Abstract: A substrate-processing apparatus includes a substrate support that includes an electrostatic chuck, the electrostatic chuck including a support surface configured to support an annular member. The support surface includes a diffusion groove through which a heat transfer gas is diffused into a gap between the annular member and the support surface. The diffusion groove includes an annular groove provided concentrically with the electrostatic chuck; and a radial groove that is in communication with the annular groove and is provided from the annular groove in a radial direction of the electrostatic chuck.

Abstract: A voltage transient detector includes circuitry for transmitting electrical current through a light emitting diode and a fuse that is serially connected between the light emitting diode and a reference potential, such that the light emitting diode is illuminated when the fuse is not blown. The voltage transient detector also includes circuitry for transmitting a controlled amount of electrical current through the fuse in conjunction with an occurrence of a voltage transient at a voltage measurement location, where the voltage transient exceeds a set transient threshold voltage. The controlled amount of electrical current transmitted through the fuse causing the fuse to blow and the light emitting diode to turn off, thereby indicating occurrence of the voltage transient at the voltage measurement location.

Abstract: A semiconductor fuse for disconnecting an electric consumer from an energy supply source for a battery electric vehicle includes at least one semiconductor switch element that is connected between the energy supply source and the electric consumer. The semiconductor switch element includes a gate control terminal for controlling a switch-on and switch-off of the semiconductor switch element. The semiconductor fuse includes: a driver circuit for applying a driver voltage that is lower than a predetermined gate threshold voltage of the semiconductor switch element at the gate control terminal of the at least one semiconductor switch element; a measurement circuit for determining a gate charge at the gate control terminal; and a control system that detects a drift of the gate threshold voltage based on the gate charge and indicates an issue with the semiconductor switch element based on the detected drift of the gate threshold voltage.

Abstract: This disclosure describes electrostatic wafer chuck designs for holding and heating semiconductor wafers. An electrostatic wafer chuck may include a metal base; a temperature sensor; and a multi-layer ceramic plate including: a bonding layer; a heater; a first dielectric positioned between the heater and the bonding layer; an electrode to electrostatically hold a semiconductor wafer; a second dielectric positioned between the heater and the electrode; a heat spreader to uniformly distribute heat from the heater to the semiconductor wafer; and a third dielectric positioned between the electrode and the semiconductor wafer; and a temperature sensor may extend through the metal base and at least partially through the multi-layer ceramic plate.

Abstract: A method for protecting a grid-forming inverter-based resource connected to a power grid from power deviations. The method includes receiving a first feedback signal for a first parameter. The first parameter being one of a power of the grid-forming inverter-based resource or an electrical frequency of the power grid. The method also includes determining a first parameter deviation signal based on a comparison between the first feedback signal and a threshold for the first parameter. Further, the method includes determining a scale factor configured to adjust sensitivity of at least one of a power or frequency protection for the grid-forming inverter-based resource based on a second parameter. The second parameter being another of the power of the grid-forming inverter-based resource or the electrical frequency of the power grid. Moreover, the method includes determining a compensated deviation signal based on the scale factor and the first parameter deviation signal.

Abstract: A power generation device includes: a power generator, a power conversion circuit, a first interruption circuit, a second interruption circuit, a first monitoring circuit which monitors an output current from the power generator to the power conversion circuit and outputs a first interruption signal when an absolute value of the output current exceeds a first predetermined value, and a second monitoring circuit which monitors a total value of output voltages of respective phases of the power generator and outputs a second interruption signal when an absolute value of the total value exceeds a second predetermined value. The first interruption circuit interrupts a connection between the power generator and the power conversion circuit in accordance with the output of the first or second interruption signal. The second interruption circuit interrupts a connection between three-phase coils and the neutral point in accordance with the output of the first or second interruption signal.

Abstract: An integrated circuit including a signal connection pad, an electrostatic discharge (ESD) protection circuit, and an input stage circuit is provided. The ESD protection circuit is coupled to the signal connection pad. An input terminal of the input stage circuit is coupled to the ESD protection circuit. The input stage circuit includes a load circuit, a current source circuit, an input transistor, and an impedance circuit. A control terminal of the input transistor is coupled to the ESD protection circuit. A first terminal of the input transistor is coupled to the load circuit. A second terminal of the input transistor is coupled to the current source circuit. A first terminal of the impedance circuit is coupled to a body of the input transistor. A second terminal of the impedance circuit is coupled to a first voltage.

Abstract: An algorithm analyzes the motion of an object to determine if a switch needs to be activated or deactivated. Accelerometers measure forces exerted upon an object to determine orientation in pitch, roll, and yaw axes, and to determine motion of the object. When threshold conditions for these orientations and movements are measured, the method combines taking moving averages of pitch, roll, and yaw, and additionally accumulating an integral of yaw to determine if an activation or deactivation condition is met. Should an integral condition not be constantly met while the moving average conditions are being determined, the yaw integral counter resets and the whole process must begin again. This method balances most unintentional activation conditions with activation latency. Another methodology tracks the motion of a wrist flick, similar to casting a fishing line, using acceleration and deceleration parameters.

Abstract: A rapid shutdown device and a photovoltaic device are provided. The rapid shutdown device according to the present disclosure includes a first on-off switching transistor, a voltage module, a first driving module and a control chip. The voltage module adapts voltage outputted by a controlled photovoltaic module to the control chip. Therefore, the rapid shutdown device for a photovoltaic device formed by multiple photovoltaic modules connected in series unnecessitated a high-voltage chip. Instead, a common low-voltage chip is suitable for such photovoltaic device. Further, since an output voltage signal of the low-voltage chip is insufficient to directly drive the first on-off switching transistor connected to the controlled photovoltaic module in series, the first driving module is added to adapt the electric signal sent by the control chip to the first on-off switching transistor.

Abstract: A plug-in discharge detection unit includes two plugs of a cathode and an anode configured to allow insertion into respective two plug insertion holes of a plug socket. A discharge detection section configured to allow detection of a noise of discharge superimposed on a voltage or current, and an arithmetic section configured to allow determination of whether discharge has occurred based on the noise. The detection unit further includes a ground terminal electrically connected to a ground; at least one first switch electrically connected to a secondary side of the respective plug; and a current limiting resistor electrically connected to a secondary side of the first switch.

Abstract: Method of poling a ferroelectric medium applies a first contact surface of a first electrical contact to a first side surface section, the first contact surface smaller than the first side surface section, and applies a second contact surface of a second electrical contact to a second side surface, the second contact surface covering at least the second side surface section, and applies an electrical voltage between the first and second electrical contacts. Relative movement between the first contact surface and the ferroelectric medium in two mutually perpendicular directions sweeps the first contact surface over the first side surface section and a measure of a current flowing between the first electrical contact and the second electrical contact through the ferroelectric medium is detected and the electrical voltage controlled so that a deviation of the current from a nominal poling current is minimised. The second electrical contact is an ionic conductor.

Abstract: A bidirectional circuit breaker has Breaking Speed Control (BSC) to prevent false triggering when an upstream fault occurs. A semiconductor switch has a Metal Oxide Semiconductor Field Effect Transistor (MOSFET), an Insulated Gate Bipolar Transistor (IGBT), and a varistor in three parallel branches that drive a positive output. An input capacitor between positive and negative inputs forms an LC network with an inductor connected to the positive input. A current sensor is connected between the inductor and the semiconductor switch. When the current sensor detects reverse current, a snubber switch is closed, connecting a snubber capacitor across both terminals of the inductor. A LCC network is formed that stores more energy than the LC network, spreading out a current spike caused by the upstream fault, reducing peak reverse current pulled through the circuit breaker by the upstream fault. Thus breaking speed is reduced when the snubber switch closes.

Abstract: The application discloses a power supply device and an overcurrent alarm method. The power supply device provides power to a load system and includes: a current sampling module for obtaining a current sampling value; a first comparison module for comparing the current sampling value with an alarm current reference value to obtain a first output value; and a control module for determining whether to send a current alarm signal to the load system based on the first output value, wherein when the current sampling value is greater than or equal to the alarm current reference value, the control module sends the current alarm signal and provides a warning notification to the load system; when the current sampling value is less than the alarm current reference value, the control module does not send the current alarm signal, or the control module sends a current non-alarm signal.

Abstract: A substrate processing equipment and a method of driving the substrate processing equipment, which automatically cut off power supplied to a main circuit breaker and a branch circuit breaker when an operator inspects a process chamber or a power supply system. The substrate processing equipment for processing a substrate includes: a process processing module including loads utilized in a process for processing a substrate; a branch circuit breaker installed on a periphery to the process processing module and electrically connected to the loads; a main circuit breaker electrically connected to the branch circuit breaker and supplying power to the branch circuit breaker; and a power distribution board in which the branch circuit breaker is mounted, and including a power distribution board door, in which the main circuit breaker cuts off power when the power distribution board door is opened.

Abstract: The present disclosure discloses a dimming power supply, which includes a power supply circuit, a power control transistor, a control circuit, a driving circuit and a short-circuit protection circuit. The short-circuit protection circuit includes a voltage sampling circuit and a first switching device, an input end of the voltage sampling circuit is connected to the negative electrode of the load, an output end of the voltage sampling circuit is connected to a control end of the first switching device, and when the first switching device is turned on, a signal input to the gate of the power control transistor is pulled down or truncated. A second switching device is connected in series in the voltage sampling circuit, a control end of the second switching device is connected to the gate of the power control transistor, when the power control transistor is turned off, the second switching device is turned off.

Abstract: An embodiment apparatus includes a processing chamber and an equipment housing; a processing tool in the equipment housing with a process nozzle projecting into the processing chamber; a substrate chuck for supporting a wafer disposed in the processing chamber. The apparatus includes a docking station in the processing chamber configured to reset a temperature of the substrate chuck when the wafer is docked in a docking position; and a chuck arm in the processing chamber. The chuck arm is configured to move the wafer under the process nozzle and to move the wafer to the docking position.

Abstract: An electrical arrangement for protection in a direct current high voltage electric system comprises an input connection with an input terminal, an output connection with a output terminal, a main disconnection component between the input terminal and the output terminal and at least one clamping circuit between the input terminal and the output terminal. The clamping circuit has a first connecting path and a second connecting path, arranged in parallel to each other. The first connection path comprises a storage coupling for temporarily buffering an overvoltage present between the input terminal and the output terminal. The first connection path also comprises an activatable switch for selectably connecting the storage coupling with the output terminal. The second connection path comprises a supply coupling for operating the activatable switch in dependency of the overvoltage.

Abstract: A semiconductor device includes a conductive layer extending along a first lateral direction; a gate dielectric layer disposed over the conductive layer; a channel layer disposed over the gate dielectric layer and extending along a second lateral direction perpendicular to the first lateral direction; a first via-like structure, in direct contact with the channel layer, that is disposed along a first edge of the channel layer extending along the second lateral direction; and a second via-like structure, in direct contact with the channel layer, that is disposed along a second, opposite edge of the channel layer extending along the second lateral direction. The first via-like structure and second via-like structure are laterally separated apart along a third lateral direction that is clockwise tilted from the second lateral direction with a first positive angle.

Abstract: A semiconductor device has an analogue-to-digital converter (ADC) driven by a plurality of analogue input channels, each having an input pad and an input node connected to the input pad. The input node is connected to an input of the ADC through a respective switch. The analogue input channels comprise a high-side clamp transistor connected between the input node and a high-side power rail, a high-side comparator to clamp the input node to a high-side clamp voltage when the voltage at the input node exceeds a high-side comparison voltage, a low-side clamp transistor connected between the input node and a low-side power rail, and a low-side comparator for turning on the low-side clamp transistor to clamp the input node to a low-side clamp voltage when the voltage at the input node falls below a low-side comparison voltage.

Abstract: To provide a static eliminator and a static elimination system capable of strictly managing a manufacturing status of a product without increasing a management burden. The static eliminator includes an ion generation unit, an ion control unit, a measurement value acquisition unit, a data generation unit, and a nonvolatile storage unit. The ion generation unit generates ions. The ion control unit controls the ion generation unit. The measurement value acquisition unit acquires a measurement value related to control by the ion control unit and acquires a measurement time at which the measurement value has been acquired. The data generation unit generates history data based on the measurement value and the measurement time. The nonvolatile storage unit stores the history data.