Patents Examined by Saeed T. Chaudhry
  • Wetting a workpiece surface in a fluid-processing system
    Patent number: 8425687
    Abstract: A method and apparatus for wetting the surface of a workpiece is disclosed. The apparatus includes a chamber with a vacuum port and a fluid port and a workpiece holder including a body, a ring, and a port. The body includes a surface and defines a cavity extending from the surface. The ring is adapted to retain the workpiece on the surface of body over the cavity. The ring forms a fluid seal relative to the workpiece and to the workpiece holder. The port is defined in the body and in communication with the cavity. The port affects pressure in the cavity to minimize a pressure differential between the front and back surfaces of the workpiece. The fluid port is in communication with the chamber. The fluid port delivers a fluid (e.g., a substantially degassed fluid) to wet the front surface of the workpiece during operation of the chamber at a reduced pressure relative to atmosphere.
    Type: Grant
    Filed: February 9, 2010
    Date of Patent: April 23, 2013
    Assignee: Tel Nexx, Inc.
    Inventor: Arthur Keigler
  • Method for removing a contamination layer from an optical surface and arrangement therefor as well as a method for generating a cleaning gas and arrangement therefor
    Patent number: 8419862
    Abstract: The invention is directed to a method for at least partially removing a contamination layer (15) from an optical surface (14a) of an EUV-reflective optical element (14) by bringing a cleaning gas into contact with the contamination layer. In the method, a jet (20) of cleaning gas is directed to the contamination layer (15) for removing material from the contamination layer (15). The contamination layer (15) is monitored for generating a signal indicative of the thickness of the contamination layer (15) and the jet (20) of cleaning gas is controlled by moving the jet (20) of cleaning gas relative to the optical surface (14a) using this signal as a feedback signal. A cleaning arrangement (19 to 24) for carrying out the method is also disclosed. The invention also relates to a method for generating a jet (20) of cleaning gas and to a corresponding cleaning gas generation arrangement.
    Type: Grant
    Filed: May 6, 2010
    Date of Patent: April 16, 2013
    Assignees: Carl Zeiss SMT GmbH, ASML Netherlands B.V.
    Inventors: Dirk Heinrich Ehm, Arnold Storm, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Thomas Stein, Edwin te Sligte
  • Method for adapting a rinsing program in a dishwasher machine, and corresponding dishwasher machine
    Patent number: 8419861
    Abstract: A method for adapting a rinsing program in a dishwasher machine, and a dishwashing machine configured to perform the method, the method enabling the rinsing program run of a dishwasher machine to be adapted in such a way that satisfactory cleaning and drying performances are achieved even when using a combination rinse aid. To this end, the rinsing program run is adapted if there is insufficient salt, if the softening device is switched off, and if the dishwasher machine is on.
    Type: Grant
    Filed: December 6, 2011
    Date of Patent: April 16, 2013
    Assignee: BSH Bosch und Siemens Hausgeraete GmbH
    Inventor: Michael Rosenbauer
  • Washing machine
    Patent number: 8418510
    Abstract: Disclosed herein is a washing machine that performs washing using bubbles. The washing machine may include an air bubble unit to generate air bubbles in detergent water using external air naturally introduced thereinto by pressure difference caused when the detergent water passes therethrough, a water tub having an introduction port to allow the detergent water containing the air bubbles to be introduced thereinto, and a washing tub rotatably provided in the water tub, the washing tub having a plurality of through-holes having a size less than the introduction port such that the air bubbles rise to a surface of the detergent water contained in the water tub.
    Type: Grant
    Filed: April 15, 2009
    Date of Patent: April 16, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seong Min Oak, Tae Jin Park, Hyun Sook Kim
  • System and method for low temperature hydration of food soils
    Patent number: 8409362
    Abstract: A system and method for low temperature hydration of food soils allows for hydration of food soils between washing cycles in a dishwasher. A user selects a hydration button to actuate a hydration cycle between dishwashing cycles. During the hydration cycle, a plurality of spraying devices are periodically actuated in accordance with a desired amount of hydration selected by the user. Water is supplied from a dedicated water supply line to the spraying devices, preferably without being heated, and is distributed throughout a dishwasher chamber utilizing spray nozzles or fans. The hydration cycle ends when deactivated, or when a dishwashing cycle is initiated.
    Type: Grant
    Filed: June 1, 2011
    Date of Patent: April 2, 2013
    Assignee: Whirlpool Corporation
    Inventors: Robert Alan Elick, Rodney M. Welch
  • Cleaning method for a process of liquid immersion lithography
    Patent number: 8409360
    Abstract: Problem: To provide a cleaning liquid and a cleaning method having excellent leaning capability. In a process of liquid immersion lithography, they can preventing the damage to be caused by the component released from the photoresist to photoexposure devices; the waste treatment is easy; the efficiency in substitution with the cleaning liquid for the medium for liquid immersion lithography is high, and the production cost is reduced not detracting from the throughput in semiconductor production. Means for Solution: A cleaning liquid to be used for cleaning a photoexposure device in a process of liquid immersion lithography, which comprises at least 5% by mass of a nonionic surfactant containing at least one group selected from an ethyleneoxy group, a propyleneoxy group and a polyglycerin group, and a balance of water; and a cleaning method using it.
    Type: Grant
    Filed: May 3, 2010
    Date of Patent: April 2, 2013
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Jun Koshiyama, Jiro Yokoya, Tomoyuki Hirano, Hiromitsu Tsuji
  • Apparatus and method for controlling concentration of wash aid in wash liquid
    Patent number: 8397328
    Abstract: An apparatus and method of using an automatic washing machine to determine a concentration of a wash aid in a wash liquid, and implementing a controlled flushing of the wash aid in response to the determined concentration.
    Type: Grant
    Filed: July 1, 2008
    Date of Patent: March 19, 2013
    Assignee: Whirlpool Corporation
    Inventors: Michael Stephen Hendrickson, Colleen M. Doyle, Frank Nekic, Joel Adam Luckman, Ayomide Fawole
  • Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid
    Patent number: 8388758
    Abstract: A surface cleaning apparatus comprising a chamber, and a thermal transfer device. The chamber is capable of holding a semiconductor structure therein. The thermal transfer device is connected to the chamber. The thermal transfer device has a surface disposed inside the chamber for contacting the semiconducting structure and controlling a temperature of the semiconductor structure in contact with the surface. The thermal transfer device has a thermal control module connected to the surface for heating and cooling the surface to thermally cycle the surface. The thermal control module effects a substantially immediate thermal response of the surface when thermally recycling the surface.
    Type: Grant
    Filed: October 2, 2007
    Date of Patent: March 5, 2013
    Assignee: International Business Machines Corporation
    Inventors: John P. Simons, Kenneth J. McCullough, Wayne M. Moreau, John M. Cotte, Keith R. Pope, Charles J. Taft, Dario L. Goldfarb
  • Cleaning method and apparatus
    Patent number: 8377222
    Abstract: A method for cleaning an interior surface of a processing equipment using a treatment liquid, the processing equipment including a pipe section defining pipe section first and second ends, the pipe section defining a pipe section volume delimited by the pipe section first and second ends, the pipe section being initially at an initial internal pressure. The method includes introducing a predetermined volume of the treatment liquid, the predetermined volume being substantially smaller than the pipe section volume circulating the predetermined volume of the treatment liquid through the pipe section by simultaneously reducing an internal pressure within the pipe section at a location substantially adjacent the pipe section second end and increasing an internal pressure within the pipe section at a location substantially adjacent the pipe section first end.
    Type: Grant
    Filed: April 18, 2005
    Date of Patent: February 19, 2013
    Inventor: Normand Lauzon
  • Submerged membrane separation apparatus, cleaning method for diffusing apparatus, and method for membrane separation
    Patent number: 8377225
    Abstract: A membrane separation method is useful in purifying clear water, sewage, etc. and can reliably remove obstruction of an air diffusing apparatus by opening and closing valves, a submerged membrane separation apparatus to be used for the same, and a method for cleaning an air diffusing apparatus. The submerged membrane separation apparatus includes a separation membrane module, an air diffusing apparatus, and a gas supplying apparatus, wherein an air diffusing apparatus is arranged in one treatment tank, two header pipes (A and B) are placed as the gas supplying pipes, the connecting port a and the header pipe A and the connecting port b and the header pipe B for each of the air diffusing apparatuses are respectively connected, on-off valves are arranged in four parts, and the header pipes A and B each have an open end.
    Type: Grant
    Filed: February 25, 2010
    Date of Patent: February 19, 2013
    Assignee: Toray Industries, Inc.
    Inventors: Junichi Baba, Toshitsugu Onoe, Makoto Ichinose
  • Method for eliminating odors in a dishwasher machine
    Patent number: 8377223
    Abstract: A method for operating a dishwasher machine (1), in particular a domestic dishwasher machine, in which in order to eliminate odors, the air located in a washing container (2) is passed by a photocatalytic layer (5) exposed to a light source (6) in order to oxidise the odour-forming molecules contained in the air. According to the invention, this is carried out during a standstill phase of the dishwasher machine (1).
    Type: Grant
    Filed: December 5, 2006
    Date of Patent: February 19, 2013
    Assignee: BSH Bosch und Siemens Hausgeraete GmbH
    Inventor: Egbert Classen
  • Automatic wash boom arm impact sensor system
    Patent number: 8372208
    Abstract: In an automatic wash, a control unit operates a boom arm around a vehicle in a bay by moving a bridge along a lengthwise vehicle orientation, moving a trolley on the bridge along a widthwise vehicle orientation, and rotating the boom arm about the trolley. The boom arm is coupled to a mount which is flexibly coupled to the trolley such that boom arm impact displaces the mount and the trolley. The displacement may be two-dimensional and/or angular. In response, the control unit determines whether an impact has occurred by comparing the data to a baseline. If there is an impact, the control unit relocates the boom arm and may continue the wash process. If a sufficient force impact occurs that the control unit cannot correct, the boom arm may disengage from the mount which may trigger a breakaway sensor and cause the control unit to abandon the wash.
    Type: Grant
    Filed: May 6, 2011
    Date of Patent: February 12, 2013
    Assignee: Mark VII Equipment, Inc.
    Inventors: David M. Gauthier, Roderick MacWilliam
  • High power density ultrasonic fuel cleaning with planar transducers
    Patent number: 8372206
    Abstract: Provided are a range of ultrasonic cleaning assemblies that include radiating surfaces activated by corresponding arrays of planar transducers configured to increase the power applied to a reduced volume of fluid associated with a fuel assembly, thereby increasing that applied power density for improved cleaning. The individual ultrasonic cleaning assemblies may be arranged in a variety of modules that, in turn, may be combined to increase the length of the cleaning zone and provide variations in the power density applied to improve the cleaning uniformity.
    Type: Grant
    Filed: January 14, 2009
    Date of Patent: February 12, 2013
    Assignee: Dominion Engineering, Inc.
    Inventors: David J. Gross, David Arguelles
  • Stripe removal system
    Patent number: 8357245
    Abstract: A system for removing paint and other coatings from hard surfaces is mounted on a truck for over-the-road travel. The truck bed carries a high power vacuum pump, a self propelled tractor with an attached blast head, a liquid reservoir, a sump or vacuum tank, and a ramp for loading the tractor. The reservoir is connected to a low pressure pump that transfers water to the high pressure pump. The high pressure pump is connected to the blast head by a high pressure hose. A vacuum hose is connected to the sump which has an internal enclosure for separating the waste materials from the liquid for easy dumping of semi dried materials.
    Type: Grant
    Filed: August 8, 2007
    Date of Patent: January 22, 2013
    Inventor: James P. Crocker
  • Process for chemically decontaminating radioactively contaminated surfaces of a nuclear plant cooling system using an organic acid followed by an anionic surfactant
    Patent number: 8353990
    Abstract: A process is provided for chemically decontaminating the surface of a metallic component. In a first treatment step, an oxide layer formed on the component by corrosion of the material of the component is detached from the surface of the component with a first aqueous treatment solution containing an organic decontamination acid. In a subsequent second treatment step, the surface which is at least partially freed of the oxide layer is treated with an aqueous solution containing an active component for removing particles which adhere to the surface. The active component is formed of at least one anionic surfactant from the group including sulphonic acids, phosphonic acids, carboxylic acids and salts of those acids.
    Type: Grant
    Filed: August 17, 2011
    Date of Patent: January 15, 2013
    Assignee: Areva NP GmbH
    Inventors: Rainer Gassen, Luis Sempere Belda, Werner Schweighofer, Bertram Zeiler
  • Method for carrying out a rinsing programme
    Patent number: 8343285
    Abstract: A method for carrying out a dishwashing cycle in a household dishwasher includes performing a wash step and dispensing an amount of a combination product from a dispenser during the wash step. The combination product includes a rinse agent and a cleaning agent. The method also includes performing a rinse step and dispensing an amount of the combination product from the dispenser during the rinse step.
    Type: Grant
    Filed: November 15, 2007
    Date of Patent: January 1, 2013
    Assignees: Miele & Cie. KG, Henkel AG & Co. KGAA
    Inventors: Willi Buchmeier, Joerg Kinnius, Christian Nitsch, Dirk Wegener, Cornelius Wolf, Johannes Zipfel
  • Apparatus for ejecting fluid onto a substrate and system and method incorporating the same
    Patent number: 8343287
    Abstract: A method of processing a substrate. In one embodiment, the invention can be a method of processing a substrate comprising: supporting the substrate in a horizontal orientation; rotating the substrate; providing a fluid dispensing apparatus adjacent a surface of the substrate, the fluid dispensing apparatus comprising a body having an outer surface and a first conduit terminating as a first hole in the outer surface of the body and a second conduit terminating as a second hole in the outer surface of the body, the first hole oriented at a non-normal angle relative to the substrate and offset a first radial distance from a rotational center-point of the substrate; and ejecting liquid out of the first hole into contact with the substrate at the rotational center-point and ejecting liquid out of the second hole into contact with the substrate at a second radial distance from the rotational center-point.
    Type: Grant
    Filed: May 10, 2011
    Date of Patent: January 1, 2013
    Inventors: Christopher Hahn, Hanjoo Lee
  • Cleaning with controlled release of acid
    Patent number: 8343283
    Abstract: The present invention discloses a method for cleaning a substrate comprising contacting the substrate in a cleaning cycle with an aqueous cleaning solution comprising an aqueous diluent and a detergent composition, the detergent composition comprising a glycolic and/or lactic acid oligomer with an average degree of polymerization between 1.8 and 6. Preferably, the substrate is contacted in a rinse cycle with an aqueous rinse which is substantially free of an intentionally added rinse agent or fabric softener.
    Type: Grant
    Filed: April 16, 2009
    Date of Patent: January 1, 2013
    Assignee: Purac Biochem BV
    Inventor: Rudolf E. Nijburg
  • Photocatalytic auto-cleaning process of stains
    Patent number: 8343282
    Abstract: The present invention provides a process for photocatalytically treating stains of chilly and turmeric caused on kitchen tiles and platforms by coating a thin film of photocatalyst made of a semiconductor such as titanium dioxide uniformly dispersed in dilute silica sol thereon and using a light source such as a fluorescent lamp to irradiate and photoexcite the photo catalytic thin film by the small amount of UV radiation included in the fluorescent light, resulting in photo decomposition and auto-cleaning of the stains.
    Type: Grant
    Filed: December 30, 2009
    Date of Patent: January 1, 2013
    Assignee: Council of Scientific and Industrial Research
    Inventors: Pushpito K. Ghosh, Raksh V. Jasra, Dipak B. Shukla, Anjani K. Bhatt, Rajesh J. Tayade
  • Escalator step cleaner
    Patent number: 8337625
    Abstract: An escalator step cleaner for cleaning escalator steps having a plurality of parallel tread ridges separated by tread grooves has a cleaning pad assembly configured to extend generally perpendicular to the direction of motion of the escalator steps and clean the escalator steps while the escalator is in motion. The cleaning pad assembly has a rigid upper plate and a flexible disposable bottom pad having a cleaning contact surface. The contact surface carries a plurality of spaced parallel pad ridges separated by pad grooves that matingly engage between the tread ridges of the escalator steps and cause dislodgement of the accumulated debris. The cleaning pad assembly can be secured on a hand-held cleaning tool or on a motorized cleaning tool with rotating brushes and a vacuum.
    Type: Grant
    Filed: May 12, 2010
    Date of Patent: December 25, 2012
    Assignee: Renaelc, LLC
    Inventors: Patrick C. Gehm, Michael Knight