Abstract: A method for deposition of thin conductive layers of low resistivity titanium silicide. The method comprises the co-deposition of titanium and silicon by plasma-enhanced chemical vapor deposition at a low temperature. An anneal above the deposition temperature reduces the layer resistivity, making the layer especially suitable for microelectronic applications.
Type:
Grant
Filed:
October 31, 1983
Date of Patent:
December 10, 1985
Assignee:
Advanced Semiconductor Materials America, Inc.
Abstract: A process for chemical vapor deposition of borophosphosilicate glass on a silicon wafer at reduced pressure is disclosed herein. The process includes a step of placing a silicon wafer within a reactor tube. The reactor tube is evacuated to a pressure of less than 500 millitorr and is heated to a temperature of not less than 350.degree. C. and not greater than 500.degree. C. A mixture of silane, phosphine and boron trichloride gases is flowed into the reactor tube so that the mixture contacts the silicon wafer. At the same time, a quantity of oxygen is flowed into the reactor tube so that the oxygen also contacts the silicon wafer and intermixes and reacts with the silane, phosphine and boron trichloride gases to form layers of borophosphosilicate glass on the silicon wafer.
Type:
Grant
Filed:
May 18, 1984
Date of Patent:
December 10, 1985
Assignee:
Thermco Systems, Inc.
Inventors:
Thomas C. Foster, Jon C. Goldman, Gary W. Hoeye
Abstract: A process for producing silicon-containing deposit films which comprises introducing a cyclic silane represented by the general formula (SiH.sub.2).sub.n, wherein n is 4, 5, or 6, in the gaseous state together with a carrier gas into a deposition chamber and applying heat to the introduced gases at ordinary pressure to decompose the cyclic silane and form a silicon-containing deposit film on a substrate placed in the deposition chamber.
Abstract: An antifouling coating for inhibiting the growth of marine life on surfaces in contact with seawater comprising a coating material having dispersed therein an effective amount of particles of a polycyclic naphthacenecarboxamide, preferably tetracycline. The principle use of composition of this invention is to coat the hulls of boats and ships and other surfaces contacted by seawater.
Abstract: An improved method of depositing borophosphosilicate glass (BPSG) on a substrate is disclosed. The improved method uses temperatures substantially lower than conventional and a volume ratio of oxygen to the total hydride content in the deposition mixture substantially higher than conventional. A BPSG film of increased purity is produced at a rate of deposition substantially faster than conventional procedures.
Abstract: The present invention relates to a method for producing elastically deformable articles constituted of a textile substrate of carbon fibers which are elastically deformable with respect to an at rest shape, wherein a flexible structure of carbon fibers is used, a predetermined form being set for this textile by means of shaping tools, and said textile being retained in said at rest shape by forming around the said fibers a thin coating of rough laminar pyrolytic carbon deposited by chemical vapor infiltration at high temperature without bonding of the fibers one to another. The textile can be given a flat form by using holding plates. It is possible to start from a braided sleeve which is either compressed or stretched axially around a mandrel. It is also possible to use a woven tape which is wound in a conical pseudo-spiral for use as a cardiac valve.
Abstract: A method for strengthening long chain synthetic polymer fibers involves soaking a fibrous material in a treatment solution of potassium aluminum sulfate or ammonium aluminum sulfate, or both, in water. The treated material is immersed in a fixing solution containing a water soluble metallic carboxylate such as sodium or potassium stearate, and then rinsed with a nonreactive liquid.
Abstract: A method for impregnating a bundle of sized glass fibers with a composition comprising a polytetrafluoroethylene resin, a film-forming acrylic resin, a thickening agent and a polyhydrolyzable organosilane having nonhydrolyzable amine functionality is described. The impregnated bundles are especially suited for at least the warp of fabrics for filtering entrained particulates from gases such as flue gases from the combustion of hydrocarbon fuels such as coal.
Abstract: A unique opalescent color effect is produced on a substrate material utilizing a multicoat coating system. The base coat is a nonmetallic primary color coat having an N-4 to N-8 value on Munsell color chart. Directly on top of the base coat there is applied a transparent interference coat containing a polymeric binder and metal oxide encapsulated mica particles in a pigment to binder ratio of 0.06 to 0.13. On top of the previously applied coats is applied a transparent protective clear coat. The resultant coating in addition to being durable to the elements produces a unique opalescent color effect on the substrate material.
Abstract: A process for making semi-reflective metallized glasses containing an anchoring layer, said anchoring layer being deposited by vacuum evaporation from an alloy comprising nickel in an amount of from about 40-70% by weight, chromium in an amount of from about 5-31% by weight, and molybdenum in an amount of from about 3-28% by weight. The anchoring layer may also be deposited from an alloy of nickel, chromium, molybdenum and at least one metal selected from the group of tungsten, iron and cobalt, in an amount of from about 55-75% by weight nickel, iron and cobalt, from about 5-31% by weight chromium, and from about 3-28% by weight molybdenum and tungsten. The anchoring layer is deposited upon the surface of a support glass by vacuum evaporation after which one or more layers may be deposited upon this anchoring layer.
Abstract: A composition and method of using thereof for enhancing the tactile characteristics of leather covered handles. The composition comprises an antiperspirant, a nonionic polymeric ethoxylate surfactant and solvent, and is applied to the leather which is subsequently dried with a cloth. The composition may also be applied to the hands of one about to use the handles, and the solvent permitted to evaporate therefrom.
Abstract: A plastic substrate is injection molded to provide a pattern of channels in at least one of its sides to define a predetermined set of conductive paths. Both the surfaces of the channels and the non-channel surfaces therebetween are metalling through one or more steps of flame spraying, a combination of electroless plating and electroplating, gas plating or vacuum deposition. In one form of the invention the metallization over the non-channel surfaces is removed by abrading. In another form of the invention the initial metallization over the non-channel surfaces is coated with a resist prior to the deposition of another metal layer. The metal covering the channels is subsequently removed by stripping the resist and etching away the initial metallization.
Abstract: A method for constructing an activity surface comprising a plurality of binder coatings interspersed with layers of particulate rubber. A tack coating preferably of asphaltic material, is applied to establish a good bond to the underlying foundation material. Subsequent binder coatings are of a latex liquid with a small quantity of surfactant added to enhance the penetration of the coating. A sealing coat is applied to seal the upper surface and to mechanically screen the harmful effects of sunlight. Each coating of latex is permitted to dry before applying a subsequent layer of rubber particles.
Abstract: Dry air is passed as a carrier gas through a supply vessel containing titanium chloride at a pressure between 0.1 and 3 bar, the resulting reaction mixture being admitted through nozzles into a tunnel traversed by hot glass containers whose mouths project into a mouth compartment of the tunnel which is separately evacuated so that, as titanium oxide is formed on the glass surfaces, the mouths of the containers can remain free of the deposit.
Abstract: The surface energy of a glass article is reduced by adsorbing multivalent cations such as chromium onto a glass surface, then treating the surface with an aqueous solution of an alkali metal alkylate such as sodium stearate or oleate to strongly bond the long chain paraffinic or olefinic acid anion to the glass surface by ionic bonding of the alkylate anion to the adsorbed multivalent cation thereby rendering the glass surface non-wettable and lubricated.
Abstract: An ion exchange membrane of a fluorinated polymer is bonded to a synthetic resin with a binder selected from the group consisting of fluorinated polymers, polyolefins and polyaryl ethers. The binder is in a form of a net, a cloth or a porous sheet so as to form an uneven interlayer.
Abstract: A process for forming heat resistant resin films comprising the steps of admixing a polyimide resin precursor solution, for example, a solution containing a reactant obtained from pyrromellitic dianhydride, 3,3',4,4'-benzophenyltetracarboxylic acid dianhydride, 4,4'-diaminodiphenyl ether, and 4,4'-diaminodiphenyl ether-3-carbonic amide with an organosilicic compound solution, coating a silicon substrate with the resulting admixture, and subjecting said coated silicon substrate to heat treatment.
Abstract: A process is disclosed comprising a method for treating and conveying gas mixtures in a coating process employing a chemical, heterogeneous vapor-phase reaction in a reaction chamber in which the reaction product obtained in the reaction chamber is withdrawn from the reaction chamber, separated into at least one component, the withdrawn component is dosed and reintroduced into the reaction chamber.
Abstract: At least one ribbon-like stream of a first coating composition adjacent to and in edge contact with at least one second ribbon-like stream of a second coating composition are deposited on the surface of a support member by establishing relative motion between the surface of the support member and the ribbon-like streams, simultaneously constraining and forming the ribbon-like streams parallel to and closely spaced from each other, contacting adjacent edges of the ribbon-like streams prior to applying the ribbon-like streams to the surface of the support member and thereafter applying the ribbon-like streams to the surface of the support member.
Type:
Grant
Filed:
September 21, 1982
Date of Patent:
June 4, 1985
Assignee:
Xerox Corporation
Inventors:
Philip P. Russell, Tyan-Faung Niu, Frederic A. Holland
Abstract: A process is disclosed for doping a semiconductor substrate which achieves a lower sheet resistivity than is otherwise obtainable. A spin-on dopant material is applied to the surface of the semiconductor substrate and subsequently heated to drive off solvents contained in the dopant material. The layer of spin-on dopant material is then plasma treated, preferably in an oxygen plasma, to enhance the diffusion properties of the spin-on material. The substrate and dopant material are then heated to an elevated temperature to accomplish the desired depth of diffusion.