Abstract: A particulate counter determines the size, number and distribution by size of various particles within a vessel by the principle of near angle scattering in which the portion of a light beam which is deflected by a given particle indicates detection and sizing of that particle. The counter disregards sidelobes which are caused by interference between the deflected portion of the beam and the beam itself by allowing only a single valid particle detection to occur in the space of a given time window.

Abstract: A device for storing an optical element is disclosed. The device includes two sets of optical surfaces for allowing examination of an optical element in two directions. The device is preferably used for an element such as a soft contact lens and is filled with fluid. Two ensure that the chamber containing the lens is filled with fluid, an opening is displaced horizontally and vertically from the chamber to remain out of the optical viewing path and to be higher than the optical chamber to prevent formation of bubbles in the chamber.

Abstract: A high-precision alignment pattern for fine-line device fabrication comprises unique marks. The pattern is utilized to align a mask or reticle with respect to a wafer and/or to evaluate actual level-to-level registration achieved between a set of masks or reticles and a wafer. One mark of the pattern comprises two spaced-apart parallel lines. The other mark comprises a notch or arrow-head including an apex portion. In practice, the orientation between the apex portion and the associated parallel lines of the pattern can be read relatively easily with high accuracy.

Abstract: An apparatus for indicating misalignment of the optical elements of an optical system (10) comprises a source (11 ) of optical radiation (which is in general nonpolarized), a beam splitter (12), an optical flat (13) and an off-axis beam sampling device (14). The beam splitter (12) divides an input beam (20) from the source (11) into a transmitted component (21) which passes along the optic axis of the optical system (10) to the optical flat (13), and a reflected component (22) which passes to the off-axis beam sampling device (14). The beam sampling device (14) divides the reflected component (22) of the input beam (20) into two angularly separated beams (24) and (25), which are returned to the beam splitter (12). The beam splitter (12) transmits components (24') and (25'), respectively, of the angularly separated beams (24) and (25) to a detector plane (23).

Abstract: This invention is directed to a new and improved system for determining optical aberrations, such as for example alignment, focus, tilt, astigmatism or coma of a telescope optical system, wherein the telescope optical system is arranged for imaging a random scene and includes a plurality of subapertures, said system comprising a grating disposed at the focal plane of the telescope optical system, an apodizing mask disposed adjacent the grating, said mask having transparent and opaque portions, an array of light detectors, a field lens disposed adjacent the grating for causing the subapertures to be imaged on the array of detectors, apparatus for effecting relative movement between the grating and the other elements, phase detector electronics for receiving the output from the detectors and outputting individual detector signals, and a processor responsive to the detector signals for determining the difference in phase between the individual detector signals and a reference phase, whereby a measure of the aber

Abstract: A sample cell is described that permits the measurement of the light scattering properties of very small liquid-borne samples with negligible background interference form the illumination source. A technique is described whereby the cell construction permits the measurement of the illumination intensity at the scattering sample itself, permitting, thereby, the normalization of each detected scattered signal. The cell structure and detection method incorporated therein also permit measurement of extremely small angle scattered intensities without interference of the incident light beam itself.

Abstract: An image of a moving object with an optically differentiatable structure is projected onto a grid of opto-electric transducers through a lens. The output signals of at least one square group of four transducers A-D are processed to produce from output signals of the respective transducers a pair of signals I=A+B-C-D and II=B+C-A-D. The nature of the object is such as to cause periodically varying signals in the transducers, and there are thus concerned two signals shifted by a quarter period, from which the direction of movement can be determined by means of a logic circuit. From the frequency of the signals the velocity can be ascertained. By means of direction dependent counters the path of the object can be determined from the signals. With a two dimensional matrix of transducers measurements can be effected of movement of the object in different directions. The measurement is simple and offers versatile possibilities of exploitation.

Abstract: A photoelectric smoke detector including a housing defining a test zone and an opening for admitting smoke thereinto, a light source arranged to direct light to the zone and a light responsive element arranged to receive light scattered by smoke particles in the zone. An optical barrier prevents the direct transmission of light through the zone and between the light source and light responsive element, the barrier defining a light passage for transmitting light directly therebetween. Projecting into the light passage is a mechanical gate that can be adjusted to alter the size of the light passage and thereby vary the level of light transmitted directly therethrough between the light source and the light responsive element. In response to selective adjustment of the mechanical gate, the light responsive element can provide a background signal that obviates normal electronic noise.

Abstract: An auto-focusing alignment and measurement system for use in precisely positioning a semiconductor substrate with respect to an integrated circuit mask is herein disclosed. This system includes a moveable convergent lens operable with another pair of convergent lenses for alternately focusing images of the mask and the substrate onto a photodiode array. The photodiode array serves as a focus detector and, together with associated signal processing circuitry, provides a feedback signal for controlling displacement of the moveable lens to equal the separation between the mask and the substrate with an accuracy better than the depth of field of the optics. An illumination source and viewing optics provide a magnified view of images of both the mask and the substrate superimposed and in focus, thereby facilitating alignment of the substrate with respect to the mask prior to photolithographic printing.

Abstract: A pattern defect is detected in accordance with the difference between a pair of patterns. The patterns are scanned and imaged to obtain first and second binary signals. A positioning error between the patterns is two-dimensionally detected during the scanning with respective first and second binary signals delayed by a prescribed amount so that each of the picture elements in a prescribed area of a two-dimensional image, delayed and cut out two-dimensionally, corresponding to one pattern, is compared with a specified picture element in a predetermined area of an image delayed and cut out two-dimensionally corresponding to another pattern. The result of the comparison is statistically summed to derive a positioning error by detecting the position shown as an extreme value from the summed values. The positioning error is corrected by two-dimensionally shifting at least one of the delayed binary signals. The corrected binary signals are then two-dimensionally compared with each other.

Abstract: Mask-to-wafer alignment in X-ray lithography is advantageously carried out utilizing zone plate marks formed on the mask and wafer. In practice, it has been observed that the intensity and in some cases even the location of the centroid of the light spot formed by a zone plate mask can vary during alignment as the mask-to-wafer spacing is changed.The present invention is based on the discovery and analysis of the causes of such variations. Based thereon, applicants have devised a modified mask structure which, when used with a wafer in a zone plate alignment system, enables mask-to-wafer alignment to be made more easily and more reliably than was possible heretofore. The modified mask structure includes a localized blocking layer over each zone plate on the mask. This layer allows only a negligible portion of the light employed to illuminate the zone plates on the mask to propagate into the mask-to-wafer space.

Abstract: In an aligner system wherein a mask and a wafer are arranged so as to oppose each other with a predetermined gap therebetween, an alignment apparatus is provided including an objective for focusing an alignment marks formed on the mask and on the wafer, a photodetector for imaging both alignment marks, an optical length-varying optical system, a displacement detector, a magnification compensation arrangement, and a relative displacement magnitude detector. The optical length-varying optical system includes at least one prism arrangement for changing an optical length of the optical system to bring each of the alignment marks into focus.

Abstract: A method and apparatus for measuring the gloss of a surface of a material by receiving light reflected from the surface and measuring the amount of light. Parallel light rays from a light source are directed against the surface the gloss of which is to be determined at an angle of incidence, and a cross-section of light rays reflected from the surface at an angle of reflection equal to the angle of incidence is received and the central region of the cross-section of the light rays is blocked out by a light intercepting plate, so that only the light received after the blocking out of the central region is used as a determination of the gloss of the surface.

Abstract: A portable measuring device for testing optical systems of an endoscope consisting of a base plate, a rail with a longitudinally extending V groove for receiving a portion of the endoscope being mounted to extend parallel to the plate on a carriage movable at right angles to the groove. The device includes a vertical shaft mounted on the plate and terminating at one end in a conical point and the shaft carries at least one extension arm which is mounted to pivot in a plane parallel to the base plate. Each arm adjustably supports a measuring disk which can have its height above the plate changed or its distance from the shaft changed.

Abstract: Optical system having application to robotics for determining an object's position. The present system consisting of a laser generator 1 with, devices 11 modulating the wavelength of laser generator frequency along an ascending ramp. An optical system 8 for concentrating radiation near the object, receiver 16 picks up a luminous signal transmitted by the object 10 and reflected on to an optical lamp 6. A processing circuit 17 measures the time in which elapses between the beginning of the shift in wavelength and the moment when the luminous signal is picked up by the receiver.

Abstract: The disclosure concerns the determination of the ophthalmic parameters of a thin astigmatic optical element without requiring initial location of its cylindrical axis. The effective optical power of the eye or other element is measured in three mutually spaced meridians that are selected without regard for the cylindrical axis. The ophthalmic parameters of the element, typically the spherical power, the cylindrical power and the cylindrical axis, are then derived from the measured powers and their selected meridian angles. The power of an astigmatic element in a selected meridian intermediate the principal meridians may be determined in generally conventional manner by adjusting a test optical system to produce a sharp image of a suitable target, preferably with limitation of the image-forming light to rays that traverse the element close to the selected meridian.

Abstract: At least three light beams are applied to different positions on an optical element to be measured. The light beams coming via the optical element to be measured are received through a light-receiving lens by a two-dimensional light position detecting system provided at the rearward focus position of the light-receiving lens or at a position conjugate therewith or are received by two-dimensionally disposed light position detecting system. Three deviation vectors are detected and the refractive powers in three meridian directions are detected, or at least five light beams are applied to different positions on an optical element to be measured and from five deviated beam positions, a general elliptical curve coupling them is specified, whereby the degree of astigmatism, the direction of astigmatism and the refractive power are calculated.

Abstract: The present invention is directed to method and apparatus for determining the resolution and range of the mask and wafer stages and the overall accuracy in a lithographic projection system, the system including first indicia disposed on a first member, second indicia disposed on a second member, the spacing between the indicia when the indicia of the first member is projected onto the indicia of the other member coarsely indicating the degree of misalignment between the members when making a fine motion alignment measurement, a first scale disposed on the first member, a second scale disposed on the second member, each of the scales having a plurality of spaced fingers, all of the fingers being of substantially the same width, the pitch of the fingers of one scale being different than the pitch of the fingers on the other scale so that when the scale of one member is projected onto the scale of the other member the pair of fingers which coincide indicates a fine degree of fine motion alignment measurement fro

Abstract: The invention is directed to an angle-measuring instrument such as a theodolite, tacheometer or the like having a coarse-fine drive arrangement for presetting a circle part of a graduated circle to a predetermined read-out value. In a preferred embodiment, a coaxial coarse-fine drive arrangement is actuated by a single control knob which is part of an adjustable drive which can be operated in two positions. In the first position, the adjustable drive functions as a coarse drive and includes a spur gear that meshes with a gear on the carrier of the graduated circle to permit adjusting the circle part to obtain a coarse setting thereof. When the control knob and adjustable drive are moved into the second position, the drive becomes completely disengaged from the carrier and functions as a fine drive that operates on a plane-parallel plate pivotally mounted in the read-out optical transmission path of the instrument to finely adjust the light rays passing therealong.

Abstract: The sensor is particularly suitable to determine movement between a ground vehicle or aircraft over a ground surface, and a portion of the reference surface (10) is imaged on a grid plane (12, 30, 40) which, in accordance with the invention, is formed as a photo-sensitive transducer, for example a plurality of photo-sensitive diodes formed on a single chip and suitably connected in a grid or matrix pattern, made, for example, by a planar process by monolithic integration. Correlation-optical measurement of relative movement thus is simplified, and precise grid structures can be readily made, the output signals from the individual photo-sensitive junctions being summed and, if interdigited grid structures are used, the so summed signals can then be subtracted from each other to eliminate ambient light, or slowly varying low-frequency components and derive only a movement signal.