Abstract: A micromotility meter for evaluating the movement of helminths in a test solution is provided, including a dark chamber having a test tube holding the solution containing a drug to be tested and a plurality of helminths placed within the solution. The solution defines a meniscus at a side wall of the test tube. A light source is directed upwardly through the test tube and is refracted from the meniscus to a photodetector adjacent the meniscus on the outside of the tube. Movement of the helminths causes a variation of the light rays refracted from the meniscus which results in an amplitude modulated electrical signal emanating from the photodetector that reflects the movement of the helminths. An electronic computation means is responsive to the modulated signal to quantitatively analyze the movement of the helminths and provide an index of motility.

Abstract: A reticle used in a patterning process to fabricate a semiconductor device or a photomask, having a reference pattern consisting of reference pattern pieces, each having the same shape and size, the size being less than the resolution limit of a reduction exposure performed in the patterning process. The reference pattern pieces are extensively printed in an actual pattern region being for a semiconductor die on a reticle substrate with a reticle pattern, so that the reference pattern pieces are used for inspecting the reticle pattern but do not influence the printed pattern of the reticle pattern on a substrate of the semiconductor device or the photomask. In the inspection of the reticle pattern, the reference pattern pieces are used to provide the detected reticle pattern data obtained from the reticle pattern by scanning, so as to be able to be compared with designed reticle pattern data, i.e.

Abstract: A method and apparatus for determining the true edge length of a body subtended by two other body edges comprises exposing the body to a beam of light such that the edge is imaged by an optical system for projecting a linear section across the body as a silhouette-like image onto a linear array of photosensitive detectors. The image is usually blurred due to diffraction effects. The body is initially positioned in focus and then scanned moving the array provide an image of at least a portion of the desired edge to define a reference line representing the location of the edge. The array is then moved in scanned sequence from that reference line to provide fifty percent (50%) intensity level data points to define the other body edges. Lines are fitted through such data points and extended to intersect the reference line to determine the true length of the edge even with a blurred image of portions of that edge.

Abstract: Method and apparatus for determining the frequency of movement of an object or inspection of a moving object where a liquid crystal viewer is pulsed at a rate equal to the rate of movement of the object. Method and means are provided for obtaining a variable viewing window for each period of the pulsing means.

Abstract: An optical instrument arrangement for determining the horizontality of a measured surface, where the arrangement comprises a solid reflecting device on a measured surface, a liquid reflecting device on a measured surface, a collimated light source positioned to direct collimated light beams onto both the solid reflecting device and the liquid reflecting device, a device for generating a first Moire fringe pattern from the solid light reflecting device and for also generating a second Moire pattern from the liquid reflecting device; and a device for simultaneously viewing the first and second Moire patterns to determine the horizontality of the measured surface from the shift of the second Moire pattern relative to the first Moire pattern.

Abstract: The area detection method detects an area on an original enclosed with a mark of specific color by the steps of scanning the original by a photosensor, judging whether the number of the mark segment detected by the photosensor in a single scan line is an even or odd number for each scan and detecting the area based on the output of the photosensor in the scan period for which the judgement is made that the number of the detected mark segment is an even number.

Abstract: Disclosed is a position detection signal processing apparatus to be used with a first body having a first pattern for alignment and a second body having a second pattern. The apparatus includes a pattern detecting device for detecting the first and second patterns and producing a detection signal stream, an expectation pulse forming circuit for forming an expectation pulse signal for specifying the portion of the detection signal stream in which the probability with which signals corresponding to the first and second patterns exist is high, and a true signal forming circuit for forming true signal streams corresponding to the first and second patterns from the detection signal stream and the expectation pulse signal.

Abstract: A pattern detector according to the present invention adopts a processing method wherein means is provided anew with which the intensity distribution of light reflected from or transmitted through an illuminated specimen is photoelectrically converted, and a pattern position is detected at high speed from the ratio between the primary moment and integral value of a detection signal thus derived, whereupon a symmetry calculation is executed within a narrow range around the detected value, whereby the pattern position is found fast and precisely.

Abstract: A device for checking positional accuracy is disclosed which precisely checks the accuracy of the mounting position of a plurality of magnetic heads mounted on a rotary disk along the edge thereof. The device includes a laser which projects a laser beam in a direction at a predetermined angle with respect to the rotary disk. The laser beam is successively scattered by head gaps of the magnetic heads. A photosensor converts the scattered light components into photoelectric signals each containing two photoelectric signal components. The two photoelectric signal components of each of the photoelectric signals are differentially amplified by an operational amplifier. The operational amplifier produces successive differential signals which are supplied to a zero-crossing detector. The accuracy of the mounting position of the magnetic heads is then checked based on the interval between adjacent detected zero crossings.

Abstract: An in-line concurrent diagnostic analyzer for laser beams. An aperature mor splits the initial laser beam into two beams. The reflected portion of the initial beam follows path 1. Along path 1, an aliquot of the path 1 beam is reflected into a time history sensor. The majority of the path 1 beam ignites a plasma to mark beam arrival time at the target. The aperatured beam strikes and heats a calorimeter mirror, which records the energy of the incident beam. About 99 percent of the aperatured beam then passes to a specially designed (thin, with a short diffusion time) mirror attached to thermocouples to record the energy profile of the beam. The beam is reflected by the special mirror onto the target. A Third sensor detects any breakdown at the target surface.

Abstract: A scattered light type smoke detector wherein a light source and a photo-cell are so disposed that light from the light source does not directly enter the photo-cell and the photo-cell is adapted to receive light from the light source scattered by intervening smoke to detect the presence of smoke. The photo-cell is accommodated in a cylindrical recess formed in a smoke detecting holder. The inner face of the cylindrical recess and the surface of the smoke detecting holder extending along the optical axis of the photo-cell has light traps formed in sawteeth configuration in section for reflecting light other than the scattered light to be detected into a direction not towards the photo-cell.

Abstract: An apparatus and method for automatically checking and correcting register adjustment of a multi-color sheet-fed printing press wherein register marks are read by an ink densitometer on a remote control desk. The densitometer head is mounted on an X,Y positioning mechanism under the control of a register control computer so that the densitometer head scans cross-shaped register marks to determine both axial and peripheral register error. Preferably both right-hand and left-hand marks are used in order to pecisely determine skew or diagonal error, and the densitometer head rapidly traverses from one mark to the other mark. Preferably each register mark is made up of offset component marks of the primary colors and the positions of the marks are matched with their respective colors by the time sequence of scan path points of intersection. One color is chosen as a reference from which desired positions are calculated for the other component marks.

Abstract: A measuring apparatus (11) for measuring the contours of a deep mirror (10) includes a laser (14) for generating a light beam (20). The light beam impinges upon a reflecting surface (16) for reflection therefrom to a point P. The light ray is then reflected from the point P back to the flat reflecting surface (16) and then to an intersection point (34). An axial reflecting surface (36) disposed normal to a central axis (12) reflects the light beam to a second reflecting surface (18). The light ray is reflected off of this surface to a point Q on the inner surface of the mirror (10). The point Q is diametrically opposite the central axis (12) from the point P. The light beam reflected from the point Q is then reflected to the reflecting surface (18) and then to a detector (50) which detects positional deviations in the path of the light beam. The mirror (10) is moved about the central axis (12) relative to the measuring apparatus such that the points P and Q traverse the surface thereof.

Abstract: An alignment system is described for lithographic proximity printing apparatus wherein the wafer and lithographic mask are each individually aligned with a third element. An alignment mask carries an alignment pattern corresponding to an alignment mark on the microcircuit wafer and also carries an alignment pattern corresponding to an alignment mark on the proximity printing mask. In one embodiment, the alignment mask is illuminated from the back side by alignment radiation (which need not be visible light) and the alignment patterns carried by the alignment mask are imaged onto the corresponding wafer and proximity printing mask alignment marks. Since the projected alignment patterns are spatially separated at the alignment mask one of the alignment patterns is conveniently shifted in effective optical position to compensate for the difference in axial position of the wafer and printing mask alignment marks. When a projected alignment pattern image correlates with (i.e.

Abstract: A particle diameter measuring device for measuring the particle diameter distribution of a number of particles to be measured, wherein a laser beam guided through a radiating optical fiber is re-formed by collimator lenses into parallel beams having an adequate diameter and is then irradiated onto the particles to be measured; a plurality of optical fibers are arranged along a circle whose center is a point P located in the particles, the receiving end of any of the optical fibers being directed toward point P. The optical fibers receiving the scattered light are arranged close to one another in the range of small scattering angles, while they are roughly arranged in the range of large scattering angles. A transmitted light enters into that optical fiber which is so arranged as to coincide with the laser beam incident direction, the intensity of this transmitted light being detected by a photodetector.

Abstract: An object is scanned first with a light plane from a variable-intensity light-plane projector, and the reflected light is used as signals to modify point by point the output of the projector in accordance with the intensity of the respective reflective-light signal. Thereupon the object is scanned a second time and the projector is instructed to apply less light than before to those points of the object from which a strong reflected-light signal was received during the first scan, and/or to apply more light to points from which a weak reflected-light signal was received during the first scan. In similar manner, a projected intensity encoded light volume is projected on an object and the reflected light is used as signals to point-by-point modify the output of the projector for subsequent projections.

Abstract: An apparatus for continuously measuring the concentration of particulates in a sample gas by using an optoacoustic effect. Identical laser rays are directed along two optical paths, and a chopper and an optoacoustic cell are position in the recited order in each of the optical paths. Sample gas containing particulates is introduced into one optoacoustic cell and sample gas from which the particulates have been removed is introduced into the other optoacoustic cell. The respective choppers are driven for producing a chopping action on the respective laser rays at a frequency corresponding to the resonant frequency of the corresponding optoacoustic cells, and the outputs from the cells can be compared for providing an indication of the concentration of the particulates in the sample gas.

Abstract: A mirror array light valve is described comprising a transparent substrate, a plurality of post members arranged in a regular array on said substrate, and a plurality of deflectable square, rectangular, hexagonal or the like light-reflecting elements arranged in a regular array on said post members such that a post member is positioned under a corresponding corner of each element; methods for making the mirror array light valve are also described.

Abstract: A primary beam of light is directed against the surface of a piece of material under conditions predetermined to generate a secondary beam by either transmission through the piece or reflection from the surface thereof. The secondary beam is directed against means for measuring the intensity of the transmitted or reflected light and the light intensity measured. The procedure is repeated on a different surface of the piece and the results compared. This gives an evaluation of the surface and a determination of the presence, absence, or condition of any coating which may be present on the surface. The apparatus of the invention comprises means for achieving the foregoing functions.The method and apparatus are of particular application in the determination of which is the coated side of an object, such as a photographic film, or a coated lens.

Abstract: This invention relates to a spectrophotometer that detects the types and amounts of certain chemical elements dissolved or suspended in a liquid or gas medium. A light beam of desirable frequency emitted from a light source passes through the mass concentration boundary layer adjacent to a filter surface, which filter functions as a selective barrier selectively blocking chemical elements or impurities under detection from moving thereacross. Prior to the start of a measurement, the filter surface is washed with the sample medium to be analyzed by allowing the sample medium to flow parallel to the filter surface without flowing across the filter. The measurement starts at the moment the outlet of the washing flow is shut-off whereupon a light sensor such as photoelectric sensor records the intensity of the light beam passing through the mass configuration boundary layer.