Abstract: An extreme ultraviolet light generation apparatus may include a chamber causing a target substance to be turned into plasma with laser light, a light concentrating mirror concentrating extreme ultraviolet light generated by the turning of the target substance into plasma, a gas supply unit supplying gas into the chamber, a magnetic field generation unit generating a magnetic field including a magnetic field axis that crosses a light path of the extreme ultraviolet light, a first exhaust port arranged at a position through which the magnetic field axis passes in the chamber, a second exhaust port arranged at a position opposite to the light concentrating mirror in the chamber, and a gas exhaust amount adjustment unit adjusting a ratio between an exhaust amount of first exhaust gas exhausted from the first exhaust port and an exhaust amount of second exhaust gas exhausted from the second exhaust port.

Abstract: Various burl designs for holding an object in a lithographic apparatus are described. A lithographic apparatus includes an illumination system, a first support structure, a second support structure, and a projection system. The illumination system is designed to receive radiation and to direct the radiation towards a patterning device that forms patterned radiation. The first support structure is designed to support the patterning device on the first support structure. The second support structure has a plurality of burls and is designed to support the substrate on the plurality of burls. A topography of a top surface of each of the plurality of burls is not substantially flat, such that a contact area between the substrate and each of the plurality of burls is reduced. The projection system is designed to receive the patterned radiation and to direct the patterned radiation towards the substrate.

Abstract: A novel spatial light modulator (SLM) includes a cover glass, and modulation layer, and a plurality of pixel mirrors, and separates unwanted, reflected light from desired, modulated light. In one embodiment, a geometrical relationship exists between the cover glass and the pixel mirrors, such that light that reflects from the cover glass is separated from light that reflects from the pixel mirrors and is transmitted from the SLM. In one example, one of the cover glass or the pixel mirrors is angled with respect to the modulation layer. In another example embodiment, the cover glass has a particular thickness, which introduces destructive interference between light that reflects from the top and bottom surfaces of the cover glass. In another embodiment antireflective coatings are disposed between optical interfaces of the SLM. In another embodiment, light from the SLM is directed through an optical filter to remove unwanted light.

Abstract: In order to provide an optical element in which the occurrence of a region where no light beams are present (omission) is prevented, an optical element is provided with a main substrate which is manufactured from a light-transmitting material and in which a front surface and a rear surface are parallel to the setting directions, wherein at least one main beam splitter surface is provided obliquely to the setting directions and formed inside the primary substrate. The optical element is also provided with a sub substrate which is manufactured from a light transmitting material and in which a front surface and a rear surface are parallel to the setting directions, wherein a sub beam splitter surface is arranged at least between the front surface or the rear surface of the single sub substrate, and the rear surface or the front surface of the main substrate.

Abstract: An apparatus (100) for receiving input radiation (108) and broadening a frequency range of the input radiation so as to provide broadband output radiation (110). The apparatus comprises a fiber (102), wherein the fiber (102) may comprise a hollow core (104) for guiding radiation propagating through the fiber (102). The apparatus (100) further comprises an apparatus for providing a gas mixture (106) within the hollow core (104). The gas mixture (106) comprises a hydrogen component, and a working component, wherein the working component is for broadening a frequency range of a received input radiation (108) so as to provide the broadband output radiation (110). The apparatus may be included in a radiation source.

Abstract: The disclosed structured light projector may include (1) a light source having a light-emitting side that emits light, (2) a solid optical spacer element having a first side securely coupled to the light-emitting side of the light source, and (3) a diffractive optical element (DOE) stack including one or more DOEs, where the DOE stack includes (a) a light-receiving side securely coupled to a second side of the solid optical spacer element opposite the first side, and (b) a light-emitting side opposite the light-receiving side that emits structured light in response to the light received from the light-emitting side of the light source via the solid optical spacer element. Various other devices and methods are also disclosed.

Abstract: A digital light processing projector includes a light machine having a shell. The shell is provided with a first positioning post and a second positioning post. A digital micromirror device is configured with a first positioning hole and a second positioning hole. The first positioning post is located in the first positioning hole. The second positioning post is located in the second positioning hole. The light machine includes a circuit board assembly, a pressing plate, and a first connection assembly for fixed connection with the shell, and fixation of the pressing plate, the circuit board assembly and the digital micromirror device on the shell.

Abstract: A target supply device according to an aspect of the present disclosure includes a nozzle through which a liquid target substance is output, and a vibration unit configured to vibrate the target substance supplied to the nozzle, and the vibration unit includes a vibration element configured to vibrate in accordance with applied drive voltage from outside, a vibration transfer unit contacting the nozzle and configured to transfer vibration of the vibration element to the nozzle, a load application member configured to apply a pressing load for pressing the vibration transfer unit against the nozzle, and a load adjustment device configured to adjust the pressing load in accordance with a signal from outside.

Abstract: Systems and methods are provided for selectively incoupling light having different wavelengths into one of a plurality of waveguides. The systems and methods provided for selectively incoupling light having different wavelengths into one of a plurality of waveguides comprise a switching device comprising switchable reflective elements that can be configured to redirect incoming light towards an incoupling element associated with one of a plurality of waveguides.

Abstract: An illumination system including first, second and third light sources, a splitting element and a wavelength conversion element is provided. The first light source emits a first light beam. The second light source emits a second light beam. The third light source emits a third light beam. The splitting element is disposed on transmission paths of the first, the second and the third light beams. The splitting element reflects the first and the third light beams, and allows the second light beam to pass through. During a first time period, the first light beam is transmitted to a first position and the second light beam is transmitted to a second position. During a second time period, the third light beam is transmitted to the first position and the second light beam is transmitted to the second position. Furthermore, a projection apparatus is also provided.

Abstract: An optical engine module comprises a casing, a light valve, a heat dissipating module, and at least three fixtures. The casing comprises at least three fixing structures. The light valve is disposed in the casing and is connected to the casing. The light valve comprises a heat interface. The heat dissipating module comprises a heat dissipating surface in contact with the heat interface of the light valve. The number of the at least three fixing structures and positions of the same correspond respectively to the number of the at least three fixtures and positions of the same. The heat dissipating module is connected to the casing by matching the at least three fixing structures and the at least three fixtures. In the optical engine module, improved stability of the heat dissipating module, preferable heat dissipating efficiency for the light valve, and thus good optical effect are provided.

Abstract: A system comprises a topography measurement system configured to determine a respective height for each of a plurality of locations on a substrate; and a processor configured to: determine a height map for the substrate based on the determined heights for the plurality of locations; and determine at least one alignment parameter for the substrate by comparing the height map and a reference height map, wherein the reference height map comprises or represents heights for a plurality of locations on a reference substrate portion.

Abstract: Provided are a projector and a lens adjusting module. The projector includes a main body, a light source disposed on the main body and providing an illumination beam, a light valve disposed on the main body and converting the illumination beam into an image beam, a projection lens movably disposed on the main body in a moving direction and projecting the image beam, and the lens adjusting module. The lens adjusting module includes a driven member connected to the projection lens and having a limiting flange, a limiting structure connected to the main body, and a rotating member screwed to the driven member and rotating to drive the driven member and the projection lens to move in a moving direction. The limiting structure is adapted to stop the limiting flange to limit a movement range of the driven member in the moving direction.

Abstract: A method for thermal management of reticles for conducting an exposure process includes operations. A default state of a reticle is selected based on given data, where the given data includes overlay values of a plurality of processed semiconductor workpieces and temperature profiles of the reticle correlated to the processed semiconductor workpieces. The reticle is regulated to reach the default state before using the reticle to perform the exposure process.

Abstract: The invention discloses a projector, including a light source, a light engine module and a lens module. The lens module includes a plate, a lens, at least two sliding components and a first position adjustment device. The sliding components are disposed between the plate and a light engine housing and located respectively at a first position and a second position of the light engine housing. Each of the sliding components has a sliding member and a distance adjustment member. The plate is movably disposed on the light engine housing via the sliding member. The distance adjustment members are in contact with the sliding members respectively. The first position adjustment device is movably disposed between the plate and the light engine housing. The invention further discloses a lens module. The invention can improve movement accuracy and imaging stability of a projector and a lens module.

Abstract: An imprint lithography method of configuring an optical layer includes depositing a set of droplets atop a side of a substrate in a manner such that the set of droplets do not contact a functional pattern formed on the substrate. The imprint lithography method further includes curing the set of droplets to form a spacer layer associated with the side of the substrate and of a height selected such that the spacer layer can support a surface adjacent the substrate and spanning the set of droplets at a position spaced apart from the functional pattern.

Abstract: A light synthesizing device includes first and second light emitting devices, first and second polarization control members, and a synthesis member. Each of the first and second light emitting devices has at least one first semiconductor laser element and at least one second semiconductor laser element, and configured such that a polarization direction of exit light from the first semiconductor laser element is different from a polarization direction of exit light from the second semiconductor laser element. The first and second polarization control members are respectively configured to change the polarization directions of the exit lights from the first semiconductor laser element of the first light emitting device and the second semiconductor laser element of the second light emitting device. The synthesis member is configured to combine light exited from the first light emitting device and light exited from the second light emitting device.

Abstract: Techniques for improving laser image quality are disclosed herein. An ultra-compact illumination module includes multiple illuminators, photodetectors, and color filters. The illuminators each emit a different spectrum of light. Because of the compact nature of the module and the positioning of the illuminators relative to one another, the different spectrums of light overlap one another prior to being detected by the photodetectors. Each of the photodetectors is associated with a corresponding one of the illuminators, and each of the color filters is associated with a corresponding one of the photodetectors. Each color filter is positioned in-between its corresponding illuminator and photodetector and passes a particular spectrum of light while filtering out other spectrums of light. Consequently, the photodetectors each receive spectrally filtered light having passed through at least one of the color filters. The power output of the illuminators can also be corrected based on output from the photodetectors.

Abstract: A lithographic apparatus comprising a projection system configured to project a patterned radiation beam to form an exposure area on a substrate, a cooling apparatus located in use above the substrate adjacent to the exposure area, the cooling apparatus being configured to remove heat from the substrate during use, a plasma vessel located below the cooling apparatus with its opening facing towards the cooling apparatus, and a gas supply for supplying gas to the plasma vessel and an aperture for receipt of a radiation beam. In use, supplied gas and a received radiation beam react to form a plasma within the plasma vessel that is directed towards a surface of the cooling apparatus which faces the opening of the plasma vessel.

Abstract: Provided is a head-up display having excellent handling properties. This head-up display is provided with a display panel, a substrate including a light source which illuminates the display panel from a rear surface thereof, a heat sink which dissipates heat transferred from the substrate, and a case which accommodates the heat sink. The case includes an opening exposing at least a portion of the heat sink, and a protecting wall which has a larger amount of protrusion than the amount of protrusion of the heat sink protruding from the opening, and which protects the heat sink protruding from the opening.