Patents Examined by Sarah K Salerno
  • Patent number: 11450771
    Abstract: A semiconductor device includes: a sidewall insulating film; a gate electrode; source and drain regions; a first stress film; and a second stress film.
    Type: Grant
    Filed: December 10, 2019
    Date of Patent: September 20, 2022
    Assignee: Sony Group Corporation
    Inventor: Yuki Miyanami
  • Patent number: 11450678
    Abstract: One illustrative integrated circuit (IC) product disclosed herein includes a selection gate electrode and a first gate insulation layer positioned above a substrate and a memory gate electrode positioned above the substrate and adjacent the selection gate electrode, wherein the memory gate electrode comprises a bottom surface and first and second opposing sidewall surfaces. This embodiment of the IC product also includes a plurality of layers of insulating material, wherein a first portion of the layers of insulating material is positioned between the first gate insulation layer and the first opposing sidewall of the memory gate electrode, a second portion of the layers of insulating material is positioned between the bottom surface of the memory gate electrode and the upper surface of the semiconductor substrate, and a third portion of the layers of insulating material is positioned on the second opposing sidewall of the conductive memory gate electrode.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: September 20, 2022
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Hui Zang, Ruilong Xie, Shesh Mani Pandey
  • Patent number: 11417660
    Abstract: A semiconductor device includes a stacked line structure including a bit line over a substrate, an active layer positioned at a higher level than the stacked line structure and parallel to the bit line, a capacitor positioned at a higher level than the active layer, a first plug extending downwardly to be coupled to the bit line through the active layer, a second plug formed between the active layer and the capacitor, and a word line extending in a direction that intersects with the bit line while intersecting with the active layer.
    Type: Grant
    Filed: December 18, 2019
    Date of Patent: August 16, 2022
    Assignee: SK hynix Inc.
    Inventor: Hyung-Jin Park
  • Patent number: 11417661
    Abstract: Some embodiments include an integrated capacitor assembly having a conductive pillar supported by a base, with the conductive pillar being included within a first electrode of a capacitor. The conductive pillar has a first upper surface. A dielectric liner is along an outer surface of the conductive pillar and has a second upper surface. A conductive liner is along the dielectric liner and is included within a second electrode of the capacitor. The conductive liner has a third upper surface. One of the first and third upper surfaces is above the other of the first and third upper surfaces. The second upper surface is at least as high above the base as said one of the first and third upper surfaces. Some embodiments include memory arrays having capacitors with pillar-type first electrodes.
    Type: Grant
    Filed: March 1, 2020
    Date of Patent: August 16, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Matthew N. Rocklein, Brett W. Busch
  • Patent number: 11417578
    Abstract: A semiconductor device includes: a semiconductor element; a frame which has a first surface, holds the semiconductor element on the first surface, and is electrically connected with the semiconductor element; and a seal which has electrical insulation properties and seals the semiconductor element and the frame, wherein a through-hole is formed in the seal, the through-hole has a hole axis which extends in a direction intersecting with the first surface, and an inner peripheral end surface of the seal exposed inside the through-hole is inclined with respect to the hole axis.
    Type: Grant
    Filed: May 7, 2018
    Date of Patent: August 16, 2022
    Assignee: Mitsubishi Electric Corporation
    Inventors: Masataka Shiramizu, Hiroyuki Hata, Yazhe Wang
  • Patent number: 11411013
    Abstract: A microelectronic device comprises a stack structure comprising a stack structure comprising alternating conductive structures and insulating structures arranged in tiers, each of the tiers individually comprising one of the conductive structures and one of the insulating structures, staircase structures within the stack structure and having steps comprising edges of the tiers, and a doped dielectric material adjacent the steps of the staircase structures and comprising silicon dioxide doped with one or more of boron, phosphorus, carbon, and fluorine, the doped dielectric material having a greater ratio of Si—O—Si bonds to water than borophosphosilicate glass. Related methods of forming a microelectronic device and related electronic systems are also disclosed.
    Type: Grant
    Filed: January 8, 2020
    Date of Patent: August 9, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Jivaan Kishore Jhothiraman, Kunal Shrotri, Matthew J. King
  • Patent number: 11404630
    Abstract: A material layer stack for a pSTTM memory device includes a magnetic tunnel junction (MTJ) stack, a oxide layer, a protective layer and a capping layer. The MTJ includes a fixed magnetic layer, a tunnel barrier disposed above the fixed magnetic layer and a free magnetic layer disposed on the tunnel barrier. The oxide layer, which enables an increase in perpendicularity of the pSTTM material layer stack, is disposed on the free magnetic layer. The protective layer is disposed on the oxide layer, and acts as a protective barrier to the oxide from physical sputter damage during subsequent layer deposition. A conductive capping layer with a low oxygen affinity is disposed on the protective layer to reduce iron-oxygen de-hybridization at the interface between the free magnetic layer and the oxide layer. The inherent non-oxygen scavenging nature of the conductive capping layer enhances stability and reduces retention loss in pSTTM devices.
    Type: Grant
    Filed: December 30, 2016
    Date of Patent: August 2, 2022
    Assignee: Intel Corporation
    Inventors: Md Tofizur Rahman, Christopher J. Wiegand, Kaan Oguz, Justin S. Brockman, Daniel G. Ouellette, Brian Maertz, Kevin P. O'Brien, Mark L. Doczy, Brian S. Doyle, Oleg Golonzka, Tahir Ghani
  • Patent number: 11404355
    Abstract: A semiconductor package includes a lead frame, a die, a discrete electrical component, and electrical connections. The lead frame includes leads and a die pad. Some of the leads include engraved regions that have recesses therein and the die pad may include an engraved region or multiple engraved regions. Each engraved region is formed to contain and confine a conductive adhesive from flowing over the edges of the engraved leads or the die pad. The boundary confines the conductive adhesive to the appropriate location on the engraved lead or the engraved die pad when being placed on the engraved regions. By utilizing a lead frame with engraved regions, the flow of the conductive adhesive or the wettability of the conductive adhesive can be contained and confined to the appropriate areas of the engraved lead or engraved die pad such that a conductive adhesive does not cause cross-talk between electrical components within a semiconductor package or short circuiting within a semiconductor package.
    Type: Grant
    Filed: July 31, 2020
    Date of Patent: August 2, 2022
    Assignees: STMICROELECTRONICS PTE LTD, STMICROELECTRONICS, INC.
    Inventors: Rennier Rodriguez, Bryan Christian Bacquian, Maiden Grace Maming, David Gani
  • Patent number: 11404611
    Abstract: In an embodiment a method for producing a semiconductor device includes providing a carrier with a semiconductor component arranged on the carrier, providing a layer arrangement on the carrier, the layer arrangement adjoining the semiconductor component and comprising a first and a second flowable layer, wherein the first layer is formed on the carrier and then the second layer is formed on the first layer, wherein the first layer comprises particles, wherein a density of the first layer is greater than a density of the second layer, and wherein a lateral wetting of the semiconductor component with the first layer occurs such that the first layer comprises a first configuration comprising a curved layer surface laterally with respect to the semiconductor component, and centrifuging the carrier such that the first layer comprises a second configuration as a result, wherein the first layer cannot return to the first configuration since the second layer is arranged on the first layer.
    Type: Grant
    Filed: August 16, 2018
    Date of Patent: August 2, 2022
    Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
    Inventors: Ivar Tangring, Gregory Bellynck
  • Patent number: 11398402
    Abstract: A method of wafer scale packaging acoustic resonator devices and an apparatus therefor. The method including providing a partially completed semiconductor substrate comprising a plurality of single crystal acoustic resonator devices, each having a first electrode member, a second electrode member, and an overlying passivation material. At least one of the devices to be configured with an external connection, a repassivation material overlying the passivation material, an under metal material overlying the repassivation material. Copper pillar interconnect structures are then configured overlying the electrode members, and solder bump structures are form overlying the copper pillar interconnect structures.
    Type: Grant
    Filed: August 21, 2019
    Date of Patent: July 26, 2022
    Assignee: Akoustis, Inc.
    Inventor: Jeffrey B. Shealy
  • Patent number: 11393842
    Abstract: A semiconductor memory device and a method of manufacturing the semiconductor memory device are provided. The semiconductor memory device includes a doped semiconductor pattern including a body portion and a first protrusion protruding from the body portion in a first direction, a first channel pattern disposed on a top surface of the first protrusion and extending in the first direction, a first memory pattern surrounding a sidewall of the first channel pattern and extending on a sidewall of the first protrusion, and interlayer insulating layers and conductive patterns alternately stacked on each other in the first direction.
    Type: Grant
    Filed: February 11, 2020
    Date of Patent: July 19, 2022
    Assignee: SK hynix Inc.
    Inventors: Nam Kuk Kim, Nam Jae Lee
  • Patent number: 11387244
    Abstract: An alternating stack of insulating layers and spacer material layers can be formed over a substrate. The spacer material layers may be formed as, or may be subsequently replaced with, electrically conductive layers. A memory opening can be formed through the alternating stack, and annular lateral recesses are formed at levels of the insulating layers. Metal portions are formed in the annular lateral recesses, and a semiconductor material layer is deposited over the metal portions. Metal-semiconductor alloy portions are formed by performing an anneal process, and are subsequently removed by performing a selective etch process. Remaining portions of the semiconductor material layer include a vertical stack of semiconductor material portions, which may be optionally converted, partly or fully, into silicon nitride material portions. The semiconductor material portions and/or the silicon nitride material portions can be employed as discrete charge storage elements.
    Type: Grant
    Filed: April 15, 2020
    Date of Patent: July 12, 2022
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Raghuveer S. Makala, Senaka Kanakamedala, Fei Zhou, Yao-Sheng Lee
  • Patent number: 11380700
    Abstract: A vertical memory device includes lower circuit patterns, a second substrate, a capacitor, gate electrodes, and a channel. The lower circuit patterns are formed on a first substrate including first, second and third regions. Contact plugs are formed in the second region. Through vias are formed in the third region. The second substrate is formed on the lower circuit patterns. The capacitor is formed on the lower circuit patterns, and includes a first conductor, a dielectric layer structure, and a second conductor. The first conductor is spaced apart from the second substrate at the same height as the second substrate. The dielectric layer structure is formed on the first conductor. The second conductor is formed on the dielectric layer structure. The gate electrodes are spaced apart from each other on the second substrate in a vertical direction. The channel extends through the gate electrodes in the vertical direction.
    Type: Grant
    Filed: April 8, 2020
    Date of Patent: July 5, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Junhyoung Kim, Taemok Gwon, Youngbum Woo
  • Patent number: 11374046
    Abstract: A semiconductor structure is disclosed. The semiconductor structure includes: a semiconductor substrate having a front surface and a back surface facing opposite to the front surface; a filling material extending from the front surface into the semiconductor substrate without penetrating through the semiconductor substrate, the filling material including an upper portion and a lower portion, the upper portion being in contact with the semiconductor substrate; and an epitaxial layer lined between the lower portion of the filling material and the semiconductor substrate. An associated manufacturing method is also disclosed.
    Type: Grant
    Filed: April 15, 2020
    Date of Patent: June 28, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Sheng-Chan Li, I-Nan Chen, Tzu-Hsiang Chen, Yu-Jen Wang, Yen-Ting Chiang, Cheng-Hsien Chou, Cheng-Yuan Tsai
  • Patent number: 11362005
    Abstract: Semiconductor structures and fabrication methods are provided. An exemplary fabrication method includes providing a semiconductor substrate having a first region, a second region, a gate structure on the first region and a dummy gate structure on the second region, and an isolation structure in the semiconductor under the dummy gate structure. The method also includes forming source/drain openings in the semiconductor substrate at two sides of the gate structure. A sidewall surface of the source/drain opening contains an apex angle extending into the semiconductor substrate under the gate structure; and the source/drain opening exposes a sidewall surface of the isolation structure. Further; the method includes forming an initial bulk layer in the source/drain opening; performing a reshaping process to the initial bulk layer to form a bulk layer having an a substantially flat reshaped surface; and forming a protective layer on the bulk layer.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: June 14, 2022
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Zhen Yu Liu
  • Patent number: 11362026
    Abstract: The present disclosure is directed to a method for forming metal insulator metal decoupling capacitors with scalable capacitance. The method can include forming a first redistribution layer with metal lines on a portion of a polymer layer, depositing a photoresist layer on the first redistribution layer, and etching the photoresist layer to form spaced apart first and second TIV openings in the photoresist layer, where the first TIV opening is wider than the second TIV opening. The method can further include depositing a metal in the first and second TIV openings to form respective first and second TIV structures in contact with the metal line, removing the photoresist layer, forming a high-k dielectric on a top surface of the first and second TIV structures, and depositing a metal layer on the high-k dielectric layer to form respective first and second capacitors.
    Type: Grant
    Filed: November 21, 2019
    Date of Patent: June 14, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Feng-Wei Kuo, Wen-Shiang Liao
  • Patent number: 11342286
    Abstract: A semiconductor die includes semiconductor devices located over a substrate, at least one dielectric material portion that laterally surrounds the semiconductor devices, and interconnect-level dielectric material layers. At least one edge seal ring structure can be provided, each including a composite edge seal via structure and a set of metal barrier structures. The composite edge seal via structure includes a metallic material layer and a dielectric fill material portion. Alternatively or additionally, at least one slit ring structure can laterally surround the semiconductor devices and the metal interconnect structures. Each slit ring structure continuously extends through each of the interconnect-level dielectric material layers and into the at least one dielectric material portion, and includes at least one dielectric material.
    Type: Grant
    Filed: April 2, 2020
    Date of Patent: May 24, 2022
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Michimoto Kaminaga, Takahiro Tanamachi, Shuya Hatao, Hidetoshi Nakamoto
  • Patent number: 11335767
    Abstract: A package structure has a chip, a molding compound encapsulating the chip and an inductor structure disposed above the chip. A vertical projection of the inductor structure at least partially overlaps with a vertical projection of the chip.
    Type: Grant
    Filed: September 21, 2017
    Date of Patent: May 17, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Chuei-Tang Wang, Tzu-Chun Tang, Wei-Ting Chen, Chieh-Yen Chen
  • Patent number: 11329094
    Abstract: A device includes a substrate, a pinning region in the substrate and having a first doping type, a photodiode in the substrate and having a doped region that has a second doping type opposite to the first doping type, and a first conductive contact. The doped region of the photodiode has a first portion below the pinning region and a second portion extending upwards from a top of the first portion of the doped region of the photodiode to a top of the substrate, and the second portion of the doped region of the photodiode is surrounded by the pinning region. The first conductive contact is disposed over and in contact with the second portion of the doped region of the photodiode.
    Type: Grant
    Filed: June 1, 2020
    Date of Patent: May 10, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Bo-Tsung Tsai
  • Patent number: 11315943
    Abstract: Methods of forming memory structures are described. A metal film is deposited in the features of a structured substrate and volumetrically expanded to form pillars. A blanket film is deposited to a height less than the height of the pillars and the blanket film is removed from the top of the pillars. The height of the pillars is reduced so that the top of the pillars are below the surface of the blanket film and the process is optionally repeated to form a structure of predetermined height. The pillars can be removed from the features after formation of the predetermined height structure to form high aspect ratio features.
    Type: Grant
    Filed: August 28, 2018
    Date of Patent: April 26, 2022
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Praburam Gopalraja, Susmit Singha Roy, Abhijit Basu Mallick, Srinivas Gandikota