Patents Examined by Lynne Gurley
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Patent number: 9190495Abstract: A recessed channel array transistor may include a substrate, a gate oxide layer, a gate electrode and source/drain regions. The substrate may have an active region and an isolation region. A recess may be formed in the active region. The gate oxide layer may be formed on the recess and the substrate. The gate oxide layer may include a first portion on an intersection between a side end of the recess and a sidewall of the active region and a second portion on a side surface of the recess. The first portion may include a thickness greater than about 70% of a thickness of the second portion. The gate electrode may be formed on the gate oxide layer. The source/drain regions may be formed in the substrate. Thus, the recessed channel array transistor may have a decreased leakage current and an increased on-current.Type: GrantFiled: September 21, 2009Date of Patent: November 17, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Jeong-Do Ryu, Dong-Chan Kim, Seong-Hoon Jeong, Si-Young Choi, Yu-Gyun Shin, Tai-Su Park, Jong-Ryeol Yoo, Jong-Hoon Kang
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Patent number: 9178040Abstract: Some embodiments of the present disclosure relate to a vertical MOSFET selection transistor that is configured to suppress leakage voltage in the memory cell without limiting the size of the memory cell. The memory selection transistor has a semiconductor body with first and second trenches that define a raised semiconductor structure having a source region, a channel region, and a drain region. A gate structure has a first gate electrode in the first trench, which extends vertically along a first side of the raised semiconductor structure, and a second gate electrode in the second trench, which extends vertically along an opposite, second side of the raised semiconductor structure. The first and second gate electrodes collectively control the flow of current between the source and drain region in the raised semiconductor structure. An electrical contact couples the drain region to a data storage element configured to store data.Type: GrantFiled: November 12, 2012Date of Patent: November 3, 2015Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Yu-Wei Ting, Chun-Yang Tsai, Kuo-Ching Huang
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Patent number: 9165919Abstract: A semiconductor device that is equipped with an ESD protection element, which has a size increase thereof suppressed, does not require extra process, and can be formed without inducing deterioration of characteristics of the semiconductor device. This semiconductor device includes a semiconductor substrate, a circuit element, that includes a PN junction formed of a region, which is formed on the semiconductor substrate, and which has a conductivity type different from that of the substrate and a protection element for the circuit element. The protection element is a transistor formed of the region, another region having the conductivity type same as that of the region, and the semiconductor substrate. The emitter for the transistor and the semiconductor substrate are connected to each other.Type: GrantFiled: February 28, 2012Date of Patent: October 20, 2015Assignee: NEW JAPAN RADIO CO., LTD.Inventors: Hideaki Matsumoto, Jun Yamashita, Kenji Esashika, Takao Sugino
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Patent number: 9165969Abstract: An apparatus of one aspect includes a photodetector array, and a peripheral region at a periphery of the photodetector array. A thinner interconnect line corresponding to the photodetector array is disposed within one or more insulating layers. A thicker interconnect line corresponding to the peripheral region is disposed within the one or more insulating layers. Other apparatus, methods, and systems are also disclosed.Type: GrantFiled: March 18, 2010Date of Patent: October 20, 2015Assignee: OmniVision Technologies, Inc.Inventors: Duli Mao, Vincent Venezia, Howard Rhodes, Hsin Chih Tai, Yin Qian
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Patent number: 9166020Abstract: A method for manufacturing a metal gate structure includes providing a substrate having a high-K gate dielectric layer and a bottom barrier layer sequentially formed thereon, forming a work function metal layer on the substrate, and performing an anneal treatment to the work function metal layer in-situ.Type: GrantFiled: March 1, 2011Date of Patent: October 20, 2015Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chan-Lon Yang, Chi-Mao Hsu, Chun-Yuan Wu, Tzyy-Ming Cheng, Shih-Fang Tzou, Chin-Fu Lin, Hsin-Fu Huang, Min-Chuan Tsai
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Patent number: 9157887Abstract: A method for forming a sensor includes forming a channel in substrate, forming a sacrificial layer in the channel, forming a sensor having a first dielectric layer disposed on the substrate, a graphene layer disposed on the first dielectric layer, and a second dielectric layer disposed on the graphene layer, a source region, a drain region, and a gate region, wherein the gate region is disposed on the sacrificial layer removing the sacrificial layer from the channel.Type: GrantFiled: August 14, 2013Date of Patent: October 13, 2015Assignee: International Business Machines CorporationInventors: Dechao Guo, Shu-Jen Han, Chung-Hsun Lin, Ning Su
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Patent number: 9123811Abstract: In a semiconductor capable of reducing NBTI and a method for manufacturing the same, a multi-gate transistor includes an active region, gate dielectric, channels in the active region, and gate electrodes, and is formed on a semiconductor wafer. The active region has a top and side surfaces, and is oriented in a first direction. The gate dielectric is formed on the top and side surfaces of the active region. The channels are formed in the top and side surfaces of the active region. The gate electrodes are formed on the gate dielectric corresponding to the channels and aligned perpendicular to the active region such that current flows in the first direction. In one aspect of the invention, an SOI layer having a second orientation indicator in a second direction is formed on a supporting substrate having a first orientation indicator in a first direction.Type: GrantFiled: March 12, 2012Date of Patent: September 1, 2015Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Shigenobu Maeda, Jeong Hwan Yang, Junga Choi
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Patent number: 9117838Abstract: A high-power and high-gain ultra-short gate HEMT device has exceptional gain and an exceptionally high breakdown voltage provided by an increased width asymmetric recess for the gate electrode, by a composite channel layer including a thin indium arsenide layer embedded in the indium gallium arsenide channel layer and by double doping through the use of an additional silicon doping spike. The improved transistor has an exceptional 14 dB gain at 110 GHz and exhibits an exceptionally high 3.5-4 V breakdown voltage, thus to provide high gain, high-power and ultra-high frequency in an ultra-short gate device.Type: GrantFiled: April 10, 2013Date of Patent: August 25, 2015Assignee: BAE Systems Information and Electronic Systems Integration Inc.Inventors: Dong Xu, Xiaoping S. Yang, Wendell Kong, Lee M. Mohnkern, Phillip M. Smith, Pane-chane Chao
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Patent number: 9093588Abstract: According to one embodiment, a semiconductor light emitting device includes an n-type semiconductor layer, a p-type semiconductor layer, a well layer, a barrier layer, an Al-containing layer, and an intermediate layer. The p-type semiconductor layer is provided on a side of [0001] direction of the n-type semiconductor layer. The well layer, the barrier layer, the Al-containing layer and the intermediate layer are disposed between the n-type semiconductor layer and the p-type semiconductor layer subsequently. The Al-containing layer has a larger band gap energy than the barrier layer, a smaller lattice constant than the n-type semiconductor layer, and a composition of Alx1Ga1-x1-y1Iny1N. The intermediate layer has a larger band gap energy than the well layer, and has a first portion and a second portion provided between the first portion and the p-type semiconductor layer. A band gap energy of the first portion is smaller than that of the second portion.Type: GrantFiled: February 23, 2011Date of Patent: July 28, 2015Assignee: Kabushiki Kaisha ToshibaInventors: Jongil Hwang, Shinji Saito, Maki Sugai, Rei Hashimoto, Yasushi Hattori, Masaki Tohyama, Shinya Nunoue
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Patent number: 9082663Abstract: In a semiconductor device including an oxide semiconductor layer, a conductive layer is formed in contact with a lower portion of the oxide semiconductor layer and treatment for adding an impurity is performed, so that a channel formation region and a pair of low-resistance regions between which the channel formation region is sandwiched are formed in the oxide semiconductor layer in a self-aligned manner. Wiring layers electrically connected to the conductive layer and the low-resistance regions are provided in openings of an insulating layer.Type: GrantFiled: September 10, 2012Date of Patent: July 14, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Atsuo Isobe, Toshinari Sasaki
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Patent number: 9068936Abstract: A method for forming a sensor includes forming a channel in substrate, forming a sacrificial layer in the channel, forming a sensor having a first dielectric layer disposed on the substrate, a graphene layer disposed on the first dielectric layer, and a second dielectric layer disposed on the graphene layer, a source region, a drain region, and a gate region, wherein the gate region is disposed on the sacrificial layer removing the sacrificial layer from the channel.Type: GrantFiled: September 6, 2012Date of Patent: June 30, 2015Assignee: International Business Machines CorporationInventors: Dechao Guo, Shu-Jen Han, Chung-Hsun Lin, Ning Su
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Patent number: 9070550Abstract: A semiconductor device includes a transistor formed by dividing into a first and a second areas, a source electrode pad connected with a first source region formed in the first area and a second source region formed in the second area, a drain electrode pad connected with a first drain region formed in the first area and a second drain region formed in the second area and a connection line to connect a first gate line and a second gate line, where the connection line being provided in a same layer as the first gate line formed in the first area and the second gate line formed in the second area. A wiring for connecting between nodes of another circuit can be provided over the layer having the connection line provided therein and thus the size of a circuit chip can be reduced.Type: GrantFiled: August 18, 2007Date of Patent: June 30, 2015Assignee: Renesas Electronics CorporationInventors: Daisaku Kobayashi, Takayoshi Fujishiro
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Patent number: 9035321Abstract: There is provided a semiconductor device including an ohmic junction layer which is excellent in surface flatness and uniformity of composition in an interface with a semiconductor substrate and thus can give a sufficiently high adhesiveness with a Schottky junction layer.Type: GrantFiled: August 20, 2009Date of Patent: May 19, 2015Assignee: SHOWA DENKO K.K.Inventors: Akihiro Matsuse, Kotaro Yano
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Patent number: 9000418Abstract: A field-effect transistor includes a semiconductor layer (14) having a portion functioning as a channel region. The semiconductor layer (14) includes, as its constituent components, a plurality of electrically conductive microparticles (52), organic semiconductor molecules (53) bonded to the microparticles (52) so as to link the microparticles to one another (52), and cyclic molecules. Each of the organic semiconductor molecules (53) includes a ?-electron conjugated chain as its main chain, and the ?-electron conjugated chain is insulated by cyclic molecules.Type: GrantFiled: November 18, 2005Date of Patent: April 7, 2015Assignee: Panasonic CorporationInventors: Takayuki Takeuchi, Kenji Harada, Nobuaki Kambe, Jun Terao
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Patent number: 8969969Abstract: Transistors exhibiting different electrical characteristics such as different switching threshold voltage or different leakage characteristics are formed on the same chip or wafer by selectively removing a film or layer which can serve as an out-diffusion sink for an impurity region such as a halo implant and out-diffusing an impurity such as boron into the out-diffusion sink, leaving the impurity region substantially intact where the out-diffusion sink has been removed. In forming CMOS integrated circuits, such a process allows substantially optimal design for both low-leakage and low threshold transistors and allows a mask and additional associated processes to be eliminated, particularly where a tensile film is employed to increase electron mobility since the tensile film can be removed from selected NMOS transistors concurrently with removal of the tensile film from PMOS transistors.Type: GrantFiled: March 19, 2010Date of Patent: March 3, 2015Assignee: International Business Machines CorporationInventors: Victor W. C. Chan, Narasimhulu Kanike, Huiling Shang, Varadarajan Vidya, Jun Yuan, Roger Allen Booth, Jr.
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Patent number: 8951874Abstract: Disclosed is a semiconductor device manufacturing method comprising: forming an element isolation region in one principal face of a semiconductor substrate of one conductivity type; forming a gate electrode extending from an element region to the element isolation region at both sides of the element region in a first direction, both end portions of the gate electrode in the first direction being on the element isolation region and respectively including a concave portion and protruding portions at both sides of the concave portion; carrying out ion implantation of impurities of the one conductivity type from a direction tilted from a direction perpendicular to the one principal face toward the first direction so that first and second impurity implantation regions of the one conductivity type are formed in the one principal face in two end regions of the element region in the first direction.Type: GrantFiled: February 23, 2011Date of Patent: February 10, 2015Assignee: LAPIS Semiconductor Co., Ltd.Inventor: Eisuke Seo
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Patent number: 8946805Abstract: A single poly EEPROM cell in which the read transistor is integrated in either the control gate well or the erase gate well. The lateral separation of the control gate well from erase gate well may be reduced to the width of depletion regions encountered during program and erase operations. A method of forming a single poly EEPROM cell where the read transistor is integrated in either the control gate well or the erase gate well.Type: GrantFiled: August 6, 2009Date of Patent: February 3, 2015Assignee: Texas Instruments IncorporatedInventors: Jozef C. Mitros, Keith Jarreau, Pinghai Hao
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Patent number: 8946774Abstract: A method of fabricating a single crystal gallium nitride substrate the step of cutting an ingot of single crystal gallium nitride along predetermined planes to make one or more single crystal gallium nitride substrates. The ingot of single crystal gallium nitride is grown by vapor phase epitaxy in a direction of a predetermined axis. Each predetermined plane is inclined to the predetermined axis. Each substrate has a mirror polished primary surface. The primary surface has a first area and a second area. The first area is between an edge of the substrate and a line 3 millimeter away from the edge. The first area surrounds the second area. An axis perpendicular to the primary surface forms an off-angle with c-axis of the substrate. The off-angle takes a minimum value at a first position in the first area of the primary surface.Type: GrantFiled: April 12, 2013Date of Patent: February 3, 2015Assignee: Sumitomo Electric Industries, Ltd.Inventor: Masaki Ueno
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Patent number: 8927361Abstract: Transistors exhibiting different electrical characteristics such as different switching threshold voltage or different leakage characteristics are formed on the same chip or wafer by selectively removing a film or layer which can serve as an out-diffusion sink for an impurity region such as a halo implant and out-diffusing an impurity such as boron into the out-diffusion sink, leaving the impurity region substantially intact where the out-diffusion sink has been removed. In forming CMOS integrated circuits, such a process allows substantially optimal design for both low-leakage and low threshold transistors and allows a mask and additional associated processes to be eliminated, particularly where a tensile film is employed to increase electron mobility since the tensile film can be removed from selected NMOS transistors concurrently with removal of the tensile film from PMOS transistors.Type: GrantFiled: March 13, 2013Date of Patent: January 6, 2015Assignee: International Business Machines CorporationInventors: Roger Allen Booth, Jr., Victor W. C. Chan, Narasimhulu Kanike, Huiling Shang, Varadarajan Vidya, Jun Yuan
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Patent number: 8921903Abstract: On a p? epitaxial layer, an n-type epitaxial layer and a gate region are formed in this order. A gate electrode is electrically connected to the gate region, and a source electrode and a drain electrode are spaced apart from each other with the gate electrode sandwiched therebetween. A control electrode is used for applying to the p? epitaxial layer a voltage that causes a reverse biased state of the p? epitaxial layer and the n-type epitaxial layer in an OFF operation.Type: GrantFiled: September 21, 2007Date of Patent: December 30, 2014Assignee: Sumitomo Electric Industries, Ltd.Inventors: Takeyoshi Masuda, Yasuo Namikawa