Patents Examined by Nicole M Ippolito
  • Patent number: 11662333
    Abstract: A system for filtering ions includes first and second surfaces extending along first and second perpendicularly arranged directions, an ion channel between the surfaces configured to receive an ion stream, and first and second electrode arrays associated with the first and second surfaces, respectively. The first and second electrode arrays include a first plurality of electrodes arranged along the first direction and a second plurality of electrodes arranged along the second direction. A controller is configured to apply a first voltage signal to the first plurality of electrodes, which are configured to generate a drive potential traveling along the first direction, and a second voltage signal to the electrode arrays, which are configured to generate an electric potential. The drive and electric potentials are configured to direct ions having mobilities in a first range along a first path and ions having mobilities in a second range along a second path.
    Type: Grant
    Filed: April 6, 2021
    Date of Patent: May 30, 2023
    Assignee: MOBILion Systems, Inc.
    Inventors: John Daniel DeBord, Liulin Deng, Sidney E. Buttrill, Jr.
  • Patent number: 11664188
    Abstract: An edge detection system is provided that generates a scanning electron microscope (SEM) linescan image of a pattern structure including a feature with edges that require detection. The edge detection system includes an inverse linescan model tool that receives measured linescan information for the feature from the SEM. In response, the inverse linescan model tool provides feature geometry information that includes the position of the detected edges of the feature.
    Type: Grant
    Filed: May 10, 2021
    Date of Patent: May 30, 2023
    Assignee: Fractilia, LLC
    Inventor: Chris Mack
  • Patent number: 11662324
    Abstract: A computer-based method for three-dimensional surface metrology of samples based on scanning electron microscopy and atomic force microscopy. The method includes: (i) using a scanning electron microscope (SEM) to obtain SEM data of a set of sites on a surface of a sample; (ii) using an atomic force microscope (AFM) to measure vertical parameters of sites in a calibration subset of the set; (iii) calibrating an algorithm, configured to estimate a vertical parameter of a site when SEM data of the site are fed as inputs, by determining free parameters of the algorithm, such that residuals between the algorithm-estimated vertical parameters and the AFM-measured vertical parameters are about minimized; and (iv) using the calibrated algorithm to estimate vertical parameters of the sites in the complement to the calibration subset.
    Type: Grant
    Filed: March 18, 2022
    Date of Patent: May 30, 2023
    Assignee: Applied Materials Israel Ltd.
    Inventors: Ido Almog, Ron Bar-Or, Lior Yaron
  • Patent number: 11656245
    Abstract: A method and device for measuring dimension of a semiconductor structure are provided. A probe of an Atomic Force Microscope (AFM) is controlled at first to move a first distance from a preset reference position to a top surface of a semiconductor structure to be measured in a direction perpendicular to the top surface of the semiconductor structure to be measured, then the probe is controlled to scan the surface of the semiconductor structure to be measured while keeping the first distance in a direction parallel to the top surface of the semiconductor structure to be measured, amplitudes of the probe at respective scanning points on the surface of the semiconductor structure to be measured are detected, and a Critical Dimension (CD) of the semiconductor structure to be measured is determined according to the amplitudes of the probe at respective scanning points on the surface of the semiconductor structure.
    Type: Grant
    Filed: August 3, 2021
    Date of Patent: May 23, 2023
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Zheng Li
  • Patent number: 11658018
    Abstract: Provided is a sample support body that includes a substrate, an ionization substrate, and a support. The ionization substrate has a plurality of measurement regions for dropping a sample on a second surface. A plurality of through-holes that open in a first surface and the second surface are formed at least in the measurement regions of the ionization substrate. A conductive layer is provided on peripheral edges of the through-holes at least on the second surface. The support has a first support provided on peripheral edges of the measurement regions on the first surface to separate the plurality of measurement regions when viewed in the direction in which the substrate and the ionization substrate face each other.
    Type: Grant
    Filed: August 3, 2018
    Date of Patent: May 23, 2023
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takayuki Ohmura, Masahiro Kotani
  • Patent number: 11659646
    Abstract: A target supply device may include a tank configured to store a target substance, a pressure adjuster configured to adjust a pressure in the tank, a filter configured to filter the target substance in the tank, a nozzle configured to output a droplet of the target substance having passed through the filter, a droplet detector configured to detect outputting of the droplet from the nozzle, and a processor configured to control the pressure adjuster so that a pressure-increasing speed of the pressure in the tank is higher after detection of outputting of the droplet than before detection of outputting of the droplet, during a period in which the pressure in the tank is increased to a target pressure from a pressure at which outputting of the droplet is detected by the droplet detector for the first time after installation of the target supply device.
    Type: Grant
    Filed: October 4, 2021
    Date of Patent: May 23, 2023
    Assignee: Gigaphoton Inc.
    Inventors: Koji Yamasaki, Fumio Iwamoto
  • Patent number: 11658021
    Abstract: Disclosed are systems and methods to provide rapid and autonomous detection of analyte particles in gas and liquid samples. Disclosed are methods and devices for identifying biological aerosol analytes using MALDI-MS and chemical aerosol analytes using LDI and MALDI-MS using time-of-flight mass spectrometry (TOFMS).
    Type: Grant
    Filed: August 26, 2020
    Date of Patent: May 23, 2023
    Assignee: Zeteo Tech, Inc.
    Inventors: Wayne A. Bryden, Charles J. Call, Michael McLoughlin, Dapeng Chen, Scott Ecelberger, Nathaniel K. Jones, Steven Strohl, Gary Anderson
  • Patent number: 11656198
    Abstract: Provided is a sample support body that includes a substrate, an ionization substrate, a support, and a frame. The ionization substrate has a plurality of measurement regions for dropping a sample on second surface. A plurality of through-holes that open in a first surface and the second surface are formed at least in the measurement regions of the ionization substrate. A conductive layer is provided on peripheral edges of the through-holes at least on the second surface. The frame has a wall provided on peripheral edges of the measurement regions on the second surface to separate the plurality of measurement regions when viewed in the direction in which the substrate and the ionization substrate face each other.
    Type: Grant
    Filed: May 5, 2022
    Date of Patent: May 23, 2023
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takayuki Ohmura, Masahiro Kotani
  • Patent number: 11656387
    Abstract: A diffusive layer including a laminate of a plurality of transparent films is provided. At least one of the plurality of transparent films includes a plurality of diffusive elements with a concentration that is less than a percolation threshold. The plurality of diffusive elements are optical elements that diffuse light that is impinging on such element. The plurality of diffusive elements can be diffusively reflective, diffusively transmitting or combination of both. The plurality of diffusive elements can include fibers, grains, domains, and/or the like. The at least one film can also include a powder material for improving the diffusive emission of radiation and a plurality of particles that are fluorescent when exposed to radiation.
    Type: Grant
    Filed: October 11, 2021
    Date of Patent: May 23, 2023
    Assignee: Sensor Electronic Technology, Inc.
    Inventors: Alexander Dobrinsky, Michael Shur
  • Patent number: 11650222
    Abstract: In the system and method disclosed, an ultrahigh vacuum (UHV) scanning tunneling microscope (STM) tip is used to selectively desorb hydrogen atoms from the Si(100)-2X1:H surface by injecting electrons at a negative sample bias voltage. A new lithography method is disclosed that allows the STM to operate under imaging conditions and simultaneously desorb H atoms as required. A high frequency signal is added to the negative sample bias voltage to deliver the required energy for hydrogen removal. The resulted current at this frequency and its harmonics are filtered to minimize their effect on the operation of the STM's feedback loop. This approach offers a significant potential for controlled and precise removal of hydrogen atoms from a hydrogen-terminated silicon surface and thus may be used for the fabrication of practical silicon-based atomic-scale devices.
    Type: Grant
    Filed: September 30, 2021
    Date of Patent: May 16, 2023
    Assignee: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
    Inventors: Seyed Omid Reza Moheimani, Hamed Alemansour
  • Patent number: 11651930
    Abstract: The present invention is to generate a spatially phase modulated electron wave. A laser radiating apparatus, a spatial light phase modulator, and a photocathode are provided. The photocathode has a semiconductor film having an NEA film formed on a surface thereof, and a thickness of the semiconductor film is smaller than a value obtained by multiplying a coherent relaxation time of electrons in the semiconductor film by a moving speed of the electrons in the semiconductor film. According to the configuration, a spatial distribution of phase and a spatial distribution of intensity of spatial phase modulated light are transferred to an electron wave, and the electron wave emitted from an NEA film is modulated into the spatial distribution of phase and the spatial distribution of intensity of the light.
    Type: Grant
    Filed: December 2, 2021
    Date of Patent: May 16, 2023
    Assignee: Hitachi High-Tech Corporation
    Inventors: Makoto Kuwahara, Koh Saitoh
  • Patent number: 11649958
    Abstract: An elongated lighting module having an asymmetric illumination source formed from at least two rows of light emitting diodes (LEDs) that extend along the long axis of the module and are independently controllable. The illumination source is rectangular and oriented so that the rows of LEDs extend along the long axis of the module. The module has couplings at each end that allow additional modules to be interconnected therewith using a linking member and a clamp. The lighting modules are powered via a wiring harness that extends down a support pole to a power converter stack having LED drivers to control the modules.
    Type: Grant
    Filed: September 25, 2020
    Date of Patent: May 16, 2023
    Assignee: M3 Innovation, LLG
    Inventors: Christopher D. Nolan, Joseph R. Casper
  • Patent number: 11650223
    Abstract: The present disclosure relates to a method for analyzing an electrode for a battery, which has the advantage of being capable of more easily distinguishing between the constituent materials of the electrode such as the electrode active material, the conductive material, and the pores, by using scanning spreading resistance microscopy.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: May 16, 2023
    Inventors: Byung Hee Choi, Byung Joon Chae, Jung Hoon Han, Ji Yeon Byeon
  • Patent number: 11651949
    Abstract: A spherical ion trap includes a substrate and an ion aperture; two RF electrodes in electrostatic communication with an ion trapping region; RF ground electrodes in electrostatic communication with the ion trapping region; and the ion trapping region bounded by opposing RF electrodes and the RF ground electrodes, such that: the ion trapping region is disposed within the ion aperture and receives ions that are selectively trapped in the ion trapping region in response to receipt of DC and RF voltages by the RF electrodes, and receipt of the DC voltages by RF ground electrodes, and the first RF electrode, the second RF electrode, the RF ground electrodes, and the ion trapping region are disposed in the same plane within the ion aperture.
    Type: Grant
    Filed: February 1, 2022
    Date of Patent: May 16, 2023
    Assignee: GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE
    Inventors: David Ray Leibrandt, David Brian Hume, Roger Charles Brown, Jeffrey Aaron Sherman
  • Patent number: 11644478
    Abstract: An atomic force microscope is provided having a controller configured to store one or more positional parameters output by a sensor assembly when a light spot is located at a first preset position on the surface of the cantilever. The controller is further configured to operate an actuator assembly so as to induce movement of the spot away from the first preset position, to detect said movement of the first spot based on a change in the one or more positional parameters output by the sensor assembly, and to operate an optical assembly in response to the detected movement of the first spot to return the first spot to the first preset position.
    Type: Grant
    Filed: February 2, 2022
    Date of Patent: May 9, 2023
    Assignee: Oxford Instruments Asylum Research, Inc.
    Inventors: Jason Bemis, David Aue, Aleksander Labuda
  • Patent number: 11646187
    Abstract: A surface-assisted laser desorption/ionization method according to an aspect includes: a first process of preparing a sample support (2) having a substrate (21) in which a plurality of through-holes (S) passing from one surface (21a) thereof to the other surface (21b) thereof are provided and a conductive layer (23) that covers at least the one surface (21a); a second process of placing a sample (10) on a sample stage (1) and arranging the sample support (2) on the sample (10) such that the other surface (21b) faces the sample (10); and a third process of applying a laser beam (L) to the one surface (21a) and ionizing the sample (10) moved from the other surface (21b) side to the one surface (21a) side via the through-holes (S) due to a capillary phenomenon.
    Type: Grant
    Filed: September 2, 2021
    Date of Patent: May 9, 2023
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Yasuhida Naito, Masahiro Kotani, Takayuki Ohmura
  • Patent number: 11647578
    Abstract: A light source is provided capable of maintaining the temperature of a collector surface at or below a predetermined temperature. The light source in accordance with various embodiments of the present disclosure includes a processor, a droplet generator for generating a droplet to create extreme ultraviolet light, a collector for reflecting the extreme ultraviolet light into an intermediate focus point, a light generator for generating pre-pulse light and main pulse light, and a thermal image capture device for capturing a thermal image from a reflective surface of the collector.
    Type: Grant
    Filed: August 31, 2021
    Date of Patent: May 9, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang Chen, Chieh Hsieh, Sheng-Kang Yu, Shang-Chieh Chien, Kai Tak Lam, Li-Jui Chen, Heng-Hsin Liu, Zhiqiang Wu
  • Patent number: 11644480
    Abstract: A probe assembly for a surface analysis instrument such as an atomic force microscope (AFM) that accommodates potential thermal drift effects includes a substrate defining a base of the probe assembly, a cantilever extending from the base and having a distal end, and a reflective pad disposed at or near the distal end. The reflective pad has a lateral dimension (e.g., length) between about twenty-five (25) microns, and can be less than a micron. Ideally, the reflective pad is patterned on the cantilever using photolithography. A corresponding method of manufacture of the thermally stable, drift resistant probe is also provided.
    Type: Grant
    Filed: August 3, 2018
    Date of Patent: May 9, 2023
    Assignee: Bruker Nano, Inc.
    Inventors: Jeffrey K. Wong, Deepkishore Mukhopadhyay
  • Patent number: 11645569
    Abstract: A method of performing a computation using a quantum computer includes generating a first laser pulse and a second laser pulse to cause entanglement interaction between a first trapped ion and a second trapped ion of a plurality of trapped ions that are aligned in a first direction, each of the plurality of trapped ions having two frequency- separated states defining a qubit, and applying the generated first laser pulse to the first trapped ion and the generated second laser pulse to the second trapped ion. Generating the first laser pulse and the second laser pulse includes stabilizing the entanglement interaction between the first and second trapped ions against fluctuations in frequencies of collective motional modes of the plurality of trapped ions in a second direction that is perpendicular to the first direction.
    Type: Grant
    Filed: September 15, 2022
    Date of Patent: May 9, 2023
    Assignee: IONQ, INC.
    Inventors: Yunseong Nam, Reinhold Blumel, Nikodem Grzesiak
  • Patent number: 11635449
    Abstract: An atomic-force-microscope-based apparatus and method including hardware and software, configured to collect, in a dynamic fashion, and analyze data representing mechanical properties of soft materials on a nanoscale, to map viscoelastic properties of a soft-material sample. The use of the apparatus as an addition to the existing atomic-force microscope device.
    Type: Grant
    Filed: April 18, 2022
    Date of Patent: April 25, 2023
    Assignee: BRUKER NANO, INC.
    Inventors: Sergey Osechinskiy, Anthonius Ruiter, Bede Pittenger, Syed-Asif Syed-Amanulla