Patents Examined by Fernando L. Toledo
  • Patent number: 11282760
    Abstract: This disclosure provides devices and methods for 3-D device packaging with backside interconnections. One or more device elements can be hermetically sealed from an ambient environment, such as by vacuum lamination and bonding. One or more via connections provide electrical interconnection from a device element to a back side of a device substrate, and provide electrical interconnection from the device substrate to external circuitry on the back side of the device. The external circuitry can include a printed circuit board or flex circuit. In some implementations, an electrically conductive pad is provided on the back side, which is electrically connected to at least one of the via connections. In some implementations, the one or more via connections are electrically connected to one or more electrical components or interconnections, such as a TFT or a routing line.
    Type: Grant
    Filed: October 22, 2019
    Date of Patent: March 22, 2022
    Assignee: Obsidian Sensors, Inc.
    Inventors: Yaoling Pan, Tallis Young Chang, John Hyunchul Hong
  • Patent number: 11282821
    Abstract: A method and apparatus for light induced selective transfer of components. A donor substrate (10) with a plurality of components (11,12) divided in different subsets arranged according to respective layouts (A,B). A target substrate (20) comprises recesses (21) and protrusions (25). The donor and target substrates (10,20) are aligned such that a first subset of components (11) is suspended over corresponding recesses (21) in the target substrate (20) and a second subset of components (12) is in contact with corresponding protrusions (25) of the target substrate (20). Light (L) is projected onto the donor substrate (10) to transfer the first subset of components (11) across and into the corresponding recesses (21) while the second subset of components (12) remains attached to the donor substrate (10).
    Type: Grant
    Filed: November 20, 2018
    Date of Patent: March 22, 2022
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Gari Arutinov, Ronald Stoute, Edsger Constant Pieter Smits
  • Patent number: 11276726
    Abstract: An imaging element includes a photoelectric conversion unit including a first electrode, a photoelectric conversion layer, and a second electrode that are stacked, in which an inorganic oxide semiconductor material layer is formed between the first electrode and the photoelectric conversion layer, and the inorganic oxide semiconductor material layer includes at least two types of elements selected from the group consisting of indium, tungsten, tin, and zinc. Alternatively, a LUMO value E1 of a material included in a part of the photoelectric conversion layer positioned near the inorganic oxide semiconductor material layer and a LUMO value E2 of a material included in the inorganic oxide semiconductor material layer satisfy E1-E2<0.2 eV. Alternatively, the mobility of a material included in the inorganic oxide semiconductor material layer is equal to or greater than 10 cm2/V·s.
    Type: Grant
    Filed: April 17, 2018
    Date of Patent: March 15, 2022
    Assignees: Sony Corporation, Sony Semiconductor Solutions Corporation
    Inventors: Toshiki Moriwaki, Yukio Kaneda
  • Patent number: 11276581
    Abstract: Embodiments of the invention include methods of forming a textile patterned hardmask. In an embodiment, a first hardmask and a second hardmask are formed over a top surface of an interconnect layer in an alternating pattern. A sacrificial cross-grating may then be formed over the first and second hardmasks. In an embodiment, portions of the first hardmask that are not covered by the sacrificial cross-grating are removed to form first openings and a third hardmask is disposed into the first openings. Embodiments may then include etching through portions of the second hardmask that are not covered by the sacrificial cross-grating to form second openings. The second openings may be filled with a fourth hardmask. According to an embodiment, the first, second, third, and fourth hardmasks are etch selective to each other. In an embodiment the sacrificial cross-grating may then be removed.
    Type: Grant
    Filed: June 7, 2019
    Date of Patent: March 15, 2022
    Assignee: Intel Corporation
    Inventors: Kevin Lin, Robert Lindsey Bristol, Alan M. Myers
  • Patent number: 11276706
    Abstract: Vertical memory devices and method of manufacturing the same are disclosed. The vertical memory device includes a substrate having a cell block area, a block separation area and a boundary area, a plurality of stack structures arranged in the cell block area and the boundary area such that insulation interlayer patterns are stacked on the substrate alternately with the electrode patterns. The stack structures are spaced apart by the block separation area in the third direction. A plurality of channel structures extend through the stack structures to the substrate in the cell block area in the first direction and are connected to the substrate. A plurality of dummy channel structures extend through upper portions of each of the stack structures in the boundary area and are connected to a dummy bottom electrode pattern spaced apart from the substrate. The bridge defect is thus substantially prevented near the substrate.
    Type: Grant
    Filed: May 13, 2020
    Date of Patent: March 15, 2022
    Inventors: Geunwon Lim, Yoonhwan Son, Junyoung Choi
  • Patent number: 11271081
    Abstract: The present disclosure relates to a Gallium-Nitride (GaN) based module, which includes a module substrate, a thinned switch die residing over the module substrate, a first mold compound, and a second mold compound. The thinned switch die includes an electrode region, a number of switch interconnects extending from a bottom surface of the electrode region to the module substrate, an aluminium gallium nitride (AlGaN) barrier layer over a top surface of the electrode region, a GaN buffer layer over the AlGaN barrier layer, and a lateral two-dimensional electron gas (2DEG) layer realized at a heterojunction of the AlGaN barrier layer and the GaN buffer layer. The first mold compound resides over the module substrate, surrounds the thinned switch die, and extends above a top surface of the thinned switch die to form an opening over the top surface of the thinned switch die. The second mold compound fills the opening.
    Type: Grant
    Filed: April 3, 2019
    Date of Patent: March 8, 2022
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Michael Carroll
  • Patent number: 11264469
    Abstract: Various embodiments of the present application are directed to a method for forming a thin semiconductor-on-insulator (SOI) substrate without implantation radiation and/or plasma damage. In some embodiments, a device layer is epitaxially formed on a sacrificial substrate and an insulator layer is formed on the device layer. The insulator layer may, for example, be formed with a net charge that is negative or neutral. The sacrificial substrate is bonded to a handle substrate, such that the device layer and the insulator layer are between the sacrificial and handle substrates. The sacrificial substrate is removed, and the device layer is cyclically thinned until the device layer has a target thickness. Each thinning cycle comprises oxidizing a portion of the device layer and removing oxide resulting from the oxidizing.
    Type: Grant
    Filed: April 29, 2020
    Date of Patent: March 1, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Cheng-Ta Wu, Chia-Shiung Tsai, Jiech-Fun Lu, Kuo-Hwa Tzeng, Shih-Pei Chou, Yu-Hung Cheng, Yeur-Luen Tu
  • Patent number: 11257915
    Abstract: A semiconductor element includes an enhancement-type transistor structure with a layer construction including a base substrate, a first semiconductor layer, and a second semiconductor layer, which are arranged one on top of the other along a first direction. The transistor structure further has a source electrode, a gate electrode, and a drain electrode, which are spaced apart from one another along a second direction that is transverse to the first direction. The first and second semiconductor layers are formed by different group III nitride materials, such that a 2D electron gas forms in a boundary region of the first and second semiconductor layers. The first and second semiconductor layers have holes in the region of the gate electrode, between which holes multiple fins including the group III nitride materials remain. The gate electrode has a plurality of gate fingers extending into the holes.
    Type: Grant
    Filed: May 6, 2020
    Date of Patent: February 22, 2022
    Assignee: Institut für Mikroelektronik Stuttgart
    Inventors: Joachim N. Burghartz, Mohammed Alomari, Muhammad Alshahed
  • Patent number: 11258041
    Abstract: A display apparatus includes: a base substrate having a front surface, a rear surface opposite to the front surface, a module hole extending through the front surface and the rear surface, an active area, a peripheral area adjacent to the active area, and a margin area adjacent to the module hole; a circuit layer on the base substrate, the circuit layer including a driving element including a thin film transistor; a display element layer including: a deposition preventing pattern; and a light emitting element including: a first electrode connected to the thin film transistor; an emission pattern on the first electrode; and a second electrode disposed on the emission pattern. An encapsulation layer is on the display element layer, and encapsulating the light emitting element. The second electrode and the deposition preventing pattern are at a same layer and do not overlap with each other.
    Type: Grant
    Filed: December 5, 2019
    Date of Patent: February 22, 2022
    Assignee: Samsung Display Co., Ltd.
    Inventor: Changyun Moon
  • Patent number: 11257922
    Abstract: A method for forming a self-aligned contact includes providing a substrate with a plurality of gate structures formed on the substrate. The method also includes forming a spacer liner on the gate structures and the substrate. The method also includes forming a sacrificial layer between the gate structures and on the gate structures. The method also includes forming a plurality of dielectric plugs through the sacrificial layer above the gate structures. The method also includes removing the sacrificial layer to form a plurality of contact openings between the gate structures. The method also includes forming an etch resistant layer conformally covering the sidewall and the bottom of the contact openings. The method also includes forming a plurality of contact plugs in the contact openings.
    Type: Grant
    Filed: April 3, 2019
    Date of Patent: February 22, 2022
    Assignee: WINBOND ELECTRONICS CORP.
    Inventors: Sih-Han Chen, Chien-Ting Chen, Yao-Ting Tsai, Hsiu-Han Liao
  • Patent number: 11251242
    Abstract: An array substrate is disclosed. The array substrate may include a base substrate (21), a pixel defining layer (22) on the base substrate (21), and a charge generating layer (24) above the pixel defining layer (22). The pixel defining layer (22) may define a plurality of pixel regions. The pixel defining layer (22) may include a plurality of acoustic structures (220), and each of the plurality of acoustic structures (220) may be configured to resonate under an action of an acoustic wave of a threshold frequency to form a slit to disconnect the charge generating layer (24) of two adjacent pixel regions of the plurality of pixel regions.
    Type: Grant
    Filed: August 3, 2018
    Date of Patent: February 15, 2022
    Assignees: HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD, BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Fei Li, Youyuan Hu, Mengyu Luan, Xinfeng Wu, Xinzhu Wang, Huihui Li
  • Patent number: 11251343
    Abstract: An LED assembly includes an LED light source having a first light output with a characteristic spectrum, and a yellow-green phosphor, red phosphor, and neodymium fluorine absorber combination through which the first light output passes, wherein the yellow-green phosphor, red phosphor, and neodymium fluorine absorber combination is configured to convert the first light output to a second light output having a predetermined correlated color temperature.
    Type: Grant
    Filed: February 8, 2017
    Date of Patent: February 15, 2022
    Assignee: CURRENT LIGHTING SOLUTIONS, LLC
    Inventors: Jianmin He, Kevin James Vick
  • Patent number: 11251106
    Abstract: The invention discloses a packaging structure and manufacturing method of a SiC MOSFET module, which is composed of SiC MOSFET chips, upper DBC substrate, lower DBC substrate, ceramic interposer, silicon oxide dielectric layer, nano silver pastes, redistribution layer, through-ceramic-hole conductive metals and power terminals. The SiC MOSFET chips are connected to the lower DBC substrate using nano silver pastes in the invention. Besides, some rectangular frames are made on the ceramic interposer, and the SiC MOSFET chips are embedded in the ceramic interposer by filling dielectric materials. The upper surfaces of the chips and the ceramic interposer are covered with a conductive metal redistribution layer, and the upper and lower surfaces of the ceramic interposer are interconnected with the upper and lower DBC substrates, respectively. The power terminals are led out from the conductive copper layers of the upper and lower DBC substrates.
    Type: Grant
    Filed: March 31, 2021
    Date of Patent: February 15, 2022
    Assignee: BEIJING UNIVERSITY OF TECHNOLOGY
    Inventors: Fei Qin, Shuai Zhao, Yanwei Dai, Pei Chen, Tong An
  • Patent number: 11244850
    Abstract: An IC device includes a simultaneously formed capacitor and resistor structure. The capacitor and resistor may be located between a Back End of the Line (BEOL) interconnect stack and an external device interconnect pad of the IC device. The resistor may be used to step down a voltage applied across the resistor. The resistor may include one or more resistor plates that are formed simultaneously with a respective one or more plates of the capacitor. For example, a capacitor plate and a resistor plate may be patterned and formed from the same conductive sheet. Each of the resistor plates may be connected to one or more vertical interconnect accesses (VIA).
    Type: Grant
    Filed: November 18, 2019
    Date of Patent: February 8, 2022
    Assignee: International Business Machines Corporation
    Inventors: Jim Shih-Chun Liang, Baozhen Li, Chih-Chao Yang
  • Patent number: 11244912
    Abstract: Semiconductor packages having a first layer interconnect portion that includes a coaxial interconnect between a die and a package substrate are described. In an example, the package substrate includes a substrate-side coaxial interconnect electrically connected to a signal line. The die is mounted on the package substrate and includes a die-side coaxial interconnect coupled to the substrate-side coaxial interconnect. The coaxial interconnects can be joined by a solder bond between respective central conductors and shield conductors.
    Type: Grant
    Filed: March 30, 2017
    Date of Patent: February 8, 2022
    Assignee: Intel Corporation
    Inventors: Sai Vadlamani, Aleksandar Aleksov, Rahul Jain, Kyu Oh Lee, Kristof Kuwawi Darmawikarta, Robert Alan May, Sri Ranga Sai Boyapati, Telesphor Kamgaing
  • Patent number: 11239219
    Abstract: A semiconductor package including a lower redistribution layer including wiring patterns; a lower substrate on the lower redistribution layer, the lower substrate including a cavity; an application processor on the lower redistribution layer in the cavity; a cache memory chip on the application processor; a passive device module on the application processor; a plurality of first through-silicon vias penetrating the application processor to connect the lower redistribution layer to the passive device module; and lower bumps on a bottom surface of the lower redistribution layer, wherein the passive device module is adjacent to a side of the cache memory chip.
    Type: Grant
    Filed: March 12, 2020
    Date of Patent: February 1, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Sanguk Kim
  • Patent number: 11233143
    Abstract: A semiconductor device includes a III-nitride buffer layer and a III-nitride barrier layer. A boron nitride alloy interlayer interposed between the III-nitride buffer layer and the III-nitride barrier layer. A portion of the III-nitride buffer layer includes a two-dimensional electron gas (2DEG) channel that is on a side of the III-nitride buffer layer adjacent to the boron nitride alloy interlayer.
    Type: Grant
    Filed: October 15, 2018
    Date of Patent: January 25, 2022
    Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
    Inventor: Xiaohang Li
  • Patent number: 11217639
    Abstract: A display device is provided. The display device includes a display region which includes a first display region and a second display region, where the first display region includes a plurality of first pixels, and the second display region includes a plurality of second pixels and at least one light transmission region, where the light transmission region has light transmittance that is higher than light transmittance of the first pixel and light transmittance of the second pixel, and the second display region has light transmittance that is higher than light transmittance of the first display region.
    Type: Grant
    Filed: July 10, 2019
    Date of Patent: January 4, 2022
    Assignee: Samsung Display Co., Ltd.
    Inventors: Dae Won Baek, Sang Min Yi, Sang Shin Lee, Sung Chul Kim, Joon Young Park
  • Patent number: 11211483
    Abstract: A method and a transistor device are disclosed. The method includes: forming a trench in a first surface in an edge region of a semiconductor body; forming an insulation layer in the trench and on the first surface of the semiconductor body; and planarizing the insulation layer so that a trench insulation layer that fills the trench remains, wherein forming the insulation layer comprises a thermal oxidation process.
    Type: Grant
    Filed: September 30, 2019
    Date of Patent: December 28, 2021
    Assignee: Infineon Technologies Austria AG
    Inventors: Hans Weber, Christian Fachmann, Franz Hirler, Winfried Kaindl, Markus Rochel
  • Patent number: 11205605
    Abstract: A semiconductor structure with a back gate includes a device wafer includes a front side and a back side. A transistor is disposed on the front side, wherein the transistor includes a gate structure, a source and a drain. An interlayer dielectric covers the transistor. A first metal layer and a second metal layer are within the interlayer dielectric. A first conductive plug is within the interlayer dielectric and contacts the source and the first metal layer. A second conductive plug is disposed within the interlayer dielectric and contacts the drain and the second metal layer. A back gate, a source conductive pad and a drain conductive pad are disposed on the back side. A first via plug penetrates the device wafer to electrically connect the source conductive pad and the source. A second via plug penetrates the device wafer to electrically connect the drain conductive pad and the drain.
    Type: Grant
    Filed: April 6, 2020
    Date of Patent: December 21, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Purakh Raj Verma, Kuo-Yuh Yang, Chia-Huei Lin