Abstract: A method includes forming a fin over a substrate, forming a dummy gate structure over the fin, removing a portion of the fin adjacent the dummy gate structure to form a first recess, depositing a stressor material in the first recess, removing at least a portion of the stressor material from the first recess, and after removing the at least a portion of the stressor material, epitaxially growing a source/drain region in the first recess.
Abstract: A DRAM capacitor comprising a first capacitor electrode configured as a container and comprising a doped titanium nitride material, a capacitor dielectric on the first capacitor electrode, and a second capacitor electrode on the capacitor dielectric. Methods of forming the DRAM capacitor are also disclosed, as are semiconductor devices and systems comprising such DRAM capacitors.
Type:
Grant
Filed:
February 23, 2018
Date of Patent:
March 29, 2022
Assignee:
Micron Technology, Inc.
Inventors:
Matthew N. Rocklein, Paul A. Paduano, Sanket S. Kelkar, Christopher W. Petz, Zhe Song, Vassil Antonov, Qian Tao
Abstract: A chip package and method of fabricating the same are described herein. The chip package includes a high speed data transmission line that has an inter-die region through which a signal transmission line couples a first die to a second die. The signal transmission line has a resistance greater than an equivalent base resistance (EBR) of a copper line, which reduces oscillation within the transmission line.
Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers above a substrate. Horizontally-elongated trenches are formed into the stack to form laterally-spaced memory-block regions. Catalytic material is formed in a bottom region of individual of the trenches. Metal material is electrolessly deposited onto a catalytic surface of the catalytic material to individually fill at least a majority of remaining volume of the individual trenches. Channel-material strings are formed and extend through the first tiers and the second tiers. Other embodiments, including structure independent of method, are disclosed.
Abstract: A package structure and a method of manufacturing the same are provided. The package structure includes a first die, a second die, a first encapsulant, a bridge, an underfill layer and a RDL structure. The first die and the second die are placed side by side. The first encapsulant encapsulates sidewalls of the first die and sidewalls of the second die. The bridge electrically connects the first die and the second die through two conductive bumps. The underfill layer fills the space between the bridge and the first die, between the bridge and the second die, and between the bridge and a portion of the first encapsulant. The RDL structure is located over the bridge and electrically connected to the first die and the second die though a plurality of TIVs. The bottom surfaces of the two conductive bumps are level with a bottom surface of the underfill layer.
Abstract: Various embodiments of the present application are directed to an IC device and associated forming methods. In some embodiments, a memory region and a logic region are integrated in a substrate. A memory cell structure is disposed on the memory region. A plurality of logic devices disposed on a plurality of logic sub-regions of the logic region. A first logic device is disposed on a first upper surface of a first logic sub-region. A second logic device is disposed on a second upper surface of a second logic sub-region. A third logic device is disposed on a third upper surface of a third logic sub-region. Heights of the first, second, and third upper surfaces of the logic sub-regions monotonically decrease. By arranging logic devices on multiple recessed positions of the substrate, design flexibility is improved and devices with multiple operation voltages are better suited.
Abstract: Embodiments of three-dimensional (3D) memory devices and fabricating methods thereof are disclosed. The method includes: forming an alternating dielectric stack on a substrate; forming a top selective gate cut and two structure strengthen plugs in an upper portion of the alternating dielectric stack, wherein each structure strengthen plug has a narrow support body and two enlarged connecting portions; forming a plurality of channel structures in the alternating dielectric stack; forming a plurality of gate line silts in the alternating dielectric stack, wherein each gate line slit exposes a sidewall of one enlarged connecting portion of a corresponding structure strengthen plug; transforming the alternating dielectric stack into an alternating conductive/dielectric stack; and forming a gate line slit structure in each gate line slit including an enlarged end portion connected to one enlarged connecting portion of a corresponding structure strengthen plug.
Abstract: A semiconductor substrate includes a main surface inclined by a first off-angle greater than 0° from a first direction parallel to a crystal plane, with respect to the crystal plane, in a first radial direction of the main surface, and a notch disposed toward the first direction, at an edge of the main surface in the first radial direction.
Abstract: A package which comprises at least one electronic chip, an encapsulant encapsulating at least part of the at least one electronic chip, and a shielding layer on at least part of an external surface of the encapsulant configured for shielding an interior of the package with regard to cooling fluid for removing thermal energy from the at least one electronic chip.
Type:
Grant
Filed:
September 21, 2017
Date of Patent:
February 8, 2022
Assignee:
Infineon Technologies AG
Inventors:
Andreas Grassmann, Wolfram Hable, Juergen Hoegerl, Ivan Nikitin, Achim Strass
Abstract: A semiconductor device comprising: a substrate; a first reflector on the substrate; a second reflector on the first reflector; a semiconductor system directly contacting the first reflector and the second reflector and comprising a first side wall; and an insulating layer covering the first side wall and formed between the substrate and the first reflector.
Abstract: A method of wafer scale packaging acoustic resonator devices and an apparatus therefor. The method including providing a partially completed semiconductor substrate comprising a plurality of single crystal acoustic resonator devices provided on a silicon and carbide bearing material, each having a first electrode member, a second electrode member, and an overlying passivation material. At least one of the devices to be configured with an external connection, a repassivation material overlying the passivation material, an under metal material overlying the repassivation material. Copper pillar interconnect structures are then configured overlying the electrode members, and solder bump structures are form overlying the copper pillar interconnect structures.
Abstract: Generally discussed herein are systems, devices, and methods that include a communication cavity. According to an example a device can include a substrate with a first cavity formed therein, first and second antennas exposed in and enclosed by the cavity, and an interconnect structure formed on the substrate, the interconnect structure including alternating conductive material layers and inter-layer dielectric layers.
Abstract: A spin-orbit-torque magnetization rotational element includes: a spin-orbit-torque wiring extending in a first direction; an antiferromagnetic layer laminated on one surface of the spin-orbit-torque wiring; and a first ferromagnetic layer located on a side of the antiferromagnetic layer opposite to the spin-orbit-torque wiring and magnetically coupled with the antiferromagnetic layer by exchange coupling, wherein a length of the antiferromagnetic layer in the first direction is shorter than a length of the spin-orbit-torque wiring in the first direction.
Abstract: A method used in forming integrated circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers. A stair-step structure is formed into the stack. A first liquid is applied onto the stair-step structure. The first liquid comprises insulative physical objects that individually have at least one of a maximum submicron dimension or a minimum submicron dimension. The first liquid is removed to leave the insulative physical objects touching one another and to have void-spaces among the touching insulative physical objects. A second liquid that is different from the first liquid is applied into the void-spaces. The second liquid is changed into a solid insulative material in the void-spaces. Other embodiments, including structure, are disclosed.
Abstract: A semiconductor device includes a semiconductor layer, a charge storage layer provided on a surface of the semiconductor layer via a tunnel insulating film, and an electrode layer provided on a surface of the charge storage layer via a block insulating film. The tunnel insulating film includes a plurality of first silicon oxynitride films which are provided between the semiconductor layer and the charge storage layer. The tunnel insulating film further includes a silicon oxide film provided between the first silicon oxynitride films and/or a second silicon oxynitride film which is provided between the first silicon oxynitride films and has an oxygen concentration higher than an oxygen concentration in the first silicon oxynitride film.
Abstract: A three-dimensional (3D) integrated circuit (IC) includes a substrate having a substrate surface, a power rail provided in the substrate, and a first tier of semiconductor devices provided in the substrate and positioned over the power rail along a thickness direction of the substrate. A wiring tier is provided in the substrate, and a second tier of semiconductor devices is provided in the substrate and positioned over the wiring tier along the thickness direction. The second tier of semiconductor devices is stacked on the first tier of semiconductor devices in the thickness direction such that the wiring tier is interposed between the first and second tiers of semiconductor devices. A first vertical interconnect structure extends downward from the wiring tier to the first tier of semiconductor devices to electrically connect the wiring tier to a device within the first tier of semiconductor devices.
Type:
Grant
Filed:
October 29, 2019
Date of Patent:
December 14, 2021
Assignee:
TOKYO ELECTRON LIMITED
Inventors:
Lars Liebmann, Jeffrey Smith, Anton J. deVilliers
Abstract: A semiconductor device includes a first rare earth oxide layer, a first magnetic layer adjacent to the first rare earth oxide layer, a second rare earth oxide layer, a second magnetic layer adjacent to the second rare earth oxide layer, and a nonmagnetic layer. The first magnetic layer is disposed between the first rare earth oxide layer and the nonmagnetic layer and is oriented in a crystal surface which is the same as a crystal surface of the nonmagnetic layer. The second magnetic layer is disposed between the second rare earth oxide layer and the nonmagnetic layer and is oriented in a crystal surface which is the same as a crystal surface of the nonmagnetic layer. The nonmagnetic layer is disposed between the first magnetic layer and the second magnetic layer.
Abstract: A semiconductor device encompasses a cooler made of ceramics, having a first main face and a second main face, being parallel and opposite to the first main face, defined by two opposite side faces perpendicular to the first and second main faces, a plurality of conductive-pattern layers delineated on the first main face, a semiconductor chip mounted on the first main face via one of the plurality of conductive-pattern layers, and a seal member configured to seal the semiconductor chip.
Abstract: To realize a high-performance liquid crystal display device or light-emitting element using a plastic film. A CPU is formed over a first glass substrate and then, separated from the first substrate. A pixel portion having a light-emitting element is formed over a second glass substrate, and then, separated from the second substrate. The both are bonded to each other. Therefore, high integration can be achieved. Further, in this case, the separated layer including the CPU serves also as a sealing layer of the light-emitting element.
Type:
Grant
Filed:
June 29, 2020
Date of Patent:
December 7, 2021
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
Abstract: A semiconductor structure having: a Group III-N semiconductor; a first dielectric disposed in direct contact with the Group III-N semiconductor; a second dielectric disposed over the first dielectric, the first dielectric having a higher dielectric constant than the second dielectric; a third dielectric layer disposed on the first dielectric layer, such third dielectric layer having sidewall abutting sides of the second dielectric layer; and a gate electrode contact structure. The gate electrode structure comprises: stem portion passing through, and in contact with, the first dielectric and the second dielectric having bottom in contact with the Group III-V semiconductor; and, an upper, horizontal portion extending beyond the stem portion and abutting sides of the third dielectric layer. An electrical interconnect structure has side portions passing through and in contact with the third dielectric layer and has a bottom portion in contact with the horizontal portion of the gate electrode contact structure.
Type:
Grant
Filed:
September 6, 2018
Date of Patent:
November 16, 2021
Assignee:
Raytheon Company
Inventors:
Jeffrey R. LaRoche, Eduardo M. Chumbes, Kelly P. Ip, Thomas E. Kazior