis and the target axis. The implant angles are within an implant angle range. A channel acceptance width is effective for the preselected crystal channel direction. The implant angle range is greater than 80% of a sum of the channel acceptance width and twofold the angular tolerance interval. The implant angle range is smaller than 500% of the sum of the channel acceptance width and twofold the angular tolerance interval.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: February 20, 2024
    Assignee: Infineon Technologies AG
    Inventors: Moriz Jelinek, Michael Hell, Caspar Leendertz, Kristijan Luka Mletschnig, Hans-Joachim Schulze
  • Patent number: 11906546
    Abstract: Active cantilever probes having a thin coating incorporated into their design are disclosed. The probes can be operated in opaque and/or chemically harsh environments without the need of a light source or optical system and without being significantly negatively impacted by corrosion. The probes include a substrate that has a cantilever, a thermomechanical actuator associated with the cantilever, a piezoresistive stress sensor disposed on the cantilever, and a thin coating disposed on the cantilever and the piezoresistive stress sensor. The coating is bonded to the substrate, is thermally conductive, and has a low thermal resistance. Further, the thin coating is configured to have little to no impact on one or more of a mass of the active probe, a residual stress of the cantilever, or a stiffness of the active probe. Techniques for performing topography and making other measurements in an opaque and/or chemically harsh environment are also provided.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: February 20, 2024
    Assignees: Massachusetts Institute of Technology, Nano Analytik GMBH, Synsfuels Americas Corporation
    Inventors: Fangzhou Xia, Chen Yang, Yi Wang, Kamal Youcef-Toumi, Christoph Reuter, Tzvetan Ivanov, Mathias Holz, Ivo Rangelow
  • Patent number: 11899159
    Abstract: A beam injector may include a cathode emitter to emit electrons and an electrode to bias at least a portion of the electrons to remain on the cathode emitter and focus the emitted electrons into an electron beam. The beam injector may also include a resistor coupled between the cathode emitter and the electrode and configured to allow self-regulation of a voltage potential on the electrode based at least in part on a current of the electron beam.
    Type: Grant
    Filed: April 2, 2020
    Date of Patent: February 13, 2024
    Assignee: SCHLUMBERGER TECHNOLOGY CORPORATION
    Inventors: Jani Reijonen, Kevin McFarland
  • Patent number: 11892471
    Abstract: A device capable of simultaneous independent motion measurement of multiple probes in an atomic force microscope includes at least two cantilever arms arranged in parallel. The end of each cantilever arm is provided with a needle tip. The surface of each cantilever arm is provided with a grating structure with a periodic distribution rule for reflecting laser irradiated on the grating structure and receiving the laser through reflected light detectors. The discrimination and motion measurement includes the steps of irradiating the measurement laser of different wavelengths on the back surfaces of multiple probes through the same light path at the same time, adopting the grating structures of different feature sizes as physical labels of the multiple probes and reflecting high-order reflected light of the laser of different wavelengths by the grating structures at different angles to separate the light path.
    Type: Grant
    Filed: May 8, 2021
    Date of Patent: February 6, 2024
    Assignee: SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
    Inventors: Lianqing Liu, Jialin Shi, Peng Yu
  • Patent number: 11890398
    Abstract: Invention relates to air cleaning systems, particularly to electric air cleaners, and may be used for decontamination of air in different industries. Invention is directed to attaining a technical effect of providing an air cleaning device, where air is cleaned owing to action of corona discharge streamers on air molecules and contamination particles. Technical effect is attained by air cleaning device that contains a high-voltage pulse generator, an outer electrode provided as a grounded metal tube, and an inner electrode rigidly secured along the tube axis by a fastening member and provided in form of a metal rod and configured so as pulsed corona discharge streamers are formed in between the inner and outer electrodes, wherein the inner electrode is spaced by a gap from an output electrode of high-voltage pulse generator and size of the gap assures breakdown of the gap with pulses formed by high-voltage pulse generator.
    Type: Grant
    Filed: July 12, 2023
    Date of Patent: February 6, 2024
    Inventors: Mikhail Aleksandrovich Meshchaninov, Dmitrii Yanovich Agasarov, Anton Viktorovich Sergeev