Patents Examined by Omar Nixon
  • Patent number: 9726617
    Abstract: Disclosed are methods and apparatus for optimizing a mode of an inspection tool. A first image or signal for each of a plurality of first apertures of the inspection tool is obtained, and each first image or signal pertains to a defect area. For each of a plurality of combinations of the first apertures and their first images or signals, a composite image or signal is obtained. Each composite image or signal is analyzed to determine an optimum one of the combinations of the first apertures based on a defect detection characteristic of each composite image.
    Type: Grant
    Filed: November 8, 2013
    Date of Patent: August 8, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Pavel Kolchin, Richard Wallingford, Lisheng Gao, Grace H. Chen, Markus B. Huber, Robert M. Danen
  • Patent number: 9720088
    Abstract: A measurement device (120) includes a light director and a spatial light modulator (130). The light director is disposed to direct light to the spatial light modulator (130) and the spatial light modulator (130) is disposed to receive light from the light director and to modulate it to form an intensity pattern. An optical element is disposed to receive light which formed the intensity pattern and is arranged to magnify the intensity pattern into a measurement space. A detector (142) is disposed to detect light reflected from the measurement space.
    Type: Grant
    Filed: March 28, 2013
    Date of Patent: August 1, 2017
    Assignee: THE SECRETARY OF STATE FOR BUSINESS, INNOVATION & SKILLS
    Inventors: Edward Benjamin Hughes, Matthew Stuard Warden
  • Patent number: 9714863
    Abstract: An optical spectrometer contains a photodiode and a straining mechanism for imposing adjustable strain on the photodiode. The spectrometer includes a measurement apparatus for measuring variation of photocurrent with strain at different values of the adjustable strain imposed by the straining mechanism. Adjusting the strain allows adjustment of the band gap Eg of the photosensitive region of the photodiode, and this determines the cut-off energy for absorption of photons. Measuring variation of photocurrent with strain at different values of the adjustable strain imposed by the straining mechanism allows study of photons within a desired energy range of the band gap energy corresponding to each strain value.
    Type: Grant
    Filed: November 8, 2013
    Date of Patent: July 25, 2017
    Assignee: International Business Machines Corporation
    Inventors: Bernd W. Gotsmann, Siegfried F. Karg, Emanuel Loertscher, Heike E. Riel, Giorgio Signorello
  • Patent number: 9714825
    Abstract: A device (10) and methods for simultaneously measuring the thickness of individual wafer layers, the depth of etched features on a wafer, and the three-dimensional profile of a wafer. The structure of the device (10) is comprised of a source/receiver section (12) having a broadband source (14), a receiver (16) and a signal processing section (20). An interferometer (28) separates or combines measurement and reference light and has a measurement leg (30) and a reference leg (34), and a reference mirror (36). The device (10) analyzes a received spectrum which is comprised of a measurement of intensity versus wavelength. There are two measurement methods disclosed: the first method is utilized for taking a single measurement and the second method is utilized for multiple measurements.
    Type: Grant
    Filed: April 8, 2011
    Date of Patent: July 25, 2017
    Assignee: Rudolph Technologies, Inc.
    Inventors: David S. Marx, David L. Grant
  • Patent number: 9702689
    Abstract: A method for providing film-thickness analysis with a spectrophotometer includes configuring an illuminator to emit a light beam at a film deposited on a substrate surface, configuring a linear sensor to receive light reflecting off the deposited film on the substrate surface via a gradient index lens and a linear variable filter, and configuring a processor to determine thickness of the film based on spectral reflectivity of the film received from the linear sensor.
    Type: Grant
    Filed: June 18, 2015
    Date of Patent: July 11, 2017
    Assignee: Xerox Corporation
    Inventors: Paul S. Bonino, Robert P. Herloski, Jason M. LeFevre
  • Patent number: 9689665
    Abstract: A position detection apparatus that illuminates diffraction gratings formed on two objects with light from a light source and receives diffracted light from the diffraction gratings to acquire relative positions of the two objects includes: an optical system configured to cause plus n-th order diffracted light and minus n-th order diffracted light from each of the diffraction gratings to interfere with each other, where n is a natural number; a light receiving unit; and a processing unit, wherein the light receiving unit receives a two-beam interference light from each of the diffraction gratings, and wherein the processing unit acquires the relative positions of the two objects by using the two-beam interference light at an area where two-beam interference lights of the diffracted light from the respective diffraction gratings do not overlap each other among the two-beam interference lights of the diffracted light from each of the diffraction gratings.
    Type: Grant
    Filed: December 18, 2012
    Date of Patent: June 27, 2017
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Takahiro Matsumoto
  • Patent number: 9678355
    Abstract: In one embodiment, the optical device for generating an illumination pattern has a beam splitter and a pattern generator mounted in series and optically coupled one with the other. The beam splitter and the pattern generator are configured to cooperate one with the other in formatting an incident light beam into the illumination pattern. The illumination pattern has a plurality of diffraction patterns each resulting from a corresponding portion of the incident light beam being split from other portions of the incident light beam by the beam splitter. Each diffraction pattern has a zero-order beam. Each diffraction pattern overlaps with at least one of the other diffraction patterns and forms at least one overlapping region therewith, wherein the plurality of zero-order beams of the plurality of diffraction patterns are separated from one another in the illumination pattern.
    Type: Grant
    Filed: May 19, 2015
    Date of Patent: June 13, 2017
    Assignee: Osela Inc.
    Inventor: Francis Cayer
  • Patent number: 9677942
    Abstract: A system and method is provided for measuring and storing the paint color formula of a sample. Paint is sprayed on directional samples. The horizontal standard is measured and stored in a database. A vertical standard is measured at a plurality of locations and orientations and stored in the database.
    Type: Grant
    Filed: October 30, 2014
    Date of Patent: June 13, 2017
    Assignee: AXALTA COATING SYSTEMS IP CO. LLC
    Inventor: Larry E. Steenhoek
  • Patent number: 9671388
    Abstract: Provided is an apparatus for blood analysis. The apparatus for blood analysis includes a spin coater to which blood is supplied, a light source part emitting light onto the spin coater, a measurement part detecting light reflected from the blood on the spin coater, and outputting a detected signal, and an analysis part analyzing information on the blood from the detected signal from the measurement part.
    Type: Grant
    Filed: June 4, 2015
    Date of Patent: June 6, 2017
    Assignees: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, PUSAN NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION
    Inventors: Dae-Sik Lee, Jeung Sang Go, Mun Youn Jung
  • Patent number: 9671347
    Abstract: Present disclosure relates to a method of diagnosing malaria infection in a patient by Surface Enhanced Raman Spectroscopy (SERS). The method includes obtaining a sample from said patient, mixing the sample with a suspension of magnetic nanoparticles, wherein said magnetic nanoparticles adsorb hemozoin present in the sample onto their surface, obtaining the SERS spectra of the sample, and correlating the obtained SERS spectra to the presence or amount of hemozoin in the sample, wherein the presence of hemozoin is indicative of malaria infection.
    Type: Grant
    Filed: April 9, 2012
    Date of Patent: June 6, 2017
    Assignee: Nanyang Technological University
    Inventors: Quan Liu, Clement Yuen
  • Patent number: 9651468
    Abstract: A method includes receiving an image of drill cuttings with a data acquisition system that includes one or more processors, the drill cuttings originating from a wellbore being drilled and including a plurality of particles. The image of the drill cuttings is analyzed with the one or more processors by obtaining three two-dimensional distance measurements for each particle and obtaining four angular measurements for each particle. The one or more processors then determine at least one of a particle size distribution of the drill cuttings and a shape distribution of the drill cuttings based on the three two-dimensional distance measurements and the four angular measurements of each particle.
    Type: Grant
    Filed: March 12, 2015
    Date of Patent: May 16, 2017
    Assignee: HALLIBURTON ENERGY SERVICES, INC.
    Inventors: Mathew Dennis Rowe, Jon Troy Gosney, Charles Cutler Britton
  • Patent number: 9651429
    Abstract: An optical measuring device measures a wavelength of a response from a sensing device. The optical measuring device contains a light path coupled to an interface for coupling the light path to the sensing device. A periodic optical filter has an input coupled to the light path, to sample light that is supplied to or received from the sensing device. A continuous output optical filter has an input coupled the light path to sample light that is supplied to or received from the sensing device. A computation circuit is coupled to detectors at the periodic optical filter and the continuous output optical filter. The computation circuit is programmed to process output signals from the detectors obtained during a wavelength scan. The processing involves quantization of data derived from the continuous filter wavelengths associated with respective time points at which the wavelength scan reaches corresponding positions in respective periods of the periodic optical filter.
    Type: Grant
    Filed: December 21, 2011
    Date of Patent: May 16, 2017
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventor: Peter Johan Harmsma
  • Patent number: 9644941
    Abstract: A grazing incidence interferometer is configured to measure a profile of a target surface using a measurement beam radiated on the target surface in a direction oblique to a normal line of the target surface and reflected on the target surface to cause an interference with a reference beam. The grazing incidence interferometer includes: a light source to emit light; a first polarization beam splitter that splits the light from the light source into the reference beam and the measurement beam; a ratio changer that changes a light amount ratio between the reference beam and the measurement beam; a second polarization beam splitter that synthesizes the measurement beam reflected on the target surface and the reference beam; and an image capturing camera that receives the synthesized beam of the reference beam and the measurement beam.
    Type: Grant
    Filed: February 13, 2015
    Date of Patent: May 9, 2017
    Assignee: MITUTOYO CORPORATION
    Inventors: Yoshimasa Suzuki, Reiya Otao
  • Patent number: 9625374
    Abstract: An optical sensor system includes a source module and a detection module. The source module includes a source housing unit having a source window member and a source shielding member. The source module emits a detection signal through the source window member. The detection module includes a detection housing unit having a detection window member and a detection shielding member. The detection module is spaced apart from the source module. The detection module detects the detection signal emitted from the source module at the detection window member.
    Type: Grant
    Filed: September 21, 2011
    Date of Patent: April 18, 2017
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Seongsik Chang, Henryk Birecki, Krzysztof Nauka
  • Patent number: 9618454
    Abstract: The invention concerns a method of measuring the amount of a particular SERS-active taggant compound in a sample of a material which includes the steps of adding an internal standard containing an isotopically-altered version of said SERS-active taggant compound to the sample, contacting the sample/internal standard mixture with a SERS substrate then subjecting the mixture and SERS substrate to Raman spectroscopy. The concentration of SERS-active taggant compound in the sample is then calculated from the ratio of (i) the Raman spectroscopy detector response to the SERS-active taggant compound to (ii) the Raman spectroscopy detector response to the internal standard.
    Type: Grant
    Filed: October 21, 2011
    Date of Patent: April 11, 2017
    Assignee: JOHNSON MATTHEY PLC
    Inventors: Clive Antony Marchant, Vincent Brian Croud
  • Patent number: 9618390
    Abstract: An optical device includes: an image-forming optical system forming an image of light from a subject; an imaging unit receiving light of the image formed by the image-forming optical system; a reflection spectroscopic device covering a given area in an imaging area of the imaging unit; and a spectrum detection unit detecting a spectroscopic spectrum of light reflected by the reflection spectroscopic device.
    Type: Grant
    Filed: October 31, 2011
    Date of Patent: April 11, 2017
    Assignee: Sony Semiconductor Solutions Corporation
    Inventor: Masanori Iwasaki
  • Patent number: 9612154
    Abstract: A method for analyzing the condition of a spectrometer is provided. In one embodiment, the method includes acquiring optical data from a spectrometer of a downhole tool during flushing of a flowline and selecting a data set from the acquired optical data. The method can also include estimating light scattering and optical drift for the spectrometer based on the selected data set and determining impacts of the estimated light scattering and optical drift for the spectrometer on measurement accuracy of a characteristic of a downhole fluid determinable through analysis of the downhole fluid using the spectrometer. Additional methods, systems, and devices are also disclosed.
    Type: Grant
    Filed: December 19, 2014
    Date of Patent: April 4, 2017
    Assignee: SCHLUMBERGER TECHNOLOGY CORPORATION
    Inventors: Kentaro Indo, Alexis Petit, Vivek Agarwal, Sepand Ossia, Julian J. Pop, Kai Hsu
  • Patent number: 9606065
    Abstract: Disclosed herein is a quantitative analysis method for measuring a target element in a specimen using laser-induced plasma spectrum. More particularly, the present invention relates to a method for analyzing a composition ratio of a target element by calculating peak intensities when peaks overlap each other in a spectrum, and a method for selecting a peak of a wavelength at which the highest precision and reproducibility are secured through linearity of a correlation plot of the peak intensities and a value by dividing a standard deviation value of calibration curve data (peak intensity ratios) by a slope when an internal standard method is used for quantitative analysis of a target element.
    Type: Grant
    Filed: December 12, 2013
    Date of Patent: March 28, 2017
    Assignee: GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY
    Inventors: Sungho Jeong, Jeonghwan In, Chan Kyu Kim, Seokhee Lee
  • Patent number: 9599572
    Abstract: An optical inspection system including a first multiplicity of cameras operative to image a second multiplicity of regions on an object, a third multiplicity of illumination sources and at least one illumination manager operative to combine illumination from the third multiplicity of illumination sources and thereafter to direct illumination therefrom to the second multiplicity of regions, the at least one illumination manager including a beam distributor receiving a composite input beam of a multiplicity of non-mutually coherent, spatially concentrated laser pulses and directing a multiplicity of composite output beams of a plurality of the non-mutually coherent, spatially concentrated laser pulses to a corresponding plurality of spatially distinct locations corresponding to the second multiplicity of regions.
    Type: Grant
    Filed: April 7, 2014
    Date of Patent: March 21, 2017
    Assignee: Orbotech Ltd.
    Inventors: Ronen Levy, Ofer Saphier, Ariel Danan
  • Patent number: 9599697
    Abstract: A system for detecting and tracking one or more of direction, orientation and position of one or more light sources includes one or more optical fiber sensors configured to receive light from the one or more light sources and to generate a plurality of cones of light according to relative positions of the one or more optical fiber sensors relative to the one or more light sources. The system includes light data processing circuitry configured to detect characteristics of the plurality of cones of light and to determine one or more of direction, orientation, or position of the one or more light sources relative to the one or more optical fibers.
    Type: Grant
    Filed: April 15, 2014
    Date of Patent: March 21, 2017
    Assignee: The Johns Hopkins University
    Inventor: Leo R. Gauthier, Jr.