Patents Examined by Philip Coe
  • Patent number: 6401732
    Abstract: A process and apparatus for drying semiconductor wafers, includes the controlled-rate extraction of a wafer immersed in rinsing liquid, irradiation of the wafer using high intensity lights or filaments along the wafer-liquid interface, and delivery of gas streams against the wafer along the wafer-liquid interface using a gas delivery system. Heating is controlled to create a temperature gradient without evaporating rinsing fluid adhering to surfaces of the wafer. Heating by the radiation sources creates a temperature gradient in the wafer in the irradiated region that simultaneously generates a surface tension gradient in the water adhering to the wafer. The gas delivery system removes the bulk of the water adhering to the wafer surface, and also suppresses the height of the rinsing liquid adhering to the wafer, providing faster extraction of dry and highly clean wafers from the rinsing liquid. A solvent vapor is optionally injected at the wafer-liquid interface, to reduce adhesion of the liquid to the vapor.
    Type: Grant
    Filed: December 19, 2000
    Date of Patent: June 11, 2002
    Assignee: Semitool, Inc.
    Inventor: Eric J. Bergman
  • Patent number: 6401499
    Abstract: An improved laundry washing machine is provided with multiple fluid storage tanks for fluid detergent, bleach, and/or fabric softener. An air pump pressurizes the tanks when the door of the washing machine is opened. Each tank is in fluid communication with an associated fluid compartment. A user can push a control button to open a valve to selectively deposit a desired amount of fluid from a tank into the associated compartment for a wash cycle.
    Type: Grant
    Filed: July 31, 2000
    Date of Patent: June 11, 2002
    Assignee: Maytag Corporation
    Inventors: Brian D. Clark, Ted L. Hansen, Daniel F. Wunderlich
  • Patent number: 6393873
    Abstract: Washing machine having a rotatable drum (1) which holds the items to be washed. The drum (1) may be removable from the machine, like a basket. A number of channels (6) extend along the length of the drum (1). Water is introduced into the upper channels (6) via a pump, valve (9, 10, 11, 12) and radial ducts (5) to the rear of the channels (6). The water showers from the upper channels (6) onto the items in the drum (1).
    Type: Grant
    Filed: October 18, 2000
    Date of Patent: May 28, 2002
    Assignee: Monotub Industries, PLC
    Inventor: Martin William Myerscough
  • Patent number: 6394110
    Abstract: A substrate processing apparatus (1) for processing wafers (W) has a first processing chamber (2) capable of containing the wafers (W) and a second processing chamber (4) capable of containing the wafers (W). The second processing chamber (4) is formed below and near the first processing chamber (2) and is capable of communicating with the first processing chamber (2). A wafer guide (6) carries the wafers (W) vertically between the first and second processing chambers (2, 4). A shutter (7) is opened to allow the first and second processing chambers (2, 4) to communicate with each other and is closed to isolate the same from each other. A steam supply system (8) including steam supply port, an ozone gas supply system (9) including ozone gas supply port and an IPA supply system (10) including IPA supply port are combined with the first processing chamber (2).
    Type: Grant
    Filed: July 25, 2001
    Date of Patent: May 28, 2002
    Assignee: Tokyo Electron Limited
    Inventors: Yuji Kamikawa, Shigenori Kitahara, Kinya Ueno
  • Patent number: 6391110
    Abstract: An apparatus for a treatment is provided, the apparatus comprising a vessel for recovering a treatment liquid flowing out or flying out when the object is treated, cleaning means for cleaning an inner wall surface of the vessel by supplying a cleaning liquid into the vessel, and a circulation system for recovering a discharged liquid discharged from the vessel when the inner wall surface of the vessel is cleaned by the cleaning means and supplying the recovered liquid to the cleaning means.
    Type: Grant
    Filed: October 12, 2000
    Date of Patent: May 21, 2002
    Assignee: Tokyo Electron Limited
    Inventors: Fumio Satou, Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi, Tetsuya Sada, Kiyohisa Tateyama
  • Patent number: 6389628
    Abstract: An improved fluid balance ring is provided with a plurality of standpipes within the cavity of the balance ring. The standpipes each have an open upper end spaced from the upper wall of the balance ring, and an open lower end extending through the bottom wall of the balance ring. The balance ring includes an inlet opening so that the ring can be substantially filled with water during the fill cycle of the tub. When the spin cycle of the tub begins, the added mass of the balance ring assists in getting the tub to the critical speed with minimum deflection. After reaching the critical speed, approximately ½ of the water is drained through the standpipes due to the centrifugal force and the remaining fluid moves to a balance position in the fluid ring to counter-act any unbalanced loads in the tub. In an alternative embodiment, the standpipes are replaced with drain openings in the top wall of the balance ring.
    Type: Grant
    Filed: September 6, 2000
    Date of Patent: May 21, 2002
    Assignee: Maytag Corporation
    Inventor: Jeffrey L. Sears
  • Patent number: 6383229
    Abstract: A method and apparatus for continuously cleaning a yarn moving through the device. A first scouring body has a yarn entrance and a yarn exit connected by a central cavity. Pressurized fluid is introduced through the yarn while the yarn is positioned within and moving through the central cavity.
    Type: Grant
    Filed: December 14, 2000
    Date of Patent: May 7, 2002
    Assignee: Ethicon, Inc.
    Inventors: Richard T. Entrekin, Samsel K. Labrecque, Harvey Gordon Anderson
  • Patent number: 6381789
    Abstract: A laundering process for a laundering machine, the machine comprising a tank (1), for containing a washing liquid, and a perforated basket (2), for containing the clothes and which is internal to the tank (1), the laundering process comprising a soaking step, a washing step and generally a centrifugal step, a control unit commanding the operation of the laundering machine. The soaking step comprises the following phases: feeding the tank (1) with the washing liquid, until reaching a determined soaking level (L2), which is lower than a respective washing level (L1) selected among a plurality of washing levels, and submitting the load of clothes immersed in the washing liquid, alternately, to a resting condition during a resting period (Tr), and to an agitation condition, during at least one agitation period (Ta1, Ta2), which is shorter than the resting period (Tr), until the soaking step has been completed.
    Type: Grant
    Filed: July 30, 1999
    Date of Patent: May 7, 2002
    Assignee: Multibras S/A Electrodomesticos
    Inventors: Flávio Erasmo Bernardino, Robert Joseph Pinkowski, Denilson Fernandes De Oliveira, Vera Coelho Aguiar
  • Patent number: 6381791
    Abstract: A system and method for controlling the rotation speed of a washing machine tub includes receiving an indication of the actual tub rotation speed and comparing the actual tub rotation speed to a set point speed to calculate a speed error. One or more gain factors are applied to the speed error to calculate a correction factor. Adaptive gain control is used, wherein the gain factors are adjusted in response to system parameters, including the actual or desired tub rotation speed, speed error, average torque demand, average power, etc.
    Type: Grant
    Filed: May 23, 2000
    Date of Patent: May 7, 2002
    Assignee: Emerson Electric Co.
    Inventors: Alan P. French, John S. Thorn
  • Patent number: 6381790
    Abstract: The invention provides an apparatus comprising a drum for containing and agitating an article, wherein the drum comprises at least two rotatable drum portions in rotatable connection with one another, a rotator member in connection with each rotatable drum portion for rotating the drum portion about an axis. The apparatus is preferably a washing machine, and the method of operating the apparatus comprises inserting at least one article, preferably a plurality of articles, into the drum; and rotating each rotatable drum portion independently of one another to agitate the article or articles.
    Type: Grant
    Filed: May 14, 2001
    Date of Patent: May 7, 2002
    Assignee: Dyson Limited
    Inventors: André Fraser Monteiro, Geoffrey Michael Burlington, Simon Paul Wells
  • Patent number: 6378342
    Abstract: A washer-dryer has an improved efficiency of drying; namely, the drying time is shortened and the unevenness of drying is alleviated. Furthermore, vibration during operations, especially during spin-drying, is reduced. An inner tub of approximately cylindrical shape rotating around a substantially vertical axis and for receiving a wash load is housed in an outer tub. The inner tub is provided with freely rotatable agitating means at the bottom part for agitating the wash load. A motor rotates the inner tub or the agitating means. The air to be supplied through a hot air supply channel into the inner tub is heated by heating means, which air is advanced by a drying air blower into the inner tub. Control means controls each of the washing, rinsing, spin-drying and drying processes by controlling respective operations of the motor, the heating means, the drying air blower, etc.
    Type: Grant
    Filed: May 10, 2001
    Date of Patent: April 30, 2002
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Masami Fukumoto, Junichi Morinaka, Yasushi Takagi, Shinichi Matsuda
  • Patent number: 6378341
    Abstract: Detergent solution is discharged by means of a pump (10) at the bottom of a washing handling space (1) and is fed back to the handling space (1) via a pipeline (9) above the washing (3) located in the handling space. The washing machine is also connected to a fresh-water supply line (5) which can be opened and closed by a valve (7) which is controllable by a sensor device (12) suitable for establishing a volumetric flow present in the pumping direction of the pump (10). It is possible to dispense with a separate sensor element for controlling the fresh-water supply by a body (13) which can be actuated by the volumetric flow prevailing in the pipeline (9) being arranged along the pipeline (9) and, depending on the presence or absence of volumetric flow, protruding into or releasing the measuring section (18) of a turbidity sensor (17). Finally, the valve (7) is controlled by the turbidity sensor (17) so as to assume its opening or closed position.
    Type: Grant
    Filed: July 21, 2000
    Date of Patent: April 30, 2002
    Assignee: BSH Bosch und Siemens Hausgeraete GmbH
    Inventors: Horst Wiemer, Harald Moschütz, Edwin Bolduan
  • Patent number: 6378537
    Abstract: The invention provides a dining table including an integral dishwasher unit. A hinged access cover to the dishwasher is provided in the dining surface and adapted for being recessed below the dining surface while the user is dining. A tray that is stored in the dishwasher is moved upwardly and positioned flush with the dining surface for dining. A perforate chute extending from below the dining surface into the dishwasher is used for placing and retrieving dishes and for storing dishes during washing. A lower access door is used to place pots and other large utensils into a second compartment in the dishwasher. Each portion of the dishwasher has its own water distributor arm.
    Type: Grant
    Filed: June 9, 2000
    Date of Patent: April 30, 2002
    Inventor: Harold F. DeHart
  • Patent number: 6375686
    Abstract: A method and apparatus are provided to regulate the flow of compressed air and steam utilized in treating spots in cloth or clothes with a spotting table having a spotting gun. The method comprises first turning on the steam or compressed air of the spotting table using conventional foot valves and next throttling the steam or compressed air flow to a desired level by manipulating a valve provided on the spotting gun, which valve can be manipulated and set by the spotting gun operator with the same hand holding the spotting gun.
    Type: Grant
    Filed: May 8, 2000
    Date of Patent: April 23, 2002
    Inventor: Su Heon Kim
  • Patent number: 6367489
    Abstract: Apparatus for cleaning and servicing vehicle brakes includes a caster mounted cabinet adapted to hold a small drum of cleaning solvent, the drum having an open top. A telescopic post or conduit extends upwardly from the cabinet to a hollow, hinged swing arm. A sink tray is mounted on the end of the swing arm and has a bottom drain opening that communicates with the hollow swing arm, which in turn communicates with the upright conduit to form drain piping for the sink tray. The outlet of the upright conduit empties into the solvent container in the cabinet. A pump mounted in the cabinet takes cleaning solvent from the drum and delivers it through a hose to a spray gun to be applied to the brakes to be cleaned. The telescoping post and adjustable swing arm allow the sink tray to be located directly under the brakes being cleaned to catch and return the used solvent. The cabinet also has a second basin or sink that drains into the container but can be used for cleaning parts.
    Type: Grant
    Filed: March 16, 2000
    Date of Patent: April 9, 2002
    Inventor: Soichiro Yamamoto
  • Patent number: 6363756
    Abstract: A laundry appliance such as a washing machine (2, 300) or a clothes drier (200) where user access to the clothes containing vessel (1, 201, 301) is facilitated by supporting the vessel in a structure (105, 205, 305) which may be tilted or slid out of the front of the appliance cabinet. When the structure is withdrawn from the cabinet the vessel hatch (35) is accessed substantially from the top. The vessel is preferably mounted with its axis horizontal and oriented in a side to side or “east-west” direction. The appliance motor (44/45, 210) control system sets the rotational position of the clothes vessel (1, 201, 301) so that when the structure (105, 205, 305) is withdrawn from the cabinet the hatchway is upper most. The hatch (35) is slid back to allow access to the vessel interior as part of the rotational positioning process.
    Type: Grant
    Filed: November 8, 1999
    Date of Patent: April 2, 2002
    Assignee: Fisher & Paykel Limited
    Inventors: Neville David Seagar, Gordon Sharpe Hunter, Joanne Mercia Oliver, Cameron Bruce William Treeby, Russell Joseph Jackson
  • Patent number: 6363953
    Abstract: A device for cleaning contact lenses, which device comprises a first chamber (1) provided with draining means (3,8), a second chamber (2) adapted to be fluidly communicable with the first chamber (1), a lens holder (20) adapted to be inserted in the first chamber (1) and agitating means (22-28) adapted to agitate the lens holder, wherein the device further comprises a valve (5) adapted to control fluid flow between the first chamber (1) and the draining means (3,8) and between the first (1) and second chambers (2). The valve (5) can be automatically controlled.
    Type: Grant
    Filed: January 18, 2000
    Date of Patent: April 2, 2002
    Inventor: Charles Philips Ifejika
  • Patent number: 6363563
    Abstract: An automatic washer includes a control which allows the user to observe the operation of the washer under a set condition or conditions. When these conditions are met, the user may open the door or lid of the washer and observe, for a predetermined period of time, the wash activity. After reclosing the door or lid, the washer may be restarted to continue the wash cycle.
    Type: Grant
    Filed: April 25, 2000
    Date of Patent: April 2, 2002
    Assignee: Whirlpool Corporation
    Inventors: Michael E. Range, Scot S. Lau
  • Patent number: 6363562
    Abstract: A delay start method of washing laundry allows laundry to be placed in the spin basket of a washing machine, with liquid detergent added to the fabric softener dispenser. After a selected time delay has expired, the basket is spun so as to discharge the detergent onto the laundry. A wash cycle is then started and operated in a normal manner.
    Type: Grant
    Filed: July 10, 2000
    Date of Patent: April 2, 2002
    Assignee: Maytag Corporation
    Inventor: Jordan S. Bruntz
  • Patent number: 6360756
    Abstract: A rinse tank for rinsing electronic substrates after a chemical process and a method for utilizing such rinse tank are provided. In the rinse tank, devices for performing a quick dump rinse; for performing a cascade overflow rinse and for feeding an inert gas bubbling are provided in the cavity of a single rinse tank. By utilizing the present invention novel rinse tank, the processing problems frequently observed in conventional rinse tanks where two rinse tanks are required for the quick dump rinse and for the cascade overflow rinse, such as particle re-deposition and a large floor space area requirement are eliminated. Furthermore, the wafer rinse process after a metal etching process can be accomplished in a total process time that is at least 2˜3 minutes shorter than that required by using conventional rinse tanks.
    Type: Grant
    Filed: June 3, 1999
    Date of Patent: March 26, 2002
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd
    Inventors: Chie-Chi Chen, Tzu-Yang Chung, Szu-Yao Wang, Sheng-Liang Pan