Abstract: A method of inspecting a wafer may include: loading of a wafer onto a stage, the wafer having a plurality of dies thereon; positioning of the wafer such that a plurality of electron beam columns on the wafer respectively face a partial region of each of the plurality of dies on the wafer; scanning the respective partial regions of each of the plurality of dies by using the electron beam columns; and combining a plurality of partial images that are obtained by scanning the partial regions to provide a die image.
Abstract: A mass spectrometer system for analysis of clinical samples includes a source of clinical samples. A controller receives the clinical samples from the source of clinical samples. A sample preparation system receives clinical sample from the controller and processes the samples to produce an extract suitable for analysis by MALDI-TOF mass spectrometry and deposits the extract on a sample plate together with a MALDI matrix. A sample plate loading mechanism transports sample plates from the sample preparation system into an evacuated ion source of a MALDI-TOF mass spectrometer. A MALDI-TOF mass spectrometer ionizes and analyzes samples on the sample plate and generates a mass spectrum of components in the clinical samples. A computer system receives data from the MALDI-TOF mass spectrometer and processes and interprets the data to generate a mass spectrum.
Abstract: A miniature mass spectrometer is disclosed comprising an atmospheric pressure ionization source 701, a first vacuum chamber having an atmospheric pressure sampling orifice or capillary, a second vacuum chamber located downstream of the first vacuum chamber and a third vacuum chamber located downstream of the second vacuum chamber. A first vacuum pump 707 is arranged and adapted to pump the first vacuum chamber, wherein the first vacuum pump 707 is arranged and adapted to maintain the first vacuum chamber at a pressure <10 mbar. A first RF ion guide 702 is located within the first vacuum chamber. An ion detector 705 is located in the third vacuum chamber. The ion path length from the atmospheric pressure sampling orifice or capillary to an ion detecting surface of the ion detector 705 is ?400 mm.
Abstract: A laser crystallizing apparatus includes a laser generator that generates an incident laser beam that includes a P polarization component and an S polarization component, an optical system that converts the incident laser beam to generate an emitted laser beam, and a stage on which is mounted a target substrate with a target thin film which is laser-crystallized by being irradiated by the emitted laser beam. The optical system includes at least one half wave plate (HWP) that shifts a polarization axis direction of the incident laser beam received from the laser generator, at least one mirror that fully reflects the laser beam, and at least one polarization beam splitter (PBS) which reflects a part of the laser beam and transmits the other part of the laser beam.
Abstract: Mass spectrometry systems or assemblies therefore include an ionizer that includes at least one planar conductor, a mass analyzer with a planar electrode assembly, and a detector comprising at least one planar conductor. The ionizer, the mass analyzer and the detector are attached together in a compact stack assembly. The stack assembly has a perimeter that bounds an area that is between about 0.01 mm2 to about 25 cm2 and the stack assembly has a thickness that is between about 0.1 mm to about 25 mm.
Type:
Grant
Filed:
February 24, 2017
Date of Patent:
May 7, 2019
Assignee:
The University of North Carolina at Chapel Hill
Abstract: A computing device configured to obtain information about a subject using a detection result detected by an X-ray detector which detects an X-ray passing through the subject, which device includes: a unit configured to obtain a detection result of the X-ray detector; a first obtaining unit configured to obtain a complex refractive index of the X-ray after passing through the subject using the detection result; and a second obtaining unit configured to obtain information about the subject in accordance with a correlation between the complex refractive index and a mass absorption coefficient.
Abstract: A miniature time-of-flight mass spectrometer (TOF-MS) was developed for a NASA/ASTID program beginning 2008. The primary targeted application for this technology is the detection of non-volatile (refractory) and biological materials on landed planetary missions. Both atmospheric and airless bodies are potential candidate destinations for the purpose of characterizing mineralogy, and searching for evidence of existing or extant biological activity.
Abstract: An extreme ultraviolet light generating apparatus includes a light collecting mirror that reflects and focuses extreme ultraviolet light, and a magnet that generates a magnetic field. The light collecting mirror includes a first mirror portion that includes a first reflective surface formed by a portion of a spheroidal surface, and a second mirror portion that includes a second reflective surface having a focal point at substantially the same position as a focal point of the first reflective surface, formed by a portion of a spheroidal surface different from that of the first reflective surface. The second reflective surface is provided at a position at which a magnetic flux density caused by the magnetic field is lower than that of the first reflective surface.
Abstract: An apparatus and associated method for obtaining a three-dimensional representation of a target object within a fluid-carrying conduit, such as a hydrocarbon exploration or production well, using high energy photons is provided. The representation is essentially a three-dimensional image that achieves visualization of the shape of the target object despite the intervening opaque fluids located between the imaging tool and the object. In one specific though non-limiting embodiment, a narrow, pencil-shaped beam of radiation is scanned in coordination with a similarly narrow detector field-of-view in order to sample the radiation-scattering properties of only a small volume of material at any given time. The result is a clearer visualization with a greater viewing depth.