Patents Examined by Joseph Perrin
  • Patent number: 6620210
    Abstract: Methods of using ozone have been developed which sterilize instruments and medical wastes, oxidize organics found in wastewater, clean laundry, break down contaminants in soil into a form more readily digested by microbes, kill microorganisms present in food products, and destroy toxins present in food products. The preferred methods for killing microorganisms and destroying toxins use pressurized, humidified, and concentrated ozone produced by an electrochemical cell.
    Type: Grant
    Filed: May 14, 2002
    Date of Patent: September 16, 2003
    Assignee: Lynntech, Inc.
    Inventors: Oliver J. Murphy, G. Duncan Hitchens
  • Patent number: 6615852
    Abstract: A machine for cleaning a die by using electrolysis and ultrasonic vibration which has in combination a degreasing processing system, an electrolytic-cleaning system with an electrolyte circulator system, and a rinse system. The die, in a container, is dipped into an electrolytic liquid tank with an ultrasonic vibrator, and it is electrolyzed in a cleaning medium for large sized dies and die components.
    Type: Grant
    Filed: June 30, 2000
    Date of Patent: September 9, 2003
    Assignee: Aqua Sonic Service Co., Ltd.
    Inventor: Shoji Kitahara
  • Patent number: 6616772
    Abstract: A method for preparing a semiconductor wafer surface is provided which includes providing a plurality of source inlets and a plurality of source outlets and applying isopropyl alcohol (IPA) vapor gas through the plurality of source inlets to the wafer surface when the plurality of source inlets and outlets are in close proximity to the wafer surface. The method also includes applying a fluid through the plurality of source inlets to the wafer surface while applying the IPA vapor gas, and removing the applied IPA vapor gas and fluid from the wafer surface through the plurality of source outlets.
    Type: Grant
    Filed: December 3, 2002
    Date of Patent: September 9, 2003
    Assignee: Lam Research Corporation
    Inventors: John Martin de Larios, Mike Ravkin, Glen Travis, Jim Keller, Wilbur Krusell
  • Patent number: 6615853
    Abstract: A fine filter assembly for a dishwasher includes a filter body, a filter screen coupled to the body; and a pressure relief tube. The pressure relief tube includes a substantially vertical portion having an open top for regulating pressure conditions in the filter body, thereby forming a standpipe that regulates pressure in the filter body. A column of fluid in the relief tube balances the operating pressure in the fine filter assembly. Pressure may be regulated in the fine filter assembly up to a maximum pressure determined by the height of the vertical portion of the tube.
    Type: Grant
    Filed: January 3, 2001
    Date of Patent: September 9, 2003
    Assignee: General Electric Company
    Inventors: Arjan Johannes Hegeman, Gregory Alan Meyer
  • Patent number: 6612316
    Abstract: A wet processing device of this invention is comprised of a chemical processing tank to store chemicals for processing the surface of the wafer, a wafer conveyor device to carry the wafer in and out of the interior of the chemical processing tank, and a sensor to determine the amount of air bubbles occurring within the chemical when present within the chemical processing tank and issue a first and a second control signal, and a wash tank to store water for washing the wafer carried out from the chemical processing tank by the wafer conveyor. The rising speed of the wafer conveyor device pulled the wafer up from the chemical processing tank is controlled in response to the first control signal, and the wash tank water fill quantity for supplying water to the wash tank is controlled in response to the second control signal.
    Type: Grant
    Filed: February 23, 2001
    Date of Patent: September 2, 2003
    Assignee: NEC Electronics Corporation
    Inventor: Hidehiko Kawaguchi
  • Patent number: 6602349
    Abstract: A dry process for the cleaning of precision surfaces such as of semiconductor wafers, by using process materials such as carbon dioxide and useful additives such as cosolvents and surfactants, where the process materials are applied exclusively in gaseous and supercritical states. Soak and agitation steps are applied to the wafer, including a rapid decompression of the process chamber after a soak period at higher supercritical pressure, to mechanically weaken break up the polymers and other materials sought to be removed, combined with a supercritical fluid flush to carry away the loose debris.
    Type: Grant
    Filed: May 18, 2001
    Date of Patent: August 5, 2003
    Assignee: S.C. Fluids, Inc.
    Inventors: Mohan Chandra, David J. Mount, Michael A. Costantini, Heiko D. Moritz, Ijaz Jafri, Jim Boyd, Rick M. Heathwaite
  • Patent number: 6601593
    Abstract: A household dishwasher, includes a dishwashing compartment, a circulating pump for delivering liquid to the dishwashing compartment, a flow heater having an inflow connection fluidically connected to the circulating pump and at least two outlet connections, spray devices disposed in the dishwashing compartment and fluidically connected to outlet connections for supplying the liquid to each of the spray devices, and a changeover device for selectively opening and closing the spray devices. The spray devices subject items disposed in the dishwashing compartment and to be cleaned to an action of a liquid delivered by the circulating pump. The changeover device is disposed in a non-restricting location at the flow heater upstream of the outlet connections with respect to a liquid flow direction and opens and/or closes one of the outlet connections or a number of outlet connections or all the outlet connections are alternately one after the other and/or on a permanent basis. A method is also provided.
    Type: Grant
    Filed: June 11, 2001
    Date of Patent: August 5, 2003
    Assignee: BSH Bosch und Siemens Hausgeräte GmbH
    Inventors: Ulrich Deiss, Helmut Jerg, Bernd Schessl, Michael Rosenbauer
  • Patent number: 6601596
    Abstract: An apparatus for cleaning a semiconductor wafer is disclosed to substantially improve the efficiency of the cleaning process, and reduce the quantity of cleaning solvent used. The apparatus includes a rotating table for supporting the wafer, a rotation device to rotate the rotation table, a movable or stationary curved-slab for scrubbing the surface of the wafer efficiently, a cleaning nozzle for applying a cleaning solvent or stripper on the surface of the wafer, and a resistance wall for preventing the cleaning solvent spun out from the wafer to pollute the cleaning room.
    Type: Grant
    Filed: May 2, 2001
    Date of Patent: August 5, 2003
    Assignee: Macronix International Co., Ltd.
    Inventors: Ming-Chung Liang, Shin-Yi Tsai
  • Patent number: 6588436
    Abstract: A liquid waste disposal and canister flushing system for a medical canister including a press-fit canister lid, features a cabinet with an opening and a sink with a drain positioned therein. A mounting bracket is affixed to the cabinet and includes a shaft connected to the canister bracket for rotating the canister and a shaft connected to the lid removal bracket for removing the canister lid from the canister. The canister is secured within the canister bracket and is rotated from an initial position to a drainage position. The canister lid is positioned on the removal bracket and is rotated from an initial position to a removal position. Once the canister is rotated into the drainage position, the pressurized and diluted cleaning solution source is activated to flush the contents out of the canister and into the sink and drain. After the canister is sanitized it may be removed from the system and reused.
    Type: Grant
    Filed: May 30, 2001
    Date of Patent: July 8, 2003
    Assignee: Dornoch Medical Systems, Inc.
    Inventors: James L. Dunn, Lawrence E. Guerra
  • Patent number: 6578587
    Abstract: A dish washing machine according to the present invention has vertically divided upper and lower doors 16 and 17 for covering an opening of a washing chamber. The upper door 16 is opened through its upward pivotal movement about its shafts 20. The lower door 17 is opened through its downward pivotal movement about its shafts 22. The upper door 16 is fully opened through its pivotal movement substantially through 180 degrees. The lower door 17 is opened to a substantially horizontal position. And when the lower door 17 is in this opened state, a basket 4 contained in the washing chamber 3 can be pulled out onto the lower door 17.
    Type: Grant
    Filed: January 29, 2001
    Date of Patent: June 17, 2003
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Tomohiko Matsuno, Tetsuo Harada, Yasuhisa Fukui
  • Patent number: 6575181
    Abstract: A probe wash vessel characterized as having a cylindrical-shaped, outer test tube with at least two vertically aligned faucets, and an inner cannula positioned within the test tube, wherein the inner cannula is characterized by a top funnel opening attached to a stem, the stem characterized as having two arm extensions are attached to the two faucets, wherein washing fluid influent and effluent through the arm extensions washes a probe inserted through the top funnel into the stem.
    Type: Grant
    Filed: October 24, 2000
    Date of Patent: June 10, 2003
    Assignee: Merck & Co., Inc.
    Inventor: Gregory A. Wimmer
  • Patent number: 6576065
    Abstract: The invention relates to an installation for treating wafers made of materials serving as microelectronics substrates including a tank for containing a treatment bath, a wafer support device capable of receiving at least one wafer of a first size, and an element for grasping and placing each wafer of the first size in the bath and for removing it therefrom. The installation further includes a support for receiving at least one wafer of a second size that is smaller than the first size, the shape of the support allowing it to be grasped by the grasping element and received by the wafer support device in the tank.
    Type: Grant
    Filed: September 8, 2000
    Date of Patent: June 10, 2003
    Assignee: S.O.I.Tech Silicon On Insulator Technologies
    Inventor: Jean-Michel Lamure
  • Patent number: 6569259
    Abstract: A disposal method of a waste optical disc is useful when a substrate material is collected from the disc. A space is created between a recording layer and a reflective layer between both of which there exists the smallest mutual adhesion by cutting a surface of a protective layer side of an optical disc. Then, the reflective layer and the protective layer are peeled off and removed from the optical disc by introducing air into the space therebetween. Then, the recorded layer remaining on a substrate layer can be removed by cutting.
    Type: Grant
    Filed: November 29, 2000
    Date of Patent: May 27, 2003
    Assignee: Taiyo Yuden Co., Ltd.
    Inventor: Keiichi Kagawa
  • Patent number: 6568409
    Abstract: An ultrasonic cleaning apparatus (10) and method for use with a cleaning solution for cleaning soiled items, such as automobile parts. The cleaning apparatus includes a cleaning tank (11) for containing a quantity of the cleaning solution therein, with the cleaning tank having a bottom and a top. An ultrasonic generator (17, 18, 122) is provided for ultrasonically exciting the cleaning solution contained within the tank. The tank includes an upper drain (32, 33 or weir 200) and a lower drain (21). A coalescing filter (14) is used for filtering the cleaning solution. A sump tank (12) provides an extra quantity of the cleaning solution for at times overfilling the tank to draw off light ends of oils and greases from the top of the tank. At other times, the lower drain is used to draw off heavy ends of greases and oils from the bottom of the tank.
    Type: Grant
    Filed: November 27, 2000
    Date of Patent: May 27, 2003
    Assignee: MCF Systems Atlanta, Inc.
    Inventor: Steven W. Fleck
  • Patent number: 6568407
    Abstract: An automatic production system includes an automatic washing device usable to wash off swarf left on a workpiece by an NC machine tool. The automatic washing device is used before measuring a portion of a workpiece using a three dimensional measuring device controlled by a measuring part program controlling the three dimensional measuring device. When automating an operation of the washing device, a washing program is produced based on the a measuring part program controlling the three dimensional measuring device to be able to efficiently wash a minimal area of the work piece encompassing the portion of the workpiece to be measured.
    Type: Grant
    Filed: May 15, 2000
    Date of Patent: May 27, 2003
    Assignees: Mitutoyo Corporation, Mori Seiki Co., Ltd., Okuma Corporation
    Inventors: Sadayuki Matsumiya, Masayoshi Uneme, Yasushi Fukaya, Kazuo Yamazaki
  • Patent number: 6568410
    Abstract: A machine for the treatment of products made of plastic material of the recyclable type comprises a drum rotating about one of its own axis, at least one inlet for the introduction of the products to the inside of the drum and means for feeding a treatment fluid to the inside of the drum, the latter comprising one or more sections having a perforated side wall and one or mode sections having a discontinuous side wall.
    Type: Grant
    Filed: December 29, 2000
    Date of Patent: May 27, 2003
    Assignee: Amut S.P.A.
    Inventors: Piergiorgio Teruggi, Enrico Sereni
  • Patent number: 6568412
    Abstract: A rotor (1) includes a pair of flanges (4, 5), four fixed holding bars (30) fixed to the flanges (4, 5), and two movable holding bars (60) supported for turning on the flanges (4, 5). The holding bars (30, 60) are provided in their surfaces with positioning grooves (32a) for positioning and holding wafers (W). The holding bars (30, 60) are provided with drain grooves (32b) connected to the positioning grooves (32a). The drain grooves (32b) prevent a processing liquid from staying in the positioning grooves (32a).
    Type: Grant
    Filed: February 28, 2001
    Date of Patent: May 27, 2003
    Assignee: Tokyo Electron Limited
    Inventor: Koji Egashira
  • Patent number: 6565670
    Abstract: A cleaning method to remove ink from the surface of a semiconductor wafer includes securing the wafer to a spin chuck, submerging the spinning wafer into an N-Methyl-Pyrolidone (NMP) solution to dissolve the ink on the surface of the semiconductor wafer, spraying a cleaning solution onto the surface of the spinning wafer to clean the ink off the surface of the wafer, and blowing gas onto the surface of the spinning wafer so as to remove residue from the surface of the wafer.
    Type: Grant
    Filed: January 3, 2002
    Date of Patent: May 20, 2003
    Assignee: United Microelectronics Corp.
    Inventors: Hsiu-Chu Hsieh, Jason Horng, Jason Hsia
  • Patent number: 6564595
    Abstract: An improved pump for washing machines provides resistance to roping of filamentary materials through the use of a single vane impeller. A combination of high clearance and elastomeric vane and asymmetry of the impeller serve to prevent or reduce clogging caused by filamentary materials.
    Type: Grant
    Filed: February 1, 2001
    Date of Patent: May 20, 2003
    Assignee: Ark-Les U.S. Controls Corporation
    Inventors: Richard A. Junk, David M. Howie
  • Patent number: 6562145
    Abstract: A cleaning unit (A) includes a movable cart (20) which carries a cleaning system for cleaning baked-on residues from walls (10) of a sterilizer chamber (12). Alkaline and acid cleaning solutions (180, 182), for removing organic and inorganic residues, respectively, from the chamber, are stored in a multi-compartment container carried by the cart and having two storage compartments (52, 54). The alkaline and acid solutions are sequentially sprayed over the chamber walls and returned to their respective compartments. After cleaning is complete, a wall (200) which separates the two compartments is punctured. The two cleaning fluids are thereby mixed together to form a neutral or near neutral solution which is disposable in a sanitary sewer system without further treatment.
    Type: Grant
    Filed: January 5, 2002
    Date of Patent: May 13, 2003
    Assignee: Steris Inc.
    Inventors: Michael A. Duckett, John C. Bliley, Gerald J. Kielar, Sayed Sadiq Shah