Patents Examined by Kiet T. Nguyen
  • Patent number: 10685809
    Abstract: A charged particle beam lithography apparatus, includes a plurality of multiple-beam sets, each of which including a plurality of irradiation sources each generating an independent charged particle beam, a plurality of objective deflectors, each arranged for a corresponding charged particle beam, and configured to deflect the corresponding charged particle beam to a desired position on a substrate, and a plurality of electrostatic or electromagnetic lens fields each to focus the corresponding charged particle beam on the target object; a plurality of common deflection amplifiers, arranged for each multiple-beam set, and each of the plurality of common deflection amplifiers being configured to commonly control the plurality of objective deflectors arranged in a same multiple-beam set; a plurality of individual ON/OFF mechanisms configured to individually turn ON/OFF a beam irradiated from each irradiation source; and one or more multiple-beam clusters including the plurality of multiple-beam sets.
    Type: Grant
    Filed: December 21, 2018
    Date of Patent: June 16, 2020
    Assignee: NuFlare Technology, Inc.
    Inventor: Munehiro Ogasawara
  • Patent number: 10684009
    Abstract: An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: June 16, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ming-Hsun Tsai, Ping-Cheng Li, Yen-Hsun Chen
  • Patent number: 10682432
    Abstract: A modular light assembly for an ultraviolet (UV) treatment device includes a UV light reflective surface. First and second sidewalls are coupled to respective sides of the reflective surface. Electrical input contacts are formed on each of the first and second sidewalls for receiving electrical power, and electrical output contacts are formed on each of the first and second sidewalls for delivering electrical power. A plurality of UV lamps are included, each of which have a first end and a second end. The first end of each of the UV lamps is coupled to a respective one of the electrical output contacts on the first sidewall, and the second end is coupled to a respective one of the electrical output contacts on the second sidewall.
    Type: Grant
    Filed: August 30, 2019
    Date of Patent: June 16, 2020
    Assignee: VIOGUARD INC.
    Inventors: Roger R. Pangan, Jr., Steven Michael Swedenburg
  • Patent number: 10658166
    Abstract: A method of mass or mobility spectrometry comprising obtaining one or more sample spectra for a sample. The one or more sample spectra are subjected to pre-processing and then multivariate and/or library based analysis so as to classify the sample. Before the sample spectra are acquired, a library of background spectra, each background spectrum relating to a certain class of sample material, is constructed. The background spectra in this library are used to subtract the background from a sample spectrum during the pre-processing of this sample spectrum.
    Type: Grant
    Filed: March 6, 2017
    Date of Patent: May 19, 2020
    Assignee: Micromass UK Limited
    Inventors: Keith George Richardson, Steven Derek Pringle
  • Patent number: 10658154
    Abstract: A system for performing diffraction analysis, includes a mill for removing a surface portion of a sample, and an analyzer for performing diffraction analysis on the milled sample.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: May 19, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Marc Adam Bergendahl, James John Demarest, Christopher J. Penny, Roger Allen Quon, Christopher Joseph Waskiewicz
  • Patent number: 10643820
    Abstract: A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: May 5, 2020
    Assignee: HERMES MICROVISION INC.
    Inventors: Weiming Ren, Shuai Li, Xuedong Liu, Zhongwei Chen
  • Patent number: 10638594
    Abstract: A compact, small foot print, light source based on electron beam acceleration for insertion devices in EUV range metrology and actinic mask inspection using coherent scattering methods includes spiral storage rings providing plane straight sections. A magnet structure generates emittance for brilliance and coherent light content. A booster feeds the storage ring by top-up injection and keeps electron beam intensity stable. A booster level below the storage ring receives the electron beam from a linear accelerator in a central booster area. The source fits into laboratories or maintenance areas. Injection, RF-acceleration, beam manipulating devices and large diagnostics systems are required once. Higher average currents stored in the spiral enhance central cone power. Bunches are limited by ion trapping and a gap clears ions. The current is increased in the spiral. Gain in central cone power increases 5 fold, assuming a gap size of half single storage ring circumference.
    Type: Grant
    Filed: August 16, 2017
    Date of Patent: April 28, 2020
    Assignee: Paul Scherrer Institut
    Inventors: Leonid Rivkin, Andreas Streun, Albin Wrulich
  • Patent number: 10636644
    Abstract: Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry (SIMS) are disclosed. In an example, a secondary ion mass spectrometry (SIMS) system includes a sample stage. A primary ion beam is directed to the sample stage. An extraction lens is directed at the sample stage. The extraction lens is configured to provide a low extraction field for secondary ions emitted from a sample on the sample stage. A magnetic sector spectrograph is coupled to the extraction lens along an optical path of the SIMS system. The magnetic sector spectrograph includes an electrostatic analyzer (ESA) coupled to a magnetic sector analyzer (MSA).
    Type: Grant
    Filed: August 30, 2019
    Date of Patent: April 28, 2020
    Assignee: NOVA MEASURING INSTRUMENTS INC.
    Inventors: David A. Reed, Bruno W. Schueler, Bruce H. Newcome, Rodney Smedt, Chris Bevis
  • Patent number: 10635002
    Abstract: A reflective EUV optic such as a collector mirror configured as an array of facets that are spaced apart to form respective gaps between adjacent facets. The gaps are used as inlets for gas flow across one of the facets such that flow is introduced parallel to the optic surface. The facets can be made with offsets such that loss of reflective area of the EUV optic can be minimized. The gas facilitates removal of target material from the surface of the facets.
    Type: Grant
    Filed: December 9, 2016
    Date of Patent: April 28, 2020
    Assignee: ASML NETHERLANDS B.V.
    Inventors: David C. Brandt, Alexander I. Ershov, Igor V. Fomenkov
  • Patent number: 10636616
    Abstract: An aperture array alignment method according to the present embodiment includes switching on and off of each of multiple beams using a blanking aperture array plate, and detecting beam current on a stage using a detector. At least one of the multiple beams is turned on to scan the blanking aperture array plate, and a current map is generated on the basis of a result of detection of the beam current made by the detector and a position of the blanking aperture array plate. An on-beam is switched from one to another to generate the current map for each of the on-beams. The position of the blanking aperture array plate is adjusted on the basis of the current maps for the on-beams.
    Type: Grant
    Filed: December 31, 2018
    Date of Patent: April 28, 2020
    Assignee: NuFlare Technology, Inc.
    Inventor: Osamu Iizuka
  • Patent number: 10636615
    Abstract: A composite beam apparatus includes an electron beam column for irradiating an electron beam onto a sample, a focused ion beam column for irradiating a focused ion beam onto the sample to form a cross section, and a neutral particle beam column having an acceleration voltage set lower than that of the focused ion beam column for irradiating a neutral particle beam onto the sample to perform finish processing of the cross section. The electron beam column, the focused ion beam column, and the neutral particle beam column are arranged such that the beams of the columns cross each other at an irradiation point. A controller controls the electron beam column to irradiate and scan the electron beam on the sample during cross section processing by the focused ion beam column and during finish processing by the neutral particle beam column.
    Type: Grant
    Filed: February 8, 2019
    Date of Patent: April 28, 2020
    Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
    Inventor: Tatsuya Asahata
  • Patent number: 10636641
    Abstract: A mass spectrometer includes an ion source configured to generate reagent ions; a drift tube configured to cause sample molecules to react with the reagent ions to generate sample ions, the drift tube comprising two sets of electrodes which are identical in structure and symmetrically distributed in a direction perpendicular to a direction of ion drift, each set of electrodes comprising a plurality of curved cell electrodes which are distributed in a same plane and arranged in the direction of ion drift so that the sample ions are generated and drifted within a region between the two sets of electrodes and focused in the direction perpendicular to the direction of ion drift; a power supply device configured to apply, to each of the cell electrodes, a DC voltage changing in the direction of ion drift; and, a mass analyzer configured to perform mass analysis for the sample ions.
    Type: Grant
    Filed: June 27, 2018
    Date of Patent: April 28, 2020
    Assignee: SHIMADZU CORPORATION
    Inventors: Xiaoqiang Zhang, Wenjian Sun
  • Patent number: 10627331
    Abstract: Techniques are disclosed relating to fluorescence-based flow cytometry. A flow cytometer may include a partially-reflective surface configured to reflect a first portion of fluorescent emissions from a sample to a first optical sensor and direct a second, greater portion of fluorescent emissions from the sample to a second optical sensor and a controller configured to determine a value representing the intensity of the fluorescent emissions based on a first measurement taken by the first optical sensor, a second measurement taken by the second optical sensor, or both. A flow cytometer may include a baseplate with a first side and a second, opposing side with a flow cell, a laser, and a reflective surface disposed above the first side and an optical sensor and isolating material disposed below the second side. The reflective surface receives fluorescent emissions and reflects at least a portion through the baseplate to the optical sensor.
    Type: Grant
    Filed: December 27, 2018
    Date of Patent: April 21, 2020
    Assignee: ChandlerTec Inc.
    Inventor: Van S. Chandler
  • Patent number: 10625098
    Abstract: A particle irradiation system includes three or more scanning magnets that scan a beam in a vertical direction (first direction) or a horizontal direction (second direction) perpendicular to each other. The three or more scanning magnets are configured such that the scanning magnets and the scanning magnets for scanning in the same direction between the vertical direction or the horizontal direction, are disposed in series on a progressing direction axis of a beam, and a volume of a magnetic field feeding region decreases as the scanning magnet is installed at a position farther from an isocenter on the progressing direction axis.
    Type: Grant
    Filed: April 24, 2019
    Date of Patent: April 21, 2020
    Assignee: Hitachi, Ltd.
    Inventors: Yuto Nakashima, Takamichi Aoki
  • Patent number: 10627378
    Abstract: Disclosed herein are volatile organic compound monitoring or detection systems and methods, including systems having both a reference air intake component and at least one air sample intake line. In certain embodiments, the systems provide for continuously repeating cycles of testing and calibration/recalibration. Further implementations relate to systems having two or more intake lines that can be positioned to take air samples at distances ranging from 5 feet to 200 feet or more apart.
    Type: Grant
    Filed: October 1, 2018
    Date of Patent: April 21, 2020
    Assignee: GreenAire Solutions, LLC
    Inventors: John Konieczka, Ken Kubitz, Timothy Austin
  • Patent number: 10629425
    Abstract: A time-of-flight mass spectrometer is disclosed comprising ion optics that map an array of ions at an ion source array (71) to a corresponding array of positions on a position sensitive ion detector (79). The ion optics include at least one gridless ion mirror (76) for reflecting ions, which may compensate for various aberrations and allows the spectrometer to have relatively high mass and spatial resolutions.
    Type: Grant
    Filed: November 16, 2016
    Date of Patent: April 21, 2020
    Assignees: MICROMASS UK LIMITED, LECO CORPORATION
    Inventors: John Brian Hoyes, Anatoly Verenchikov, Mikhail Yavor, Keith Richardson, Jason Wildgoose
  • Patent number: 10622199
    Abstract: The invention relates to methods and devices for analysis of samples using laser ablation imaging mass cytometry and mass spectrometry. The invention provides methods and devices in which individual ablation plumes are distinctively captured and rapidly transferred to the ionization system, followed by analysis by mass spectrometry. A transfer conduit can be used to convey ablation plumes to an ionization system. The transfer conduit can include an asymmetric cone. The transfer conduit can be tapered. A flow sacrificing system can be adapted to divert a part of the sheath flow out a sacrificial outlet while the core of the sheath flow containing ablation plumes enters the ionization system.
    Type: Grant
    Filed: August 2, 2017
    Date of Patent: April 14, 2020
    Assignee: FLUIDIGM CANADA INC.
    Inventor: Alexander V. Loboda
  • Patent number: 10622200
    Abstract: Certain configurations of ionization sources are described. In some examples, an ionization source comprises an ionization block, an electron source, an electron collector, an ion repeller and at least one electrode configured to provide an electric field when a voltage is provided to the at least one electrode. Systems and methods using the ionization source are also described.
    Type: Grant
    Filed: May 18, 2018
    Date of Patent: April 14, 2020
    Assignee: PerkinElmer Health Sciences Canada, Inc.
    Inventors: Anna Kornilova, Gholamreza Javahery, Lisa Cousins
  • Patent number: 10622201
    Abstract: A method for preparing thin layers from liquid samples is disclosed. Such thin layers can be useful when analyzing samples with probes whose penetration length in these samples is short The method consists of squeezing a certain amount of a liquid sample between two approximately flat and parallel surfaces separated by a small distance then cooling down the liquid sample until it freezes in a way that the frozen sample adheres only to one of these two flat surfaces. Removing the non-adhered flat surface leaves the frozen sample layer with the thickness approximately equal to the initial distance between the two parallel surfaces.
    Type: Grant
    Filed: July 25, 2017
    Date of Patent: April 14, 2020
    Assignee: SYNAPTIVE MEDICAL (BARBADOS) INC.
    Inventor: Kresimir Franjic
  • Patent number: 10613054
    Abstract: An analytical device for analyzing ions is provided comprising a separator 2 for separating ions according to a physico-chemical property and an interface 3 comprising one or more ion guides. A quadrupole rod set mass filter 4 is arranged downstream of the interface 3. A control system is arranged and adapted: (i) to transmit a first group of ions which emerges from the separator 2 through the interface 3 with a first transit time t1; and (ii) to transmit a second group of ions which subsequently emerges from the separator 2 through the interface 3 with a second different transit time t2.
    Type: Grant
    Filed: October 15, 2018
    Date of Patent: April 7, 2020
    Assignee: Micromass UK Limited
    Inventors: Kevin Giles, Steven Derek Pringle, Jason Lee Wildgoose