Patents Examined by Michael Logie
  • Patent number: 9343261
    Abstract: A combined round-multipole magnetic lens comprises a coil bracket, a first pole piece and a second pole piece. At least a first pole shoe of the first pole piece on the coil support and at least a second pole shoe of the second pole piece under the coil support respectively extend towards the central axis. The first pole shoe and the second pole shoe are symmetric according to the central axis, or the first pole shoes and the second pole shoes are respectively symmetrically arranged, and the angle difference between the first pole shoe and the adjacent second pole shoes is 360/2N degrees. A magnetic circuit gap is formed between the first pole shoe and the adjacent second pole shoe, for generating a magnetic field distribution of multi-poles and reducing the volume and the number of power supplies.
    Type: Grant
    Filed: November 6, 2014
    Date of Patent: May 17, 2016
    Assignee: NATIONAL TSING HUA UNIVERSITY
    Inventors: Wei-Yu Chang, Fu-Rong Chen, Te-Hui Lee, Tsu-Wei Huang
  • Patent number: 9341585
    Abstract: An X-ray detector includes a housing and an X-ray sensing device provided within the housing along the axis of the housing, wherein the housing is structured to be coupled to the electron column or sample chamber of a charged particle beam device. The X-ray detector also includes an electron detector structured to detect a plurality of electrons ejected from a sample in response to an electron beam impinging on the sample, the electron detector being coupled to the housing on or near the axis such that a first line of sight to the electron detector from a point at which the electron beam impinges on the sample is similar to a second line of sight to the X-ray sensing device from the point at which the electron beam impinges on the sample such that X-ray and Backscattered electron images will show similar parallax and shadowing effects.
    Type: Grant
    Filed: October 15, 2013
    Date of Patent: May 17, 2016
    Assignee: PulseTor, LLC
    Inventors: Nicholas C. Barbi, Richard B. Mott
  • Patent number: 9343268
    Abstract: In accordance with one aspect of this invention, a multi charged particle beam writing apparatus includes an aperture member, in which a plurality of openings are formed, configured to form multi-beams by making portions of the charged particle beam pass through the plurality of openings; a plurality of blankers configured to perform blanking-deflect regarding beams corresponding to the multi-beams; a writing processing control unit configured to control writing processing with a plurality of beams having passed through different openings among the plurality of openings being irradiated on the target object at a predetermined control grid interval; and a dose controlling unit configured to variably control a dose of a beam associated with deviation according to a deviation amount when an interval between the plurality of beams irradiated is deviated from the control grid interval.
    Type: Grant
    Filed: October 30, 2014
    Date of Patent: May 17, 2016
    Assignee: Nuflare Technology, Inc.
    Inventors: Ryoichi Yoshikawa, Munehiro Ogasawara
  • Patent number: 9338870
    Abstract: A first remaining plasma that at least partially coincides with a target region is formed; a target including target material in a first spatial distribution to the target region is provided, the target material including material that emits EUV light when converted to plasma; the first remaining plasma and the initial target interact, the interaction rearranging the target material from the first spatial distribution to a shaped target distribution to form a shaped target in the target region, the shaped target including the target material arranged in the shaped spatial distribution; an amplified light beam is directed toward the target region to convert at least some of the target material in the shaped target to a plasma that emits EUV light; and a second remaining plasma is formed in the target region.
    Type: Grant
    Filed: December 8, 2014
    Date of Patent: May 10, 2016
    Assignee: ASML Netherlands B.V.
    Inventors: Yezheng Tao, John Tom Stewart, IV, Daniel J.W. Brown
  • Patent number: 9337822
    Abstract: To provide a switch circuit in which ON/OFF control can be realized even in a state where high voltage is not applied, and high voltage can be completely lowered to the ground. Provided is a switch circuit that includes plural MOS switches connected in series in such a manner that the source of one element is connected to the drain of another between high voltage and a system ground and that switches a connection state between the high voltage and the system ground, the switch circuit including: a MOS switch 101 the source of which is connected to the system ground among the plural MOS switches; a MOS switch 102 the source of which is connected to the drain of the MOS switch 101 in a shared manner and the drain of which is connected to the high voltage side among the plural MOS switches; a MOS switch 103 the drain of which is connected to the gate of the MOS switch 102 in a shared manner; and a resistor 104 that is connected in parallel between the gate and the source of the MOS switch 102.
    Type: Grant
    Filed: April 1, 2013
    Date of Patent: May 10, 2016
    Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Ryo Kadoi, Yoshikazu Sugiyama
  • Patent number: 9333375
    Abstract: An IGRT apparatus includes a medical imaging device integrated with a linear accelerator, the linear accelerator is configured for emitting a radiation beam, which is shaped by a beam shaper, and a gantry. The position of the beam shaper is adjustable between a first position and a second position; the first position is a treatment position and the second position is a non-treatment position and the first position is within the gantry and the second position is removed from the gantry.
    Type: Grant
    Filed: October 27, 2014
    Date of Patent: May 10, 2016
    Assignee: Elekta AB (Publ)
    Inventors: Philip Lee Arber, Joseph Hubert Marie Habets, Clifford William Perkins, John Shelley
  • Patent number: 9326747
    Abstract: A mobile radiation imaging apparatus includes a radiation generation unit configured to generate radiation, a cart, a supporting member formed on the cart and configured to hold the radiation generation unit in a movable manner with respect to the cart, a detection unit configured to detect arrangement of the radiation generation unit in a particular non-imaging position, and a control unit configured to limit a motion of the supporting member according to a detection result by the detection unit.
    Type: Grant
    Filed: September 26, 2013
    Date of Patent: May 3, 2016
    Assignee: Canon Kabushiki Kaisha
    Inventor: Satoru Omura
  • Patent number: 9329202
    Abstract: A method is presented for calibrating a cantilever, such as a scanning probe microscope cantilever (SPM cantilever). The cantilever to be calibrated comprises at least a first and a second layer having a mutually different thermal expansion coefficient, the method comprising the steps of: controllably causing a temperature distribution along the cantilever, measuring a spatial state of the cantilever, computing a mechanical property from the observed spatial state caused by controllably changing the temperature. Also a calibration arrangement and a scanning probe microscope provided with the calibration arrangement are presented.
    Type: Grant
    Filed: March 22, 2013
    Date of Patent: May 3, 2016
    Assignee: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
    Inventor: Hamed Sadeghian Marnani
  • Patent number: 9316569
    Abstract: A sub-micron scale property testing apparatus including a test subject holder and heating assembly. The assembly includes a holder base configured to couple with a sub-micron mechanical testing instrument and electro-mechanical transducer assembly. The assembly further includes a test subject stage coupled with the holder base. The test subject stage is thermally isolated from the holder base. The test subject stage includes a stage subject surface configured to receive a test subject, and a stage plate bracing the stage subject surface. The stage plate is under the stage subject surface. The test subject stage further includes a heating element adjacent to the stage subject surface, the heating element is configured to generate heat at the stage subject surface.
    Type: Grant
    Filed: August 26, 2010
    Date of Patent: April 19, 2016
    Assignee: Hysitron, Inc.
    Inventors: Yunje Oh, Syed Amanulla Syed Asif, Edward Cyrankowski, Oden Lee Warren
  • Patent number: 9305741
    Abstract: A wide range tunable magnetic lens for the desktop electron microscope is provided. The wired range tunable magnetic lens comprises a coil support, an inner pole piece, a permanent-magnet, a first outer pole piece and a second outer pole piece. The inner pole piece covers the coil support and forms a first magnetic-circuit gap. The permanent-magnet forms a ring structure according to the central axis and is disposed at the outer side of the inner pole piece away from the central axis. The first outer pole piece is adjacently disposed at the upper-side of the permanent-magnet and extends to the central hole of the coil support. The second outer pole piece is adjacently disposed at the under-side of the permanent-magnet and extends to the central hole of the coil support, wherein the first outer pole piece and the second outer pole piece forms a second magnetic-circuit gap.
    Type: Grant
    Filed: November 3, 2014
    Date of Patent: April 5, 2016
    Assignee: NATIONAL TSING HUA UNIVERSITY
    Inventors: Wei-Yu Chang, Fu-Rong Chen, Te-Hui Lee, Tsu-Wei Huang
  • Patent number: 9299547
    Abstract: A mass spectrometric analysis method comprises: (1) processing a mass spectrum to reduce the signals to monoisotopic values; (2) creating a list of differences between the monoisotopic values; (3) creating one or more lists of theoretical mass-to-charge differences among known adducts, charge states and polymerization states whose formation may be expected from various analyte molecules; (4) comparing the theoretical differences (line or edge in the network) to the list of differences from the mass spectrum and, where applicable, make and tabulate tentative species assignments; (5) assigning the mass spectral peaks to respective ion species in accordance with the redundancy of each assignment based on multiple independent calculated mass-to-charge differences pertaining to each peak; (6) choosing an ion species for further fragmentation or reaction in the mass spectrometer, based on the assigning; and (7) performing the fragmentation or reaction on the chosen ion species in the mass spectrometer.
    Type: Grant
    Filed: September 22, 2015
    Date of Patent: March 29, 2016
    Assignee: Thermo Finnigan LLC
    Inventors: Thomas McClure, Michael J. Athanas, Matthew Kump
  • Patent number: 9299466
    Abstract: An apparatus for processing a radionuclide including a parent radionuclide that decays over time into a daughter radionuclide, a separation column that separates the daughter radionuclide from the parent radionuclide, a plurality of valves and at least one pump that operate to separate the daughter radionuclide from the parent radionuclide and deliver the daughter radionuclide into the daughter radionuclide container by alternately connecting at least two of the parent radionuclide container, the daughter radionuclide container, the separation column container and the plurality of processing containers, a plurality of RFID tags including an RFID tag of the plurality of RFID tags affixed to each of the daughter radionuclide container and the separation column and a programmed processor that reads an identifier of each of the plurality of RFID tags, an identifier and position of each of the plurality of valves and pump and saves the identifiers, positions and operations into a tracking file.
    Type: Grant
    Filed: October 30, 2014
    Date of Patent: March 29, 2016
    Assignee: NORTHSTAR MEDICAL RADIOISOTOPES LLC
    Inventors: Glenn H. Isensee, Lionel Johnson
  • Patent number: 9297786
    Abstract: A cross-flow ion mobility spectrometer consists of two parallel plates defining a volume between them. Analyte ions flow along an axis from an entrance end to an exit end through the volume. An RF confining field tends to guide ions along the axis. An analytical gas flow is established orthogonal to the axis. A DC electrostatic analytical field is oriented in opposition to the analytical gas flow such that the “drag force” on ions of the selected mobility due to the analytical gas flow is balanced by the force on the ions due to the electrostatic analytical field. The selected ions are thereby able to follow a stable path to the exit end of the cross-flow mobility analyzer. However, the force on ions of other than the selected mobility is unbalanced and these ions are deflected and lost.
    Type: Grant
    Filed: August 18, 2014
    Date of Patent: March 29, 2016
    Assignee: Bruker Daltonics, Inc.
    Inventor: Melvin Andrew Park
  • Patent number: 9299470
    Abstract: An arrangement for modifying the local intensity of x-ray radiation includes an x-ray filter with a plurality of absorption chambers, which may be filled by a ferrofluid. The absorption chambers are stacked in the x-ray beam direction. The x-ray filter includes a plurality of storage containers in which the ferrofluid may be stored. Each of the absorption chambers is connected to a respective one of the storage containers. The absorption of the x-ray radiation is achieved as a result of individual absorption chambers being filled with the ferrofluid. By filling a different number of absorption chambers, the local intensity of the x-ray radiation may be modified easily, precisely and quickly.
    Type: Grant
    Filed: September 26, 2013
    Date of Patent: March 29, 2016
    Assignee: Siemens Aktiengesellschaft
    Inventors: Oliver Hayden, Lukas Richter, Manfred Rührig, Oliver Schmidt
  • Patent number: 9297727
    Abstract: A method for using differential imaging for applications involving TEM samples by allowing operators to take multiple images during a procedure involving a focused ion beam procedure and overlaying the multiple images to create a differential image that clearly shows the differences between milling steps. The methods also involve generating real-time images of the area being milled and using the overlays of the differential images to show small changes in each image, and thus highlight the ion beam milling location. The methods also involve automating the process of creating differential images and using them to automatically mill subsequent slices.
    Type: Grant
    Filed: October 29, 2014
    Date of Patent: March 29, 2016
    Assignee: FEI Company
    Inventor: Alexander Buxbaum
  • Patent number: 9287085
    Abstract: A processing apparatus including a process chamber, a plasma source disposed within the process chamber, wherein the plasma source is movable in a first direction and is configured to emit an ion beam along a second direction that is orthogonal to the first direction. The apparatus may further include a platen disposed within the process chamber for supporting a substrate, and an ion beam current sensor that is disposed adjacent to the platen.
    Type: Grant
    Filed: May 12, 2014
    Date of Patent: March 15, 2016
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Ernest E. Allen, Jon Ballou, Kevin M. Daniels, James P. Buonodono, Joseph P. Dzengeleski
  • Patent number: 9285342
    Abstract: An ion mobility spectrometer system is disclosed. In one aspect, the system includes a gas chromatograph, first and second ion mobility spectrometers, and a sample feed device that feeds a sample from the gas chromatograph to the first and second ion mobility spectrometers. The sample feed device includes an inner chamber, first and second sample outlets for outputting the sample from the gas chromatograph to the first and second ion mobility spectrometers, respectively, and a gas inlet for inputting a gas into the sample feed device. The system detects and identifies molecules at improved resolution and enhanced molecule information. The system detects positive and negative ions, interrelates positive-mode and negative-mode spectrums, and separates substances.
    Type: Grant
    Filed: October 27, 2014
    Date of Patent: March 15, 2016
    Assignee: Nuctech Company Limited
    Inventors: Qingjun Zhang, Shiping Cao, Yuanjing Li, Zhiqiang Chen, Ziran Zhao, Yinong Liu, Jianping Chang, Yan Zheng, Yanchun Wang, Shaoji Mao
  • Patent number: 9281163
    Abstract: A TEM grid provides posts having steps, the steps increasing the number of samples that can be attached to the grid. In some embodiments, each post includes a one sided stair step configuration. A method of extracting multiple samples includes extracting samples and attaching the samples to the different stair steps on the posts.
    Type: Grant
    Filed: April 14, 2014
    Date of Patent: March 8, 2016
    Assignee: FEI Company
    Inventors: Brian Roberts Routh, Jr., Valerie Brogden, Michael Schmidt
  • Patent number: 9281169
    Abstract: Provided is a mass spectrometer capable of easy exchange of a measurement sample and suppressing a carryover. The mass spectrometer includes a mass spectrometry section, an ion source the internal pressure of which is reduced by a differential pumping from the mass spectrometry section and the ion source ionizes the sample gas, a sample container in which the sample gas is generated by vaporizing the measurement sample, a thin pipe that introduces the sample gas generated in the sample container into the ion source, an elastic tube of openable and closable that connects the sample container and the thin pipe, a pair of weirs that closes or opens the elastic tube so as to sandwich the elastic tube, and a cartridge that integrates the sample container, the thin pipe, and the elastic tube, and is detachable in a lump from a main body of the mass spectrometer.
    Type: Grant
    Filed: March 10, 2015
    Date of Patent: March 8, 2016
    Assignee: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Hidetoshi Morokuma, Koji Ishiguro, Shun Kumano
  • Patent number: 9281090
    Abstract: Packaging for transporting radioactive material (1) comprising a radiation protection structure (4) comprising a shielding portion (5) defining a cavity (2) to house the radioactive material and a portion (7) having the effect of distancing the radioactive material from the outside of the packaging. The distancing-effect portion (7) directly encloses the shielding portion (5). The protection structure (4) has a thickness e associated with a segment (S) connecting a point (B) on the outer surface of the packaging to the center of gravity (G) of the cavity (2). It satisfies for any point (B): e=e1+e2 and 0.05<e1/e<0.25, where e1 is the thickness of the shielding portion (5), e2 is the thickness of the distancing-effect portion (7), with e1, e2 associated with the segment (S). The shielding portion (5) has a mean density of more than 8, the distancing-effect portion has a mean density of less than 0.5.
    Type: Grant
    Filed: June 27, 2013
    Date of Patent: March 8, 2016
    Assignee: TN INTERNATIONAL
    Inventors: Gilda Leleu, Kévin Massif