Patents Examined by Isiaka O. Akanbi
  • Patent number: 11221279
    Abstract: A laser absorption spectroscopy exhaust gas sensor includes an optical cell with porous walls having pores with a mean diameter in the range of 0.1 nm to 1 mm; gold mirrors within the optical cell positioned to support a multi-pass optical path within the optical cell; an active heating element adapted to heat the optical cell to prevent condensation; a laser adapted to generate a laser beam; an optical detector adapted to detect a returning laser beam; and a processor for controlling the laser and the active heating element and for analyzing signals from the optical detector to identify a gas in the optical cell.
    Type: Grant
    Filed: January 11, 2020
    Date of Patent: January 11, 2022
    Assignee: Indrio Technologies, Inc
    Inventor: Ritobrata Sur
  • Patent number: 11215564
    Abstract: The visual inspection device comprises a first illumination device capable of illuminating an top surface of an inspection object, a second illumination device capable of illuminating a bottom surface opposite to the top surface of the inspection object and a first imaging device capable of capturing the top surface of the inspection object. A relative position of each of the first illumination device and the second illumination device and the inspection object are adjusted such that a part of the captured image captured by the first imaging device is disappeared.
    Type: Grant
    Filed: April 30, 2020
    Date of Patent: January 4, 2022
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventor: Hideki Wada
  • Patent number: 11209476
    Abstract: An inspection system includes a light source, a mirror, Galvano mirrors, a casing that holds the mirror and the Galvano mirrors inside and includes an attachment portion for attaching an optical element, and a control unit that controls a deflection angle of the Galvano mirrors, wherein the control unit controls the deflection angle so that an optical path optically connected to a semiconductor device is switched between a first optical path passing through the Galvano mirrors and the mirror, and a second optical path passing through the Galvano mirrors and the attachment portion, and controls the deflection angle so that the deflection angle when switching to the first optical path has been performed and the deflection angle when switching to the second optical path has been performed do not overlap.
    Type: Grant
    Filed: March 7, 2018
    Date of Patent: December 28, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Tomonori Nakamura, Yoshitaka Iwaki
  • Patent number: 11199400
    Abstract: The optical angle sensor comprises a diffraction unit, a light source, a light receiving unit, and a plurality of reflection units. The diffraction unit includes a first diffraction part for generating combined light and a second diffraction part for diffracting a first light and a second light a plurality of times. The plurality of reflection units includes a first reflection unit, a second reflection unit, a third reflection unit that reflects the first light and the second light through the second diffraction part toward the second diffraction part, fourth reflection unit, and fifth reflection unit. The calculating unit, with the rotation of the diffraction unit, calculates the amount of change in the angle based on the change in the interference signal caused by the combined light generated on the light receiving surface.
    Type: Grant
    Filed: May 22, 2020
    Date of Patent: December 14, 2021
    Assignee: MITUTOYO CORPORATION
    Inventor: Akihide Kimura
  • Patent number: 11199486
    Abstract: A method of characterising particles in a sample, comprising: obtaining a scattering measurement comprising a time series of measurements of scattered light from a detector, the scattered light produced by the interaction of an illuminating light beam with the sample; producing a corrected scattering measurement, comprising compensating for scattering contributions from contaminants by reducing a scattering intensity in at least some time periods of the scattering measurement; determining a particle characteristic from the corrected scattering measurement.
    Type: Grant
    Filed: March 20, 2018
    Date of Patent: December 14, 2021
    Assignee: Malvern Panalytical Limited
    Inventors: Jason Corbett, Alex Malm
  • Patent number: 11200660
    Abstract: According to one embodiment, a holding apparatus holds a moving body and changes a position of the moving body in a second direction perpendicular to a surface of a columnar body. The surface of the columnar body extends in the first direction. The moving body is movable along the first direction. The apparatus includes first and second holders separated from each other. The first holder includes first and second portions separated from each other, and a third portion. The second holder includes fourth and fifth portions separated from each other, and a sixth portion. The moving body is held by the first and second holders in a state in which the moving body is at a hold position. The hold position is where the moving body opposes the third and sixth portions and is between the first and second portions and between the fourth and fifth portions.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: December 14, 2021
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ENERGY SYSTEMS & SOLUTIONS CORPORATION :
    Inventor: Hiroaki Kuwahara
  • Patent number: 11193877
    Abstract: A method for characterizing particle objects comprises generating a radiation beam, illuminating with the radiation beam an observation region transited by a particle object, collecting an interference image determined by an interference between a transmitted fraction and a part of the scattered fraction of the radiation beam that propagates around the direction of the optical axis, collecting a part of the scattered fraction that propagates at the scattering angle, and measuring at least one scattered radiation intensity value determined by the part of the scattered fraction, calculating, from the interference image, a pair of independent quantities that define the complex field of the first part of the scattered fraction, calculating, starting from the pair of independent quantities, a theoretical value of scattered radiation intensity, and comparing the measured value with the theoretical scattered radiation intensity value.
    Type: Grant
    Filed: May 18, 2018
    Date of Patent: December 7, 2021
    Assignee: EOS S.R.L.
    Inventor: Marco Alberto Carlo Potenza
  • Patent number: 11187525
    Abstract: A method, system, and computer program product for optical inspection of objects. The method projects an optical test line on a device under test. A frame is captured of the optical test line projected onto the device under test. The method provides a reference line for the device under test and compares the reference line and the optical test line within the frame. The method generates a visual quality determination based on the comparison of the reference line and the optical test line.
    Type: Grant
    Filed: January 6, 2020
    Date of Patent: November 30, 2021
    Assignee: International Business Machines Corporation
    Inventors: Eric V. Kline, Wen Qi Loh, Jon Vitas Elumbaring Guiritan, Lee Leng Tey
  • Patent number: 11187521
    Abstract: A calibration configuration for a chromatic range sensor (CRS) optical probe of a coordinate measurement machine (CMM) includes a calibration object. The calibration object includes at least a first nominally cylindrical calibration surface having a central axis that extends along a Z direction that is intended to be aligned approximately parallel to a rotation axis of the CRS optical probe. The first nominally cylindrical calibration surface is arranged at a known first radius R1 from the central axis that extends along the Z direction. A first set of angular reference features is formed on or in the first nominally cylindrical calibration surface. The angular reference features are configured to be sensed by the radial distance sensing beam and are located at known angles or known angular spacings around the central axis from one another on or in the first nominally cylindrical calibration surface.
    Type: Grant
    Filed: April 28, 2020
    Date of Patent: November 30, 2021
    Assignee: MITUTOYO CORPORATION
    Inventor: Joseph Daniel Tobiason
  • Patent number: 11175233
    Abstract: A tactical chemical detector may include a light array comprising a plurality of light sources; a sensor optic comprising a plurality of optic elements, each optic element in optical communication with one of the plurality of light sources; a sensor array comprising a plurality of sensors arranged on a substrate, each sensor in optical communication with one of the plurality of light sources and wherein at least one vent opening extends through the substrate; a power source configured to selectively provide power the light array and the sensor array; and a housing having a first side and a second side and enclosing the light array, the sensor optic, the sensor array, and the power source.
    Type: Grant
    Filed: February 26, 2020
    Date of Patent: November 16, 2021
    Assignee: GENTEX CORPORATION
    Inventors: Jason D. Hallack, Bradley R. Hamlin, Jeffrey K. Okamitsu, Ross A. Riches, Douglas W. Later, Benjamin R. Bunes
  • Patent number: 11169272
    Abstract: A method is provided for detecting a property of a gas comprising: emitting a light, comprising a plurality of wavelengths covering a plurality of absorption lines of the gas, along a first axis, the light being scattered by particles of the gas resulting in a scattered light, generating a sensor image using a detection arrangement configured to receive the scattered light and comprising: an optical arrangement having an optical plane and being configured to direct the scattered light on to a light sensor, the light sensor having at least one pixel columns, wherein the pixel columns are aligned to an image plane and configured to output a sensor image, wherein the first axis, the optical plane, and the image plane intersect such that a Scheimpflug condition is achieved, determining, from the sensor image, properties of the gas at a plurality of positions along the first axis.
    Type: Grant
    Filed: July 14, 2018
    Date of Patent: November 9, 2021
    Assignee: NEOLund AB
    Inventor: Mikkel Brydegaard
  • Patent number: 11169049
    Abstract: Disclosed is a method for evaluating cosmetic defects of an optical device, including: a first step of acquiring a first set of cosmetic defects of the optical device; a second acquiring step during which a second set of cosmetic defects of the optical device is acquired, the second set of cosmetic defects being different from the first set of cosmetics defects and including at least one cosmetic defect corresponding to a cosmetic defect of the first set of cosmetic defects; a determining step, during which a subset of the first set of cosmetic defects of the optical device is determined based on the comparison of the cosmetic defects of the second set of cosmetic defects and the cosmetic defects of the first set of cosmetic defects; and a determining step, during which a quality factor of the optical device is determined based on the subset of cosmetic defects.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: November 9, 2021
    Assignee: Essilor International
    Inventors: Pascal Mathey, Dominique Leguy
  • Patent number: 11169087
    Abstract: Method and system in which, in order to determine foreign gases in ethylene with a degree of purity up to greater than 99%, a sample 2 of the ethylene in a measuring cell 1 is irradiated with light 14, wherein the wavelength of the light 14 is varied to scan selected absorption lines of the foreign gases in a wavelength-dependent manner, where the light 14 is detected after passing through the sample 2 to determine the concentrations of the foreign gases based on the wavelength-specific absorption of the light 14 at the points of the scanned absorption lines.
    Type: Grant
    Filed: July 21, 2017
    Date of Patent: November 9, 2021
    Assignee: Siemens Aktiengesellschaft
    Inventors: Alexandru Popescu, Thomas Hörner
  • Patent number: 11168977
    Abstract: A thickness measuring apparatus for measuring the thickness of a workpiece held on a chuck table includes the followings: a light source configured to emit white light; an optical branching unit configured to branch, to a second optical path, reflected light applied from the light source to the workpiece held on the chuck table via a first optical path and reflected from the workpiece; a diffraction grating disposed in the second optical path; an image sensor configured to detect an optical intensity signal of light separated into each wavelength by the diffraction grating; and a thickness output unit configured to generate a spectral interference waveform on the basis of the optical intensity signal detected by the image sensor, determine the thickness on the basis of the spectral interference waveform, and output the thickness.
    Type: Grant
    Filed: April 6, 2020
    Date of Patent: November 9, 2021
    Assignee: DISCO CORPORATION
    Inventors: Nobuyuki Kimura, Keiji Nomaru
  • Patent number: 11150087
    Abstract: The present disclosure provides a method for measuring an angle and a distance. The method includes: at an initial position, after a laser emitting device aligns with a laser receiving device, recording a first angle and measuring a first distance between the laser emitting device and the laser receiving device; and moving the laser receiving device from the initial position to a first position, and after the laser emitting device realigns with the laser receiving device, recording a second angle and measuring a second distance between the laser emitting device and the laser receiving device. The method for measuring the angle and the distance creatively records the corresponding angle and distance at different positions, respectively, such that the position of the laser receiving device relative to the laser emitting device is accurately determined.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: October 19, 2021
    Assignee: NORTHWEST INSTRUMENT INC.
    Inventors: Xin Shi, David Xing
  • Patent number: 11150498
    Abstract: A detection method and device of a display panel are disclosed. The detection method includes: selecting at least two comparison points for a detection point with a set comparison pitch, the detection point corresponding to a separation cell or a pixel cell; detecting a first defect and a second defect of a display substrate according to gray scale values of the detection point and 2 comparison points, wherein the first defect includes a normal separation cell and a pixel defect and the second defect includes a pixel defect and a defected separation cell; and determining the defected separation cell according to the first defect and the second defect.
    Type: Grant
    Filed: July 19, 2018
    Date of Patent: October 19, 2021
    Assignee: HKC Corporation Limited
    Inventor: Huailiang He
  • Patent number: 11150552
    Abstract: The present invention relates to a method for analyzing at least one defective location of a photolithographic mask, having the following steps: (a) obtaining measurement data for the at least one defective location of the photolithographic mask; (b) determining reference data of the defective location from computer-aided design (CAD) data for the photolithographic mask; (c) correcting the reference data with at least one location-dependent correction value; and (d) analyzing the defective location by comparing the measurement data to the corrected reference data.
    Type: Grant
    Filed: September 6, 2019
    Date of Patent: October 19, 2021
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Michael Budach, Ralf Schönberger
  • Patent number: 11143638
    Abstract: An apparatus includes a flow cell body, a plurality of electrodes, an imaging assembly, and one or more barrier features. The flow cell body defines one or more flow channels and a plurality of wells defined as recesses in the floor of each flow channel. Each well is fluidically coupled with the corresponding flow channel. The flow cell body further defines interstitial surfaces between adjacent wells. Each well defines a corresponding depth. Each electrode is positioned in a corresponding well of the plurality of wells. The electrodes are to effect writing of polynucleotides in the wells. The imaging assembly is to capture images of polynucleotides written in the wells. The one or more barrier features are positioned in the wells, between the wells, or above the wells. The one or more barrier features contain reactions in each well, reduce diffusion between the wells, or reduce optical cross-talk between the wells.
    Type: Grant
    Filed: May 26, 2020
    Date of Patent: October 12, 2021
    Assignee: ILLUMINA, INC.
    Inventors: Tarun Khurana, Ali Agah, Aathavan Karunakaran, Stanley Hong, Merek Siu, Arvin Emadi, Craig Ciesla
  • Patent number: 11131543
    Abstract: There is provided a three-dimensional measuring apparatus that performs three-dimensional measurement of an object using laser light, the apparatus including: a laser light source that emits the laser light; a line generating lens that widens and emits the laser light into line laser light having a first luminance distribution having a higher luminance at an edge portion than a luminance at a center portion in an extending direction; a mirror that swings around a swing axis, reflects the line laser light, and projects pattern light onto a projection surface including the object; an imaging portion that captures an image of the projection surface on which the pattern light is projected and acquires a pattern image; and a measuring portion that obtains a three-dimensional shape of the object based on the pattern image.
    Type: Grant
    Filed: March 27, 2020
    Date of Patent: September 28, 2021
    Inventor: Shuichi Wakabayashi
  • Patent number: 11132804
    Abstract: A hybrid depth estimation system includes a switchable projector that controllably projects either dot light or surface light onto an object; a sensor that receives reflected dot light or reflected surface light from the object to capture a first image or a second image respectively; a dot time-of-flight (ToF) depth generator that generates a dot depth map and an associated dot confidence map according to the first image; a surface ToF depth generator that generates a surface depth map according to the second image; and a denoise processor that processes the surface depth map according to a plurality of points on the dot depth map with high confidence, thereby generating a denoised depth map.
    Type: Grant
    Filed: January 7, 2020
    Date of Patent: September 28, 2021
    Assignee: Himax Technologies Limited
    Inventors: Wei-Kai Chan, Yi-Nung Liu, Chin-Jung Tsai