Patents Examined by Gordon J. Stock, Jr.
  • Patent number: 11908717
    Abstract: A transfer method transfers a substrate between a transfer unit configured to hold and transfer the substrate and a substrate stage serving as a transfer destination or a transfer source of the substrate. The transfer method includes: acquiring positional information of the transfer unit and positional information of the substrate stage; determining whether or not there is a risk for the substrate to contact with the substrate stage, based on the acquired positional information of the transfer unit and positional information of the substrate stage; and when determined that there is a risk for the substrate to contact with the substrate stage, notifying the risk according to the determination at the determining.
    Type: Grant
    Filed: May 26, 2020
    Date of Patent: February 20, 2024
    Inventors: Masakazu Yamamoto, Tadashi Enomoto
  • Patent number: 11906389
    Abstract: There is provided a system and a method for assisting a technician in fiber optic cable splices and comprising a pair of test units including an OTDR, an optical switch, a tone generator and a tone detector to automate the splicing process and testing. The test units may be in communication with a wireless portable device used by the splicing technician and controlled therefrom. In one embodiment, the test units are driven by a test orchestrator application (e.g., server-based) to switch fibers, perform continuity tests and/or splice quality tests, triggered by the technician's portable device.
    Type: Grant
    Filed: April 21, 2022
    Date of Patent: February 20, 2024
    Assignee: EXFO Inc.
    Inventors: Stephane Perron, Michel Leclerc
  • Patent number: 11906289
    Abstract: A triangulation-based optical profilometry system for scanning a three-dimensional sample surface located at a sample plane includes a projection system; an image sensor; a processing unit; an objective lens assembly for imaging onto the image sensor a luminous line formed on the sample plane, a first direction orthogonal to an optical axis and being defined parallel to an extent of the luminous line, a second direction being defined perpendicular to the first direction; and a diaphragm defining a non-circular aperture defined by a first dimension and a second dimension greater than the first dimension, the diaphragm being rotationally oriented such that the first dimension is aligned with the first direction and the second dimension is aligned with the second direction, the objective lens assembly being arranged to form an out-of-focus image of the luminous line on the image sensor.
    Type: Grant
    Filed: June 28, 2019
    Date of Patent: February 20, 2024
    Inventor: Francois Martin
  • Patent number: 11906284
    Abstract: A method for detecting an edge of an object is carried out by means of a detection device (10), which has an emission region running along a first straight line and has a receiving region which runs along a second straight line, which is arranged in parallel to the first straight line. An emission subregion (11a-p) of the emission region is selected, which extends up to a first end of the emission region. Light is emitted from the emission subregion (11a-p) and a light signal of light reflected on the object is received in the receiving region. The emission subregion (11a-p) is then shifted along the first straight line in the direction of a second end of the emission region. Emitting, receiving and shifting are repeated until the emission subregion (11a-p) extends up to the second end at the start of the shifting step. A signal course is compiled from the received light signals, and the detection of the edge from the signal course is carried out.
    Type: Grant
    Filed: February 22, 2021
    Date of Patent: February 20, 2024
    Assignee: BALLUFF GMBH
    Inventors: Juri Schroffenegger, Sergej Hense
  • Patent number: 11899375
    Abstract: A multi-column metrology tool may include two or more measurement columns distributed along a column direction, where the two or more measurement columns simultaneously probe two or more measurement regions on a sample including metrology targets. A measurement column may include an illumination sub-system to direct illumination to the sample, a collection sub-system including a collection lens to collect measurement signals from the sample and direct it to one or more detectors, and a column-positioning sub-system to adjust a position of the collection lens. A measurement region of a measurement column may be defined by a field of view of the collection lens and a range of the positioning system in the lateral plane. The tool may further include a sample-positioning sub-system to scan the sample along a scan path different than the column direction to position metrology targets within the measurement regions of the measurement columns for measurements.
    Type: Grant
    Filed: March 24, 2021
    Date of Patent: February 13, 2024
    Assignee: KLA Corporation
    Inventors: Jonathan Madsen, Andrei V. Shchegrov, Amnon Manassen, Andrew V. Hill, Yossi Simon, Gilad Laredo, Yoram Uziel
  • Patent number: 11901937
    Abstract: Disclosed are a long-distance optical fiber detecting method, apparatus, device and system, and a storage medium. The method comprises: in response to a detection request of a target node on a to-be-detected optical fiber, determining a first and second sampling sequence that are formed by respectively propagating, on said optical fiber, a first and second optical signal respectively sent from each end of the optical fiber through an OTDR; determining a total length of the optical fiber; generating a detection result according to the first and second sampling sequence and the total length, and sending the detection result to the target node. By determining the first and second sampling sequence and combining the total length of the optical fiber, a detection result of the to-be-detected optical fiber is generated.
    Type: Grant
    Filed: December 28, 2020
    Date of Patent: February 13, 2024
    Inventors: Qi Zhou, Tao Xiong, Chunping Yu, Qinlian Bu
  • Patent number: 11885707
    Abstract: A system for providing advanced characterization of an optical fiber span is based upon the use of a pair of optical time domain reflectometers (OTDRs), located at opposing end terminations of the span being characterized. Each OTDR performs standard reflectometry measurements and transmits the resulting OTDR trace to monitoring equipment in a typical manner. The pair of OTDR traces is thereafter combined in a particular manner (“stitched together”) to create an OTDR trace of the entire fiber span (essentially doubling the operational range of prior art OTDR measurement capabilities). The transmit portion of one OTDR may be paired with the receive portion of the other OTDR, with time-of-light measurements (or signal loss measurements) used to determine optical path length and/or optical signal loss of the span. Using a multi-wavelength light source in the paired transmit/receive arrangement allows for a characterization of chromatic dispersion of the span.
    Type: Grant
    Filed: November 17, 2021
    Date of Patent: January 30, 2024
    Assignee: II-VI Delaware, Inc.
    Inventors: Michael J. Cahill, Ian Peter McClean
  • Patent number: 11879803
    Abstract: An optical fiber testing method is presented for measuring the change amount for the wave number k of a Brillouin Frequency Shift ? in stimulated Brillouin scattering generated in the same acoustic mode with respect to each target propagation mode. In this way, the ratio of the change amount measured at each propagation mode is acquired as the group delay ratio between the modes.
    Type: Grant
    Filed: June 3, 2020
    Date of Patent: January 23, 2024
    Inventors: Tomokazu Oda, Hiroyuki Oshida, Daisuke Iida, Atsushi Nakamura, Yuto Sagae
  • Patent number: 11879997
    Abstract: A system and method for analyzing a surface of an object is provided. The system includes a 3D measurement device operable to acquire a plurality of points on the surface of the object and determine 3D coordinates for each of the points. The system further includes processors operably coupled to the 3D measurement device. The processors are responsive to computer instructions when executed on the processors for performing a method comprising: generating a point cloud from the 3D coordinates of the plurality of points; extracting a first set of points from the plurality of points; defining a first reference geometry through the first set of points; measuring at least one first metric from each of the points in the first set of points to the first reference geometry; and identifying a nonconforming feature based at least in part on the at least one first metric.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: January 23, 2024
    Assignee: FARO Technologies, Inc.
    Inventors: Oliver Zweigle, Aleksej Frank, Johannes Buback
  • Patent number: 11879802
    Abstract: There are provided methods and systems for testing the continuity of optical fiber links under test and/or a fiber arrangement, polarity or mapping of optical fiber connections within optical devices under test using the backscattering pattern as a signature. The device under test may comprises a single fiber, a duplex link, a multifiber cable or another multi-port device such as a backplane device.
    Type: Grant
    Filed: October 19, 2021
    Date of Patent: January 23, 2024
    Assignee: EXFO Inc.
    Inventors: Stephane Perron, Michel Leclerc, Pascal Gosselin-Badaroudine
  • Patent number: 11867494
    Abstract: Provided is an optical displacement sensor that allows a housing serving as a head to be downsized. A relay cable extending from the head is integrated with a body. The head is primarily responsible for projecting and receiving light to and from a to-be-detected object, while the body is made up of a power supply circuit, a display, and an operation part. The head includes a green laser light source and emits the green laser light to form a spot on a surface of the to-be-detected object.
    Type: Grant
    Filed: March 9, 2021
    Date of Patent: January 9, 2024
    Inventors: Daiki Matsumoto, Choryon Oh
  • Patent number: 11860058
    Abstract: According to examples, a fiber-optic testing source for testing a multi-fiber cable may include a laser source communicatively coupled to a plurality of optical fibers connected to a connector. The fiber-optic testing source may include at least one photodiode communicatively coupled to at least one of the plurality of optical fibers by at least one corresponding splitter to implement a communication channel between the fiber-optic testing source and a fiber-optic testing receiver. The communication channel may be operable independently from a polarity associated with the multi-fiber cable. The fiber-optic testing receiver may include a plurality of photodiodes communicatively coupled to a plurality of optical fibers.
    Type: Grant
    Filed: April 19, 2021
    Date of Patent: January 2, 2024
    Inventor: Joachim Lönne
  • Patent number: 11854854
    Abstract: A method for calibrating the alignment of a wafer is provided. A plurality of alignment position deviation (APD) simulation results are obtained form a plurality of mark profiles. An alignment analysis is performed on a mark region of the wafer with a light beam. A measured APD of the mark region of the wafer is obtained in response to the light beam. The measured APD is compared with the APD simulation results to obtain alignment calibration data. An exposure process is performed on the wafer with a mask according to the alignment calibration data.
    Type: Grant
    Filed: July 23, 2021
    Date of Patent: December 26, 2023
    Inventors: Chang-Jen Chen, Wen-Yun Wang, Yen-Chun Chen, Po-Ting Yeh
  • Patent number: 11846559
    Abstract: An optical detection device and method for detecting temperature changes and/or wavelength changes of an optical probe signal includes transmitting an optical probe signal having a predetermined wavelength to an optical input port of an optical waveguide; detecting first and second optical detection signal at first and second optical output ports via first and second opto-electrical converters which create corresponding first and second electrical signals; measuring values of the first and second electrical signal and determining an absolute temperature or a temperature change of the optical waveguide and/or an absolute wavelength value or a wavelength change of the optical probe signal via values measured of the first and second electrical signals and first and second previously determined wavelengths and temperature dependencies of both first and second power transfer functions.
    Type: Grant
    Filed: December 8, 2021
    Date of Patent: December 19, 2023
    Assignee: Adtran Networks SE
    Inventors: Benjamin Wohlfeil, Gilda Raoof Mehrpoor
  • Patent number: 11841289
    Abstract: The present invention is a passive receive module for use with an OTDR for determining polarity of a cable under test. Only one position of the module connector of the receive module includes a filling and all other positions are occupied with a reflective component with a reflective characteristic distinct from that of the filling. Only one position at the OTDR end of the cable will receive a distinct reflection from all of the other positions. Polarity may be determined from these positions.
    Type: Grant
    Filed: November 11, 2020
    Date of Patent: December 12, 2023
    Inventors: Piotr Anatolij Levin, Sergej Karpichin
  • Patent number: 11841621
    Abstract: An overlay metrology system may scan a sample including inverted Moiré structure pairs along a scan direction, include an illumination sub-system to illuminate first and second Moiré structures of one of an inverted Moiré structure pair with common mutually coherent illumination beam distributions, and include an objective lens to capture at least +/?1 diffraction orders from sample, where a first pupil plane includes overlapping distributions of the collected light with an interference pattern associated with relative wavefront tilt. The system may also include a diffractive element in the first pupil plane, where one diffraction order associated with the first Moiré structure and one diffraction order associated with the second Moiré structure overlap at a common overlap region in a field plane, and a collection field stop located in the field plane to pass light in the common overlap region and block remaining light and remove the relative wavefront tilt.
    Type: Grant
    Filed: December 27, 2021
    Date of Patent: December 12, 2023
    Assignee: KLA Corporation CA
    Inventors: Andrew V. Hill, Vladimir Levinski, Amnon Manassen, Yuri Paskover
  • Patent number: 11835865
    Abstract: An overlay measurement apparatus that can quickly measure an overlay error between layers with a large height difference is provided. The overlay measurement apparatus measures an error between a first overlay mark and a second overlay mark formed in a pair on different layers of a wafer. The overlay measurement apparatus includes an imaging system configured to acquire alignment images of a pair of first and second overlay marks at a plurality of focus positions, and a controller communicatively coupled to the imaging system. The overlay measurement apparatus can rapidly and accurately measure an overlay error between layers with a large height difference.
    Type: Grant
    Filed: May 10, 2023
    Date of Patent: December 5, 2023
    Inventors: Hyeon Gi Shin, Bo Kyung Ryu, Jung Sun Ko, Jin Woo Park
  • Patent number: 11828586
    Abstract: A multi-core fiber includes multiple optical cores, and for each different core of a set of different cores of the multiple optical cores, a total change in optical length is detected. The total change in optical length represents an accumulation of all changes in optical length for multiple segments of that different core up to a point on the multi-core fiber. A difference is determined between the total changes in optical length for cores of the set of different cores. A twist parameter and/or a bend angle associated with the multi-core fiber at the point on the multi-core fiber is/are determined based on the difference.
    Type: Grant
    Filed: August 24, 2022
    Date of Patent: November 28, 2023
    Assignee: Intuitive Surgical Operations, Inc.
    Inventors: Mark E. Froggatt, Justin W. Klein, Dawn K. Gifford, Stephen T. Kreger
  • Patent number: 11829077
    Abstract: A wafer shape metrology system includes a wafer shape metrology sub-system configured to perform one or more stress-free shape measurements on a first wafer, a second wafer, and a post-bonding pair of the first and second wafers. The wafer shape metrology system includes a controller communicatively coupled to the wafer shape metrology sub-system. The controller is configured to receive stress-free shape measurements from the wafer shape sub-system; predict overlay between one or more features on the first wafer and the second wafer based on the stress-free shape measurements of the first wafer, the second wafer, and the post-bonding pair of the first wafer and the second wafer; and provide a feedback adjustment to one or more process tools based on the predicted overlay. Additionally, feedforward and feedback adjustments may be provided to one or more process tools.
    Type: Grant
    Filed: January 28, 2021
    Date of Patent: November 28, 2023
    Assignee: KLA Corporation
    Inventors: Franz Zach, Mark D. Smith, Xiaomeng Shen, Jason Saito, David Owen
  • Patent number: 11828676
    Abstract: The purpose of this invention is to provide an optical pulse testing method and optical pulse testing device capable of measuring the loss at an end farther than an axially misaligned connection point at which inter-mode crosstalk occurs independently from the crosstalk value at the point. In this optical pulse testing method, a matrix (loss and crosstalk) representing the mode coupling at a near-end connection point is calculated, and an OTDR waveform having the effects of crosstalk eliminated therefrom is obtained by numerical processing using the calculated matrix representing the mode coupling.
    Type: Grant
    Filed: June 11, 2019
    Date of Patent: November 28, 2023
    Inventors: Atsushi Nakamura, Keiji Okamoto, Hiroyuki Oshida