Abstract: Heights on a surface of a photomask are measured using broadband light interferometry. The heights include heights of patterned areas of the photomask. A focal map is produced from the measured heights on the surface of the photomask. To produce the focal map, the measured heights of the patterned areas are adjusted based on fill factors for the patterned areas. The photomask is inspected for defects, using the focal map.

Abstract: An apparatus for checking mechanical parts such as tools on machine tools employs optical devices for emitting and receiving a light beam, for example a laser beam, along a checking direction, and sensors for detecting variations in the features of such a light beam. A protection device (15) for at least one of the optical devices comprises a support element (21,22) with an inner seat (20), communication conduits (18,26,34) aligned along the checking direction and a shutter (44) movable, in the internal seat, from a rest position to an operative position of the apparatus. The shutter comprises a transversal through hole (60) which is arranged along the checking direction in the operative position, aligned with the communication conduits to allow the light beam to pass through. A movable closure element (55), for example a small sphere or ball, is arranged in a transversal hollow (54) of the shutter and is pushed by a spring towards the outside of the transversal hollow.

Abstract: Embodiments of the present invention include a device for removing energy from a beam of electromagnetic radiation. Typically, the device can be operatively coupled to a turbidity measuring device to remove energy generated by the turbidity measuring device. The device can include a block of material having one of a plurality of different shapes coated in an energy absorbing material. Generally, the device can include an angled or rounded energy absorbing surface where the beam of electromagnetic radiation can be directed. The angled or rounded energy absorbing surface can be configured to deflect a portion of the beam of electromagnetic radiation to a second energy absorbing surface.

Abstract: Apparatuses for measuring parameters of an object may include an apparatus frame. A rotary table assembly may include a rotary table having a diameter or width and carried by the apparatus frame. The rotary table may be configured to support the object for rotation. A rotary table motor may operably engage the rotary table for rotation. A carriage rail may be carried by the apparatus frame. The carriage rail may be disposed in fixed position relative to the rotary table. A sensor carriage may be carried by and configured to traverse the carriage rail. A carriage drive motor may engage the sensor carriage. The carriage drive motor may be operable to displace the sensor carriage along the carriage rail. At least one displacement sensor may be carried by the sensor carriage. The displacement sensor may have a displacement sensor travel path which passes over and traverses the diameter or width of the rotary table as the sensor carriage traverses the carriage rail.

Abstract: An apparatus for dental imaging comprises a light source for generating light, an optics system for focusing the light, and a light-guiding part having an entrance face and an exit face. The light source, the optics system and the light-guiding part are arranged such that the light passes through the optics system, enters the light-guiding part via the entrance face, and exits the light-guiding part via the exit face. The optics system is configured such that, upon entering the light-guiding part, an outermost chief ray of the light with respect to an optical axis of the optics system is divergent to the optical axis and an outermost marginal ray of the light with respect to the optical axis is parallel or divergent to the optical axis.

Abstract: A device includes a filter that enhances a beam profile of a received pulsed laser; a first optical element to direct the pulsed laser as a reference wave towards an optical sensor; an open cavity positioned between the first optical element and the optical sensor. The open cavity receives an aerosol particle, which enters the open cavity from any direction. The reference wave illuminates the aerosol particle. An illuminated particle generates and directs an object wave towards the optical sensor. A pixel array is connected to the optical sensor. The pixel array receives the reference wave and the object wave. The optical sensor creates a contrast hologram comprising an interference pattern of the illuminated particle. A processor creates an image of the illuminated particle based on the contrast hologram.

Abstract: An adaptive focusing system including an optics module, an optics module height positioner (OMHP), a position sensor operative to generate a position output indicating a height of the optics module, a predictive height estimator operative to generate an estimated height value of a sample at each site of a plurality of sites, and generate a desired optics module height output for each of the sites, a regulator operative to generate, at least partially based on the desired optics module height output and a known height of the optics module, a sequence of optics module height control instructions for the plurality of sites, a driver operative to provide a sequence of control outputs to the OMHP and a model predictive controller (MPC) operative to monitor differences between a reported height of the optics module and an MPC-expected height of the optics module, thereby to generate system amelioration values.

Abstract: An improved vehicle surface scanning system for assessing the damaged surfaces of a vehicle with resulting estimates of repair costs. A mobile scanning booth is assembled in an open-ended tunnel-like rig having a plurality of reflective panels positioned along opposite sides and across the roof of the booth to serve as deflection screens. A plurality of scanner modules are mounted in fixed positions about opposite ends of the booth and positioned to face the interior of the booth. Wheels provide controlled locomotion/movement of the scanning booth over the vehicle. The scanner modules use a combined hybrid methodology of active stereo 3D reconstruction and deflectometry to acquire data measurements along the surfaces of the vehicle incrementally as the booth is moved. The incremental measurement data acquired during the mobile scanning is processed and furthermore combined to produce accurate reports of the damage surfaces and estimates of associated repair costs.

Abstract: Systems and methods of using the same for functional fluorescence imaging of live cells in suspension with isotropic three dimensional (3D) diffraction-limited spatial resolution are disclosed. The method-live cell computed tomography (LCCT)-involves the acquisition of a series of two dimensional (2D) pseudo-projection images from different perspectives of the cell that rotates around an axis that is perpendicular to the optical axis of the imaging system. The volumetric image of the cell is then tomographically reconstructed.

Abstract: Provided herein are systems and methods of optical particle counters which account and adjust for the refractive index of the carrier fluid being analyzed. The provided systems are robust and may be implemented in a variety of optical particle counters including obscured light, reflected light, emitted light and scattered light particle counters. The described systems may be useful with any fluid, including gases or liquids. In some cases, the system can account for the differences in refractive index between two liquids, for example, ultrapure water and an acid, such as sulfuric, hydrochloric, hydrofluoric, acetic, phosphoric, chromic phosphoric, and the like. By accounting for the refractive index of the carrier fluid, the described systems and methods are also more sensitive and able to more accurately detect and characterize smaller particles, including nanoscale sized particles.

Abstract: Embodiments of a sensor device, method and system employ a multiplicity of environmental sensors as a single monitoring and alerting mechanism, operable to provide a profile of any contaminant in terms of various gases and particles in the atmosphere, quantified in terms of relative concentrations. In various embodiments, the sensor device can comprise hardware and firmware elements, including an electronic control system, a case, a shield and a cover. The environmental sensors can be secured as part of the electronic control system and the shield can be formed so as to facilitate proper channeling of air and sound for effective operation.

Abstract: Embodiments of a sensor device, method and system employ a multiplicity of environmental sensors as a single monitoring and alerting mechanism, operable to provide a profile of any contaminant in terms of various gases and particles in the atmosphere, quantified in terms of relative concentrations. In various embodiments, the sensor device can comprise hardware and firmware elements, including an electronic control system, a case, a shield and a cover. The environmental sensors can be secured as part of the electronic control system and the shield can be formed so as to facilitate proper channeling of air and sound for effective operation.

Abstract: An inspection apparatus includes: a light source that generates and outputs light; a stage on which an inspection target is arranged; an irradiation optical system that irradiates light from the light source to the inspection target; a detector that receives the light diffracted from the inspection target and generates diffraction image; and a detector moving device configured to move the detector on a z-axis, which is an optical axis of the light, and an x-y plane perpendicular to the z-axis. Furthermore, while the detector moves on the x-y plane and the z-axis through the detector moving device, the detector generates a plurality of the diffraction images with different positions on the x-y plane and the z-axis with respect to the inspection target, and thus simultaneously implements phase retrieval and super resolution of diffraction images.

Abstract: The invention provides differential refractive index detectors and methods for the use of differential refractive index detectors. In an exemplary embodiment, a differential refractive index detector includes a flow cell body having a proximal end, a distal end, and a flow axis extending between the proximal and the distal end. The flow cell body includes a first chamber and a second chamber and the fluid conduits coupled to the flow cell body can be tapered to reduce dispersion.

Abstract: A multi-wavelength laser diode based optical sensor system capable of monitoring the dynamics and physiological changes of a microorganism culture in real-time. The microorganism culture from a microorganism production chamber is pumped to a flow chamber. Laser diodes emit light at certain wavelengths through the flow chamber, which is sensed by photodiodes. A laser control circuitry is operatively connected to the laser diodes and a signal conditioning circuitry is operatively connected to the photodiodes. A microprocessor reads and records voltage signals corresponding to the wavelengths. A data acquisition system converts said voltage signals into measurements of biological parameters, which are displayed on a graphical user interface and allow a user to monitor the measurements in real time.

Abstract: The appearance inspection device inspects an appearance of a crimp terminal by capturing an image of the crimp terminal with a camera while applying illumination light onto the crimp terminal. The device includes an illumination unit for applying illumination light onto a crimp terminal and cameras that capture an image of the crimp terminal. A planar gradation light source having brightness that gradually changes in a predetermined direction from one side on an illumination surface toward another side is provided as the illumination unit. The cameras are disposed such that the gradation light source is reflected on an image obtained by the camera capturing the image of the crimp terminal, as a reflected image on a surface of the crimp terminal.

Abstract: Two pairs of alignment targets (one aligned, one misaligned by a bias distance) are formed on different masks to produce a first pair of conjugated interference patterns. Other pairs of alignment targets are also formed on the masks to produce a second pair of conjugated interference patterns that are inverted the first. Misalignment of the dark and light regions of the first interference patterns and the second interference patterns in both pairs of conjugated interference patterns is determined when patterns formed using the masks are overlaid. A magnification factor (of the interference pattern misalignment to the target misalignment) is calculated as a ratio of the difference of misalignment of the relatively dark and relatively light regions in the pairs of interference patterns, over twice the bias distance. The interference pattern misalignment is divided by the magnification factor to produce a self-referenced and self-calibrated target misalignment amount, which is then output.

Abstract: An apparatus to detect the topology of a workpiece including surface variations and flaws according to images from several viewpoints includes a frame, a loading member, a robot, an image capturing mechanism, and a controller. The loading member is positioned on the frame and loads a workpiece. The controller controls the robot to drive the image capturing mechanism to move or rotate to different preset positions from each of which the image capturing mechanism can capture images of the workpiece and transmit the images to the controller. The controller further processes the images to obtain an assessment of the components and surface of the workpiece for further processing.

Abstract: An apparatus for dental imaging comprises a light source for generating light, an optics system for focusing the light, and a probe head. The light source, the optics system and the probe head are arranged such that the light passes through the optics system, passes through the probe head, and exits the probe head. The optics system is configured such that, upon entering the probe head, an outermost chief ray of the light with respect to an optical axis of the optics system is divergent to the optical axis and an outermost marginal ray of the light with respect to the optical axis is parallel or divergent to the optical axis.

Abstract: Method of characterizing particles suspended in a fluid dispersant by light diffraction, comprising: obtaining measurement data from a detector element, the detector element being arranged to measure the intensity of scattered light; identifying a measurement contribution arising from light scattered by inhomogeneities in the dispersant; processing the measurement data to remove or separate the measurement contribution arising from light scattered by inhomogeneities in the dispersant; calculating a particle size distribution from the processed measurement. The detector element is one of a plurality of detector elements from which the measurement data is obtained. The detector elements are arranged to measure the intensity of scattered light at a plurality of scattering angles, the plurality of scattering angles distributed over a plurality of angles about an illumination axis.