Patents Examined by Joseph C Nicely
  • Patent number: 11784250
    Abstract: Compact radiation-hardened NMOS transistors permitting close spacing for high circuit density can be fabricated using modern commercial foundry processes incorporating lightly-doped drain (LDD) and silicidation techniques. Radiation-induced leakage currents in parasitic field oxide transistors are reduced by spacing diffusions away from field oxide edges under the gate, forming gap regions from which n-type dopants and silicide formation are excluded using blocking patterns in the layout. P-type implants along these field oxide edges further increase radiation tolerance. Dimensions can be tailored to permit tradeoffs between radiation tolerance, breakdown voltage, and circuit density. Compact layouts for series-connected NMOS transistors are provided and applied to high-density rad-hard circuits. Methods for fabricating devices having these features are also provided, requiring minimal adaptation of standard processes.
    Type: Grant
    Filed: February 2, 2023
    Date of Patent: October 10, 2023
    Assignee: Apogee Semiconductor, Inc.
    Inventor: Mark Hamlyn
  • Patent number: 11777031
    Abstract: The present disclosure provides a semiconductor device and a method for fabricating a semiconductor device. The semiconductor device includes a substrate, a metal gate layer over the substrate, a channel between a source region and a drain region in the substrate, and a ferroelectric layer, at least a portion of the ferroelectric layer is between the metal gate layer and the substrate, wherein the ferroelectric layer includes hafnium oxide-based material, the hafnium oxide-based material includes a first portion of hafnium oxide with orthorhombic phase, a second portion of hafnium oxide with monoclinic phase, and a third portion of the hafnium oxide with tetragonal phase, wherein a first volume of the first portion is greater than a second volume of the second portion, and the second volume of the second portion is greater than a third volume the third portion.
    Type: Grant
    Filed: February 21, 2022
    Date of Patent: October 3, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chun-Yen Peng, Chih-Yu Chang, Bo-Feng Young, Te-Yang Lai, Sai-Hooi Yeong, Chi On Chui
  • Patent number: 11777028
    Abstract: According to one embodiment, a semiconductor device includes first to third electrodes, a first conductive member, a semiconductor member, and a first insulating member. The third electrode includes a third electrode end portion and a third electrode other-end portion. The first conductive member includes a first conductive member end portion and a first conductive member other-end portion. The first conductive member is electrically connected with one of the second electrode or the third electrode. The semiconductor member includes first to fourth semiconductor regions. The first semiconductor region includes first and second partial regions. The third semiconductor region is electrically connected with the second electrode. The fourth semiconductor region is electrically connected with the first electrode. At least a portion of the first insulating member is between the semiconductor member and the third electrode and between the semiconductor member and the first conductive member.
    Type: Grant
    Filed: August 5, 2021
    Date of Patent: October 3, 2023
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventors: Yusuke Kobayashi, Akihiro Goryu, Ryohei Gejo, Hiro Gangi, Tomoaki Inokuchi, Shotaro Baba, Tatsuya Nishiwaki, Tsuyoshi Kachi
  • Patent number: 11777055
    Abstract: A light emitting device includes a substrate, a plurality of light sources, a partitioning member, a light transmissive member, a plurality of reflecting portions. The light sources are arranged on the substrate. Each of the light sources has a light emitting diode. The partitioning member includes a plurality of wall portions defining a plurality of sections respectively surrounding at least one of the light sources, the wall portions including top portions. The light transmissive member is arranged above the light sources. The plurality of reflecting portions are arranged on a lower surface of the light transmissive member. Lower surfaces of the reflecting portions are positioned lower than apexes of the top portions of the wall portions of the partitioning member.
    Type: Grant
    Filed: June 16, 2021
    Date of Patent: October 3, 2023
    Assignee: NICHIA CORPORATION
    Inventors: Shimpei Sasaoka, Toshiyuki Hashimoto, Yoshihiro Sho, Toshinobu Katsumata
  • Patent number: 11764293
    Abstract: Provided are a trench gate IGBT and a device. The trench gate IGBT includes an emitting electrode, a p well region, a gate, a gate oxide layer, a drift region and a back collecting electrode. The gate is located in a trench; the gate is isolated from the emitting electrode, the p well region and the drift region by the gate oxide layer; the trench is disposed inside a substrate; and recesses are provided at the boundary of the trench and the drift region. During switching on and off the trench gate IGBT, an interface between the drift region and a side surface of the trench is provided with recess gate oxide layers, so that electron charges can be restrained and accumulated, and improving the conduction capacity.
    Type: Grant
    Filed: December 17, 2019
    Date of Patent: September 19, 2023
    Inventors: Hao Lan, Yuxiang Feng
  • Patent number: 11764297
    Abstract: An integrated circuit comprising an n-type drift region, a gate structure directly on a first portion of the n-type drift region, a drain structure formed in a second portion of the n-type drift region, the gate structure and the drain structure being separated by a drift region length, a resist protective oxide (RPO) formed over a portion of the n-type drift region between the gate structure and the drain structure, a field plate contact providing a direct electrical connection to the resist protective oxide.
    Type: Grant
    Filed: August 10, 2022
    Date of Patent: September 19, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD, TSMC CHINA COMPANY, LIMITED
    Inventors: Lianjie Li, Feng Han, Jian-Hua Lu, YanBin Lu, Shui Liang Chen
  • Patent number: 11764273
    Abstract: The present disclosure generally relates to semiconductor structures for capacitive isolation, and structures incorporating the same. More particularly, the present disclosure relates to capacitive isolation structures for high voltage applications. The present disclosure also relates to methods of forming structures for capacitive isolation and the structures incorporating the same. The disclosed semiconductor structures may enable a smaller device footprint and reduced dimensions of components on an IC chip, whilst ensuring galvanic isolation between circuits.
    Type: Grant
    Filed: June 1, 2021
    Date of Patent: September 19, 2023
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Bong Woong Mun, Jeoung Mo Koo
  • Patent number: 11756948
    Abstract: Embodiments described herein are directed to a thin film capacitor (TFC) for power delivery that is in situ in a package substrate and techniques of fabricating the TFC. In one example, the TFC includes a first electrode, a dielectric layer over the first electrode, and a second electrode over the dielectric layer. Each of the dielectric layer and the second electrode comprises an opening. Furthermore, the two openings are positioned over one another such that the openings expose a surface of the first electrode. In this example, a first vertical interconnect access (via) is positioned on the exposed surface of the first electrode and a second via is positioned on an exposed surface of the second electrode. The TFC can be positioned in or on a layer of the package substrate close to a component (e.g., a die, a die stack, etc.) on the package substrate that may require a decoupling capacitance.
    Type: Grant
    Filed: May 1, 2019
    Date of Patent: September 12, 2023
    Assignee: Intel Corporation
    Inventors: Thomas Sounart, Aleksandar Aleksov, Henning Braunisch
  • Patent number: 11757044
    Abstract: An electrode structure is disclosed, which includes a buffer layer disposed on a substrate; and an electrode disposed on a surface of the buffer layer away from the substrate, an edge of the electrode including an extension surface extending from a surface of the electrode away from the substrate, and the extension surface is in contact with a surface of the buffer layer and forms an included angle with a surface of the buffer layer contacting the electrode. An anti-reflection layer is disposed at the edge of the electrode, the anti-reflection layer surrounds and covers the edge of the electrode, and the anti-reflection layer extends to be in contact with the buffer layer. An undercut structure is formed between an outer surface of the anti-reflection layer and the surface of the buffer layer.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: September 12, 2023
    Assignee: TCL China Star Optoelectronics Technology Co., Ltd.
    Inventors: Wenbo Liu, Yuanke Huang
  • Patent number: 11749726
    Abstract: A transistor device includes a semiconductor layer, source and drain contacts on the semiconductor layer, a gate contact on the semiconductor layer between the source and drain contacts, and a field plate over the semiconductor layer between the gate contact and the drain contact. The transistor device includes a first electrical connection between the field plate and the source contact that is outside an active region of the transistor device, and a second electrical connection between the field plate and the source contact.
    Type: Grant
    Filed: May 20, 2021
    Date of Patent: September 5, 2023
    Assignee: Wolfspeed, Inc.
    Inventors: Kyle Bothe, Jeremy Fisher, Matt King, Jia Guo, Qianli Mu, Scott Sheppard
  • Patent number: 11751449
    Abstract: An array substrate, a display panel and a display device are provided. The array substrate includes: a base substrate; a plurality of pixel units in an array on the base substrate; and a first power line and a second power line arranged on the base substrate and configured to respectively provide a first power signal and a second power signal to the pixel units. At least one of the pixel units includes: a first-color light emitting device; a second-color light emitting device; a first pixel driving circuit configured to drive the first-color light emitting device; and a second pixel driving circuit configured to drive the second-color light emitting device. The first pixel driving circuit is electrically connected to the first power line, the second pixel driving circuit is electrically connected to the second power line, the first power line and the second power line are insulated from each other.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: September 5, 2023
    Assignees: Chengdu BOE Optoelectronics Technology Co., Ltd., BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Zhongjie Wang, Zhongliu Yang
  • Patent number: 11749730
    Abstract: The present disclosure relates to a semiconductor device with a contact structure and a method for preparing the semiconductor device. The semiconductor device includes a source/drain structure disposed over a semiconductor substrate, and a dielectric layer disposed over the source/drain structure. The semiconductor device also includes a polysilicon stack disposed over the source/drain structure and surrounded by the dielectric layer. The polysilicon stack includes a first polysilicon layer and a second polysilicon layer disposed over the first polysilicon layer. The first polysilicon layer is undoped, and the second polysilicon layer is doped. The semiconductor device further includes a contact structure disposed directly over the polysilicon stack and surrounded by the dielectric layer.
    Type: Grant
    Filed: June 14, 2021
    Date of Patent: September 5, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Tse-Yao Huang
  • Patent number: 11749750
    Abstract: A split-gate trench device chip has an active region in which a plurality of active trenches are disposed. The active region is enclosed by termination trenches disposed in a termination region, which extends to the edges of the chip. A gate metal lead is disposed on the device surface. The gate metal lead makes contact to gate electrodes in the active trenches through contact holes disposed in the active region. A source or a drain metal lead is also disposed on the surface. The source or the drain metal lead makes contact to the field plate electrodes through contact holes disposed outside the active region. Each active trench in the active region has a first end merge into a first termination trench and a second end separated from an adjacent second termination trench.
    Type: Grant
    Filed: August 16, 2022
    Date of Patent: September 5, 2023
    Assignee: Diodes Incorporated
    Inventors: Chiao-Shun Chuang, Tsung-Wei Pai, Yun-Pu Ku
  • Patent number: 11742402
    Abstract: A semiconductor structure includes a substrate, an isolation layer, a dielectric layer, an insulation layer, a conductor and a capping layer. The substrate has a concave portion. The isolation layer is located on a top surface of the substrate. The dielectric layer is located on the isolation layer. The insulation layer is located on a surface of the concave portion and extends to a sidewall of the isolation layer. The conductor is located on the insulation layer in the concave portion. The conductor has a first top surface and a second top surface, and the first top surface is closer to the dielectric layer than the second top surface. The capping layer is located in the concave portion and covers the conductor.
    Type: Grant
    Filed: July 21, 2021
    Date of Patent: August 29, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Chih-Wei Huang, Hsu-Cheng Fan, En-Jui Li
  • Patent number: 11742207
    Abstract: A semiconductor device includes substrate, a first gate structure, a second gate structure, and an epitaxy layer. The first gate structure and the second gate structure are over the substrate, in which the first gate structure and the second gate structure each comprises a shielding electrode, a gate electrode over the shielding electrode, and a first gate dielectric layer vertically separating the shielding electrode from the gate electrode. The epitaxy layer is over the substrate and cups an underside of the first gate structure and the second gate structure, in which the epitaxy layer comprises a doped region laterally between the first gate dielectric layer of the first gate structure and the first gate dielectric layer of the second gate structure, a dopant concentration of the doped region being non-uniform along a lateral direction.
    Type: Grant
    Filed: February 7, 2022
    Date of Patent: August 29, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITED
    Inventor: Zheng-Long Chen
  • Patent number: 11735484
    Abstract: Semiconductor device and the manufacturing method thereof are disclosed. An exemplary semiconductor device comprises a first semiconductor stack and a second semiconductor stack over a substrate, wherein each of the first and second semiconductor stacks includes semiconductor layers stacked up and separated from each other; a dummy spacer between the first and second semiconductor stacks, wherein the dummy spacer contacts a first sidewall of each semiconductor layer of the first and second semiconductor stacks; and a gate structure wrapping a second sidewall, a top surface, and a bottom surface of each semiconductor layer of the first and second semiconductor stacks.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Yu Hsu, Jian-Hao Chen, Chia-Wei Chen, Shan-Mei Liao, Hui-Chi Chen, Cheng Hong Yang, Shih-Hao Lin, Kuo-Feng Yu, Feng-Cheng Yang, Yen-Ming Chen
  • Patent number: 11737260
    Abstract: A memory device includes a substrate, an active region, a first gate structure, a second gate structure, a first word line, and a second word line. The active region protrudes from a top surface of the substrate. The active region has at least one ring structure, in which when viewed from above, the ring structure has a first linear portion, a second linear portion, a first curved portion, and a second curved portion, the first curved portion connects first sides of the first and second linear portions, and the second curved portion connects second sides of the first and second linear portions. The first gate structure and the second gate structure are over the substrate and cross the active region. The first word line and the second word line are electrically connected to the first gate structure and the second gate structure, respectively.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Wen Su, Yu-Kuan Lin, Lien-Jung Hung, Ping-Wei Wang, Chia-En Huang
  • Patent number: 11735591
    Abstract: A method includes providing a structure having two fins extending from a substrate; an isolation structure isolating bottom portions of the fins; source/drain (S/D) features over each of the fins; a dielectric fin oriented lengthwise parallel to the fins and disposed between the two fins and over the isolation structure; a dummy gate stack over the isolation structure, the fins, and the dielectric fin; and one or more dielectric layers over sidewalls of the dummy gate stack. The method further includes removing the dummy gate stack to result in a gate trench within the one or more dielectric layers, wherein the dielectric fin is exposed in the gate trench; trimming the dielectric fin to reduce a width of the dielectric fin; and after the trimming, forming a high-k metal gate in the gate trench.
    Type: Grant
    Filed: March 9, 2021
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuan-Ting Pan, Chih-Hao Wang, Shi Ning Ju, Jia-Chuan You, Kuo-Cheng Chiang
  • Patent number: 11735485
    Abstract: A method includes forming a deep well region of a first conductivity type in a substrate, implanting a portion of the deep well region to form a first gate, and implanting the deep well region to form a well region. The well region and the first gate are of a second conductivity type opposite the first conductivity type. An implantation is performed to form a channel region of the first conductivity type over the first gate. A portion of the deep well region overlying the channel region is implanted to form a second gate of the second conductivity type. A source/drain implantation is performed to form a source region and a drain region of the first conductivity type on opposite sides of the second gate. The source and drain regions are connected to the channel region, and overlap the channel region and the first gate.
    Type: Grant
    Filed: June 11, 2021
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Mingo Liu
  • Patent number: 11728402
    Abstract: The present disclosure provides an integrated circuit (IC) device, including: a semiconductor substrate having a top surface; a first source/drain feature and a second source/drain feature disposed on the semiconductor substrate; and a plurality of semiconductor layers including a first semiconductor layer and a second semiconductor layer. Each of the first semiconductor layer and the second semiconductor layer extends longitudinally in a first direction and connects the first source/drain feature and the second source/drain feature. The first semiconductor layer is stacked over the second semiconductor layer in a second direction perpendicular to the first direction. A length of the first semiconductor layer along the first direction is less than a length of the second semiconductor layer along the first direction. The IC device further includes a gate structure engaging center portions of the first semiconductor layer and the second semiconductor layer.
    Type: Grant
    Filed: February 1, 2022
    Date of Patent: August 15, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Jhon Jhy Liaw