Abstract: A plasma source chamber (10) for use in a spectrometer comprises an inner housing (11) for accommodating a plasma source (31) and an outer housing (12) accommodating the inner housing. The outer housing (12) comprises at least one outer air inlet opening (21) in a first wall and at least one outer air outlet opening (22) in a second wall. Walls of the inner housing and walls of the outer housing define a spacing (25) so as to allow a first air flow (1) from the at least one outer air inlet opening (21) to the at least one outer air outlet opening (22) through the spacing (25) between the inner housing and the outer housing. The inner housing (11) comprises at least one inner air inlet opening (23) in a first wall and at least one inner air outlet opening (24) in a second wall to allow a second air flow (2) from the at least one inner air inlet opening to the at least one inner air outlet opening through the inner housing.

Abstract: A heterodyne interferometer and a measurement method based on multi-target opposite displacement measurement are provided, technical points including: An output path of the laser source is sequentially arranged with a first beam splitter and a second beam splitter arranged in parallel on left and right sides, and both of which are polarization beam splitters; a first reflector is arranged above the first beam splitter, a third reflector is arranged on a right side of the second beam splitter, a second plane reflector is arranged in front of the second beam splitter, and a first plane reflector is arranged behind the second beam splitter; the first plane reflector and the second plane reflector jointly constitute a second reflector group; a left side of the first beam splitter is provided with a first photodetector and a second photodetector. The present invention realizes the measurement of relative displacement between opposing objects.

Abstract: A method of inspecting flatness of substrate is provided and includes providing a substrate. N first inspecting points are selected from the surface of the substrate along a first straight line, where the coordinate of the i-th first inspecting point is (Xi,Yi,Zi). By using a formula “ D = ? i = 1 N - 1 ? ( X i + 1 - X i ) 2 + ( Y i + 1 - Y i ) 2 + ( Z i + 1 - Z i ) 2 ” , a first measurement length D is calculated. By using a formula “F=(D?S)/S”, a first flatness index F is calculated. S is the horizontal distance between 1st first inspecting point and N-th first inspecting point. When the first flatness index F is larger than a first threshold, the substrate is determined to be unqualified.

Abstract: There is provided an apparatus (100) comprising one or more processors (102) configured to acquire a multi-/hyperspectral two-dimensional image of an object at respective wavelengths. For at least one pixel of the image corresponding to a first point on an object surface, a set of intensity values for said at least one pixel is compared to a characteristic curve to determine a similarity measure. A first angle of the first point is estimated from the similarity measure or a correction is applied to the image at the first point using the similarity measure. The characteristic curve is a difference between a spectrum of at least one second point on the object surface at a second angle with respect to a plane of the image and a spectrum of at least one third point on the object surface at a third angle with respect to the plane of the image.

Abstract: A method of testing a photonic device includes providing a plurality of optical test signals at respective inputs of a first plurality of inputs of an optical input circuit located on a substrate, combining the plurality of optical test signals into a combined optical test signal at an output of the optical input circuit, transmitting the combined optical test signal through the output to an input waveguide of an optical device under test, the optical device under test being located on the substrate, and measuring a response of the optical device under test to the combined optical test signal. Each of the plurality of optical test signals comprises a respective dominant wavelength of a plurality of dominant wavelengths.

Abstract: Apparatuses and methods therefor generally relate to sensing. In one example of such an apparatus, there is a platform. An optical fiber with Fiber Bragg Grating sensors is located in a trench formed in the platform. The trench has curved sections. The Fiber Bragg Grating sensors are respectively in the curved sections of the trench.

Abstract: A dot projector may include a vertical-cavity surface-emitting laser (VCSEL). The dot projector may include one or more collimating elements to collimate light emitted by the VCSEL. An effective focal length of the one or more collimating elements may be larger than an optics length of the dot projector. The dot projector may include an optical element including a periodic optical phase function to replicate the light after collimation by the one or more collimating elements and an aberration-correcting phase function to correct spot aberrations in a dot pattern resulting from the tiling or splitting of the light.

Abstract: A method of manufacturing a semiconductor device includes: receiving a workpiece on which the semiconductor device is manufactured; causing a nozzle to dispense a fluid toward a surface of the workpiece external to the nozzle, wherein the nozzle includes a first channel and a second channel that allow the fluid to flow through; emitting light, by a light source, from within the nozzle toward the surface while the nozzle is dispensing the fluid; receiving light reflected from the surface by a light sensor, the light source and the light sensor being disposed within the nozzle and opposite to each other, and the emitted light and the reflected light adapted to be contained within the fluid; and examining a status of the reflected light. The emitted light and the reflected light propagate in a direction parallel to a longitudinal axis of each of the first channel and the second channel.

Abstract: A gas analysis system for engaging a sealed container to withdraw and analyze gas from the sealed container, the system comprising: a penetration implement configured to create an opening to permit withdrawal of gas from the container; a chamber operatively coupled to the penetration implement for receiving gas from the container; a gas analyzer; a seal configured to engage the container to enable the system to maintain an enclosed volume comprising the chamber and an interior of the container after the penetration implement has created an opening in the container; and a mechanism to effect flow of gas from the container to the chamber, and thereafter from the chamber to the gas analyzer, the mechanism comprising a first valve operatively coupled to the penetration implement, and a connection pipe configured to connect with the gas analyzer; wherein the first valve is movable between a first position in which it permits flow of gas from the container to the chamber, and prevents gas from escaping from the enc

Abstract: There is provided a lens including a first curved surface and a second curved surface. The first curved surface and the second curved surface have different focal distances and are arranged interlacedly along a radial direction of the lens.

Abstract: A method for detecting a distortion of a light pattern defining a code word includes projecting a light pattern onto an object via a light source and detecting the projected light pattern and comparing the detected light pattern with a reference light pattern. The reference light pattern has individual, spaced-apart light pattern elements arranged in a plurality of successive columns in the direction of a first extension axis and the number and/or position of the at least one light pattern element in each column of the reference light pattern is an encoding feature that defines at least one code word. The distortion of the detected light pattern with respect to the reference light pattern is determined by comparing distances between the light pattern elements of the detected light pattern with distances between the light pattern elements of the reference light pattern.

Abstract: A laser irradiation apparatus includes: multiple irradiation units each to emit a laser beam to a surface of a base to form a pattern, the multiple irradiation units, including: a first irradiation unit to emit a first laser beam; and a second irradiation unit to emit a second laser beam; and a circuitry to: control the first irradiation unit to irradiate only a first irradiation region on a surface of a base with the first laser beam; and control the second irradiation unit to irradiate only a second irradiation region on the surface of the base with the second laser beam. The first irradiation region and the second irradiation region are not overlapping each other.

Abstract: A system, method, and apparatus are provided for flow cytometry. In one example, the flow cytometry system includes dual laser devices and dual scatter channels to measure velocity of particles in a core stream of sample fluid. The total flow rate of the sample fluid and the sheath fluid around the sample fluid is controlled, and thus held constant, by a feedback control system controlling a vacuum pump based on differential pressure across ends of a flow channel in the flow cell. A stepper flow control valves are disclosed that apply a physical fluid resistance to a flow of sheath fluid in the flow cytometer. The physical fluid resistance regulates a flow rate of the sheath fluid and thereby regulates a flow rate of sample fluid in the flow cytometer.

Abstract: Methods and systems for optimal capture of a multi-channel image in a LSPR spectrometry is described herein. The method comprises 1) finding a plurality of valid groupings of channels, 2) determining total capture times for each valid grouping of channels, 3) determining a measure of exposure sub-optimality, 4) estimating the expected error in peak wavelength for each valid grouping, 5) finding an optimal grouping of channels by identifying the grouping with the lowest estimate of expected error in peak wavelength and 6) capturing a subsequent multi-channel image using the optimal grouping.

Abstract: Micro device optical inspection and repairing equipment adopting an adhesion device is provided. The micro device optical inspection and repairing equipment includes a carrying stage, an optical inspection module and at least one adhesion device. The optical inspection module is arranged corresponding to the carrying stage so as to capture image information and obtain a position coordinate from the image information. The adhesion device includes a main body and an adhesive portion. The adhesive portion is connected to the main body. The adhesion device can move to a target position of the carrying stage according to the position coordinate. The main body is adapted to drive the adhesive portion to move to the target position along a moving axis. An optical inspection and repairing method adopting the micro device optical inspection and repairing equipment is also provided.

Abstract: A collimated beam alignment system for aligning a receiving insulator, a guide insulator and a drive insulator of an electric power disconnect switch. The collimated beam alignment system includes an emitter stage temporarily attached to the receiving insulator, an aperture stage including an alignment aperture temporarily attached to the receiving insulator, and a target stage including an alignment target temporarily attached to the drive insulator. With the drive insulator rotated to a switch-closed position, proper alignment of the receiving insulator, the guide insulator and the drive insulator is indicated by a visible spectrum collimated beam from the emitter stage passing through the alignment aperture and illuminating the alignment target. Once the insulators are aligned, the alignment system is removed and the live components of the disconnect switch are attaches to the insulators.

Abstract: A flow cell and flow cell system which allows for calibration of an attached sensor to be performed in place. Specifically, the ability to utilize standard addition techniques of calibration without the need to take a test sample from the process stream or remove the sensor from operating on the flow cell.

Abstract: A method and apparatus for surface plasmon resonance imaging are provided for imaging the surface plasmon resonance signals caused by the interaction of biomolecules. In particular, the method and apparatus can image the slightly spectral change in a surface plasmon resonance mode by comparing the light intensities of two bands in the frequency domain of the surface plasmon.

Abstract: An optical sensor circuit is provided. In the optical sensor circuit, an output stage circuit transmits a voltage of first and second node to the output line according to a first driving signal. A first sensor is configured to generate a first photocurrent according to a first color light that senses an ambient light, and generate a second photocurrent according to a second color light. A second sensor is configured to generate a third photocurrent according to a third color light, and generate a fourth photocurrent according to the second color light. In a sensing phase, when the first sensor senses the first color light, and the second sensor senses the third color light, the first sensor adjusts a voltage level of the voltage according to the first photocurrent, and the second sensor adjusts the voltage level of the voltage according to the third photocurrent.

Abstract: The present disclosure describes a flow cell, a read head, and a skid attachment for measuring real-time molecular weight for downstream process control. In an embodiment, the flow cell comprises a hollow cylindrical tube, an inlet flange connected to an inlet of the tube, and an outlet flange connected to an outlet of the tube. In an embodiment, the read head comprises at least one push rod, at least two line contacts, where the at least one push rod is configured to push an outer side wall of a flow cell against the at least two line contacts. In an embodiment, the skid attachment comprises a plurality of arms connected to an enclosure configured to house at least a multi-angle light scattering instrument comprising a read head.