Patents Examined by Kiet T. Nguyen
  • Patent number: 10290463
    Abstract: A particle beam device including a magnet, the device including: a particle beam source configured to emit electron and ion beams; a plurality of yokes arranged in a substantially rectangular shape; a coil set including a plurality of coils, wherein windings of the plurality of coils are uniformly distributed across and wound around the plurality of yokes, wherein the coil set is configured to produce both dipole and quadrupole fields, wherein the magnet is configured to deflect and focus electron and ion beams.
    Type: Grant
    Filed: June 16, 2017
    Date of Patent: May 14, 2019
    Assignee: IMATREX, INC.
    Inventors: Roy E. Rand, Vitaliy Ziskin
  • Patent number: 10290482
    Abstract: A tandem collision/reaction cell for an inductively coupled plasma-mass spectrometry (ICP-MS) system includes a first ion guide, a second ion guide, and an intermediate electrode in the vicinity of an exit end of the first ion guide. A DC potential barrier is applied to the intermediate electrode. The cell may provide two or more stages of an ion-molecule collision process.
    Type: Grant
    Filed: March 13, 2018
    Date of Patent: May 14, 2019
    Assignee: Agilent Technologies, Inc.
    Inventors: Noriyuki Yamada, Erina Shimizu, Yu Okamoto
  • Patent number: 10281412
    Abstract: An apparatus for measuring a semiconductor device includes a beam irradiating unit configured to irradiate a first beam to a semiconductor substrate, a stage configured to receive the semiconductor substrate thereon and which is configured to rotate toward a central axis, which is perpendicular to a horizontal plane lying in the same plane with the semiconductor substrate, by a first angle to the horizontal plane and a second angle that is different from the first angle, a detector configured to receive a second beam generated by reflecting the first beam to the semiconductor substrate at the first angle and to receive a third beam generated by reflecting the first beam to the semiconductor substrate at the second angle, and an arithmetic operation unit configured to generate a 3D image of the semiconductor substrate using the second beam and the third beam received by the detector.
    Type: Grant
    Filed: July 6, 2016
    Date of Patent: May 7, 2019
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Choon-Shik Leem, Yeon-Joong Kim
  • Patent number: 10283339
    Abstract: The present invention relates to a particle beam mass spectrometer and particle measurement method by means of same. More particularly, the present invention relates to a particle beam mass spectrometer including: a particle focusing unit focusing a particle beam induced by gas flow; an electron gun forming a charged particle beam by accelerating thermal electrons to ionize the particle beam focused by the particle focusing unit; a deflector deflecting the charged particle beam according to kinetic energy to charge ratio; and a sensing unit measuring a current induced by the deflected charged particle beam, wherein the deflector includes at least one particle beam separation electrode provided at each of opposite sides with respect to a progress axis of the charged particle beam before being deflected.
    Type: Grant
    Filed: October 7, 2015
    Date of Patent: May 7, 2019
    Assignee: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
    Inventors: Chang Joon Park, Sang Jung Ahn, Cheolsu Han, Keu Chan Lee, Seok Rae Yoon
  • Patent number: 10276347
    Abstract: A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.
    Type: Grant
    Filed: October 22, 2018
    Date of Patent: April 30, 2019
    Assignee: HERMES MICROVISION INC.
    Inventors: Weiming Ren, Shuai Li, Xuedong Liu, Zhongwei Chen
  • Patent number: 10276274
    Abstract: Containers for sealing and shielding radioactive fluid are disclosed. Methods of manufacturing such containers are also disclosed. The container is arranged to maintain a fluid tight seal to contain radioactive fluid when subjected to environmental forces, while also permitting a user to manually remove the cap from the container body when desired. In some embodiments, the container includes a container body with an inner chamber, along with an associated cap. The cap forms a fluid tight seal with the body by way of an interference fit between a sealing element and a burnished abutment surface.
    Type: Grant
    Filed: October 2, 2015
    Date of Patent: April 30, 2019
    Assignee: Lantheus Medical Imaging, Inc.
    Inventors: Joseph Haepers, Ralph Farella
  • Patent number: 10269542
    Abstract: An ionization chamber includes a cavity in which an air supply pipe and a filament are located. The air supply pipe is bent to form a closed frame in which the filament is accommodated. The filament is energized to generate hot electrons. The air supply pipe has an air outlet on one side facing the filament for outputting an ion-source gas. The ion-source gas collides with the hot electrons to produce plasma. Also disclosed are an ion-implantation apparatus and an ion-implantation method. Because the ion-source gas collides with the hot electrons uniformly, the plasma concentration at each position in the cavity is uniform; the ion-implantation effect is improved. During the process of the uniformity of the plasma concentration, the regulation about frequency of current of the filament is reduced, then the filament's life is increased, the equipment maintenance cycle is extended, the display equipment production cost is reduced.
    Type: Grant
    Filed: July 26, 2017
    Date of Patent: April 23, 2019
    Assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
    Inventor: Rui Xie
  • Patent number: 10268119
    Abstract: An extreme ultraviolet light generating device may include a chamber, an EUV light focusing mirror provided therein, including a reflection surface having a concave curved shape and an outer peripheral portion around an outer edge of the reflection surface, and configured to focus EUV light radiated from plasma generated when a target is irradiated with laser light, a gas supplying device including peripheral heads provided on or along the outer peripheral portion; and a discharge device including a discharge path forming a discharge port near the outer peripheral portion, and configured to discharge an ion or a particle from the discharge port. The peripheral heads each may blow out a gas flow from the outer peripheral portion or a vicinity thereof along the reflection surface, and allow gas flows to join on the reflection surface to thereby form a gas flow along the reflection surface toward the discharge port.
    Type: Grant
    Filed: April 4, 2018
    Date of Patent: April 23, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Shinji Nagai, Atsushi Ueda, Takashi Saito
  • Patent number: 10265546
    Abstract: Systems, devices, and methods for pre-treatment verification of radiation dose delivery in arc-based radiation therapy devices using a time-dependent gamma evaluation method.
    Type: Grant
    Filed: January 20, 2016
    Date of Patent: April 23, 2019
    Assignee: VARIAN MEDICAL SYSTEMS INTERNATIONAL AG
    Inventors: Frans Verhaegen, Mark Podesta, Sebastiaan M. J. J. G. Nijsten, Lucas C. G. G. Persoon, Christof Baltes, Stefan G. Scheib
  • Patent number: 10271414
    Abstract: The stability of operations of an EUV light generating apparatus is improved. A droplet detector may include: a light source unit configured to emit illuminating light onto a droplet, which is output into a chamber and generate extreme ultraviolet light when irradiated with a laser beam; a light receiving unit configured to receive the illuminating light and to detect changes in light intensities; and a timing determining circuit configured to output a droplet detection signal that indicates that the droplet has been detected at a predetermined position within the chamber, based on a first timing at which the light intensity of the illuminating light decreases due to the droplet being irradiated therewith and a second timing at which the light intensity of the illuminating light increases.
    Type: Grant
    Filed: September 7, 2017
    Date of Patent: April 23, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Kouichi Satou, Takayuki Yabu, Yoshifumi Ueno, Hirokazu Hosoda
  • Patent number: 10261071
    Abstract: A set of volatile organic compounds is provided, comprising Benzene, 2,3,4-trimethyl-Pentane, 1,4-dimethyl-, trans-Cyclohexane, 2,2,4-trimethyl-Hexane, 1,7,7-trimethyl-Tricyclo[2.2.1.0(2,6)]heptane, and 4-ethyl-3-Octene for breath analysis. Methods of identifying these VOCs and use thereof in diagnosing, monitoring the onset of pulmonary toxicity are also disclosed.
    Type: Grant
    Filed: July 9, 2017
    Date of Patent: April 16, 2019
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: Richard T. Mahon, Aaron A Hall, William A Cronin
  • Patent number: 10256084
    Abstract: An electronic device 1 for analyzing a gas composition, which is present in an environment A at an environment pressure Pa, is described. The device 1 is portable and comprises a gas sampling module 7, an ion filtering module 8 and an ion detecting module 9. The sampling module 7 is configured to adjust an input gaseous flow Fi of gaseous particles from the environment A and to ionize said gaseous particles and to generate an ion flow I having an ion composition representative of the gas composition to be analyzed. The ion filtering module 8 is configured to controllably select at least one type of ions present in the ion flow I and to generate a corresponding at least one homogeneous ion beam I?. The ion detecting module 9 is configured to measure the intensity of such least one ion beam I?.
    Type: Grant
    Filed: July 2, 2015
    Date of Patent: April 9, 2019
    Assignee: NANOTECH ANALYSIS S.R.L.
    Inventors: Gianpiero Mensa, Raffaele Correale
  • Patent number: 10242841
    Abstract: The purpose of the present invention is to provide a specimen holder having a structure capable of maintaining a seal surface regardless of a change of environment. A specimen holder according to the present invention is characterized by comprising a specimen holder axis part having a specimen and/or a specimen mesh setting part, an external cylinder part capable of housing the specimen holder axis part, and a seal part for sealing the specimen and/or the specimen mesh setting part from atmosphere wherein the seal part is set to a step part which is set to a portion of the external cylinder part. Further, in a referred embodiment of a specimen holder according to the present invention, it is characterized in that the seal part set to the step part is as a first seal part, further the specimen holder has a second seal part which exists in a tip part of the specimen holder and exists in a direction of a central axis of an electron microscope comparing to the specimen and/or the specimen mesh setting part.
    Type: Grant
    Filed: September 27, 2017
    Date of Patent: March 26, 2019
    Assignee: Mel-Build Corporation
    Inventor: Hiroya Miyazaki
  • Patent number: 10242851
    Abstract: A method of mass spectrometry is disclosed that comprises predicting 1 one or more first reaction products which may result from subjecting an analyte to one or more reactions of interest, calculating 2 one or more first masses or mass to charge ratios and one or more first ion mobility values, collision cross sections or interaction cross sections of at least some first reaction product ions which may be generated from the one or more first reaction products under first conditions, and calculating one or more second masses or mass to charge ratios and one or more second ion mobility values, collision cross sections or interaction cross sections of at least some second reaction product ions which may be generated from the one or more first reaction products under second different conditions.
    Type: Grant
    Filed: March 10, 2015
    Date of Patent: March 26, 2019
    Assignee: Micromass UK Limited
    Inventors: Martin Raymond Green, Kevin Giles, Keith Richardson, Jason Lee Wildgoose
  • Patent number: 10241023
    Abstract: The invention relates to methods and devices for analysis of samples using laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS). The invention provides methods and devices in which individual ablation plumes are distinctively captured and transferred to the ICP, followed by analysis by mass cytometry.
    Type: Grant
    Filed: April 18, 2018
    Date of Patent: March 26, 2019
    Assignee: Fluidigm Canada Inc.
    Inventor: Alexandre Loboda
  • Patent number: 10242854
    Abstract: Disclosed is a method of quantification of one or more ion species, in a sample of ions, using a mass spectrometer, the method including the steps of: obtaining a time domain data set corresponding to a signal induced by motion of the ions in the mass spectrometer; adjusting the data set by applying an asymmetric window function thereto; generating an absorption mode mass spectrum in the frequency domain including the step of applying a Fourier transform to the adjusted data set; determining peak ranges for one or more peaks in the mass spectrum associated with the one or more ion species; integrating, for each determined peak range, the spectral data within the respective peak range to generate a respective peak intensity value; and quantifying each of the one or more ion species on the basis of the respective peak intensity values.
    Type: Grant
    Filed: October 30, 2015
    Date of Patent: March 26, 2019
    Assignee: SHIMADZU CORPORATION
    Inventors: Aleksandr Rusinov, Li Ding
  • Patent number: 10236169
    Abstract: An ionization device includes: a plasma generating device for generating metastable particles and/or ions of an ionization gas in a primary plasma region; a field generating device for generating a glow discharge in a secondary plasma region; an inlet for supplying a gas to be ionized into the secondary plasma region; and a further inlet for supplying the metastable particles and/or the ions of the ionization gas into the secondary plasma region. A mass spectrometer includes such an ionization device and a detector downstream of the outlet of the ionization device for the mass-spectrometric analysis of the ionized gas.
    Type: Grant
    Filed: June 8, 2017
    Date of Patent: March 19, 2019
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Michel Aliman, Hin Yiu Anthony Chung, Gennady Fedosenko, Ruediger Reuter, Alexander Laue, Achim von Keudell, Marc Boeke, Thorsten Benter, Joerg Winter, Peter Awakowicz, Leonid Gorkhover
  • Patent number: 10234436
    Abstract: The present disclosure provides a gas chromatography-ion mobility spectrometry apparatus, including a housing, an injection port mounted to and connected with the housing and configured for input of a gas containing a sample therein, a multicapillary column configured for separation of a gas substance and an ion mobility tub configured for analysis of the gas substance. The gas chromatography-ion mobility spectrometry apparatus further includes: a gas path part connected with the ion mobility tube and configured for providing the gas to the ion mobility tube and receiving a gas discharged from the ion mobility tube; and a buffer base part detachably mounted to the housing and configured to isolation vibration outside the buffer base part, the ion mobility tube being disposed on the buffer base part, wherein the gas path part is mounted in an interior space of the buffer base part.
    Type: Grant
    Filed: November 30, 2017
    Date of Patent: March 19, 2019
    Assignee: Nuctech Company Limited
    Inventors: Qingjun Zhang, Yuanjing Li, Ziran Zhao, Weiping Zhu, Huishao He, Qiufeng Ma, Xiang Zou, Biao Cao
  • Patent number: 10229825
    Abstract: A mass spectrometer system can include an ion source, a vacuum chamber; a mass analyzer within the vacuum chamber, a transfer tube between the ion source and the vacuum chamber, a transfer tube heater, and a vacuum pump. The mass spectrometer system can be configured to reduce the pump speed of the vacuum pump in response to receiving a transfer tube swap instruction; lower the temperature of the transfer tube to below a first threshold; operating the vacuum pump at the reduced pump speed while the transfer tube is replaced with a second transfer tube; heating the second transfer tube to a temperature above a pump down temperature; and increasing the pump speed of the vacuum pump after the temperature of the second transfer tube exceeds a second threshold.
    Type: Grant
    Filed: June 22, 2018
    Date of Patent: March 12, 2019
    Assignee: THERMO FINNIGAN LLC
    Inventors: Scott T. Quarmby, Edward B. McCauley, Joshua T. Maze
  • Patent number: 10224176
    Abstract: There is provided an electron microscope capable of producing good images by reducing contrast nonuniformity.
    Type: Grant
    Filed: July 28, 2017
    Date of Patent: March 5, 2019
    Assignee: JEOL Ltd.
    Inventor: Takashi Suzuki