Patents Examined by Grant S Withers
  • Patent number: 11973135
    Abstract: A semiconductor device includes a main groove formed in a main surface of a substrate, a semiconductor region formed in contact with a surface of the main groove, an electron supply region formed in contact with a surface of the semiconductor region on opposite sides of at least side surfaces of the main groove to generate a two-dimensional electron gas layer in the semiconductor region, and a first electrode and a second electrode formed in contact with the two-dimensional electron gas layer and apart from each other.
    Type: Grant
    Filed: February 6, 2018
    Date of Patent: April 30, 2024
    Assignee: NISSAN MOTOR CO., LTD.
    Inventors: Keisuke Takemoto, Tetsuya Hayashi, Wei Ni, Toshiharu Marui, Ryouta Tanaka, Shigeharu Yamagami
  • Patent number: 11973134
    Abstract: Devices and methods of a transistor device including a source and a drain, the source and drain are at a horizontal plane at a location along a vertical direction. A gate, that is at a higher horizontal plane along the vertical direction then the source and drain horizontal plane. A first region under the source and drain horizontal plane, includes a first three Nitride (III-N) layer, a second III-N layer over the first III-N layer. A second region under the gate, includes a first III-N layer, a second III-N layer over the first III-N layer, and a third III-N layer over the second III-N layer. The third III-N layer at selective locations extends through the second III-N layer and into a portion of the first III-N layer along a width of the transistor. The third III-N layer is doped P-type, and the first and second III-N layers are unintentionally doped.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: April 30, 2024
    Assignee: Mitsubishi Electric Research Laboratories, Inc.
    Inventors: Koon Hoo Teo, Nadim Chowdhury
  • Patent number: 11955397
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a substrate, a channel layer, a barrier layer, a compound semiconductor layer, a gate electrode, and a stack of dielectric layers. The channel layer is disposed on the substrate. The barrier layer is disposed on the channel layer. The compound semiconductor layer is disposed on the barrier layer. The gate electrode is disposed on the compound semiconductor layer. The stack of dielectric layers is disposed on the gate electrode. The stack of dielectric layers includes layers having different etching rates.
    Type: Grant
    Filed: November 9, 2020
    Date of Patent: April 9, 2024
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Shin-Cheng Lin, Cheng-Wei Chou, Ting-En Hsieh, Yi-Han Huang, Kwang-Ming Lin, Yung-Fong Lin, Cheng-Tao Chou, Chi-Fu Lee, Chia-Lin Chen, Shu-Wen Chang
  • Patent number: 11955522
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a substrate, a buffer layer, a barrier layer, a dielectric layer, a source structure, and a drain structure. The buffer layer is disposed on the substrate. The barrier layer is disposed on the buffer layer. The dielectric layer is disposed on the barrier layer. The passivation layer is disposed on the dielectric layer. The source structure and the drain structure are disposed on the passivation layer.
    Type: Grant
    Filed: February 13, 2020
    Date of Patent: April 9, 2024
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Cheng-Wei Chou, Shin-Cheng Lin, Yung-Fong Lin
  • Patent number: 11955344
    Abstract: According to an aspect of the disclosure, a method of controlling bow of a substrate is provided. In the method, a substrate is provided on which a dielectric layer is formed. The substrate has a bow with respect to a reference plane. The bow of the substrate is adjusted by performing an annealing process on the substrate. The annealing process includes one of a first process condition and a second process condition. The first process condition induces a tensile stress on the substrate to cause the substrate to bow upward with respect to the reference plane. The second process condition induces a compressive stress on the substrate to cause the substrate to bow downward with respect to the reference plane.
    Type: Grant
    Filed: January 3, 2022
    Date of Patent: April 9, 2024
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: JinHao Li, FeiFei Tu, Xiao Hou, Xianchun Deng
  • Patent number: 11950519
    Abstract: A non-volatile memory cell includes a bottom electrode, a top electrode having a conductive material, a resistive layer interposed between the bottom electrode and the top electrode, and side portions covering sides of the top electrode and the resistive layer. The side portions contain an oxide of the conductive material. The non-volatile memory cell further includes a contact wire disposed on the top electrode. A width of the contact wire is less than a width between lateral outer surfaces of the side portions.
    Type: Grant
    Filed: December 2, 2021
    Date of Patent: April 2, 2024
    Assignee: Hefei Reliance Memory Limited
    Inventors: Zhiqiang Wei, Zhichao Lu
  • Patent number: 11935947
    Abstract: An enhancement mode high electron mobility transistor (HEMT) includes a group III-V semiconductor body, a group III-V barrier layer and a gate structure. The group III-V barrier layer is disposed on the group III-V semiconductor body, and the gate structure is a stacked structure disposed on the group III-V barrier layer. The gate structure includes a gate dielectric and a group III-V gate layer disposed on the gate dielectric, and the thickness of the gate dielectric is between 15 nm to 25 nm.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: March 19, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Tung Yeh, Chun-Ming Chang, Bo-Rong Chen, Shin-Chuan Huang, Wen-Jung Liao, Chun-Liang Hou
  • Patent number: 11929407
    Abstract: A method of fabricating a HEMT includes the following steps. A substrate having a group III-V channel layer, a group III-V barrier layer, a group III-V gate layer, and a gate etch stop layer disposed thereon is provided. A passivation layer is formed to cover the group III-V barrier layer and the gate etch stop layer. A gate contact hole and at least one source/drain contact hole are formed in the passivation layer, where the gate contact hole exposes the gate etch stop layer, and the at least one source/drain contact hole exposes the group III-V channel layer. In addition, a conductive layer is conformally disposed on a top surface of the passivation layer and in the gate contact hole and the at least one source/drain contact hole.
    Type: Grant
    Filed: May 30, 2022
    Date of Patent: March 12, 2024
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Ting-En Hsieh, Yu-Chieh Chou, Yung-Fong Lin
  • Patent number: 11923448
    Abstract: A semiconductor device includes type IV semiconductor base substrate, first and second device areas that are electrically isolated from one another, a first region of type III-V semiconductor material formed over the first device area, a second region of type III-V semiconductor material formed over the second device area, the second region of type III-V semiconductor material being laterally electrically insulated from the first region of type III-V semiconductor material, a first high-electron mobility transistor integrally formed in the first region, and a second high-electron mobility transistor integrally formed in the second region. The first and second high-electron mobility transistors are connected in series. A source terminal of the first high-electron mobility transistor is electrically connected to the first device area. The first device area is electrically isolated from a subjacent intrinsically doped region of the base substrate by a first two-way voltage blocking device.
    Type: Grant
    Filed: January 10, 2022
    Date of Patent: March 5, 2024
    Assignee: Infineon Technologies Austria AG
    Inventors: Hyeongnam Kim, Jens Ulrich Heinle, Mohamed Imam, Bhargav Pandya, Ramakrishna Tadikonda, Manuel Vorwerk
  • Patent number: 11923201
    Abstract: Semiconductor device structures having metal gate structures with tunable work function values are provided. In one example, a first gate structure and a second gate structure formed on a substrate, wherein the first gate structure includes a first work function metal having a first material, and the second gate structure includes a second work function metal having a second material, the first material being different from the second material, wherein the first gate structure further includes a gate dielectric layer, a self-protective layer having metal phosphate, and the first work function metal on the self-protective layer.
    Type: Grant
    Filed: February 26, 2021
    Date of Patent: March 5, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ju-Li Huang, Ying-Liang Chuang, Ming-Hsi Yeh, Kuo-Bin Huang
  • Patent number: 11916076
    Abstract: The present disclosure provides chip architectures for FPGAs and other routing implementations that provide for increased memory with high bandwidth, in a reduced size, accessible with reduced latency. Such architectures include a first layer in advanced node and a second layer in legacy node. The first layer includes an active die, active circuitry, and a configurable memory, and the second layer includes a passive die with wiring. The second layer is bonded to the first layer such that the wiring of the second layer interconnects with the active circuitry of the first layer and extends an amount of wiring possible in the first layer.
    Type: Grant
    Filed: June 29, 2020
    Date of Patent: February 27, 2024
    Assignee: Adeia Semiconductor Inc.
    Inventors: Javier A. Delacruz, Don Draper, Jung Ko, Steven L. Teig
  • Patent number: 11916139
    Abstract: A semiconductor device includes a substrate, a semiconductor channel layer, a semiconductor barrier layer, and a gate electrode. The semiconductor channel layer is disposed on the substrate, and the semiconductor barrier layer is disposed on the semiconductor channel layer, where the surface of the semiconductor barrier layer includes at least one recess. The gate electrode is disposed on the semiconductor barrier layer and includes a body portion and at least one vertical extension portion overlapping the recess.
    Type: Grant
    Filed: February 26, 2021
    Date of Patent: February 27, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventor: Po-Yu Yang
  • Patent number: 11908898
    Abstract: Embodiments of the disclosure provide a lateral bipolar transistor with a base layer of varying horizontal thickness, and related methods to form the same. A lateral bipolar transistor may include an emitter/collector (E/C) layer on a semiconductor layer. A first base layer is on the semiconductor layer and horizontally adjacent the E/C layer. The first base layer has a lower portion having a first horizontal width from the E/C layer. The first base layer also has an upper portion on the lower portion, with a second horizontal width from the E/C layer greater than the first horizontal width. A second base layer is on the first base layer and adjacent a spacer. The upper portion of the first base layer separates a lower surface of the second base layer from the E/C layer.
    Type: Grant
    Filed: November 30, 2021
    Date of Patent: February 20, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Haiting Wang, Hong Yu, Zhenyu Hu, Alexander M. Derrickson
  • Patent number: 11908975
    Abstract: An optoelectronic device includes a first semiconductor layer, a second semiconductor layer and an active layer between the first semiconductor layer and the second semiconductor layer; a first insulating layer on the second semiconductor layer and including a plurality of first openings exposing the first semiconductor layer, wherein the first openings include a first group and a second group; a third electrode on the first insulating layer and including a first extended portion and a second extended portion, wherein the first extended portion and the second extended portion are respectively electrically connected to the first semiconductor layer through the first group of the first openings and the second group of the first openings, and wherein the number of the first group of the first openings is different from the number of the second group of the first openings; and a plurality of fourth electrodes on the second insulating layer and electrically connected to the second semiconductor layer, wherein in a
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: February 20, 2024
    Assignee: EPISTAR CORPORATION
    Inventors: Chao-Hsing Chen, Jia-Kuen Wang, Chien-Chih Liao, Tzu-Yao Tseng, Tsun-Kai Ko, Chien-Fu Shen
  • Patent number: 11908851
    Abstract: A method for forming a semiconductor device includes: forming a fin structure protruding from a substrate of the semiconductor device; forming a first conductive rail on the substrate, wherein a side of the first conductive rail facing the fin structure has a first recess and a second recess; forming a first conductive line in a same layer as the first conductive rail by filling a first conductive material into the first recess, wherein the first conductive line extends across the fin structure and wraps a portion of the fin structure; and forming a second conductive line in the same layer as the first conductive rail by filling a second conductive material into the second recess, wherein the second conductive line extends across the fin structure and contacts another portion of the fin structure.
    Type: Grant
    Filed: December 9, 2020
    Date of Patent: February 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Shun-Li Chen, Chung-Te Lin, Hui-Zhong Zhuang, Pin-Dai Sue, Jung-Chan Yang
  • Patent number: 11901450
    Abstract: The present disclosure relates to a semiconductor device includes a substrate and first and second spacers on the substrate. The semiconductor device includes a gate stack between the first and second spacers. The gate stack includes a gate dielectric layer having a first portion formed on the substrate and a second portion formed on the first and second spacers. The first portion includes a crystalline material and the second portion comprises an amorphous material. The gate stack further includes a gate electrode on the first and second portions of the gate dielectric layer.
    Type: Grant
    Filed: June 29, 2021
    Date of Patent: February 13, 2024
    Assignee: Taiwan Semicondutor Manufacturing Co., Ltd.
    Inventors: Cheng-Ming Lin, Sai-Hooi Yeong, Ziwei Fang, Bo-Feng Young, Chi On Chui, Chih-Yu Chang, Huang-Lin Chao
  • Patent number: 11888059
    Abstract: Provided is a field effect transistor (FET) including a gradually varying composition channel. The FET includes: a drain region; a drift region on the drain region; a channel region on the drift region; a source region on the channel region; a gate penetrating the channel region and the source region in a vertical direction; and a gate oxide surrounding the gate. The channel region has a gradually varying composition along the vertical direction such that an intensity of a polarization in the channel region gradually varies.
    Type: Grant
    Filed: June 16, 2021
    Date of Patent: January 30, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Injun Hwang, Jongseob Kim, Joonyong Kim, Younghwan Park, Junhyuk Park, Dongchul Shin, Jaejoon Oh, Soogine Chong, Sunkyu Hwang
  • Patent number: 11888051
    Abstract: Structures for a high-electron-mobility transistor and methods of forming a structure for a high-electron-mobility transistor. The high-electron-mobility transistor has a first semiconductor layer, a second semiconductor layer adjoining the first semiconductor layer along an interface, a gate electrode, and a source/drain region. An insulator region is provided in the first semiconductor layer and the second semiconductor layer. The insulator region extends through the interface at a location laterally between the gate electrode and the source/drain region.
    Type: Grant
    Filed: May 8, 2020
    Date of Patent: January 30, 2024
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Jiacheng Lei, Lawrence Selvaraj Susai, Joseph James Jerry
  • Patent number: 11881479
    Abstract: The present invention provides a nitride semiconductor device, including an insulating substrate, a substrate over the first surface of the insulating substrate, a first lateral transistor over a first region of the substrate, wherein the first lateral transistor includes a first nitride semiconductor layer formed over the substrate, and a first gate electrode, a first source electrode and a first drain electrode formed over the first nitride semiconductor layer, and a second lateral transistor over a second region of the substrate, wherein the second lateral transistor includes a second nitride semiconductor layer formed over the substrate, and a second gate electrode, a second source electrode and a second drain electrode formed over the second nitride semiconductor layer, and a separation trench formed over a third region, wherein the third region is between the first region and the second region.
    Type: Grant
    Filed: March 4, 2022
    Date of Patent: January 23, 2024
    Assignee: ROHM CO., LTD.
    Inventor: Hirotaka Otake
  • Patent number: 11876111
    Abstract: A sensor includes a sensor array. The sensor array includes a plurality of passive imaging pixels and a plurality of time of flight (TOF) imaging pixels. A method of imaging includes collecting passive imaging data from a sensor array and collecting time of flight (TOF) imaging data from the sensor array. Collecting passive imaging data and collecting TOF imaging data can be performed at least partially at the same time and along a single optical axis without parallax.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: January 16, 2024
    Assignee: Sensors Unlimited, Inc.
    Inventor: John Angelo Wieners