Abstract: A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.

Abstract: The present disclosure may include a method for calibrating a capacitor in a matching network in a radio frequency plasma processing device, the method including. The method may include identifying the capacitor in the matching network, measuring the impedance of the matching network as a whole, and driving the capacitor from a zero step value to a predefined step value. The method may further include measuring impedance at each step between the zero step value and the predefined step value, identifying the measured impedance for each step value to a predefined impedance curve, and matching a capacitor position to a specific impedance based on the identifying the measured impedance for each step value to the predefined impedance curve. Calibration of matching networks may also be enhanced by optimizing the steps to percentage reported ratio in the range of capacitor values most frequently used.

Abstract: A plasma processing apparatus 100 is equipped with a shower head 16 and a placing table 2 facing each other. A first RF power supply 10a is configured to apply a RF power to any one of the shower head 16 or the placing table 2 without igniting plasma. A measuring device 204 is configured to measure a physical quantity of the RF power applied by the first RF power supply 10a. A process controller 91 is configured to acquire an inter-electrode distance by using the measured physical quantity of the RF power in a correlation function of the inter-electrode distance and the physical quantity of the RF power.

Abstract: A system for street light lighting control and for Internet-of Things control for monitoring solar power generation includes a solar panel configured to generate photovoltaic-based electricity using sunlight; a battery configured to store the electricity generated by the solar panel; a solar controller configured to control the battery to store the electricity; and a street light controller configured to control lighting of at least one street light using the electricity stored in the battery, wherein the solar controller includes a battery information detection module configured to detect remaining charge information and discharging time information, which are charging/discharging status information of the battery and a communication module configured to transmit the remaining charge information and discharging time information to a monitoring server, wherein the communication module transmits the charging/discharging status information, the remaining charge information, and the discharging time information

Abstract: This application relates to a semiconductor device for a condition-controlled radio frequency (RF) system. In an embodiment of this application, an RF detection apparatus includes: a high-pass filter (HPF), one end of which is electrically coupled to an RF loop electrode of a ceramic heater, and another end of which is grounded; a voltage measurer, connected to the HPF in parallel; and a low-pass circuit, connected to the HPF in parallel.

Abstract: Methods and apparatus for processing a substrate are provided herein. For example, an apparatus can be a controller for a high peak power radio frequency (RF) generator. The controller comprises a control logic circuit in operable communication with an RF generator operating in a burst mode, the control logic circuit configured to receive a power, P, request at a predetermined duty cycle, ?, from a plasma processing chamber, determine a peak maximum power, Ppeakmax, based on a maximum average power, Pavgmax, and a maximum absolute power, Pabsmax, of the RF generator and the predetermined duty cycle, and transmit a control signal to the RF generator to limit a peak power, Ppeak, to the plasma processing chamber based on the Ppeakmax.

Abstract: This disclosure relates to systems and methods element identification and quantification. The method includes generating pulsed plasma based on an input voltage and a current so that the pulsed plasma interacts with a particle and atomizes the particle when the pulsed plasma is disposed in a flow field, identifying an atomic emission of the pulsed plasma with an optical sensor, determining element identification and quantification based on the identified emission of pulsed plasma, generating DC plasma having an electrical field based on an input DC voltage and a DC current, positioning the DC plasma in a flow field, detecting a change in the electrical field of the DC plasma, and determining a size of the particle based on the change in electrical field.

Abstract: A method for manufacturing an inorganic thin film electroluminescent display element comprises forming a layer structure, said forming the layer structure comprising forming a first dielectric layer (11); forming a luminescent layer (12), comprising manganese doped zinc sulfide ZnS:Mn, on the first dielectric layer, and forming a second dielectric layer (13) on the luminescent layer. Each of the first and the second dielectric layers are formed so as to comprise nanolaminate with alternating aluminum oxide Al2O3 and zirconium oxide ZrO2 sub-layers.

Abstract: Embodiments of the disclosure provided herein include an apparatus and method for the plasma processing of a substrate in a processing chamber. More specifically, embodiments of this disclosure describe a biasing scheme that is configured to provide a radio frequency (RF) generated RF waveform from an RF generator to one or more electrodes within a processing chamber and a pulsed-voltage (PV) waveform delivered from one or more pulsed-voltage (PV) generators to the one or more electrodes within the processing chamber. The plasma process(es) disclosed herein can be used to control the shape of an ion energy distribution function (IEDF) and the interaction of the plasma with a surface of a substrate during plasma processing.

Abstract: A driver arrangement is provided for a LED lighting device with a LED light source and at least one additional auxiliary module. The driver arrangement comprises separate main and auxiliary drivers. The delivery of power from the auxiliary driver is controlled to either an auxiliary power output or to both a main power output and the auxiliary power output. Each driver can be optimized for the load it is required to drive. The device may overall be more efficient in a low power auxiliary mode, by using a driver suited for such low power operation. In particular when the power demand of the LED light source is low, the auxiliary driver may be used.

Abstract: A sensor for sensing environmental characteristics of a space may include a visible light sensing circuit for recording an image of the space and a control circuit responsive to the visible light sensing circuit. The control circuit may detect an occupancy or vacancy condition in the space in response to the visible light sensing circuit, and measure a light level in the space in response to the visible light sensing circuit. The control circuit may also include a low-energy occupancy sensing circuit for detecting an occupancy condition in the space. The control circuit may disable the visible light sensing circuit when the space is vacant. The control circuit may detect an occupancy condition in the space in response to the low-energy occupancy sensing circuit and subsequently enable the visible light sensing circuit. The visible light sensor may be configured in a way that protects the privacy of the occupants of the space.

Abstract: A high frequency power supply member for supplying high frequency power includes: an inner conductor that forms a hollow; and an outer conductor arranged to surround the inner conductor, wherein a refrigerant flow path is provided inside a wall surface of at least one of the inner conductor and the outer conductor.

Abstract: A system to identify incidents associated with streetlight fixtures based on sensor data from one or more smart sensor devices. Each smart sensor device is coupled to a respective streetlight fixture and captures data from one or more sensors. The data from a single smart sensor device or a plurality of smart sensor devices is aggregated to generate a current data signature of the one or more smart sensor devices. The current data signature is compared to a plurality of known signatures to determine if an incident associated with a streetlight fixture has occurred. Such incidents can include a failed light source, a failing light source, a weather incident, a geologic incident, etc. Depending on the type of incident an instruction is sent to the one or more smart sensor devices to perform one or more responsive actions.

Abstract: According to one embodiment, a plasma processing apparatus includes a chamber configured to maintain an atmosphere depressurized below atmospheric pressure, a gas supply part configured to supply a gas into the chamber, a placement part provided inside the chamber, and configured to place a processed product, a depressurization part configured to depressurize inside the chamber, a window provided in the chamber, and facing the placement part, a plasma generator provided outside the chamber and on a surface of the window on an opposite side to the placement part, and configured to generate plasma inside the chamber, an optical path changing part provided inside the window and having a surface tilted to a central axis of the chamber, and a detection part provided on a side surface side of the window, and facing the surface of the optical path changing part.

Abstract: A disclosed method for LED control for a detachable reversable power cable includes detecting, at a power source, that a first connector at a first end of the power cable is connected to the power source, triggering, at the power source, a first pulse on a first wire of the power cable that turns off a first LED switch coupled to a first LED on the first connector, disabling the first LED, and triggering, at the power source, a second pulse on a second wire of the power cable that drives a second LED on a second connector at a second end of the power cable opposite the first end, the second LED being coupled to a second LED switch that is on. The method further includes, responsive to detecting that the second connector is connected to a power sink, modifying a driver path for the second LED.

Abstract: Remote control devices may control electrical loads and/or load control devices of a load control system without accessing electrical wiring. The remote control device may be mounted over a mechanical switch that is installed in a wallbox. The remote control device may include a control unit and a faceplate assembly. The faceplate assembly may include a mounting frame, an adapter plate, and a faceplate. The mounting frame may be configured to abut a bezel of the mechanical switch such that that the faceplate is spaced away from the bezel of the mechanical switch to enable the mounting ring to extend through respective openings in the adapter plate and the faceplate.

Abstract: Some embodiments include a high voltage pulsing circuit comprising: a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a pulse repetition frequency greater than 1 kHz; a bias compensation circuit arranged in parallel with the output the bias compensation circuit comprising; first inductance comprising the inductive elements and any stray inductance between the bias compensation circuit and the high voltage pulsing power supply; and second inductance comprising the inductive elements and any stray inductance between the bias compensation circuit and the output.

Abstract: Disclosed is a phase-cut dimmer, comprising an AC switch coupled in series between an AC supply and a load; a DC power supply powered from a voltage across the switch; a zero-crossing detector of a phase-cut AC voltage across the switch; a timer generating a timing signal of a duty-cycle proportional to a variable fraction of a peak voltage of a sawtooth signal, wherein the sawtooth signal is synchronized to the zero-crossing detector; a blanking signal generator triggered by a duty-cycle detector to reduce the duty-cycle when the duty-cycle of the timing signal exceeds a predetermined maximum limit; and an operation mode selector activated by an output of an inductive load detector.

Abstract: A system for adaptive lights for use in a vehicle includes a headlight configured to generate light to be at least partially directed away from the vehicle to illuminate a portion of an environment of the vehicle. The system further includes a sensor configured to detect data corresponding to an environmental condition in the environment of the vehicle. The system further includes an electronic control unit (ECU) coupled to the headlight and the sensor and configured to determine the environmental condition based on the detected data and to adjust an intensity and an orientation of the light generated by the headlight based on the environmental condition.

Abstract: A light fixture and a lighting system including the light fixture is disclosed. The light fixture can include a first light emitting diode (LED) on a printed circuit board (PCB) sized and configured to receive direct current power directly from a photovoltaic (PV) panel and sized to accommodate a maximum voltage output from the PV panel. The lighting system can include the PV panel and the light fixture with the first light emitting diode (LED) on the PCB.