Abstract: A method for material processing utilizing a material processing system to perform a process. The method performs a process (510), measures a scan of data (520), and transforms the data scan (530) into a signature (540) including at least one spatial component. The scan of data (530) can include a process performance parameter such as an etch rate, an etch selectivity, a deposition rate, a film property, etc. The signature (540) can be stored (550), and compared with either a previously acquired signature or with an ideal signature (560). If at least one spatial component substantially deviates from the reference spatial component, then a process fault has potentially occurred. If the cumulative deviation of all spatial components or a select group of components substantially deviates from a reference set of spatial components, then a process fault has potentially occurred.

Abstract: In a sensor diagnosis process, a controller for controlling an NOx gas sensor performs processing of changing the oxygen partial pressure in a second measurement chamber by changing the oxygen partial pressure in a first measurement chamber (S190), processing of detecting a current flowing through a second pump cell before the change of the oxygen partial pressure (S180), and processing of detecting a current flowing through the second pump cell after the change of the oxygen partial pressure (S230). Furthermore, the controller performs processing of judging whether or not the ratio between the current values detected by the respective current detecting unit falls within an allowable range, judging that the second pump cell 113 is in a normal state if the ratio between the current values falls within the allowable range, and judging that the second pump cell 113 is in a deteriorated state if the ratio between the current values is out of the allowable range (S240 and S250).

Abstract: A machine for coating a transparent substrate for the production of display screens comprises a coating chamber that has a modular design. Each of the modules 1 features a chamber section 2, a first support 3 that is arranged removably in or at the chamber section 2, and a second support 4 that is arranged removably at the first support 3. Whereas the first support 3 bears the cathodes, the second support 4 is formed as a cover at which are arranged the pumps for producing a vacuum in the coating chamber. Carriers 3 and 4 can be removed laterally from the chamber section 2 to such an extent that areas 11a, 11b accessible to persons can be formed between the module components. In this way, the components of the machine are readily accessible, for example for maintenance purposes. Work can be done simultaneously on the cathodes and in the chamber interior.

Abstract: For forming alumina films on substrates by sputtering of an aluminum metal target in an oxidizing gas-containing atmosphere, a method of producing ? crystal structure-based alumina films efficiently includes as an early film formation, forming films under conditions suited for formation of ? crystal structure alumina. For example the forming forms films of ?crystal structure alumina in a poisoning mode discharge condition only in an early stage of film formation.

Abstract: A wastewater analysis sensor cartridge (10) according to the invention is intended to be used only once. It has a liquid-tight housing (20), which contains at least one electrochemical sensor element (30, 32) and at least one reference element (56). Furthermore, the housing (20) contains a sensor element electrolyte tank (40,42) and a reference element electrolyte tank (44). The ion-sensitive membranes (31, 33) of the sensor elements (30, 32) and the housing (20) consist of plastic.

Abstract: A component separating device includes a substrate, a fluid channel provided at the substrate, an actuator and a groove provided at a surrounding of the actuator, the fluid channel contains a fluid including a liquid component and a solid component, and the actuator generates a standing wave at inside of the fluid channel. By such a constitution, a vibration loss is reduced by reflecting a vibration by the groove to be transmitted to a side of the fluid channel, the standing wave having a strong intensity is generated at inside of the fluid channel, and the small-sized highly accurate component separating device is provided.

Abstract: A single cell oxygen sensor apparatus and method are disclosed. An yttrium-based stabilized layer having electrical terminals connected to the yttrium-based stabilized layer can be provided on a substrate, wherein the yttrium-based stabilized layer is excitable by a constant current applied to the electrical terminals. A plurality of electrodes are located on a side of the yttrium-based stabilized layer and a plurality of heater elements located on said substrate opposite said yttrium-based stabilized layer. The heater elements can maintain the yttrium-based stabilized layer at a particular temperature. A cavity is formed and located between the yttrium-based stabilized layer and the heater elements. The partial pressure of oxygen can be measured by comparing the partial pressure of oxygen within the cavity with respect to the partial pressure of oxygen in the atmosphere external to the single cell oxygen sensor apparatus.

Abstract: The present invention provides a unique solution to the problems of both steady-state and transient signals produced by a variety of interfering stimuli, including humidity, which relies upon the inclusion in a gas sensing electrode in an electrochemical gas sensor of a catalyst material in addition to a first catalyst material reactive to the target gas, the additional, or second, catalyst material producing a response to an interfering stimulus which is of the opposite polarity to that generated by the first catalyst material.

Abstract: Using a gas detection voltage Vs output from a terminal CU, a determination is made at to whether, after startup of an air-fuel ratio detection apparatus (1), a full-range air-fuel ratio sensor (10) has reached a semi-activated state in which a determination can be made as to whether the air-fuel ratio is on the rich or lean side based on a change in a gas detection signal Vic. After determining that the sensor has reached the semi-activated state, the signal Vic is compared with a threshold to determine whether the air-fuel ratio is on the rich or lean side. In the apparatus (1), the potential difference between an outer pump electrode of a pump cell (14) and a reference electrode of an oxygen concentration measurement cell (24) is obtained via a first differential amplification circuit (53) as the gas detection signal Vic, the signal Vic being highly responsive to a change in air-fuel ratio of exhaust gas.

Abstract: A sensor control apparatus comprising an air/fuel ratio sensor having a sensor cell with a pair of electrodes, a current source capable of supplying a predetermined current between the electrodes, a current control section that turns on/off the current source, a voltage detecting section that detects voltages generated between the electrodes at respective times when the current source is turned on and off, a differential voltage detecting section that detects a differential voltage between the voltages that are generated at the respective times when the current source is turned on and off, a first voltage comparing section that compares the differential voltage with a first threshold voltage, and a half-activated state determining section that determines that the sensor cell has reached a half-activated state when the differential voltage is lower than the first threshold voltage. A sensor control method is also provided.

Abstract: Disclosed is a DNA analysis method and a DNA analyzer whose signal intensity is not lowered even when a material at a higher density is measured. There is supplied dATP, dTTP, dGTP, or dCTP from a dATP solution vessel, a dTTP solution vessel, a dGTP solution vessel, or a dCTP solution vessel, and this causes an extension reaction of a double-stranded DNA immobilized to a bead, to yield pyrophosphoric acid. The pyrophosphoric acid is converted into a redox compound by the actions of a reagent and an enzyme contained in a reaction buffer in a reaction buffer vessel. The redox compound causes a variation in surface potential of a measuring electrode bearing an electrochemically active material immobilized thereto through an insulating molecule, and this variation causes a variation in drain current of a field-effect transistor electrically connected to the measuring electrode. Thus, the extension reaction is detected.

Abstract: Claimed is a sputtering target system comprising a plurality of backing plates to be individually cooled. Each backing plate is provided on its back side with a meandering groove that is closed off by a sealing plate. The sealing plate is welded around its circumference to the backing plate and at the same time is welded to at least one ridge located at a distance from the frame, which separates two grooved sections from one another. The sealing plate thus welded to the backing plate not only closes off the grooves to form a cooling channel, but also is used for reinforcement of the otherwise relatively flat backing plate.

Abstract: A ceramic window in an iPVD module is provided with features that reduce heating of the window as a result of metal film deposits on the window. Dielectric dissipation and resistive heating of the metal film are reduced by the features. Reducing of the window heating is provided by either shaping the window surface on the chamber side of the window or providing structurally floating features to block at least a portion of a conductive path from forming on the chamber side window surface. The shaping can produce contours that prevent current paths from being created in the forming metal film. In addition or in the alternative, texture on the chamber side surface of the window is provided to increase surface area and thereby reduce film thickness.

Abstract: The present invention relates to an aeration device for use in a liquid medium. The device includes a housing adapted to float within the medium such that a top portion thereof remains above a top surface of the medium. The housing has a bottom portion and an open side portion. The device further includes a hose affixed to the bottom portion of the housing substantially parallel to the surface of the liquid medium. The hose has a wall with a plurality of pores formed therein. The device further includes a gas-supplying pipe affixed to the hose and means for supplying a gas to the pipe such that the gas passes through the pipe and into the hose.

Abstract: The present invention provides a sensor, such as a biosensor, comprising at least one self-assembled monolayer (SAM) comprising analyte-sensitive groups, such as glucose-sensitive groups, attached to the surface of the outer wall of a carbon nanotube (CNT), such as a single-walled carbon nanotube (SWNT), by terminal groups, which bind to a thin layer of a metal or metal oxide, which has been deposited on the surface of the outer wall of the nanotube.

Abstract: Provided is a hollow cathode sputtering target comprising an inner bottom face having a surface roughness of Ra?1.0 ?m, and preferably Ra?0.5 ?m. This hollow cathode sputtering target has superior sputter film evenness (uniformity), generates few arcing and particles, is capable of suppressing the peeling of the redeposited film on the bottom face, and has superior deposition characteristics.

Abstract: Described herein is an apparatus and a method for producing atom clusters based on a gas discharge within a hollow cathode. The hollow cathode includes one or more walls. The one or more walls define a sputtering chamber within the hollow cathode and include a material to be sputtered. A hollow anode is positioned at an end of the sputtering chamber, and atom clusters are formed when a gas discharge is generated between the hollow anode and the hollow cathode.

Abstract: The present invention is made to provide a method of producing a ZnO thin film in which the c-axis is oriented in-plane over a large area. A ZnO target 28 as the material of the thin film is sputtered by using a magnetron sputtering system, and a flow of material (material flow) directed from the cathode 23 to the anode 24 is generated in a plasma. The material flow has a high density at its central part and has a low density as it departs from the central part. A substrate 20 is fixed at a position displaced from the central axis of a region 30 where the material flow is generated so as to be inclined relative to the central axis. Thereby, a temperature gradient is naturally formed on the substrate 20, and the c-axis of the ZnO thin film deposited on the substrate 20 is oriented in-plane to the temperature gradient direction. Since the substrate 20 is fixed so as to be inclined relative to the material flow, the area where the c-axis is consistently oriented in-plane becomes larger than before.

Abstract: A sensor element is provided for determining a physical property of a measuring gas, especially of the concentration of at least one gas component in the measuring gas, which has at least one ceramic layer, a diffusion barrier adjoining the at least one ceramic layer and at least one electrode that is exposed to the measuring gas diffusing through the diffusion barrier. In order to reduce the production variations with respect to the static pressure dependence and the limiting current of the diffusion barrier), the proportions of silicon in the diffusion barrier and in the at least one ceramic layer are approximately equal and differ by not more than 1 wt. %.

Abstract: An apparatus and methods for solar conversion using nanoscale cometal structures are disclosed herein. The cometal structures may be coaxial and coplanar. A nanoscale optics apparatus for use as a solar cell comprises a plurality of nanoscale cometal structures each including a photovoltaic material located between a first electrical conductor and a second electrical conductor. A method of fabricating solar cells comprises preparing a plurality of nanoscale planar structures; coating a plurality of planar surfaces of the plurality of planar structures with a photovoltaic semiconductor while leaving space between the plurality of planar surfaces; and coating the photovoltaic semiconductor with an outer electrical conductor layer, wherein a portion of the outer electrical conductor layer is located between the planar structures to form coplanar structures.