Patents Examined by Phillip Johnston
  • Patent number: 10811214
    Abstract: An ion implanter. The ion implanter may include a beamline, the beamline defining an inner wall, surrounding a cavity, the cavity arranged to conduct an ion beam. The ion implanter may also include a low emission insert, disposed on the inner wall, and further comprising a 12C layer, the 12C layer having an outer surface, facing the cavity.
    Type: Grant
    Filed: May 17, 2019
    Date of Patent: October 20, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Julian G. Blake, Frank Sinclair
  • Patent number: 10804070
    Abstract: The present invention relates to a deflection scanning device with a multi-phase winding and a deflection scanning system. The deflection scanning device is of an axisymmetric structure, and comprises a ferromagnetic frame and a deflection scanning winding, wherein the inner side of the ferromagnetic frame is longitudinally provided with 2aw wire slots equally distributed along the circumference; and the deflection scanning winding comprises a w-phase winding, wherein the axis of the each phase winding is symmetrically distributed. The deflection scanning system comprises a deflection scanning device, a drive power supply unit and, a central, control unit. The deflection scanning device of the present invention can improve the uniformity of the magnetic induction intensity in the charged particle beam channel, and then reduce the defocusing effect and improve the scanning accuracy.
    Type: Grant
    Filed: July 24, 2019
    Date of Patent: October 13, 2020
    Inventors: Xiaodong Huang, Shouqi Wei, Yujiang Qin, Guokun Zhu, Shuli Cai, Xiang Fei, Guohua Huang, Jianfei Zhang, Yinhong Qin
  • Patent number: 10801991
    Abstract: Synchronized ion modification systems and techniques are described. An ion modifier can be used to modify a portion of ions that enter a drift chamber via a gate that controls entry of the ions to the drift chamber. A controller that is communicatively coupled to the ion modifier is configured to control the ion modifier to select a portion of the ion to be modified. In embodiments, the controller selects the portion based on a detector's previous response to other ions that are formed from a sample from which the ions were formed. The other ions, for example, correspond to ions that are associated with a peak in previous operation of a spectrometer.
    Type: Grant
    Filed: October 2, 2018
    Date of Patent: October 13, 2020
    Assignee: SMITHS DETECTION—WATFORD LTD.
    Inventors: Stephen J. Taylor, Jonathan R. Atkinson
  • Patent number: 10794931
    Abstract: When a liquid surface is detected based on a detection signal from a photodetector during the approaching operation, a photodetector movement processor moves the photodetector to a position where reflected light from a cantilever is incident with the cantilever being in liquid. When the reflected light from the cantilever is incident on the photodetector during the approaching operation continued after the movement of the photodetector by the photodetector movement processor, an optical axis adjustment processor adjusts an optical axis of the reflected light incident on the photodetector. When a surface of a solid sample is detected based on a detection signal from the photodetector during the approaching operation continued after the adjustment of the optical axis by the optical axis adjustment processor, an approaching processor stops the approaching operation.
    Type: Grant
    Filed: February 25, 2019
    Date of Patent: October 6, 2020
    Assignee: Shimadzu Corporation
    Inventor: Eiji Iida
  • Patent number: 10784077
    Abstract: Systems and methods for implementing charged particle flooding in a charged particle beam apparatus are disclosed. According to certain embodiments, a charged particle beam system includes a charged particle source and a controller which controls the charged particle beam system to emit a charged particle beam in a first mode where the beam is defocused and a second mode where the beam is focused on a surface of a sample.
    Type: Grant
    Filed: August 2, 2018
    Date of Patent: September 22, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Frank Nan Zhang, Zhongwei Chen, Yixiang Wang, Ying Crystal Shen
  • Patent number: 10777378
    Abstract: The present invention relates to a transmission electron microscope (TEM) micro-grid and a method for preparing the TEM micro-grid. The TEM micro-grid comprises a porous silicon nitride substrate and a graphene layer located on a surface of the porous silicon nitride substrate. The porous silicon nitride substrate comprises a plurality of through holes. The graphene layer covers the plurality of through holes. The method for preparing the TEM micro-grid provided in the present disclosure uses a carbon nanotube film structure to transfer a graphene layer to a surface of a porous silicon nitride substrate.
    Type: Grant
    Filed: January 20, 2019
    Date of Patent: September 15, 2020
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Lin Cong, Wei Zhao, Jin Zhang, Yu-Chien Tsai, Kai-Li Jiang, Shou-Shan Fan
  • Patent number: 10777401
    Abstract: The present invention relates to the technical field of ionizing a gaseous substance, in particular the ionizing or ionization of a gaseous substance in preparation for its analysis. A device is intended to make a discharge gas and a test substance ionizable in a flow-through mode without essentially destroying or fragmenting the sample substance. In order to avoid a high expenditure in terms of construction and equipment, the device is intended to be usable under ambient conditions and to ensure a high sensitivity in a possible analysis of an ionized substance. To this end, an ionizing device is used for flow-through ionization of a discharge gas and of a sample substance at an absolute pressure of more than 40 kPa in the ionizing device during ionization. The ionizing device comprises an inlet, an outlet, a first electrode, a dielectric element and a second electrode.
    Type: Grant
    Filed: December 14, 2016
    Date of Patent: September 15, 2020
    Assignee: PLASMION GMBH
    Inventor: Jan-Christoph Wolf
  • Patent number: 10775173
    Abstract: The present disclosure relates to Superfluid QUantum Interference Devices (SQUIDs) that measure phase differences existing in quasi-particles or matter-wave systems, and the related techniques for their use at room-temperatures. These Bose-Einstein Condensation interferometry techniques include quantum scale metrology devices such as quasi-particle based linear accelerometers, gyroscopes, and Inertial Measurement Units that incorporate such interferometers. In the presence of additive white Gaussian noise, estimates are made for the Bias Instability, Angle Random Walk, and Velocity Random Walk of the device for purposes of quantum inertial sensing. Moreover, this disclosure relates to SQUIDs based on charged quasi-particles that can, in turn, be used to construct quantum computing elements such as quantum transistors, and quasi-particle circuits at room-temperatures. These quasi-particle circuits can be used to build analogs of electronic circuit elements, and offer an alternative to traditional electronics.
    Type: Grant
    Filed: March 19, 2019
    Date of Patent: September 15, 2020
    Inventor: Frederick Ira Moxley, III
  • Patent number: 10755891
    Abstract: Methods and systems for correcting aberrations in atom probe tomography are described. A specimen function associated with a plurality of lattice positions of ions of a specimen in a holder is generated using a transmission electron microscope. An image function associated with x- and y-coordinates and time of flight information for a plurality of ions of the specimen in the holder is generated using a delay line detector mounted on the transmission electron microscope. A transfer function based on the specimen function and the image function is generated. The transfer function comprises information relating to ion trajectory aberrations. An Atom Probe Tomography (APT) image of the specimen is generated based on the specimen function, the image function, and the transfer function. The APT image is adjusted to correct for the ion trajectory aberrations.
    Type: Grant
    Filed: April 15, 2019
    Date of Patent: August 25, 2020
    Assignee: COLORADO SCHOOL OF MINES
    Inventor: Brian P. Gorman
  • Patent number: 10750604
    Abstract: An EUV source for generating a beam of EUV radiation, has a droplet generator with a nozzle assembly to emit droplets of fuel from a nozzle towards a plasma formation location. The nozzle assembly receives the fuel from a reservoir. The nozzle assembly has a pump chamber receiving the fuel from the reservoir and an actuator to vibrate a membrane that forms a wall of the pump chamber. The wall is oriented perpendicularly to a direction wherein the nozzle emits the fuel. The nozzle assembly has first and second nozzle filters non-adjacently arranged in series in a path of the fuel from the pump chamber to the nozzle.
    Type: Grant
    Filed: November 22, 2016
    Date of Patent: August 18, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Johan Frederik Dijksman, Wilhelmus Henricus Theodorus Maria Aangenent, Ronald Johannes Hultermans, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Peter Wilhelm Hendrik Van Putten
  • Patent number: 10748740
    Abstract: An x-ray shield for improved vacuum conductivity is disclosed herein. An example x-ray shield includes at least one elongate member formed from high atomic weight material shaped into a twist with at least 180° of twist.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: August 18, 2020
    Assignee: FEI Company
    Inventors: Rients Jan De Groot, Casper Smit
  • Patent number: 10730764
    Abstract: A fluid sterilization module includes an inner cylinder forming a processing flow path, a case portion in which the inner cylinder is accommodated, a member provided between an outer circumferential surface of the inner cylinder and an inner circumferential surface the case portion, a first chamber located in a region on a side of one end portion of the inner cylinder with respect to the member, in a gap between the inner cylinder and the case portion, a second chamber located in a region on a side of the other end portion of the inner cylinder with respect to the member, and a light emitting element provided in at least one of the one end portion and the other end portion of the inner cylinder, and configured to emit ultraviolet light to the object passing through the processing flow path.
    Type: Grant
    Filed: April 12, 2019
    Date of Patent: August 4, 2020
    Assignee: ASAHI KASEI KABUSHIKI KAISHA
    Inventors: Sho Sugiyama, Atsushi Kodama, Naoto Yabuki, Hiroyuki Kishi, Naoto Ito, Sumire Jinno
  • Patent number: 10729797
    Abstract: UV hard-surface disinfection system that is able to disinfect the hard surfaces in a room, while minimizing missed areas due to shadows by providing multiple UV light towers that can be placed in several areas of a room such that shadowed areas are eliminated and that can be transported by a cart that is low to the ground such that the towers may be loaded and unloaded easily by a single operator. The system is able to be controlled remotely, such that during activation of the system, no operator is present, and to automatically cut power to all towers in the event that a person enters the room.
    Type: Grant
    Filed: January 31, 2020
    Date of Patent: August 4, 2020
    Assignee: Surfacide, LLC
    Inventors: Waldemar John Lyslo, Mark Howard Schwartz, Stephen Boyd Pettis
  • Patent number: 10712365
    Abstract: A liquid cell for in situ atomic force microscopy (AFM) measurement of a sample during filtration is provided. The liquid cell includes a cantilever probe; a cantilever holder to position the probe near a surface of a sample (e.g., a filtration membrane); a liquid cell housing provided to hold the sample and comprising an opening at the top; an upper part; a lower part; an internal cavity to contain a fluid; a fluid inlet passage located in the upper part; a first fluid outlet passage located in the upper part; and a second fluid outlet passage located in the lower part. A method of in situ atomic force microscopy (AFM) measurement of a sample during filtration in a liquid by using the liquid cell described herein is also provided.
    Type: Grant
    Filed: August 3, 2018
    Date of Patent: July 14, 2020
    Assignee: New Jersey Institute of Technology
    Inventors: Wen Zhang, Wanyi Fu
  • Patent number: 10714322
    Abstract: A sample introduction system for a spectrometer comprises a desolvation region that receives or generates sample ions from a solvent matrix and removes at least some of the solvent matrix from the sample ions. A separation chamber downstream of the desolvation region has a separation chamber inlet communicating with the desolvation region, for receiving the desolvated sample ions along with non-ionised solvent and solvent ion vapours. The separation chamber has electrodes for generating an electric field within the separation chamber, defining a first flow path for sample ions between the separation chamber inlet and a separation chamber outlet. Unwanted solvent ions and non-ionised solvent vapours are directed away from the separation chamber outlet. The sample introduction system has a reaction chamber with an inlet communicating with the separation chamber outlet, for receiving the sample ions from the separation chamber and for decomposing the received ions into smaller products.
    Type: Grant
    Filed: September 18, 2019
    Date of Patent: July 14, 2020
    Assignee: Thermo Fisher Scientific (Bremen) GmbH
    Inventors: Alexander A. Makarov, Stevan R. Horning
  • Patent number: 10702624
    Abstract: An air duct sterilization system, and a device and method for producing the air duct sterilization system. The system includes a plurality of ultraviolet light-emitting diodes (UV LEDs), arranged in a UV LED strip within an air duct, configured to destroy airborne biological contaminants in the air duct. The device includes wheel assemblies and an applicator assembly. During installation of the UV LED strip, the wheel assemblies contact a lower surface and an upper surface of an interior of the air duct, thereby enabling the device to roll along the interior of the air duct. The UV LED strip is applied to the upper surface of the interior of the air duct using the applicator assembly, with minimal effort needed from an individual performing the installation. After installation, the UV LEDs are illuminated as needed to destroy airborne biological contaminants, thereby sterilizing the air duct and air therein.
    Type: Grant
    Filed: September 7, 2018
    Date of Patent: July 7, 2020
    Inventor: James Peterson
  • Patent number: 10697932
    Abstract: A method of mass spectrometry is disclosed comprising selecting a modification of interest that may modify the mass to charge ratios of precursor ions of interest when said precursor ions are subjected to a fragmentation or reaction condition for producing product ions. The method then filters the product ions (or product ion data) such that only a subset of the product ions are transmitted and detected (or a subset of the data remains) and so as to exclude product ions (or product ion data) that could not have possibly resulted from the modification of interest. This significantly simplifies the product ion data, enabling the product ions to be identified or compared to precursor ion spectra more efficiently.
    Type: Grant
    Filed: November 11, 2014
    Date of Patent: June 30, 2020
    Assignee: MICROMASS UK LIMITED
    Inventor: Jason Lee Wildgoose
  • Patent number: 10697944
    Abstract: A portable system 1 for analyzing gaseous flows that vary over time is described, the system comprising a sampling chamber 18, a gas sampling module 7, an ion filtering module 8 and an ion detecting module 9. The gas sampling module 7 is configured to adjust an input gaseous flow Fi of gas particles from the sampling chamber 18, ionize said gas particles and to emit the produced ions, so as to generate an ion flow I. The ion filtering module 8 is configured to controllably select at least one type of ion present in the ion flow I and to generate a corresponding at least one homogeneous ion beam I?, having an intensity representative of the concentration of the corresponding gas particle in the gaseous composition to be analyzed. The ion detecting module 9 is configured to measure the intensity of the at least one ion beam I?.
    Type: Grant
    Filed: July 2, 2015
    Date of Patent: June 30, 2020
    Assignee: Nanotech Analysis S.R.L.
    Inventors: Gianpiero Mensa, Raffaele Correale
  • Patent number: 10692694
    Abstract: Apparatus include a reflector positioned adjacent to a sample location that is situated to receive a charged particle beam (CPB) along a CPB axis from a CPB focusing assembly so that the reflector is situated to receive light emitted from a sample at the sample location based on a CPB-sample interaction or a photon-sample interaction and to direct the light to a photodetector, and a steering electrode situated adjacent to the reflector so as to direct secondary charged particles emitted from the sample based on the CPB-sample interaction away from the reflector and CPB axis. Methods and systems are also disclosed.
    Type: Grant
    Filed: December 21, 2018
    Date of Patent: June 23, 2020
    Assignee: FEI Company
    Inventors: Galen Gledhill, Mostafa Maazouz
  • Patent number: 10692697
    Abstract: An ion implantation system may include an ion source to generate an ion beam, a substrate stage disposed downstream of the ion source; and a deceleration stage including a component to deflect the ion beam, where the deceleration stage is disposed between the ion source and substrate stage. The ion implantation system may further include a hydrogen source to provide hydrogen gas to the deceleration stage, wherein energetic neutrals generated from the ion beam are not scattered to the substrate stage.
    Type: Grant
    Filed: October 9, 2018
    Date of Patent: June 23, 2020
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Frank Sinclair, Daniel Tieger, Klaus Becker