Patents Examined by Hsien C Tsai
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Patent number: 11264223Abstract: A method is disclosed comprising providing a biological sample on a swab, directing a spray of charged droplets onto a surface of the swab in order to generate a plurality of analyte ions, and analysing the analyte ions.Type: GrantFiled: July 12, 2018Date of Patent: March 1, 2022Assignee: Micromass UK LimitedInventors: Zoltan Takats, Emrys Jones, James Ian Langridge, Michael Raymond Morris, Tamas Karancsi, Steven Derek Pringle, Julia Balog, Daniel Simon, Lajos Godorhazy, Daniel Szalay, Keith Richardson, Phillip Robert Bennett, David Alan Macintyre, Pamela Pruski
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Patent number: 11257658Abstract: An object of the invention is to correct an aberration or a defocus of an electron beam for irradiation, and control an influence on a deflector by a fluctuation in an electric field of an electrostatic lens. The invention provides a charged particle beam apparatus including a deflector that deflects a charged particle beam with which a specimen is irradiated, an objective lens that focuses the charged particle beam on the specimen, an electrostatic lens that includes a part of the objective lens and to which a voltage for correcting the aberration or the defocus of the charged particle beam is applied, and an constant electric field applying electrode that is provided between the deflector and the electrostatic lens and to which a constant voltage having a same sign with the voltage applied to the electrostatic lens is applied.Type: GrantFiled: September 17, 2019Date of Patent: February 22, 2022Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Noritsugu Takahashi, Makoto Sakakibara, Makoto Suzuki, Minoru Yamazaki
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Patent number: 11237186Abstract: The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a wide-field scanning probe microscope combined with an apparatus for modifying an object, said microscope comprising a base on which a piezo-scanner unit having a piezo scanner, a probe unit having a probe holder, and a punch unit having a punch are movably mounted, a punch actuator is configured as a three-axis actuator, allowing the punch to move along a first axis X, a second axis Y and a third axis Z; and the probe unit is mounted on the punch actuator. The invention is aimed at simplifying the structure of the device by combining into one unit means for measuring and means for modifying an object. The technical result of the invention consists in increasing measurement resolution.Type: GrantFiled: May 18, 2017Date of Patent: February 1, 2022Assignee: Chastnoe Uchrezhdenie Nazarbayev University Research and Innovation SystemInventors: Alexander Mihaylovich Alekseev, Aleksey Dmitrievich Volkov, Dmitry Yurjevich Sokolov, Anton Evgenievich Efimov
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Patent number: 11217423Abstract: A multi-beam apparatus for observing a sample with oblique illumination is proposed. In the apparatus, a new source-conversion unit changes a single electron source into a slant virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample with oblique illumination, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means not only forms the slant virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots. The apparatus can provide dark-field images and/or bright-field images of the sample.Type: GrantFiled: March 18, 2019Date of Patent: January 4, 2022Assignee: ASML Netherlands B.V.Inventors: Weiming Ren, Shuai Li, Xuedong Liu, Zhongwei Chen, Jack Jau
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Patent number: 11211178Abstract: Provided is a neutron shielding material having excellent transparency and high neutron shielding ability. In this neutron shielding material, light transmittance at wave length of 400 to 700 nm is 80% or greater, and the thickness of a 1/10 value layer of a neutron generated from Californium 252 is 14 cm or less.Type: GrantFiled: June 6, 2017Date of Patent: December 28, 2021Assignees: MITSUBISHI CHEMICAL CORPORATION, CO. LTD. RSCInventors: Yuusuke Watanabe, Akihiro Itou, Takaya Shinmura, Teruo Hashimoto, Takaaki Kishimoto
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Patent number: 11177109Abstract: The present invention addresses a problem of providing a specimen holder capable of observing phenomena on the surface and in the inner part of a specimen, the phenomena being generated in different gas spaces, and a charged particle beam device provided with the specimen holder. In order to solve this problem, a specimen holder for a charged particle beam device which observes a specimen using a charged particle beam is configured such that the specimen holder includes a first gas injection nozzle capable of injecting a first gas to a first portion of a specimen, a second gas injection nozzle capable of injecting a second gas to a second portion of the specimen, the second portion being different from the first portion, and a partition part provided between the first gas injection nozzle and the second gas injection nozzle.Type: GrantFiled: May 23, 2016Date of Patent: November 16, 2021Assignee: Hitachi High-Tech CorporationInventors: Toshie Yaguchi, Yasuhira Nagakubo
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Patent number: 11155427Abstract: A device for the surface treatment of a substrate including a transport device, a vacuum suction device, a corona device and a coating device, is described. The transport device is formed as a conveyor belt. The conveyor belt is formed as a vacuum suction belt of the vacuum suction device, and the conveyor belt is formed as a counter electrode of the corona device.Type: GrantFiled: April 6, 2017Date of Patent: October 26, 2021Assignee: LEONHARD KURZ STIFTUNG & CO. KGInventors: Michael Triepel, Konstantin Kosalla
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Patent number: 11150266Abstract: The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a scanning probe nanotomograph having an optical analysis module and comprising a base, on which a piezo-scanner unit, a probe unit and a punching unit are mounted, a sixth actuator is introduced, which is installed on said base, on which an optical analysis module is fastened, which comprises a lens and an analyser, optically connected to each other; moreover, the sixth actuator facilitates displacement of the optical analysis module along the third axis Z. The invention aims at expanding functional capabilities by means of using the optical analysis module. The technical result of the invention consists in enabling the optical observation and study of objects while same are being sectioned, which expands the functional capabilities of the apparatus.Type: GrantFiled: May 18, 2017Date of Patent: October 19, 2021Assignee: NAZARBAYEV UNIVERSITY RESEARCH AND INNOVATION SYSTEMInventors: Alexander Mihaylovich Alekseev, Aleksey Dmitrievich Volkov, Dmitry Yurjevich Sokolov, Anton Evgenievich Efimov
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Patent number: 11133169Abstract: Apparatus is disclosed comprising a first ion source (210) arranged and adapted to emit a spray of charged droplets (211) and a detector or sensor (203) arranged and adapted automatically to detect, sense or determine one or more first parameters or properties of the spray of charged droplets (211) as the spray of charged droplets (211) impacts upon a surface of the detector or sensor 203. The apparatus further comprises a control system (204) arranged and adapted to adjust, correct and/or optimise one or more second parameters or properties of the spray of charged droplets (211) based on the one or more first parameters or properties of the spray of charged droplets (211) detected, sensed or determined by the detector or sensor (203).Type: GrantFiled: June 5, 2017Date of Patent: September 28, 2021Assignee: Micromass UK LimitedInventors: Emrys Jones, Richard Chapman, Steven Pringle
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Patent number: 11133150Abstract: The present invention addresses a problem of providing a specimen holder capable of observing phenomena on the surface and in the inner part of a specimen, the phenomena being generated in different gas spaces, and a charged particle beam device provided with the specimen holder. In order to solve this problem, a specimen holder for a charged particle beam device which observes a specimen using a charged particle beam is configured such that the specimen holder includes a first gas injection nozzle capable of injecting a first gas to a first portion of a specimen, a second gas injection nozzle capable of injecting a second gas to a second portion of the specimen, the second portion being different from the first portion, and a partition part provided between the first gas injection nozzle and the second gas injection nozzle.Type: GrantFiled: May 23, 2016Date of Patent: September 28, 2021Assignee: Hitachi High-Tech CorporationInventors: Toshie Yaguchi, Yasuhira Nagakubo
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Patent number: 11092569Abstract: A system for detecting a chemical substance of interest among a plurality of different chemical substances comprises an inlet, an ionization module, a high-field asymmetric waveform ion mobility spectrometry (FAIMS) cell, and optionally a detector. A focussing module and/or a flow control gas supply can be provided. The system has example applications for molecules including ?-9-tetrahydrocannabinol (THC), its metabolites and/or other substances of interest from a breath of a subject or from a breath sample obtained from a subject.Type: GrantFiled: September 14, 2020Date of Patent: August 17, 2021Assignee: CANNABIX TECHNOLOGIES INC.Inventors: Rajpaul Attariwala, Daryoush Sahebjavaher, Jared Boock, Mikko Maatta
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Patent number: 11094426Abstract: The invention relates to charged particle beam generator comprising a charged particle source for generating a charged particle beam, a collimator system comprising a collimator structure with a plurality of collimator electrodes for collimating the charged particle beam, a beam source vacuum chamber comprising the charged particle source, and a generator vacuum chamber comprising the collimator structure and the beam source vacuum chamber within a vacuum, wherein the collimator system is positioned outside the beam source vacuum chamber. Each of the beam source vacuum chamber and the generator vacuum chamber may be provided with a vacuum pump.Type: GrantFiled: February 20, 2020Date of Patent: August 17, 2021Assignee: ASML Netherlands B.V.Inventors: Alexander Hendrik Vincent Van Veen, Willem Henk Urbanus, Marco Jan-Jaco Wieland
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Patent number: 11087965Abstract: A sample plate for MALDI mass spectrometry, according to the present invention, enables separately positioning, by means of a plastic insulation plate, metal wiring and metal dots onto which an analyte sample is to be loaded, and electrically connecting same by means of a via or a metal portion, and thus the energy transferred into the plate when radiating a laser beam on the target (metal dots) may be reduced compared to a sample plate using a base metal, and thus laser energy may be concentrated on the target, and an effect may be achieved whereby heat loss is minimized.Type: GrantFiled: February 14, 2018Date of Patent: August 10, 2021Assignee: Bioneer CorporationInventors: Taeman Kim, Jong Rok Ahn, Dohoon Kim, Han-Oh Park
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Patent number: 11083422Abstract: Among other things, one or more systems and/or techniques are described for shaping a profile of radiation attenuation in a fan-angle direction via a pre-object filter (e.g., a bowtie filter) based upon a profile of an object. For example, a pre-object filter may be at least partially rotated about a filter axis and/or may be translated in a direction parallel to a direction of conveyance of the object under examination to adjust a profile of radiation attenuation in the fan-angle direction. Further, in one embodiment, the profile of radiation attenuation may be reshaped during rotation of the radiation source about the object to adjust an amount of radiation attenuation in the fan-angle direction (e.g., to adjust a profile of radiation attenuation as a shape of the object changes from a perspective of a radiation source as the radiation source is rotated about the object).Type: GrantFiled: April 15, 2019Date of Patent: August 10, 2021Assignee: Analogic CorporationInventors: Matthew B. Christensen, Aleksander Roshi, Anton Deykoon
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Patent number: 11043369Abstract: A sample analyzer includes a voltage source that applies a voltage to a sample. A laser irradiator irradiates the sample with a laser beam. A detector detects a particle emitted from the sample. An operation device specifies the material of the particle detected by the detection device, by mass spectrometry of the particle and analyzes the structure of the sample. The operation device calculates a ratio in structure between model information indicating the structure of the sample, which is prepared in advance, and analysis information indicating the structure of the sample, which is obtained by the mass spectrometry, and applies the ratio to the analysis information so as to correct the analysis information.Type: GrantFiled: August 27, 2018Date of Patent: June 22, 2021Assignee: TOSHIBA MEMORY CORPORATIONInventors: Akira Kuramoto, Teruyuki Kinno
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Patent number: 11037759Abstract: In one embodiment, a multi charged particle beam writing apparatus includes a stage position detector detecting a position of the stage which holds a substrate to be written, a mark disposed on the stage, a beam position detector detecting a beam position of each beam by allowing the multiple beams to pass over the mark, a beam shape detector detecting a beam shape of the multiple beams at predetermined time intervals based on the detected beam position and the detected position of the stage, the multiple beams being used to irradiate the substrate, and a writing data processor calculating an amount of irradiation correction of each beam for correcting the beam shape based on the detected beam shape.Type: GrantFiled: September 17, 2018Date of Patent: June 15, 2021Assignee: NuFlare Technology, Inc.Inventors: Ryoichi Kakehi, Osamu Iizuka
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Patent number: 11017980Abstract: The invention relates to a method of manipulating a sample in an evacuated chamber of a charged particle apparatus, the method performed in said evacuated chamber, the method including: providing a sample on a first substrate; bringing an extremal end of a manipulator in contact with the sample; attaching the sample to said extremal end, the attaching being a removable attaching; lifting the sample attached to the extremal end of the manipulator from the first substrate and transport the sample to a second substrate; attaching the sample to the second substrate; and detaching the sample from the extremal end of the manipulator. At least one of the steps of attaching the sample being performed solely by bringing the sample into contact with a bundle of carbon nanotubes.Type: GrantFiled: April 14, 2016Date of Patent: May 25, 2021Assignee: FEI CompanyInventors: Tomá{hacek over (s)} Vystav{hacek over (e)}l, Petronella Catharina Maria Baken, Ernst Jan Ruben Vesseur, Pavel Poloucek
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Patent number: 10994036Abstract: An apparatus and method for irradiating a fluid containing a material to be irradiated, comprising at least one irradiation chamber having at least one inlet port and outlet port, at least one fluid cooling chamber having at least one inlet port and outlet port, one or more UV radiation sources coupled to the irradiation chamber(s); and at least one heat exchange mechanism thermally coupled to the radiation source(s) and the cooling chamber(s). At least a portion of the interior surface of the cooling chamber(s) may comprise at least a portion of the exterior surface of the irradiation chamber(s) so the cooling chamber(s) is in fluid communication with the irradiation chamber(s).Type: GrantFiled: August 13, 2018Date of Patent: May 4, 2021Assignee: AQUISENSE TECHNOLOGIES, LLCInventors: Jennifer Godwin Pagan, Steven Franklin Pugh, John Krause, Oliver Lawal, Richard Mark Simons
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Patent number: 10998162Abstract: A charged-particle beam apparatus is provided with a cathode to emit charged particle beams, an anode to propagate the charged particle beams emitted from the cathode in a sample surface direction, an aperture to propagate a charged particle beam passing through an opening at a predetermined position and of a predetermined shape, among the charged particle beams passing through the anode, in the sample surface direction, and a first electrode that is disposed between the anode and the aperture, and is set at a first electric potential of a polarity repelling a polarity of an ion generated due to collision of a charged particle beam.Type: GrantFiled: September 10, 2018Date of Patent: May 4, 2021Assignee: NUFLARE TECHNOLOGY, INC.Inventors: Nobuo Miyamoto, Munehiro Ogasawara
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Patent number: 10973474Abstract: The invention refers to an elongated base profile (7) for use in a lower-body radiation protection system. The elongated base profile (7), comprises as seen in a transverse cross section, a first connecting portion (8) adapted to engage a connection rail (4) of an examination table (1), a second connecting portion (14) forming a protrusion (15) or a groove extending along the longitudinal extension of the elongated base profile (7), wherein the protrusion (15) is adapted to form a connection rail (4), and wherein the groove is adapted to support a separate connection rail or a separate connector; and a third connecting portion (18) adapted to engage a first connector (11) of a first shielding panel (10).Type: GrantFiled: May 10, 2017Date of Patent: April 13, 2021Assignee: BORNTECHInventor: Ove Bornvall