Patents Examined by Kiet T. Nguyen
  • Patent number: 11141608
    Abstract: A proton beam imaging system includes: a proton beam generator to generate a proton beam; a proton beam modulator through which the proton beam passes positioned between the proton beam generator and an image target; and a proton beam detector positioned to detect the proton beam existing the image target; wherein the proton beam modulator comprises: a rotating wheel having an axis of rotation positioned so that the proton beam passes through the axis of rotation and the axis of rotation is perpendicular to the proton beam; a first modulating portion comprising a first material portion and a second material portion through which a proton beam passes; and a second modulating portion comprising a third material portion and a fourth material portion through with the proton beam passes; wherein the first and second wedges are positioned opposite each other on the rotating wheel.
    Type: Grant
    Filed: April 6, 2018
    Date of Patent: October 12, 2021
    Inventors: Matthew L. Cavuto, Neerja Aggarwal, Melissa Li, Nathaniel H. Rodman
  • Patent number: 11145429
    Abstract: An extreme ultraviolet chamber apparatus includes: a chamber; an EUV condensing mirror arranged in the chamber; a first nozzle arranged in an outer peripheral portion of the EUV condensing mirror and configured to feed a gas in a first direction along a reflective surface of the EUV condensing mirror; a second nozzle arranged in the outer peripheral portion of the EUV condensing mirror and configured to feed a gas in a second direction away from the EUV condensing mirror; and an exhaust port arranged in the chamber.
    Type: Grant
    Filed: March 17, 2020
    Date of Patent: October 12, 2021
    Assignee: Gigaphoton Inc.
    Inventors: Atsushi Ueda, Gota Niimi, Georg Soumagne
  • Patent number: 11143606
    Abstract: To enable evaluation of a shape of a fine particle and a fine particle type, a substrate is set as a substrate on which an isolated fine particle to be measured and an isolated standard fine particle in the vicinity of the isolated fine particle to be measured are disposed, and a scanning electron microscope body including a detector configured to detect secondary charged particles obtained by scanning a surface of the substrate with an electron beam probe, and a computer that processes a detection signal and generates an image of the isolated fine particle to be measured and the isolated standard fine particle are provided. The computer corrects a shape of the isolated fine particle to be measured by using a measurement result of the isolated standard fine particle disposed in the vicinity of the isolated fine particle to be measured.
    Type: Grant
    Filed: February 1, 2018
    Date of Patent: October 12, 2021
    Inventors: Tomihiro Hashizume, Masatoshi Yasutake, Tsunenori Nomaguchi, Takafumi Miwa
  • Patent number: 11143619
    Abstract: A gas ionization chamber, includes a first electrode, a fence electrode disposed below the first electrode, a second electrode disposed below the fence electrode, a first dielectric layer disposed between the first electrode and the fence electrode, and a second dielectric layer disposed between the fence electrode and the second electrode. The first and second electrodes, and the first and second dielectric layers include a plurality of aligned holes forming channels configured to permit gas flow between the first electrode to the second electrode through an opening in the fence electrode, the plurality of aligned holes being arranged in a pattern having a central region with a first set of aligned holes and a peripheral region having a second set of aligned holes, and wherein a diameter of at least one hole of the first set of aligned holes is less than or equal to about 0.5 millimeters.
    Type: Grant
    Filed: April 12, 2021
    Date of Patent: October 12, 2021
    Assignee: Nanova Environmental, Inc.
    Inventors: Biyan Chen, Haisheng Zheng, Jun Yin, Qiao Zhang
  • Patent number: 11133149
    Abstract: A focused ion beam apparatus (100) includes: a focused ion beam lens column (20); a sample table (51); a sample stage (50); a memory (6M) configured to store in advance three-dimensional data on the sample table and an irradiation axis of the focused ion beam, the three-dimensional data being associated with stage coordinates of the sample stage; a display (7); and a display controller (6A) configured to cause the display to display a virtual positional relationship between the sample table (51v) and the irradiation axis (20Av) of the focused ion beam, which is exhibited when the sample stage is operated to move the sample table to a predetermined position, based on the three-dimensional data on the sample table and the irradiation axis of the focused ion beam.
    Type: Grant
    Filed: September 22, 2020
    Date of Patent: September 28, 2021
    Inventors: Toshihiro Mochizuki, Haruyuki Ishii, Atsushi Uemoto
  • Patent number: 11133167
    Abstract: In one aspect, a curtain and orifice plate assembly for use in a mass spectrometry system is disclosed, which comprises a curtain plate including a first printed circuit board (PCB) having an aperture configured for receiving ions generated by an ion source of the mass spectrometry system and at least one gas-flow channel, where said first PCB has at least one metal coating disposed on at least a portion thereof. The assembly further includes an orifice plate coupled to the curtain plate, which includes a PCB providing an orifice that is substantially aligned with the aperture of the curtain plate so that the ions entering the assembly via said aperture of the curtain plate can exit the assembly via said orifice of the orifice plate, where the second PCB has at least one metal coating disposed on at least a portion thereof.
    Type: Grant
    Filed: March 1, 2019
    Date of Patent: September 28, 2021
    Assignee: DH Technologies Development Pte. Ltd.
    Inventor: Robert Haufler
  • Patent number: 11133170
    Abstract: A solution-cathode glow discharge mass spectrometry (SCGD-MS) apparatus comprises a SCGD source and a mass spectrometer. The SCGD source may comprise conductive rods, a power source, and a capillary. A method for ionizing an analyte comprises flowing an electrically conductive liquid onto a conductive rod, applying an electric potential to a second conductive rod such that a plasma discharge forms between the first conductive rod and the electrically conductive liquid to produce ions, and separating the ions in a mass spectrometer. The analyte may be a polypeptide that may be contacted with trypsin. The analyte may be a solid, liquid, gas, chemical complex, or ion in solution. The method may comprise sequencing the polypeptide.
    Type: Grant
    Filed: August 19, 2020
    Date of Patent: September 28, 2021
    Assignees: Indiana University Research and Technology Corporation, Kent State University
    Inventors: Jacob T. Shelley, Kelsey L. Williams, Gary M. Hieftje, Andrew J. Schwartz
  • Patent number: 11133163
    Abstract: A system and method are provided for loading a sample into an analytical instrument using acoustic droplet ejection (“ADE”) in combination with a continuous flow sampling probe. An acoustic droplet ejector is used to eject small droplets of a fluid sample containing an analyte into the sampling tip of a continuous flow sampling probe, where the acoustically ejected droplet combines with a continuous, circulating flow stream of solvent within the flow probe. Fluid circulation within the probe transports the sample through a sample transport capillary to an outlet that directs the analyte away from the probe to an analytical instrument, e.g., a device that detects the presence, concentration quantity, and/or identity of the analyte. When the analytical instrument is a mass spectrometer or other type of device requiring the analyte to be in ionized form, the exiting droplets pass through an ionization region, e.g.
    Type: Grant
    Filed: August 4, 2020
    Date of Patent: September 28, 2021
    Inventors: Sammy Datwani, Don W. Arnold, Lucien P. Ghislain, Chang Liu, Thomas Covey
  • Patent number: 11127556
    Abstract: In one embodiment, an ion extraction optics for extracting a plurality of ion beams is provided. The ion extraction optics may include, an extraction plate, the extraction plate defining a cut-out region, the cut-out region being elongated along a first direction. The extraction apparatus may include a slidable insert, the slidable insert disposed to overlap the cut-out region, and slidably movable with respect to the extraction plate, along the first direction, wherein the slidable insert and cut-out region define a first aperture and a second aperture.
    Type: Grant
    Filed: September 23, 2019
    Date of Patent: September 21, 2021
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Costel Biloiu, Jon Ballou, James P. Buonodono
  • Patent number: 11120979
    Abstract: A time-of-flight mass spectrometer includes a beam irradiation unit that generates an ionized particle by emitting an ion beam in a pulse form to a sample, a mass spectrometry unit that causes the ionized particle to fly, an MCP disposed in the mass spectrometry unit to measure a mass by amplifying the ionized particle, an MCP power source that applies a voltage to the MCP, and an MCP gain adjustment unit that adjusts a gain of the voltage. The MCP gain adjustment unit adjusts the gain of the voltage until a subsequent pulse is emitted after the beam irradiation unit emits a first pulse of the ion beam.
    Type: Grant
    Filed: August 20, 2020
    Date of Patent: September 14, 2021
    Inventor: Jun Asakawa
  • Patent number: 11107657
    Abstract: A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.
    Type: Grant
    Filed: May 4, 2020
    Date of Patent: August 31, 2021
    Assignee: ASML Netherlands B.V.
    Inventors: Weiming Ren, Shuai Li, Xuedong Liu, Zhongwei Chen
  • Patent number: 11107667
    Abstract: A mass spectrometer includes an ion source configured to ionize a sample to produce ions; a mass analyzer configured to separate the ions based on their mass-to-charge ratio; a detector configured to detect ions; an ion optics component configured to direct ions along at least part of the path from the ion source to the mass analyzer to the detector; and a controller. The controller is configured to switch the source at a first time from a first polarity source voltage to a second polarity source voltage; and switch the detector or the ion optics component at a second time from a first voltage to a second voltage, the second time being offset from the first time, the first voltage being the first polarity detector voltage or the first polarity ion optics voltage and the second voltage being the second polarity detector voltage or the second polarity ion optics voltage.
    Type: Grant
    Filed: August 7, 2020
    Date of Patent: August 31, 2021
    Assignee: Thermo Fisher Scientific
    Inventors: Mikhail V. Ugarov, Oleg Silivra
  • Patent number: 11107668
    Abstract: Four rod electrodes (50a to 50d) for separating ions according to a mass-to-charge ratio are held by a rod holder (51). The rod holder (51) is placed on a metal holder sustaining stand (52) provided on a bottom surface of a vacuum housing (1), and is fixed while being pressed by a fixation band (53) fixed to the holder sustaining stand (52) with screws (56). A heat release layer (55) made from heat dissipation silicone or the like is inserted between the fixation band (53) and the rod holder (51) and between the fixation band (53) and the holder sustaining stand (52). Therefore, heat generated in the rod holder (51) due to dielectric loss is not only directly transmitted to the holder sustaining stand (52), but also efficiently transmitted to the holder sustaining stand (52) through the fixation band (53).
    Type: Grant
    Filed: February 7, 2018
    Date of Patent: August 31, 2021
    Inventors: Manabu Ueda, Kota Nagasao
  • Patent number: 11097855
    Abstract: An aircraft beacon light includes a mounting plate having a central portion; a plurality of light sources arranged on the mounting plate around the central portion and facing away from the mounting plate; and a lens structure arranged over the plurality of light sources, wherein the lens structure is configured to reflect a first portion of light emitted by the plurality of light sources laterally outwards via total internal reflection; wherein the aircraft beacon light is configured to emit flashes of red light in operation.
    Type: Grant
    Filed: June 14, 2019
    Date of Patent: August 24, 2021
    Inventors: Anil Kumar Jha, Andre Hessling-Von Heimendahl
  • Patent number: 11101101
    Abstract: Methods and systems for implementing laser-based phase plate image contrast enhancement are disclosed herein. An example method at least includes forming at least one optical peak in a diffraction plane of an electron microscope, and directing an electron beam through the at least one optical peak at a first location, where the first location determines an amount of phase manipulation the optical peak imparts to an electron of the electron beam.
    Type: Grant
    Filed: April 22, 2020
    Date of Patent: August 24, 2021
    Assignee: FEI Company
    Inventors: Bart Buijsse, Bas Hendriksen, Pleun Dona
  • Patent number: 11099116
    Abstract: The invention relates to methods and devices for analysis of samples using laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS). The invention provides methods and devices in which individual ablation plumes are distinctively captured and transferred to the ICP, followed by analysis by mass cytometry.
    Type: Grant
    Filed: June 8, 2020
    Date of Patent: August 24, 2021
    Inventor: Alexandre Loboda
  • Patent number: 11094504
    Abstract: Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.
    Type: Grant
    Filed: January 6, 2020
    Date of Patent: August 17, 2021
    Assignee: APPLIED Materials, Inc.
    Inventors: Costel Biloiu, Michael Honan, Robert B Vopat, David Blahnik, Charles T. Carlson, Frank Sinclair, Paul Murphy
  • Patent number: 11094518
    Abstract: Laser ablation devices and methods including laser ablation are provided. The ablation devices can include a deep UV laser. Dual-laser ablation devices are also provided. Biomolecules can be ablated using a combination of deep UV laser and nanoelectrospray, resulting in protonated sample molecules.
    Type: Grant
    Filed: June 3, 2020
    Date of Patent: August 17, 2021
    Inventors: Kermit King Murray, Fabrizio Donnarumma, Oluwaremilekun Lawai
  • Patent number: 11087968
    Abstract: A traveling wave multipole comprising two or more pairs of segmented electrodes arranged around a central axis; and a voltage supply. The voltage supply configured to supply the segments of each pair of electrodes with a different RF and DC potential; and match RF and DC potentials with a location of an ion of target m/z moving through the traveling wave multipole such that as the ion travels along the multipole the ion experiences the same RF and DC potentials while another ion of a second target m/z concurrently experiences a different RF and DC potentials at another location within the traveling wave multipole.
    Type: Grant
    Filed: December 5, 2019
    Date of Patent: August 10, 2021
    Inventors: David A. Schell, Joshua T. Maze
  • Patent number: 11087964
    Abstract: A method for cleaning an electrospray emitter of a mass spectrometer, comprises: (a) changing a mode of operation of the electrospray emitter from a stable jet mode of operation to a dripping mode or a pulsating mode of operation by lowering a magnitude of a voltage applied between an counter electrode and the electrospray emitter; (b) causing a cleaning solvent to flow through the electrospray emitter at least until a droplet of the cleaning solvent forms on an exterior surface of the electrospray emitter while operating the electrospray emitter in the dripping mode of operation; and (c) causing the droplet to dislodge from the electrospray emitter exterior.
    Type: Grant
    Filed: November 21, 2019
    Date of Patent: August 10, 2021
    Assignee: Thermo Finnigan LLC
    Inventors: Joshua A. Silveira, Michael L. Poltash, Wei Wei, Eloy R. Wouters