Abstract: The present invention provides a column tilt apparatus and method for providing an off-normal angle of incidence of a beam in a scanned beam system onto a substrate passing through the eucentric point that is electro-mechanically adjustable during operation while maintaining vacuum integrity of the column and work chamber, and without introducing significant vibrations.

Abstract: A method of diagnosing a parameter of a scanning electron microscope such as magnification, linearity and stability, includes loading a reference material into a microscope, setting a permissible limit of a value of the parameters, inputting a pitch of the reference material, inputting a magnification of the microscope, acquiring a set of digital images on the reference material, analyzing the digital image line after line with determination of a pitch of features of the image in each line, in mutually orthogonal directions, checking if all lines of the digital image has been analyzed, determining a mean value of the pitch of the features in each orthogonal direction, comparing the obtained value of the pitch of the image with a known value of the pitch of the reference material to determine a ratio indicative of a modification, and determining a precision of the measurements of the pitch by statistical analysis of the pitch measurements.

Abstract: In a method of examining the surface structures of a sample or of modifying the surface structures of a sample by means of a beam impinging on the surface structure of the sample, gas is supplied discontinuously, preferably in a pulsed mode, at least in the area of impingement of the beam on the surface structure of the sample.

Abstract: Charged-particle-beam (CPB) apparatus and methods are disclosed that achieve efficient correction of imaging conditions such as shape-astigmatic aberrations, etc., caused by differences in the distribution of pattern elements within respective subfields of the reticle. Indices based on the pattern-element distributions within subfields are stored, together with corresponding optical-correction data for the subfields. As the subfields are exposed, respective data are recalled and the exposure is performed with optical corrections made according to the data. The indices are determined beforehand from pattern data at time of reticle manufacture. The tabulated data are rewritable with changes in apparatus parameters such as beam-current density and beam-divergence angle. Intermediate data can be determined by interpolation of tabulated data.

Abstract: A variable potential ion guide for placement within the reflectron of a time-of-flight mass spectrometer includes an elongate resistive electrode placed axially within the reflectron. The electrode may be a non-conductive monofilament coated with a resistive polymer coating, with one end of the electrode coupled to a high potential source, the electrode carrying a potential gradient along its length.

Abstract: Generally, the present invention provides a device for heating the sample stream inlet of an ion mobility spectrometry (IMS) sensor. The heating device increases the temperature of the sample stream inlet surface to reduce the amount of time between adsorption and desorption taking place on the surface. This greatly improves the ability of the IMS sensor to follow rapidly changing analyte concentration levels. An alternate preferred embodiment of the present invention provides a flow smoothing device for decreasing the turbulence present in the fluid flow entering the IMS sensor's carrier stream inlet. This flow smoothing insert permits increasing the fluid flow rate entering the IMS sensor's carrier stream inlet to levels which maximize the IMS sensor's measurement sensitivity without causing mixing of the sample and carrier fluid stream flows.

Abstract: A specimen inspection instrument has a specimen-moving mechanism mounted within a specimen chamber. An electrical current, induced across the specimen by the mechanism, is detected with a detector. The specimen is examined based on the obtained detector output signal. An amplifier for amplifying the detector output signal is placed outside the specimen chamber. A first lead wire passes the detector output signal to the outside amplifier through the wall of the specimen chamber. A second lead wire connects a conductive partition member with a conducting member and with a reference input terminal of the amplifier that determines a reference potential for the output from the amplifier.

Abstract: A shielded packaging system is formed by a top panel and a bottom panel that are connected to one another along a preselected extent of their respective peripheral edges. An opening is formed along the unconnected extent and provides access to the space between the panels that holds radioactive items. Each panel includes at least two layers of lead foil so that if a pinhole is formed in either layer, the probability of two pinholes lining up and enabling radiation to escape from the space is minimal. The layers of lead foil have at least one ridge formed in them at their respective peripheral edges so that radiation traveling in a straight path parallel to the top and bottom panels encounters the ridges and cannot escape through the edges of the package.

Abstract: Contamination control apparatus and methods for the removal of particulate contamination on EUV mirrors and reflective masks are provided. Embodiments in accordance with the present invention involve providing a charge to the particles and moving them away from the reflective surface by electrostatic elements. An electron source and one or more electrostatic elements are positioned adjacent the reflective surface of the reflective component. The electron source is adapted to shower electrons onto the particles in an area above the reflective surface and on the reflective surface to provide a negative charge to the particles. The electrostatic elements are adapted to provide an attractive electrostatic charge to attract the negatively charged particles on and near the reflective surface.

Abstract: A mass spectrometer is disclosed comprising an ion guide which spans two or more vacuum chambers. The ion guide comprises a plurality of electrodes having apertures. Preferably, one of the electrodes also forms a differential pumping aperture which separates two vacuum chambers.

Abstract: A charged particle filter provides a curved through path and has both magnetic poles for applying a magnetic field normal to the plane of curvature of the path and electrodes for applying a radial electric field. The filter is used as an energy filter downstream of an accelerator in an ion implanter. The filter can be set to provide a range of energy dispersions, to operate as an achromatic bend, or to reject lower charge state ions.

Abstract: A device for separating a chemical mixture into its constituents includes a central cathode that is aligned axially within a cylindrical plasma chamber. An anode, made of the chemical mixture requiring separation is positioned near the cylindrical wall of the plasma chamber. A working gas is introduced into the chamber to sputter the chemical mixture into the plasma chamber where it is dissociated and ionized. To reduce the unwanted loss of the central cathode due to sputtering by the working gas, the central cathode is formed with a plurality of radial projections that extend outwardly from the axis of the cylindrical plasma chamber. These radial projections act to capture sputtered cathode material before it is lost to the plasma. Once the chemical mixture has been ionized in the plasma chamber, the ions are separated, according to their respective mass to charge ratio, using crossed electric and magnetic fields.

Abstract: An EUV source (82) that delivers a laser beam (94, 96) asymmetrical relative to first collection optics (88). The first collection optics (88) has an opening (90, 92) for the laser beam (94, 96) that is positioned so that the laser beam (94, 96) is directed towards the plasma off-axis relative to the collection optics (88). Thus, the strongest EUV radiation (98, 100) is not blocked by the target production hardware (84).

Abstract: The present invention is an improved apparatus and method for mass spectrometry using a dual ion trapping system. In a preferred embodiment of the present invention, three “linear” multipoles are combined to create a dual linear ion trap system for trapping, analyzing, fragmenting and transmitting parent and fragment ions to a mass analyzer—preferably a TOF mass analyzer. The dual ion trap according to the present invention includes two linear ion traps, one positioned before an analytic quadrupole and one after the analytic multipole. Both linear ion traps are multipoles composed of any desired number of rods—i.e. the traps are quadrupoles, pentapoles, hexapoles, octapoles, etc. Such arrangement enables one to maintain a high “duty cycle” while avoiding “memory effects” and also reduces the power consumed in operating the analyzing quadrupole.

Abstract: A high-current, high-gradient, high-efficiency, multi-stage cavity cyclotron resonance accelerator (MCCRA) provides energy gains of over 50 MeV/stage, at an acceleration gradient that exceeds 20 MeV/m, in room temperature cavities. The multi-stage cavity cyclotron resonance accelerator includes a charged particle source, a plurality of end-to-end rotating mode room-temperature cavities, and a solenoid coil. The solenoid coil encompasses the cavities and provides a substantially uniform magnetic field that threads through the cavities. Specifically, the MCCRA is provided with a constant magnetic field sufficient to produce a cyclotron frequency a little higher than the RF of the accelerating electric field. A plurality of input feeds, each of which respectively coupled to a cavity, are also provided. According to an embodiment of the invention, the beam from the first cavity passes through a cutoff drift tube and is accelerated further with a cavity supporting a still lower radio-frequency electric field.

Abstract: An end support system is applied to each end of a container for shipping nuclear fuel assemblies in an inner box within the container. The end support system includes a rectilinear metal end frame, a crosspiece with a reinforcing channel along an inside surface of the crosspiece and four arms projecting in a perpendicular direction from the metal end frame for straddling the sides of the container end. By screwing the metal end support system into the wooden framing elements of the container, the integrity of the container ends is maintained during hypothetical accident conditions specified in licensing regulations.

Abstract: The invention relates to a method of checking emergency shutdown of an ion beam therapy system which comprises a raster scanning device arranged in a beam guidance system and having vertical deflection means and horizontal deflection means for the vertical and horizontal deflection of a treatment beam at right angles to its beam direction, so that the treatment beam is deflected by the raster scanning device onto an isocenter of the irradiation station and scans a specific area surrounding the isocenter, a check of emergency shutdown being carried out.

Abstract: Metal ions are attached to a sample gas in an ionization chamber to produce ions of the sample gas. The ions of the sample gas pass through a mass spectrometer formed by an electromagnetic field for separation by mass. The mass separated ions of the sample gas are detected and measured by a detector as an ion current. Further, a metal ion emitter for emitting metal ions is arranged at the upstream side of a region controlled to a reduced pressure atmosphere where the flow of gas becomes viscous, a sample gas inflow part for introducing the sample gas to the downstream side where the metal ions are transported, and the sample gas ionized by attachment of the metal ions passes through the opening of the aperture plate and transported to the mass spectrometer. A second gas inflow part is arranged at the upstream side of the metal ion producing region. A second gas supplied by the second inflow part flows through the metal ion producing region and sample gas ionization region.

Abstract: An improved method of parent ion scanning is disclosed. In one embodiment a quadrupole mass filter 3 upstream of a collision cell 4 is arranged to operate in a highpass mode. Parent ions transmitted by the mass filter 3 are fragmented in the collision cell 4 and detected by an orthogonal time of flight analyser 5 which obtains a daughter ion mass spectrum. Ions having a mass to charge ratio below the cutoff of the mass filter 3 are identified as daughter ions, and candidate parent ions may then be discovered and their identity confirmed by obtaining corresponding daughter ion spectra. In a second embodiment, the collision cell 4 alternates between high and low fragmentation and candidate parent ions can additionally be identified on the basis of the loss of a predetermined ion or neutral particle.

Abstract: A system for irradiating articles is disclosed. The system has multiple beam paths and is capable of irradiating articles with x-rays or electron beams (e-beams). The system is comprised of a single radiation source producing multiple beam paths. At least one of the beam paths is configured to irradiate articles with x-rays and at least one other beam path is configured to irradiate articles with e-beams. The beam paths are each positioned to scan product carried on conveyors. The x-ray beam paths and e-beam have separate conveyor systems that operates independently from each other.