Abstract: An apparatus and method for aligning a mask and wafer in the fabrication of ntegrated circuits utilizing alignment patterns on the mask and wafer. Each alignment pattern comprises a plurality of parallel alignment marks which are spaced from one another such that the patterns may be superimposed so that the marks of one pattern are positioned between marks of the other pattern. When the patterns are misaligned, a moire pattern is produced which disappears on alignment. The marks of each pattern are also disparately spaced from one another, permitting a gross to fine alignment. In aligning the patterns, each mark of one pattern is positioned between pairs of marks of the other pattern in an order corresponding to the widths of spaces defined between marks of the other pattern, progressing from the largest space width, giving gross alignment, to the smallest, giving fine alignment.

Abstract: An electrooptical system and technique for direct quantitative measurement of the mass concentration of monodisperse aerosols by means of filling an enclosed chamber with a cloud or a sequence of separate clouds of essentially transparent and spherical, aerosolized particles or droplets of known density and known or selectively controlled particle size. While within the confines of the chamber the cloud, or each of the sequence of clouds, of aerosolized particles is maintained in a homogeneous condition and irradiated with a beam of high-intensity and constant wavelength irradiation selected to possess a wavelength to particle size ratio wherein attenuation of the irradiation will be almost exclusively, if not nearly entirely, attributable to optical scattering.

Abstract: The invention contemplates a photometer tube having a rotatably mounted slit-diaphragm insert, with provision for scanning a specimen object through the slit, in the direction perpendicular to the instantaneous longitudinal orientation of the slit. In a first embodiment, the rotatable slit is coupled with an angle transmitter which supplies a control signal for scanning by a motor-driven X-Y specimen stage. In a second embodiment, the diaphragm holder itself is mounted on a carrier, for lineal displacement on the carrier in the direction perpendicular to the direction of the slit, and the carrier is rotatable to permit slit orientation with respect to a pattern of interest in an observed specimen.

Abstract: An alignment system and method is provided having an alignment target pattern formed on a semiconductor wafer, with means for scanning that target pattern to produce signals representing dimensions of individual features therein and distances between adjacent features, and with means for interrogating these signals to determine the relative position and distance of the scanned portion of the target pattern from a predetermined reference position. The target pattern includes one or more series of concentric figures, each figure having a particular dimension which differs from the particular dimension of each adjacent figure by a predetermined magnitude and being spaced from adjacent figures by predetermined distances. These predetermined distances and magnitude are detected from the scanning means signals and are used to determine the distance and direction of the scanning position from a reference position.

Abstract: An alignment apparatus for aligning one of the substrates with the other by means of first and second reference marks comprises scanning means including a light beam generating means for reciprocally scanning first and second areas respectively by a light beam, discrimination means for generating a discrimination signal indicative of the scanning direction by the scanning means in synchronism with the scanning, first photoelectric means for generating a first signal when the first photoelectric means receives the light beam transmitted through a first area and separated by the first reference mark, second photoelectric means for generating a second signal when the second photoelectric means receives the light beam transmitted through the second area and separated by the second reference mark, operation means for determining the direction and amount of the relative deviation between the first and second reference marks from the first and second signals and from the discrimination signal, and means for moving o

Abstract: Radiation pulses are directed at a measuring spot on a rotating printing-image carrier in an offset printing press. The intensity of the radiation returned from the measuring spot outside of the angle of reflection of the pulse is measured for a predetermined wavelength. A pulse is directed at the measuring spot before printing and while the measuring spot is dry, and a signal representing the intensity of the returned radiation is stored in a working memory. During a subsequent printing operation, a dampening agent is applied to the printing-image carrier. In order to determine the amount of dampening agent on the printing-image carrier, radiation pulses are directed at the measuring spot as the printing-image carrier rotates during printing. The intensity of the returned radiation in the predetermined wavelength is converted into damp signals which represent the amount of dampening agent since the predetermined wavelength approximates or equals an absorption wavelength of the dampening agent.

Abstract: A projection type lensmeter in which the target image for measuring the refractive power of a lens is projected on a screen and the projected image is magnified and observed through a magnifying observation optical system including a collimator lens having a focal length f.sub.1 adapted to collimate light projected from the target image, and a projection lens having a focal length f.sub.2 adapted to project light from the target image to the screen. The magnifying observation optical system has an effective diameter .phi. and a magnification m.sub.2. The focal lengths f.sub.1 and f.sub.2, the effective diameter .phi., and the magnification m.sub.2 satisfy the following relations:25 mm.ltoreq.f.sub.1 .ltoreq.30 mm409 mm.ltoreq.f.sub.2 .ltoreq.600 mm60 mm.ltoreq..phi..ltoreq.70 mm1.25.ltoreq.m.sub.2 .ltoreq.1.83.The overall magnification of the lensmeter is 30 or greater.

Abstract: A plate thickness measuring method and apparatus, is provided wherein a fine pattern is projected on the front and rear surfaces of an object to be measured via object lenses oppositely provided on the front and rear surfaces of the object to be measured in its thickness. The image of the projected pattern on the object to be measured is formed via said object lenses, and the contrast of the formed pattern image is detected. Then the object lenses are moved slightly to achieve the maximum of the contrast, or to perform an automatic focusing control. The thickness of the object to be measured can then be estimated from the difference of the positions of the object lenses at which the maximum contrast, or the focused condition, are obtained.

Abstract: The disclosure is directed to an apparatus and method for obtaining an improved moire fringe pattern image of an object. A beam of incoherent light is projected at the object. A grating is disposed in the path of the beam projected at the object, this grating being referred to as a projection grating. Means are provided for focusing the beam reflected from the object to obtain an image at an image plane. Another movable grating is disposed at the image plane. This movable grating is referred to as a reference grating. Means are provided for recording the image at the image plane, the recording means being, for example, a photographic or video camera. In accordance with an important feature of the invention, means are provided for moving the projection grating and the reference grating in synchronism. In a preferred embodiment, the projection and reference gratings are mounted in spaced relation in a movable member, and the synchronized motion of the gratings is implemented by moving the member.

Abstract: Two objects each having mark elements which extend in different directions are aligned. The mark elements are scanned by a linear slit-like illumination area, and the light reflected by the mark elements are used for the alignment. The direction or inclination of the linear-slit-like illumination area is changed, during one scanning deflection, to be in conformity with the mark elements.

Abstract: A method and apparatus for monitoring the surface of an elongated, normally-smooth object, such as coated cable, for certain flaws. The object is longitudinally movable along a path. Radiation, such as white light, is directed at the object such that it is incident therewith throughout a narrow zone extending substantially entirely around the object's perimeter. The angle of incidence of the light with the object is such that a normally smooth surface specularly reflects light at a relatively large angle, whereas particular flaws, such as pips and the like, scatter the light in a particular direction longitudinally of the object and at a relatively smaller or limited angle thereto. A slotted mirror is disposed concentrically about the object's path and reflects the scattered light to imaging and detecting devices, such as a charge injection device. Analytical electronics connected to the detector analyze its electrical signal to indicate the presence of a flaw.

Abstract: The invention relates to apparatus for measuring the dimensions of cylindrical objects by means of a scanning laser beam which is directed from a source (1) of laser light onto a rotating mirror (2) and through a first lens (6) located a focal-length distance from the center of rotation of the mirror. The beam is arranged to sweep over one side of the object (7) and is reflected onto the rotating mirror from where it is reflected onto a light detector (11) arranged to control a data processor (12), which determines and indicates the sensed dimension. The apparatus includes means (2,10,9,8) for directing the laser beam onto and to sweep the same over the other, opposite side of the object (7). During one revolution of the mirror the beam will therewith, during one half of a mirror revolution, sweep over a first side of the object, and will sweep over the other side of the object during the other half of the mirror revolution.

Abstract: An optical sensor comprises a device for monitoring the angular motion of a remote body about three orthogonal axes from a single observation point. A compact totally passive target is adapted to be attached to the body, the angular motion of which is to be sensed. The target reflects light beams representing pitch, yaw and roll measurement functions. The reflected light beams are optically sensed and reduced to components about the pitch, yaw and roll axes which are visually displayed through a single eyepiece.

Abstract: The distance between first and second grating-like structures such as a shadow mask and a faceplate of a color picture tube or the size of pattern elements of the second grating-like structure such as black stripes formed on the inner surface of the faceplate is optically measured. The shadow mask has a periodic pattern of apertures or slots and the faceplate has a periodic pattern of the black stripes. An optical system located between a light source and an assembly of the first and second grating-like structures applies parallel rays of light to the assembly and is arranged to vary an incident angle of the parallel rays to the assembly. A photodetector detects the quantity of light passed through the assembly to produce an electric signal whose amplitude periodically varies with variation in the incident angle of the parallel rays to the assembly.

Abstract: A method and apparatus for aligning a surface of a pyramidal-shaped workpiece (such as a stylus) with respect to a positioning ring attached to a holder supporting the workpiece. One surface of the workpiece (electrode of the stylus) is exposed to an incident light beam of large diameter so that only a portion of the incident beam is reflected from the surface onto a calibrated screen. A mirror reflects the remaining portion of the light beam back to the other two stylus surfaces to provide a pair of reflected beams onto the same screen. The workpiece is rotated to position the three reflections on the calibrated screen for comparison to a standard.

Abstract: The invention relates to an apparatus for measuring the wave surface distortions introduced by a lens, comprising a source which emits coherent light of frequency .nu.o; means for creating a reference beam and a measuring beam; a Bragg cell receiving and transmitting said beams, excited by a radio-frequency wave of frequency f emitted by a generator, the reference beam transmitted having the frequency .nu.o and the measuring beam diffracted by the cell having a frequency .nu.o+f; means for transmitting the beams from the cell to the lens to be tested; detection means transforming the light signal from the lens into an electrical signal of frequency f and whereof the phase is characteristic of the wave surface distortions introduced by the lens; and means for measuring the phase displacement between the phase of the electrical signal from the detection means and the phase of an electrical signal corresponding to the radio-frequency waves.

Abstract: A meter for measuring the transmissivity of a floppy disk including an oscillator for generating a sinusoidal signal, a driver and an LED, biased on by the driver and modulated by the driver responsive to the sinusoidal signal, the LED for illuminating a portion of a surface of the disk. The meter further including a photodetector optically aligned with the LED and so disposed as to develop a detected signal from illumination transmitted through the disk, a current to voltage converter, an amplifier, a state variable band pass filter, and a peak detector and amplifier for amplifying, filtering and detecting the detected signal to develop a signal suitable for driving a digital panel meter so as to directly indicate in percent the transmissivity of the disk.

Abstract: An edge detector in an optical measuring instrument, for detecting a transmitted light or reflected light to directly or indirectly measure dimensions of an object being measured, comprising:a sensor including four light receiving elements provided on a plane substantially in parallel with a plane of relative movement between the sensor and said object being measured, whereby at least two sets of phase shift signals are generated in accordance with brightness and darkness generated during said relative movement; a first and a second operational means for calculating differences between the sets of said phase shift signals; a third operational means for calculating a difference between output signals emitted from said first and second operational means and a fourth operational means for calculating a sum of said output signals; and a detecting means for emitting a crossing signal when an output signal from said third operational means is on a reference level, and when an output signal from said fourth operatio

Abstract: An apparatus for automatically detecting and evaluating print characteristics comprising an optical detection and comparison means. In particular comparison is made using reflector means which is at the same time a background area for a print in its test position.

Abstract: An alignment apparatus for aligning a mask having a first mark comprising first mark elements and a wafer having a second mark comprising second mark elements different in width from the first mark elements, comprises a moving mechanism for moving the wafer, a sensor for detecting the first and second marks and putting out a detection signal stream, a signal processing circuit for receiving the detection signal stream, discriminating between the first mark elements and the second mark elements in accordance with their respective pulse widths and creating a discrimination signal and creating a spacing signal regarding a plurality of spacings between the first mark elements and the second mark elements, and a drive circuit for driving the moving mechanism in response to the discrimination signal and the spacing signal.