Patents Examined by George R Fourson, III
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Patent number: 10497778Abstract: A semiconductor device includes a substrate, a semiconductor fin, an isolation plug, and an isolation structure. The semiconductor fin is over the substrate. The isolation plug is over the substrate and adjacent to an end of the semiconductor fin. The isolation structure is over the substrate and adjacent to sidewalls of the semiconductor fin and the isolation plug. A top surface of the isolation structure is in a position lower than a top surface of the isolation plug.Type: GrantFiled: August 2, 2018Date of Patent: December 3, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuo-Cheng Ching, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang
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Patent number: 10490556Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a memory region and a periphery region; forming a first trench and a second trench in substrate on the memory region, wherein a width of the second trench is greater than a width of the first trench; forming a first liner, a second liner, and a third liner in the first trench and the second trench; performing a surface treatment process to lower stress of the third liner; and planarizing the third liner, the second liner, and the first liner to form a first isolation structure and a second isolation structure.Type: GrantFiled: July 29, 2018Date of Patent: November 26, 2019Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Yu-Shan Su, Chia-Wei Wu, Ting-Pang Chung
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Patent number: 10483239Abstract: A semiconductor device is disclosed including semiconductor die formed with a row of functional die bond pads and an adjacent row of dummy die bond pads. The functional die bond pads may be electrically connected to the integrated circuits formed within the semiconductor die. The dummy die bond pads may be formed in the scribe area of a semiconductor wafer from which the semiconductor die are formed, and are provided for wire bonding the semiconductor die within the semiconductor device.Type: GrantFiled: February 28, 2018Date of Patent: November 19, 2019Assignee: SanDisk Semiconductor (Shanghai) Co. Ltd.Inventors: Junrong Yan, Xiaofeng Di, Harjashan Singh, Gokul Kumar, Chee Keong Chin, Ming Xia Wu, Jian Bin Gu
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Patent number: 10483157Abstract: In a method of forming a semiconductor device including a fin field effect transistor (FinFET), a first sacrificial layer is formed over a source/drain structure of a FinFET structure and an isolation insulating layer. The first sacrificial layer is patterned, thereby forming an opening. A first liner layer is formed on the isolation insulating layer in a bottom of opening and at least side faces of the patterned first sacrificial layer. After the first liner layer is formed, a dielectric layer is formed in the opening. After the dielectric layer is formed, the patterned first sacrificial layer is removed, thereby forming a contact opening over the source/drain structure. A conductive layer is formed in the contact opening.Type: GrantFiled: July 30, 2018Date of Patent: November 19, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Meng-Hsuan Hsiao, Yee-Chia Yeo, Tung Ying Lee, Chih Chieh Yeh
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Patent number: 10468329Abstract: The present disclosure relates to a thermally enhanced semiconductor package having field effect transistors (FETs) with a back-gate feature. The thermally enhanced semiconductor package includes a first buried oxide (BOX) layer, a first epitaxial layer over the first BOX layer, a second BOX layer over the first epitaxial layer, a second epitaxial layer over the second BOX layer and having a source, a drain, and a channel between the source and the drain, a gate dielectric aligned over the channel, and a front-gate structure over the gate dielectric. Herein, a back-gate structure is formed in the first epitaxial layer and has a back-gate region aligned below the channel. A FET is formed by the front-gate structure, the source, the drain, the channel, and the back-gate structure.Type: GrantFiled: July 18, 2017Date of Patent: November 5, 2019Assignee: Qorvo US, Inc.Inventors: Julio C. Costa, George Maxim, Dirk Robert Walter Leipold, Baker Scott
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Patent number: 10461741Abstract: A power switch and a semiconductor device thereof are disclosed. The power switch device includes a first transistor cell, a second transistor cell, a body region and a conductive layer. The first transistor cell includes a first electrode. The second transistor cell includes a second electrode. The body region is disposed between the first transistor cell and the second transistor cell. The conductive layer is electrically connected with the body region, the first electrode and the second electrode respectively.Type: GrantFiled: March 22, 2018Date of Patent: October 29, 2019Assignee: UPI SEMICONDUCTOR CORPORATIONInventor: Chia-Long Wu
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Patent number: 10453857Abstract: A three-dimensional semiconductor device includes gate electrodes including pad regions sequentially lowered by a first step portion in a first direction and sequentially lowered by a second step portion in a second direction perpendicular to the first direction, the second step portion being lower than the first step portion, wherein a length of a single pad region among pad regions sequentially lowered by the second step portion in the second direction is less than a length of a remainder of the pad regions in the second direction.Type: GrantFiled: March 22, 2018Date of Patent: October 22, 2019Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jung Hwan Lee, Jee Yong Kim, Seok Jung Yun, Ji Hyeon Lee
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Patent number: 10453886Abstract: A semiconductor device including a first material layer adjacent to a second material layer, a first via passing through the first material layer and extending into the second material layer, and a second via extending into the first material layer, where along a common cross section parallel to an interface between the two material layers, the first via has a cross section larger than that of the second via.Type: GrantFiled: January 19, 2018Date of Patent: October 22, 2019Assignee: Sony CorporationInventors: Hiroshi Takahashi, Shunichi Sukegawa, Keishi Inoue
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Patent number: 10450190Abstract: In a MEMS device, an oxide layer is disposed between first and second semiconductor layers and MEMS resonator is formed within a cavity in the first semiconductor layer. A first electrically conductive feature functionally coupled to the MEMS resonator is exposed at a surface of the first semiconductor layer, and an insulating region is exposed at the surface of the first semiconductor layer adjacent the first electrically conductive feature. A semiconductor cover layer is bonded to the surface of the first semiconductor layer to hermetically seal the MEMS resonator within the cavity. A second electrically conductive feature extends through the semiconductor cover layer to contact the first electrically conductive feature, and an isolation trench extends through the semiconductor cover layer to the insulating region to electrically isolate a conductive path formed by the first and second electrically conductive features.Type: GrantFiled: August 21, 2018Date of Patent: October 22, 2019Assignee: SiTime CorporationInventors: Aaron Partridge, Markus Lutz, Pavan Gupta
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Patent number: 10446614Abstract: The present disclosure relates to an organic light-emitting display device capable of improving the aperture ratio thereof, and the organic light-emitting display device according to the present disclosure includes a plurality of sub-pixels respectively including organic emission layers arranged on a substrate, wherein a sub-pixel in which the organic emission layer is spaced a first vertical distance from the substrate and a sub-pixel in which the organic emission layer is spaced a second vertical distance from the substrate are alternatively arranged, thereby improving the aperture ratio.Type: GrantFiled: August 14, 2018Date of Patent: October 15, 2019Assignee: LG Display Co., Ltd.Inventor: Hee-Young Chae
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Patent number: 10446467Abstract: Disclosed are exemplary embodiments of thermal transfer/management and electromagnetic interference (EMI) shielding/mitigation solutions, systems, and/or assemblies for electronic devices. Also disclosed are methods of making or manufacturing (e.g., stamping, drawing, etc.) components of the thermal transfer/management and EMI shielding/mitigation solutions, systems, and/or assemblies.Type: GrantFiled: October 30, 2018Date of Patent: October 15, 2019Assignee: Laird Technologies, Inc.Inventor: Sri Talpallikar
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Patent number: 10437119Abstract: A liquid crystal display device includes: a first display panel; and a second display panel opposing to the first display panel. Each of the first and second display panel includes a plurality of source lines, a plurality of gate lines, a plurality of thin film transistors, and a plurality of pixel electrodes electrically connected to corresponding one of the thin film transistors. In a second display panel, at least two thin film transistors are electrically connected to a same second source line and a same second gate line.Type: GrantFiled: March 22, 2018Date of Patent: October 8, 2019Assignee: Panasonic Liquid Crystal Display Co., Ltd.Inventors: Ikuko Mori, Teruhisa Nakagawa, Kazuhiko Tsuda, Katsuji Tanaka
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Patent number: 10431523Abstract: The present disclosure relates to a thermally enhanced semiconductor package having field effect transistors (FETs) with a back-gate feature. The thermally enhanced semiconductor package includes a first buried oxide (BOX) layer, a first epitaxial layer over the first BOX layer, a second BOX layer over the first epitaxial layer, a second epitaxial layer over the second BOX layer and having a source, a drain, and a channel between the source and the drain, a gate dielectric aligned over the channel, and a front-gate structure over the gate dielectric. Herein, a back-gate structure is formed in the first epitaxial layer and has a back-gate region aligned below the channel. A FET is formed by the front-gate structure, the source, the drain, the channel, and the back-gate structure.Type: GrantFiled: July 18, 2017Date of Patent: October 1, 2019Assignee: Qorvo US, Inc.Inventors: Julio C. Costa, George Maxim, Dirk Robert Walter Leipold, Baker Scott
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Patent number: 10424549Abstract: A method of forming a trench structure is provided. The method includes depositing a silicon carbide (SiC) layer on a top metal layer, forming a first passivation layer on the SiC layer, removing a portion of the first passivation layer to form a first opening, forming a second passivation layer on the first passivation layer, the second passivation layer including a first portion in the first opening, and forming a second opening by removing a part of the first portion of the second passivation layer. The forming the second opening exposes the top metal layer.Type: GrantFiled: October 29, 2018Date of Patent: September 24, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Fu-Chiang Kuo, Shih-Chi Kuo, Tsung-Hsien Lee, Ying-Hsun Chen
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Patent number: 10424591Abstract: In a memory cell region of a semiconductor device, a memory active region is defined by an element isolation insulating film. In the memory cell region, the position of the upper surface of the element isolation insulating film is set to be lower than the position of the main surface of a semiconductor substrate. A buried silicon nitride film and an etching stopper film are formed over the element isolation insulating film. The position of the upper surface of the etching stopper film is higher than that of the upper surface of the element isolation insulating film defining a peripheral active region.Type: GrantFiled: July 11, 2018Date of Patent: September 24, 2019Assignee: Renesas Electronics CorporationInventor: Tamotsu Ogata
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Patent number: 10418517Abstract: Resonant optical cavity light emitting devices are disclosed, where the device includes a substrate, a first spacer region, a light emitting region, a second spacer region, and a reflector. The light emitting region is configured to emit a target emission deep ultraviolet wavelength, and is positioned at a separation distance from the reflector. The reflector may have a metal composition comprising elemental aluminum or may be a distributed Bragg reflector. The device has an optical cavity comprising the first spacer region, the second spacer region and the light emitting region, where the optical cavity has a total thickness less than or equal to K·?/n. K is a constant ranging from 0.25 to less than 1, ? is the target wavelength, and n is an effective refractive index of the optical cavity at the target wavelength.Type: GrantFiled: August 29, 2018Date of Patent: September 17, 2019Assignee: Silanna UV Technologies Pte LtdInventor: Petar Atanackovic
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Patent number: 10418369Abstract: A multilevel semiconductor device including: a first level including a first array of first memory cells and first control line; a second level including a second array of second memory cells and second control line; a third level including a third array of third memory cells and third control line, where the second level overlays the first, and where the third level overlays the second; a first, second and third access pillar; memory control circuits designed to individually control cells of the first, second and third memory cells, where the device includes an array of units, where each of the units includes a plurality of the first, second and third memory cells, and a portion of the memory control circuits, where the array of units include at least eight rows and eight columns of units, and where the memory control is designed to control independently each of the units.Type: GrantFiled: May 26, 2018Date of Patent: September 17, 2019Assignee: Monolithic 3D Inc.Inventors: Zvi Or-Bach, Jin-Woo Han
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Patent number: 10418334Abstract: A semiconductor die is disclosed including corner recesses to prevent cracking of the semiconductor die during fabrication. Prior to dicing the semiconductor die from the wafer, recesses may be formed in the wafer at corners between any pair of semiconductor die. The recesses may be formed by a laser or photolithographic processes in the kerf area between semiconductor die. Once formed, the corner recesses prevent cracking and damage to semiconductor die which could otherwise occur at the corners of adjacent semiconductor die as the adjacent semiconductor die move relative to each other during the backgrind process.Type: GrantFiled: June 22, 2017Date of Patent: September 17, 2019Assignee: SanDisk Semiconductor (Shanghai) Co. Ltd.Inventors: Hang Zhang, Weili Wang, Junrong Yan, Kim Lee Bock, Chee Keong Chin, Chong Un Tan, Xin Tian
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Patent number: 10411089Abstract: A semiconductor device includes a substrate including a recess, the recess being positioned below an isolation region and having a side portion including a plurality of stepped portions, a plurality of gate electrodes spaced apart from each other on the substrate, and stacked in a direction perpendicular to an upper surface of the substrate, a channel structure passing between a first set of the plurality of gate electrodes, and the isolation region passing between a second set of the plurality of gate electrodes, the isolation region extending from the upper surface of the substrate and having an inclined lateral surface.Type: GrantFiled: May 24, 2018Date of Patent: September 10, 2019Assignee: Samsung Electronics Co., Ltd.Inventors: Jee Yong Kim, Jung Hwan Lee
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Patent number: 10411110Abstract: A semiconductor structure including a substrate, a BJT, a first interconnect structure and a second interconnect structure is provided. The substrate has a first side and a second side opposite to each other. The BJT is located at the first side. The BJT includes a collector, a base and an emitter. The collector is disposed in the substrate. The base is disposed on the substrate. The emitter is disposed on the base. The first interconnect structure is located at the first side and electrically connected to the base. The second interconnect structure is located at the second side and electrically connected to the collector. The first interconnect structure further extends to the second side. The first interconnect structure and the second interconnect structure are respectively electrically connected to an external circuit at the second side. The semiconductor structure can have better overall performance.Type: GrantFiled: August 2, 2018Date of Patent: September 10, 2019Assignee: United Microelectronics Corp.Inventors: Purakh Raj Verma, Kuo-Yuh Yang