Patents Examined by Richard Booth
  • Patent number: 11417724
    Abstract: A capacitor includes a lower electrode, a first dielectric layer provided on the lower electrode including a perovskite structure, an upper electrode including a perovskite structure, a first dielectric layer between provided on the lower electrode and the upper electrode; and a second dielectric layer, having a band gap energy greater than that of the first dielectric layer, provided between on the first dielectric layer and the upper electrode, the capacitor may have a low leakage current density and stable crystallinity, thereby suppressing a decrease in a dielectric constant.
    Type: Grant
    Filed: November 12, 2020
    Date of Patent: August 16, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jeongil Bang, Seungwoo Jang, Hyosik Mun, Younggeun Park, Jooho Lee
  • Patent number: 11417672
    Abstract: There are provided a semiconductor memory device and a manufacturing method thereof. The manufacturing method of the semiconductor memory device includes: forming a preliminary memory cell array that includes a gate stack structure and a channel structure, wherein the gate stack structure includes interlayer insulating layers and conductive patterns, alternately stacked on a first substrate, and wherein the channel structure has a first end portion that penetrates the gate stack structure and extends into the first substrate; forming a common source line to be in contact with a second end portion of the channel structure, the common source line formed on a first surface of the gate stack structure; removing the first substrate; and forming a bit line connected to the first end portion of the channel structure on a second surface of the gate stack structure that is opposite of the first surface of the gate stack structure.
    Type: Grant
    Filed: March 6, 2020
    Date of Patent: August 16, 2022
    Assignee: SK hynix Inc.
    Inventor: Nam Jae Lee
  • Patent number: 11417768
    Abstract: The disclosed technology generally relates to ferroelectric materials and semiconductor devices, and more particularly to semiconductor memory devices incorporating doped polar materials. In one aspect, a semiconductor device comprises a capacitor which in turn comprises a polar layer comprising a base polar material doped with a dopant. The base polar material includes one or more metal elements and one or both of oxygen or nitrogen. The dopant comprises a metal element that is different from the one or more metal elements and is present at a concentration such that a ferroelectric switching voltage of the capacitor is different from that of the capacitor having the base polar material without being doped with the dopant by more than about 100 mV. The capacitor stack additionally comprises first and second crystalline conductive oxide electrodes on opposing sides of the polar layer.
    Type: Grant
    Filed: November 16, 2021
    Date of Patent: August 16, 2022
    Assignee: Kepler Computing Inc.
    Inventors: Ramesh Ramamoorthy, Sasikanth Manipatruni, Gaurav Thareja
  • Patent number: 11411116
    Abstract: The disclosed technology generally relates to ferroelectric materials and semiconductor devices, and more particularly to semiconductor memory devices incorporating doped polar materials. In one aspect, a semiconductor device comprises a capacitor which in turn comprises a polar layer comprising a base polar material doped with a dopant. The base polar material includes one or more metal elements and one or both of oxygen or nitrogen. The dopant comprises a metal element that is different from the one or more metal elements and is present at a concentration such that a ferroelectric switching voltage of the capacitor is different from that of the capacitor having the base polar material without being doped with the dopant by more than about 100 mV. The capacitor stack additionally comprises first and second crystalline conductive oxide electrodes on opposing sides of the polar layer.
    Type: Grant
    Filed: July 2, 2021
    Date of Patent: August 9, 2022
    Assignee: Kepler Computing Inc.
    Inventors: Ramesh Ramamoorthy, Sasikanth Manipatruni, Gaurav Thareja
  • Patent number: 11411025
    Abstract: Various embodiments of the present disclosure are directed towards a metal-ferroelectric-insulator-semiconductor (MFIS) memory device, as well as a method for forming the MFIS memory device. According to some embodiments of the MFIS memory device, a lower source/drain region and an upper source/drain region are vertically stacked. A semiconductor channel overlies the lower source/drain region and underlies the upper source/drain region. The semiconductor channel extends from the lower source/drain region to the upper source/drain region. A control gate electrode extends along a sidewall of the semiconductor channel and further along individual sidewalls of the lower and upper source/drain regions. A gate dielectric layer and a ferroelectric layer separate the control gate electrode from the semiconductor channel and the lower and upper source/drain regions.
    Type: Grant
    Filed: June 17, 2020
    Date of Patent: August 9, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sheng-Chih Lai, Chung-Te Lin
  • Patent number: 11404430
    Abstract: According to one embodiment, a semiconductor memory device includes a semiconductor substrate; a first conductor layer provided above the semiconductor substrate and including silicon; a plurality of second conductor layers provided above first conductor layer and stacked apart from each other in the first direction; and a first pillar extending in the first direction through the second conductor layers and including intersection portions where the first pillar intersects the second conductor layer, the intersection portions each functioning as a memory cell transistor, wherein the first conductor layer includes a first region which is in contact with the first pillar and includes at least one element of arsenic (As), phosphorus (P), carbon (C), or boron (B).
    Type: Grant
    Filed: September 9, 2019
    Date of Patent: August 2, 2022
    Assignee: Kioxia Corporation
    Inventor: Ken Komiya
  • Patent number: 11398452
    Abstract: Methods for the production of a semiconductor device are disclosed. In one embodiment, a method may include: (1) mechanically contacting a first substrate (100) having a semiconductor material to a second substrate (200) having a bondable passivation material and contact vias (210) extending through the bondable passivation material; (2) covering the contact vias (210) with an at least high-resistance material (220, 300) on a side facing away from the first substrate (100); (3) applying an electric potential between the at least high-resistance material and the first substrate. The potential has a sufficient level that is functionally sufficient to initiate a bonding process between the bondable passivation material of the second substrate and the semiconductor material of the first substrate.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: July 26, 2022
    Assignee: X-FAB Semiconductor Foundries GmbH
    Inventors: Stefan Weinberger, Roy Knechtel, Peter Tilo
  • Patent number: 11393897
    Abstract: A capacitor structure of memory is provided in the present invention, including structures of multiple cylindrical bottom electrode layers with bottoms contacting a substrate and extending vertically and upwardly from the substrate, the cylindrical shape of the bottom electrode layer has a sidewall with wavelike cross-section, and the wavelike cross-sections of adjacent bottom electrode layers are identical but shifted vertically by a distance, a capacitive dielectric layer on the bottom electrode layers, and a top electrode layer on the capacitive dielectric layer.
    Type: Grant
    Filed: March 15, 2021
    Date of Patent: July 19, 2022
    Assignee: Powerchip Semiconductor Manufacturing Corporation
    Inventor: Kai-Jyun Huang
  • Patent number: 11393834
    Abstract: According to one embodiment, a semiconductor storage device includes a first interconnection, a second interconnection, a first channel part, a second channel part, a first charge storage part, a second charge storage part, a first insulator, a second insulator, and a third insulator. The first insulator includes a portion between at least a portion of the first charge storage part and at least a portion of the second charge storage part, and extends in a first direction. The second insulator is between the first insulator and the first interconnection, and extends in the first direction at a position arranged with respect to the first charge storage part in the first direction. The third insulator is between the second interconnection and the first insulator, and extends in the first direction at a position arranged with respect to the second charge storage part in the first direction.
    Type: Grant
    Filed: August 19, 2020
    Date of Patent: July 19, 2022
    Assignee: KIOXIA CORPORATION
    Inventors: Yefei Han, Tetsu Morooka, Norio Ohtani
  • Patent number: 11393920
    Abstract: Some embodiments include an integrated assembly having a conductive structure, an annular structure extending through the conductive structure, and an active-material-structure lining an interior periphery of the annular structure. The annular structure includes dielectric material. The active-material-structure includes two-dimensional-material. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: July 19, 2022
    Assignee: Micron Technology, Inc.
    Inventors: David K. Hwang, John F. Kaeding, Richard J. Hill, Scott E. Sills
  • Patent number: 11393833
    Abstract: In some embodiments, the present disclosure relates to an integrated chip. The integrated chip includes a bottom electrode disposed over a substrate and a top electrode disposed over the bottom electrode. A ferroelectric switching layer is arranged between the bottom electrode and the top electrode. The ferroelectric switching layer is configured to change polarization based upon one or more voltages applied to the bottom electrode or the top electrode. A seed layer is arranged between the bottom electrode and the top electrode. The seed layer and the ferroelectric switching layer have a non-monoclinic crystal phase.
    Type: Grant
    Filed: July 24, 2020
    Date of Patent: July 19, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bi-Shen Lee, Hsing-Lien Lin, Hsun-Chung Kuang, Yi Yang Wei
  • Patent number: 11387325
    Abstract: A vertical semiconductor device may include a semiconductor substrate having at least one trench therein, and a superlattice liner at least partially covering sidewall portions of the at least one trench and defining a gap between opposing sidewall portions of the superlattice liner. The superlattice liner may include a plurality of stacked groups of layers, each group of layers comprising stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer, with each at least one non-semiconductor monolayer of each group being constrained within a crystal lattice of adjacent base semiconductor portions. The device may also include a semiconductor layer on the superlattice liner and including a dopant constrained therein by the superlattice liner, and a conductive body within the at least one trench defining a source contact.
    Type: Grant
    Filed: November 23, 2020
    Date of Patent: July 12, 2022
    Assignee: ATOMERA INCORPORATED
    Inventors: Robert John Stephenson, Richard Burton, Dmitri Choutov, Nyles Wynn Cody, Daniel Connelly, Robert J. Mears, Erwin Trautmann
  • Patent number: 11380812
    Abstract: Disclosed herein is an apparatus and a method of making the apparatus. The method comprises obtaining a plurality of semiconductor single crystal chunks. Each of the plurality of semiconductor single crystal chunks may have a first surface and a second surface. The second surface may be opposite to the first surface. The method may further comprise bonding the plurality of semiconductor single crystal chunks by respective first surfaces to a first semiconductor wafer. The plurality of semiconductor single crystal chunks forming a radiation absorption layer. The method may further comprise forming a plurality of electrodes on respective second surfaces of each of the plurality of semiconductor single crystal chunks, depositing pillars on each of the plurality of semiconductor single crystal chunks and bonding the plurality of semiconductor single crystal chunks to a second semiconductor wafer by the pillars.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: July 5, 2022
    Assignee: SHENZHEN XPECTVISION TECHNOLOGY CO., LTD.
    Inventors: Peiyan Cao, Yurun Liu
  • Patent number: 11362185
    Abstract: A method for manufacturing a memory device is provided. The method includes depositing a floating gate electrode film over a semiconductor substrate; patterning the floating gate electrode film into at least one floating gate electrode having at least one opening therein; depositing a control gate electrode film over the semiconductor substrate to overfill the at least one opening of the floating gate electrode; and patterning the control gate electrode film into at least one control gate electrode over the floating gate electrode.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: June 14, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Chu Lin, Chi-Chung Jen, Yen-Di Wang, Jia-Yang Ko, Men-Hsi Tsai
  • Patent number: 11355643
    Abstract: The disclosed technology generally relates to ferroelectric materials and semiconductor devices, and more particularly to semiconductor memory devices incorporating doped polar materials. In one aspect, a semiconductor device comprises a capacitor which in turn comprises a polar layer comprising a base polar material doped with a dopant. The base polar material includes one or more metal elements and one or both of oxygen or nitrogen. The dopant comprises a metal element that is different from the one or more metal elements and is present at a concentration such that a ferroelectric switching voltage of the capacitor is different from that of the capacitor having the base polar material without being doped with the dopant by more than about 100 mV. The capacitor stack additionally comprises first and second crystalline conductive oxide electrodes on opposing sides of the polar layer.
    Type: Grant
    Filed: July 2, 2021
    Date of Patent: June 7, 2022
    Assignee: Kepler Computing Inc.
    Inventors: Ramesh Ramamoorthy, Sasikanth Manipatruni, Gaurav Thareja
  • Patent number: 11355578
    Abstract: We disclose herein a high voltage device comprising: a first electrode; a second electrode disposed underneath and spaced from the first electrode; and a dielectric layer disposed between the first and second electrodes, wherein the first electrode extends further in at least one lateral direction in respect of the second electrode.
    Type: Grant
    Filed: January 22, 2020
    Date of Patent: June 7, 2022
    Assignee: X-FAB DRESDEN GMBH & CO.KG
    Inventors: Victor Sizov, Denis Reso
  • Patent number: 11348876
    Abstract: A method of fabricating a semiconductor package includes forming a capping pattern on a chip pad of a semiconductor device. The semiconductor device includes a passivation pattern that exposes a portion of the chip pad, and the capping pattern covers the chip pad. The method further includes forming a redistribution layer on the capping pattern. Forming the redistribution layer includes forming a first insulation pattern on the capping pattern and the passivation pattern, forming a first opening in the first insulation pattern by performing exposure and development processes on the first insulation pattern, in which the first opening exposes a portion of the capping pattern, and forming a redistribution pattern in the first opening.
    Type: Grant
    Filed: December 22, 2020
    Date of Patent: May 31, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kyoung Lim Suk, Seung-Kwan Ryu, Seokhyun Lee
  • Patent number: 11349031
    Abstract: The disclosed technology generally relates to ferroelectric materials and semiconductor devices, and more particularly to semiconductor memory devices incorporating doped polar materials. In one aspect, a semiconductor device comprises a capacitor which in turn comprises a polar layer comprising a base polar material doped with a dopant. The base polar material includes one or more metal elements and one or both of oxygen or nitrogen. The dopant comprises a metal element that is different from the one or more metal elements and is present at a concentration such that a ferroelectric switching voltage of the capacitor is different from that of the capacitor having the base polar material without being doped with the dopant by more than about 100 mV. The capacitor stack additionally comprises first and second crystalline conductive oxide electrodes on opposing sides of the polar layer.
    Type: Grant
    Filed: July 2, 2021
    Date of Patent: May 31, 2022
    Assignee: Kepler Computing Inc.
    Inventors: Ramesh Ramamoorthy, Sasikanth Manipatruni, Gaurav Thareja
  • Patent number: 11342423
    Abstract: A grid is manufactured with a combination of ion implant and epitaxy growth. The grid structure is made in a SiC semiconductor material with the steps of a) providing a substrate comprising a doped semiconductor SiC material, said substrate comprising a first layer (n1), b) by epitaxial growth adding at least one doped semiconductor SiC material to form separated second regions (p2) on the first layer (n1), if necessary with aid of removing parts of the added semiconductor material to form separated second regions (p2) on the first layer (n1), and c) by ion implantation at least once at a stage selected from the group consisting of directly after step a), and directly after step b); implanting ions in the first layer (n1) to form first regions (p1). It is possible to manufacture a grid with rounded corners as well as an upper part with a high doping level.
    Type: Grant
    Filed: September 14, 2018
    Date of Patent: May 24, 2022
    Assignee: II-VI DELAWARE, INC.
    Inventors: Adolf Schöner, Sergey Reshanov, Nicolas Thierry-Jebali, Hossein Elahipanah
  • Patent number: 11342344
    Abstract: The present disclosure relates to a memory device, and more particularly, to a memory device including a substrate, a plurality of vertical structures disposed on the substrate and including insulation layers and lower electrodes, which are alternately laminated with each other, wherein the vertical structures are aligned in a first direction parallel to a top surface of the substrate and a second direction crossing the first direction, an upper electrode disposed on a top surface and side surfaces of each of the vertical structures, and a first dielectric layer disposed between the upper electrode and the vertical structures to cover the top surface and the side surfaces of each of the vertical structures. Here, the first dielectric layer includes a ferroelectric material.
    Type: Grant
    Filed: November 4, 2020
    Date of Patent: May 24, 2022
    Assignees: Electronics and Telecommunications Research Institute, University-Industry Cooperation Group of Kyung Hee University
    Inventors: Seungeon Moon, Bae Ho Park, Sung-Min Yoon, Seung Youl Kang, Jeong Hun Kim, Jiyong Woo, Jong Pil Im, Chansoo Yoon, Ji Hoon Jeon