Abstract: Provided is an inductively coupled plasma spectrometric system for measuring an emission state of plasma into which a measurement target sample is fed, the inductively coupled plasma spectrometric system including: a spectrometer configured to resolve light emitted in a measurement region set in the plasma into a plurality of wavelength components; a detection device configured to detect a spatial distribution of the resolved light; and a measuring device configured to measure the detected spatial distribution at every measurement unit time, the measurement unit time being at least shorter than time required for the sample to pass through the measurement region.

Abstract: The present invention discloses a multi-excitation wavelength spectrometer fluorescence laser radar system, including a multi-wavelength laser emission system, a signal frequency division system and a data storage and display system. The present invention emits lasers with a plurality of wavelengths into the atmosphere simultaneously to alternately excite an organic matter in atmospheric particulate matters and obtain a fluorescence spectrum. The lasers with different wavelengths can excite the same organic matter to obtain different spectra. By analyzing a matrix diagram of each excitation and emission fluorescence spectrum, the present invention effectively explores the features of compositions and concentration of the organic matter in the atmospheric particulate matters.

Abstract: A system for detecting machining errors for a laser machining system for machining a workpiece includes: a detection unit for detecting image data and height data of a machined workpiece surface; and a computing unit. The computing unit is designed to generate an input tensor based on the detected image data and height data and to determine an output tensor on the basis of the input tensor using a transfer function. The output tensor contains information on a machining error.

Abstract: A LIDAR device for scanning a scanning angle, including at least one radiation source for generating at least one electromagnetic beam, including a rotatable mirror for deflecting the at least one electromagnetic beam along the scanning angle, including a receiving unit for receiving at least one incoming electromagnetic beam and for deflecting the at least one incoming electromagnetic beam to at least one detector, and including at least one filter, the at least one filter being adaptable to the at least one incoming electromagnetic beam. Moreover, a method for scanning a scanning angle with the aid of such a LIDAR device is described.

Abstract: A DNA analysis method and a DNA analyzing device using terahertz wave capable of accurately determining a type of cancer from DNA using terahertz wave are disclosed. The DNA analysis method according to the present invention comprises: (a) irradiating terahertz wave onto methylated DNA; (b) detecting the terahertz wave reflected from the methylated DNA; (c) detecting a peak of a waveform of the terahertz wave detected in the step (b); and (d) determining type of cancer from the peak detected in the step (c).

Abstract: A system for non-invasively measuring an analyte in a vehicle driver and controlling a vehicle based on a measurement of the analyte. At least one solid-state light source is configured to emit different wavelengths of light. A sample device is configured to introduce the light emitted by the at least one solid-state light source into tissue of the vehicle driver. One or more optical detectors are configured to detect a portion of the light that is not absorbed by the tissue of the vehicle driver. A controller is configured to calculate a measurement of the analyte in the tissue of the vehicle driver based on the light detected by the one or more optical detectors, determine whether the measurement of the analyte in the tissue of the vehicle driver exceeds a pre-determined value, and provide a signal to a device configured to control the vehicle.

Abstract: Methods for locating and characterizing defects can include performing a first scan of a substrate to produce a first defect map including a first set of coordinates of one or more defects of the substrate and performing a second scan of one or more regions of the substrate associated with the defects based on the first defect map to produce one or more electron channeling contrast (ECC) images of the defects. Characterization of the defects can be based on the ECC images alone or in combination with other techniques. Such methods can include determining a second set of coordinates associated with the one or more defects based on the ECC images and directing an ion beam toward the substrate and milling the substrate based on the second set of coordinates.

Abstract: A cigarette filter inspection method of inspecting a solid flavor element to be disposed in a void between two filter plugs placed in outer filter wrapper, and the cigarette filter inspection method includes an illumination step of irradiating the void with illumination light, an imaging step of obtaining an inspection image of a region containing the void, a filler detection step of detecting the flavor element based on contrast between the void and the flavor element in the inspection image, and an inspection step of inspecting the flavor element detected in the inspection image.

Abstract: A laser radar device includes a scanner unit for scanning a measurement target area along a second direction orthogonal to a predetermined first direction by irradiating the measurement target area with a line-shaped laser beam as a light-transmitting angle is changed, the line-shaped laser beam being a laser beam formed into a line shape so as to extend in the first direction, a received signal generation unit for generating a received signal according to received reflected light of the line-shaped laser beam, a storage unit for storing shape distortion information of the line-shaped laser beam in the second direction, and a three-dimensional information generation unit for generating three-dimensional information of the measurement target area based on corrected position information in the second direction obtained by correcting position information in the second direction calculated based on the received signal and the light-transmitting angle, with the shape distortion information.

Abstract: A method for inspecting a pillar-shaped honeycomb structure includes steps of: capturing a pattern of reflected light from an end face with a camera and generating an image data of the pattern of the reflected light; distinguishing positional information of each of cells adjacent to an outer peripheral side wall and cells that are not adjacent to the outer peripheral side wall based on the image data of the pattern of the reflected light, and storing the distinguished positional information in a memory; capturing a pattern of transmitted light from the end face with the camera and generating an image data of the pattern of the transmitted light; measuring intensity of each transmitted light from the cells adjacent to the outer peripheral side wall to detect the cells having defective plugged portions that are adjacent to the outer peripheral side wall based on the generated image data of the pattern of the transmitted light and the positional information; and measuring intensity of each transmitted light from

Abstract: The disclosure discloses a methane value online real-time monitoring system, which includes a laser tunable system portion, a gas component detection system portion and a data processing system portion. The laser tunable system portion includes a computer, laser drivers, tunable lasers, a laser beam combiner, a collimator, and a beam expander, which are connected in sequence. The gas component detection system portion includes a gas supply system pipeline, a hose, a valve, and a gas chamber. The data processing system portion includes a detector, lock-in amplifiers, an oscilloscope, and a data acquisition card, which are connected in sequence. In a working process of the methane value online real-time monitoring system, gas mass namely the methane value change can be monitored in real time on line by collecting natural gas introduced into a combustion chamber through a gas supply system pipeline of a natural gas engine.

Abstract: A method for manufacturing a gas concentration calculation device including a housing made of a synthetic resin and configured to include a cylindrical portion including first and second openings, respectively, at axial both ends thereof, and first and second mirrors, respectively, arranged facing each other at the first and second openings to form an optical path of infrared light inside the cylindrical portion. The method includes a step of preparing a precursor including respective sticking-out portions made of a synthetic resin sticking more outward than respective installation positions of first and second mirrors in a cylindrical portion and a step of bonding the first and second mirrors to the respective installation positions by arranging the first and second mirrors, respectively, at the respective installation positions of the precursor and then bending the sticking-out portions while melting with heat to cause them to adhere to the first and second mirrors.

Abstract: Disclosed are various embodiments for integrated diffuse correlation spectroscopy. A first control signal can be sent to a switch to cause an integrator to integrate a current from a photodiode. An integrated current can be received from the integrator, and a data signal can be sent to a computing device based at least in part on the integrated current. A second control signal can be sent to a switch to cause the integrator to cease integrating the current from the photodiode.

Abstract: A defect detection and imaging system is presented for performing microscopy and/or spectroscopy on a device under test. The defect detection system comprises a controller for toggling the state of a light source, which may allow for fast simultaneous high-speed inspection and high-resolution review imaging of the device under test by the same system and simultaneously deliver inspection, computer generated reconstructions or tomography, and defect review on sub second time-scales. The defect detection system further comprises a converter for converting X-ray images of the device under test into photoelectron contrast images to achieve nanometer scale measurement resolution in non-destructive and real-time fashion, to complement or replace destructive TEM. These photoelectron contrast images may be received by a detector to output an electronic format map or 3D/4D image that indicates one or more features of the device under test.

Abstract: Methods for laser induced ablation spectroscopy (LIBS) are disclosed. Light from laser ablation can be gathered into a lightguide fiber bundle that is subdivided into branches. One branch can convey a first portion of the light to a broadband spectrometer operable to analyze a relatively wide spectral segment, and a different branch can convey a second portion of the light to a high dispersion spectrometer operable to measure minor concentrations and/or trace elements. Emissions can be analyzed using a plurality of spectrometers having distinct and/or complementary capabilities, and with a synergistic method using inductively coupled plasma mass spectrometry.

Abstract: Provided is an image capture method including: illuminating an object having known label data, capturing images of the object using illumination parameters, and acquiring captured images; generating an estimated image of the object at the time of illumination based on the illumination parameter on the basis of an image data set obtained by associating a captured image with an illumination parameter; setting a maximum number of captured images permitted for the object; and performing learning with a machine learning model for each number of images equal to or smaller than the maximum number of captured images, optimizing illumination parameters and inspection algorithm parameters on the basis of a result of comparison between a result of estimation of the machine learning model and the label data of the object, calculating an index representing inspection performance expected when the each number of images is captured, and presenting the index to a user.

Abstract: An overlay metrology system may include an illumination sub-system to sequentially illuminate an overlay target with a first illumination lobe and a second illumination lobe opposite the first illumination lobe, where the overlay target includes grating-over-grating features formed from periodic structures on a first sample layer and a second sample layer. The system may further include an imaging sub-system to generate a first image and a second image of the overlay target. The first image includes an unresolved image of the grating-over-grating structures formed from a single non-zero diffraction order of the first illumination lobe. The second image includes an unresolved image of the one or more grating-over-grating structures formed from a single non-zero diffraction order of the second illumination lobe. The system may further include a controller to determine an overlay error between the first layer and the second layer based on the first image and the second image.

Abstract: Provided herein is a particle analyzer that is operably connected to a probe unit that is capable of both dislodging particles from a surface and sampling the particles after they have been dislodged. The devices and methods described herein may be lightweight and/or handheld, for example, so that they may be used within a cleanroom environment to clean and sample permanent surfaces and tools. The devices may include optical particle counters that use scattered, obscured or emitted light to detect particles, including condensation particle counting systems or split detection optical particle counters to increase the sensitivity of the device and thereby facilitate detection of smaller particles, while avoiding the increased complexity typically required for the detection of nanoscale particles, such as particles less than 100 nm in effective diameter.

Abstract: There is provided a tubular body inner surface inspection apparatus that detects a defect existing on an inner surface of a tubular body, the apparatus including: a tubular body imaging apparatus including N (N?2) imaging units each including a laser light source that applies laser light, an optical element that reflects laser light applied from the laser light source in a circumferential direction of the inner surface of the tubular body, as annular laser light, an area camera that images a region of the inner surface of the tubular body where the annular laser light is applied, and thereby generates an annular beam image, and a linking member that links together and fixes the laser light source and the area camera, in which the imaging units are linked in series along a tube axial direction of the tubular body in such a manner that positions of the linking members in a plane orthogonal to a tube axis are different from each other; a movement apparatus that moves the tubular body imaging apparatus along the

Abstract: Described is a metrology system for determining a characteristic of interest relating to at least one structure on a substrate, and associated method. The metrology system comprises a processor being configured to computationally determine phase and amplitude information from a detected characteristic of scattered radiation having been reflected or scattered by the at least one structure as a result of illumination of said at least one structure with illumination radiation in a measurement acquisition, and use the determined phase and amplitude to determine the characteristic of interest.