Abstract: A method and system for calibrating force (F12) in a dynamic mode atomic force microscope (AFM). An AFM tip (11) is disposed on a first cantilever (12). The first cantilever (12) is actuated to oscillate the AFM tip (11) in a dynamic mode. A first sensor (16) is configured to measure a first parameter (A1) of the oscillating AFM tip (11). A second sensor (26) is configured to measure a second parameter (A2) of a resilient element (22). The oscillating AFM tip (11) is moved in proximity to the resilient element (22) while measuring the first parameter (A1) of the AFM tip (11) and the second parameter (A2) of the resilient element (22). A force (F12) between the oscillating AFM tip (11) and the resilient element (22) is calculated based on the measured second parameter (A2) and a calibrated force constant (K2) of the resilient element (22).

Abstract: An apparatus for measuring mass of one or more ions, the apparatus including an ion trap coupled to an electrostatic ion bottle (EIB).

Abstract: A method of performing sub-surface imaging of a specimen in a charged-particle microscope of a scanning transmission type, comprising the following steps: Providing a beam of charged particles that is directed from a source along a particle-optical axis through an illuminator so as to irradiate the specimen; Providing a detector for detecting a flux of charged particles traversing the specimen; Causing said beam to follow a scan path across a surface of said specimen, and recording an output of said detector as a function of scan position, thereby acquiring a scanned charged-particle image I of the specimen; Repeating this procedure for different members n of an integer sequence, by choosing a value Pn of a variable beam parameter P and acquiring an associated scanned image In, thereby compiling a measurement set M={(In, Pn)}; Using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set representing depth-resolved imagery of the specimen,

Abstract: To realize a multi-beam formation device that can stably machine a fine pattern using complementary lithography, provided is a device that deforms and deflects a beam, including an aperture layer having a first aperture that deforms and passes a beam incident thereto from a first surface side of the device and a deflection layer that passes and deflects the beam that has been passed by the aperture layer. The deflection layer includes a first electrode section having a first electrode facing a beam passing space in the deflection layer corresponding to the first aperture and a second electrode section having an extending portion that extends toward the beam passing space and is independent from an adjacent layer in the deflection layer and a second electrode facing the first electrode in a manner to sandwich the beam passing space between the first electrode and an end portion of the second electrode.

Abstract: A light curing device includes a housing module and a lighting module. The lighting module includes a light emitter, a driver and a switch module. The light emitter includes a plurality of light-emitting elements configured to emit curing light into an irradiation space in the housing module. The driver is for driving the light-emitting elements, and includes a plurality of user-operable setting buttons corresponding to at least one of the light-emitting elements. When triggered, the switch module is operable to activate the driver to drive at least one of the light-emitting elements that corresponds to a selected one of the user-operable setting buttons to emit the curing light.

Abstract: An electron source is formed on a silicon substrate having opposing first and second surfaces. At least one field emitter is prepared on the second surface of the silicon substrate to enhance the emission of electrons. To prevent oxidation of the silicon, a thin, contiguous boron layer is disposed directly on the output surface of the field emitter using a process that minimizes oxidation and defects. The field emitter can take various shapes such as pyramids and rounded whiskers. One or several optional gate layers may be placed at or slightly lower than the height of the field emitter tip in order to achieve fast and accurate control of the emission current and high emission currents. The field emitter can be p-type doped and configured to operate in a reverse bias mode or the field emitter can be n-type doped.

Abstract: The invention comprises a method or apparatus for tomographically imaging a sample, such as a tumor of a patient, using positively charged particles. Position, energy, and/or vectors of the positively charged particles are determined using a plurality of scintillators, such as layers of chemically distinct scintillators where each chemically distinct scintillator emits photons of differing wavelengths upon energy transfer from the positively charged particles. Knowledge of position of a given scintillator type and a color of the emitted photon from the scintillator type allows a determination of residual energy of the charged particle energy in a scintillator detector. Optionally, a two-dimensional detector array additionally yields x/y-plane information, coupled with the z-axis energy information, about state of the positively charged particles.

Abstract: A method of operating a Fourier Transform (FT) mass analyzer, which has a plurality of selectable resolving power settings, includes storing an optimized voltage value in association with each one of the plurality of selectable resolving power settings. More particularly, the optimized voltage values for at least two of the selectable resolving power settings differ from one another. When a user selects one of the plurality of selectable resolving power settings, the optimized voltage value that is stored in association therewith is retrieved. At least one voltage setting of the FT mass analyzer is controlled, based on the retrieved optimized voltage value, and an analytical scan is performed at the selected one of the plurality of selectable resolving power settings for a population of ions within the FT mass analyzer.

Abstract: An extreme ultraviolet light generation apparatus includes: a chamber; a target supply unit that supplies a droplet of a target substance to a plasma generation region in the chamber; a first pipe at least partly covering a trajectory of the droplet and having a first opened end part as an upstream end part and a second opened end part as a downstream end part in a trajectory direction; a second pipe at least partly covering the first pipe with a gap between the second pipe and the first pipe, and having a third end part, opened and extending downstream of the second end part of the first pipe in the trajectory direction, as a downstream end part in the trajectory direction; and a gas supply unit that supplies gas flowing through the gap and causes the gas to flow in the trajectory direction out of a gas exit.

Abstract: Provided is a decontamination apparatus for decontaminating an enclosed room. The decontamination apparatus includes a source including a UVC bulb and a reflective shield arranged adjacent to the UVC bulb and configured to reflect UVC light emitted by the UVC bulb toward a region of the enclosed room to be decontaminated. A mounting system that is adjustable secures the source at a desired location within the enclosed room. A controller is operatively-connected to the source to terminate operation of the UVC bulb in response to a determination that an occupant is present within the enclosed room.

Abstract: In a PESI ion source, a solvent supply unit (8) is placed above the liver (101), which is the object of measurement, and by moving a probe (6) up and down such that the tip of the probe (6) passes through the solvent supply unit (8) and is inserted into the liver (101), a sample is captured by the tip of said probe. The solvent supply unit (8) includes a container unit comprising a liquid-blocking upper film body (81) stretched over the bottom surface opening of a cylindrical body (80), and a liquid-blocking lower film body (82) which is stretched out approximately in parallel with the upper film body (81) with a spacer interposed therebetween; the container unit houses a solvent (84). Because the tip of the probe (6) passes through the solvent (84) during the up-and-down movement of the probe (6), sufficient solvent adheres to the sample and when a high voltage is applied to the probe (6), components in the sample are favorably ionized.

Abstract: A drawing device according to an embodiment includes: a stage configured to be capable of having a processing target mounted thereon; an aperture member including a plurality of apertures corresponding to a plurality of beams irradiated to the processing target; a data generator configured to generate gradation data indicating irradiation time data with n bits (n is a positive integer) with respect to positions of respective coordinates of the beams; a calculator configured to perform a logical addition operation of the gradation data of the respective positions of the coordinates; and a controller configured to control the aperture member based on the gradation data and a result of the logical addition operation.

Abstract: A scanning electron microscope incorporates a multi-pixel solid-state electron detector. The multi-pixel solid-state detector may detect back-scattered and/or secondary electrons. The multi-pixel solid-state detector may incorporate analog-to-digital converters and other circuits. The multi-pixel solid state detector may be capable of approximately determining the energy of incident electrons and/or may contain circuits for processing or analyzing the electron signals. The multi-pixel solid state detector is suitable for high-speed operation such as at a speed of about 100 MHz or higher. The scanning electron microscope may be used for reviewing, inspecting or measuring a sample such as unpatterned semiconductor wafer, a patterned semiconductor wafer, a reticle or a photomask. A method of reviewing or inspecting a sample is also described.

Abstract: A method includes producing ions from one or more calibrant species and delivering the ions to a mass analyzer, and measuring a first set of mass related physical values for the ions from the one or more calibrant species. The method further includes producing ions from a sample and delivering the ions to a mass analyzer, and measuring a second mass related physical value for a first sample ion species. The first sample ion species has a mass-to-charge ratio outside of the range of the mass-to-charge ratios of the calibrant ion species. Additionally, the method includes calculating a calibration curve based on the first set of mass related physical values and second mass related physical value, and modifying at least one instrument parameter based on the calibration curve.

Abstract: A miniature mass spectrometer is disclosed comprising an atmospheric pressure ionization source, a first vacuum chamber having an atmospheric pressure sampling orifice or capillary, a second vacuum chamber located downstream of the first vacuum chamber and a third vacuum chamber located downstream of the second vacuum chamber. A first vacuum pump is arranged and adapted to pump the first vacuum chamber, wherein the first vacuum pump is arranged and adapted to maintain the first vacuum chamber at a pressure <10 mbar. A first RF ion guide is located within the first vacuum chamber and an ion detector is located in the third vacuum chamber. The ion path length from the atmospheric pressure sampling orifice or capillary to an ion detecting surface of the ion detector is ?400 mm.

Abstract: An EDS 5 acquires first spectrum data by detecting an X-ray generated from a sample. A WDS 6 acquires second spectrum data by detecting the X-ray generated from the sample. A phase distribution map generation processing unit 11 generates a phase distribution map of a substance of the sample in a measurement region, on the basis of the first spectrum data acquired with respect to each pixel in the measurement region on a sample surface. A composition information acquisition processing unit 13 acquires element composition information of each phase, on the basis of the second spectrum data acquired with respect to a position on the sample corresponding to a representative pixel in the measurement region corresponding to each of the phases of the phase distribution map.

Abstract: For the purposes of high-resolution scanning microscopy, a sample is excited by illumination radiation to emit fluorescent radiation in such a way that the illumination radiation is focused at a point in or on the sample, so as to form a diffraction-limited illumination spot. The point is imaged in a diffraction image on a detector in a diffraction-limited manner, wherein the detector has detector elements and a plurality of location channels which resolve a diffraction structure of the diffraction image. The sample is scanned with various scanning positions with an increment smaller than half the diameter of the illumination spot. An image of the sample with a resolution that is increased beyond a resolution limit of the image is generated from the data of the detector and from the scanning positions associated with these data.

Abstract: A method is presented for sub-surface imaging of a specimen in a charged particle microscope. A series of images, with individual members In is collected, with a value of a beam parameter P varied for each image, thereby compiling a measurement set M={(In, Pn)}, with P being the focus position along the charged particle axis. The data for the images are recorded using signals from a segmented detector. The signals from segments combined and compiled to yield a vector field. Mathematical processing then deconvolves the vector field, resulting in depth-resolved imagery of the specimen.

Abstract: A method for generating a mass spectrum of sample ions using a multi-collector mass spectrometer is disclosed. The mass spectrometer includes a spatially dispersive mass analyser to direct the sample ions into a detector chamber. The method includes generating sample ions of a first ion species A, a second ion species B, and a third ion species C, wherein the ions of species A have a different nominal mass to the ions of species B and C, and further wherein the ions of species B have the same nominal mass as the ions of species C. The sample ions of the species A, B and C are directed to travel through the mass analyser and towards detectors in the detector chamber, the sample ions being deflected during their travel. The ions of species B and C are scanned across a master aperture defined in a master mask of a master detector, while the ions of species A pass through a lead aperture defined in a lead mask of a lead detector.

Abstract: An ion mobility spectrometry apparatus and method are provided. The ion mobility spectrometry apparatus includes an ion source for providing ions; an ion guiding device having at least three ends internally communicated: first, second and third guiding ends, wherein ions can enter or exit from the ion guiding device from any ends thereof, the first guiding end is used for entrance of ions provided by the ion source, and the third guiding end is communicated with a downstream device; at least one drift cell in correspondence to the second guiding end, for transmitting ions and/or performing ion mobility analysis, each drift cell having a first and second ends which are internally communicated, wherein the second end of drift cell is communicated with said second guiding end; an ion storage device communicated with said first end of the drift cell, for storing ions or ejecting ions.