Abstract: In an extreme ultraviolet light generation apparatus, a target detection section may include a light source, a transfer optical system, an image sensor configured to output image data of an image that has been formed by irradiating a target outputted from a target supply device with light outputted from the light source on a light-receiving unit of the image sensor by the transfer optical system, and a processing unit, connected to the image sensor, configured to receive the image data, obtain a first optical intensity distribution along a first line that intersects with a trajectory of the target and a second optical intensity distribution along a second line that intersects with the trajectory, calculate a center of gravity position in the first optical intensity distribution and a center of gravity position in the second optical intensity distribution, and calculate an actual path of the target based on the calculated positions.

Abstract: A non-radioactive plasma ion source device includes at least four planar electrodes that define at least three chambers, including a discharger chamber and at least two additional chambers aligned along a major longitudinal axis of the housing. A discharger ionizes at least one of a transport gas and a discharge gas to form ions in the discharger chamber that are directed by a homogeneous electric field generated by the planar electrodes toward an analyte gas outlet. Ionized species of at least one of the transport gas and the discharge gas that are not entrained by a counterflow gas stream are discharged from the discharger chamber to form a stream of ionized particles that ionize a sample gas and thereby form a stream of ionized analyte particles of the same polarity. The ionized analyte particles are entrained with the stream of ionized particles and pass through an analyte gas outlet to an analyzer.

Abstract: A charged particle beam device is provided which includes a primary beam source device adapted for generating a primary charged particle beam, a mirror corrector device adapted for providing compensation of spherical and/or chromatic aberrations, a first beam separator adapted for transmitting the primary charged particle beam to the mirror corrector device and for separating the primary charged particle beam from a compensating primary charged particle beam reflected by the mirror corrector device, wherein the first beam separator has a magnetic deflector configured to generate at least one dipole magnetic field, an objective lens adapted for focusing the compensating primary charged particle beam onto a specimen, and a second beam separator adapted for transmitting the compensating primary charged particle beam to the specimen and for separating the compensating primary charged particle beam from a secondary charged particle beam originating from the specimen.

Abstract: In an analyzing apparatus for analyzing compositions using a fluorescent X-ray in the atmosphere, a calibration to eliminate influences caused by a time-dependent change is performed. The analyzing apparatus includes an emission unit, a detection unit, an environment measurement unit, and a time-dependent change calculation unit. The emission unit emits a primary X-ray. The detection unit detects an intensity of a secondary X-ray passing through the atmosphere. The environment measurement unit measures an environment parameter defining the atmosphere. The time-dependent change calculation unit calculates a time-dependent change of the intensity of the secondary X-ray between a first timing and a second timing, based on a first environment parameter, a first intensity of the secondary X-ray, a second environment parameter, and a second intensity of the secondary X-ray.

Abstract: A method of analyzing ions is disclosed comprising performing an initial multi-dimensional survey scan comprising separating parent ions according to a first physico-chemical property (e.g. ion mobility) and then separating the parent ions according to a second physico-chemical property (e.g. mass to charge ratio). A plurality of parent ions of interest are then determined from the initial multi-dimensional survey scan. Once parent ions of interest have been determined, the plurality of parent ions of interest are sequentially selected based upon the first and second physico-chemical properties during a single cycle of separation. The parent ions of interest may then be fragmented and corresponding fragment ions may then be mass analyzed.

Abstract: An ion implanter includes a high-voltage power supply, a control unit that generates a command signal controlling an output voltage of the high-voltage power supply, an electrode unit to which the output voltage is applied, and a measurement unit that measures an actual voltage applied to the electrode unit. The control unit includes a first generation section that generates a first command signal for allowing the high-voltage power supply to output a target voltage, a second generation section that generates a second command signal for complementing the first command signal so that the actual voltage measured by the measurement unit becomes or close to the target voltage, and a command section that brings to the high-voltage power supply a synthetics command signal which is produced by synthesizing the first command signal and the second command signal.

Abstract: A device for separating non-ions from ions is disclosed. The device includes a plurality of electrodes positioned around a center axis of the device and having apertures therein through which the ions are transmitted. An inner diameter of the apertures varies in length. At least a portion of the center axis between the electrodes is non-linear.

Abstract: An instrument producing a charged particle beam according to the present invention is provided with: a charged particle source; a plurality of first electrodes disposed along a direction of irradiation of charged particles from the charged particle source; a plurality of insulation members disposed between the first electrodes; and a housing mounted around the plurality of first electrodes. The housing is formed from an insulating solid material, and includes a plurality of second electrodes disposed at positions in proximity to the plurality of first electrodes. At least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the potential of the proximate one of the first electrodes.

Abstract: A method of analyzing ions is disclosed comprising performing an initial multi-dimensional survey scan comprising separating parent ions according to a first physico-chemical property (e.g. ion mobility) and then separating the parent ions according to a second physico-chemical property (e.g. mass to charge ratio). A plurality of parent ions of interest are then determined from the initial multi-dimensional survey scan. Once parent ions of interest have been determined, the plurality of parent ions of interest are sequentially selected based upon the first and second physico-chemical properties during a single cycle of separation. The parent ions of interest may then be fragmented and corresponding fragment ions may then be mass analyzed.

Abstract: An apparatus for holding radioactive objects includes a base and a central pillar extending upwardly between a bottom end coupled to the base and a top end above the base. A plurality of inner segments are spaced around the central pillar, and a plurality of outer segments are spaced around the inner segments to form pairs. The inner segments, the outer segments and the central pillar may be coupled together to permit limited radial movement of at least one of the segments of each pair. Each pair may define a generally vertical, object-receiving channel arranged between the inner and outer segment of the pair. The segments of each pair may be adapted to bear against an object in the channel of the pair to laterally restrain the object and facilitate heat transfer from the object.

Abstract: An XRF (XRF=x-ray fluorescence) measurement apparatus (1) has an x-ray source (2) for generating x-rays (4), x-ray optics (3) for directing x-rays (4) from the x-ray source (2) to a sample (5) and an EDS (EDS=energy dispersive spectroscopy) detector (7) for detecting fluorescent x-rays (14) from the sample (5). The apparatus is characterized in that the sample (5) is a wafer (6), in particular a Si wafer, wherein the x-ray optics (3) is positioned to direct the x-rays (4) onto the bevel (12) of the wafer (6). The x-ray source (2) plus the x-ray optics (3) has a brilliance of at least 5*107 counts/sec mm2, preferably at least 1*108counts/sec mm2. The apparatus allows an improved contamination control of wafers, in particular silicon wafers.

Abstract: A method includes capturing a first image of the sample via a detector, wherein the particles of the primary particle beam have a first average energy so that the interaction products detected by the detector predominantly contain sample information from a sample layer lying below the sample surface. The method also includes removing the outermost sample layer with the aid of the cutting device, and capturing a second image of the sample via the detector, wherein the particles of the primary particle beam have a second average energy so that the interaction products detected by the detector predominantly contain sample information from the surface layer of the sample. The method further includes calculating the lateral shift/lateral offset of the sample from a comparison of the first and second images, and compensating for the lateral offset.

Abstract: An apparatus for disinfecting a button including a housing having an inner side and an outer side. At least one button is disposed within the housing, the button having a rotational symmetry allowing rotation of the button with respect to the housing. A rotation mechanism rotates the button with respect to the housing. A disinfecting system positioned on the inner side of the housing disinfects a portion of the button that is exposed on the inner side of the housing. The rotation mechanism rotates the button at a substantially constant speed. The apparatus provides a safer operation of the button as there is a continuous sanitizing of the surface of the button contaminated by users.

Abstract: A radiotherapy apparatus includes a rotatable drum on which is mounted a gantry arm carrying a radiation source, the arm extending from the drum to locate the source is offset from the axis of rotation of the drum and oriented towards the axis, and a mechanism to apply a tilt to the arm depending on the rotational orientation of the drum.

Abstract: Systems and methods for providing improved scanner corrections are disclosed. Scanner corrections provided in accordance with the present disclosure may be referred to as wafer geometry aware scanner corrections. More specifically, wafer geometry and/or wafer shape signature information are utilized to improve scanner corrections. By removing the wafer geometry as one of the error sources that may affect the overlay accuracy, better scanner corrections can be obtained because one less contributing factor needs to be modeled.

Abstract: A top opening-closing mechanism for opening and closing a top of a container including a container body and the top includes a rolling element rotatably provided at the top and positioned on the outside of the container body in a planar view, a rail, a jack for lifting the rail, and a top resting table disposed adjacent to the container and mounting the top thereon. When the top is opened, the jack lifts the rail, the rail lifts the rolling element from below, and thereby the top is lifted up from the container body. Then, the rolling element rolls on the rail and the top resting table to move the top from above the container body to the top resting table.

Abstract: Methods, systems and devices that generate differential axial transport in a fluidic device having at least one fluidic sample separation flow channel and at least one ESI emitter in communication with the at least one sample separation flow channel. In response to the generated differential axial transport, the at least one target analyte contained in a sample reservoir in communication with the sample separation channel is selectively transported to the at least one ESI emitter while inhibiting transport of contaminant materials contained in the sample reservoir toward the at least one ESI emitter thereby preferentially directing analyte molecules out of the at least one ESI emitter. The methods, systems and devices are particularly suitable for use with a mass spectrometer.

Abstract: A method for predicting the corrosion rate of crude oil or other related process streams is provided. The method includes using x-ray absorption spectroscopy to characterize heteroatom species present by functional group and quantify the relative amount of each species in a plurality of samples. The corrosion rate of each sample is measured. A correlation between the relative amount of each species and the corrosion rate is determined and used to create a corrosion prediction model. The corrosion prediction model can be used so that corrosion rate can be predicted for a sample solely from the spectroscopy measurement of the relative amounts of each relevant species.

Abstract: A magnetic field measuring device including: a vibrational probe unit having a probe that includes one or more material(s) whose intensity of magnetization is proportionate to an external magnetic field, a mechanical vibration source for the probe; a vibration detector detecting a vibration frequency and amplitude of the probe; an alternating-current magnetic field generator applying to the probe an alternating-current magnetic field; a direct-current external magnetic field generator applying a direct-current external magnetic field to the probe; a frequency modulation detector detecting frequency modulation occurring to the mechanical vibration of the probe; a direct-current external magnetic field controller adjusting the intensity of the direct-current external magnetic field applied to the probe; and a direct-current magnetic field determination unit determining a value of the direct-current magnetic field originating from a specimen.

Abstract: An object is mounted on a surface of a sample carrier. Properties of the surface of the object are measured and/or modified by means of a plurality of independently movable heads, each comprising a microscopic probe. The heads being located between the surface of a reference grid plate and the surface of the sample carrier. Head specific target locations are selected for the heads. Each head is moved over the surface of the reference grid plate, to the target location of the head. During movement a position of the head is determined from markings on the reference grid plate sensed by sensor in the head. When the sensor has indicated that the head is at the target location selected for the head a force between the head and the reference grid plate is switched to seat and/or clamp the head on the reference grid plate.