Patents Examined by Tarifur Chowdhury
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Patent number: 10254223Abstract: According to an embodiment of the invention, an apparatus to detect fluorescence from a sample is disclosed. The apparatus comprises a sample plane onto which the sample is arranged, an excitation light unit including at least a light source to illuminate the sample, and a detection unit comprising at least a detector having at least 100,000 active detection elements to detect a fluorescence signal from the sample.Type: GrantFiled: January 25, 2018Date of Patent: April 9, 2019Assignee: ChemoMetec A/SInventors: Søren Kjaerulff, Mette Elena Skinderso, Helle Frobose Sorensen, Frans Ejner Ravn, Martin Glensbjerg
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Patent number: 10254110Abstract: An optical metrology device determines physical characteristics of at least one via in a sample, such as a through-silicon vias (TSV), using signal strength data for modeling of the bottom critical dimension (BCD) and/or for refinement of the data used to determine a physical characteristic of the via, such as BCD and/or depth. The metrology device obtains interferometric data and generates height and signal strength data, from which statistical properties may be obtained. The height and signal strength data for the via is refined by removing noise using the statistical property, and the BCD for the via may be determined using the refined height and signal strength data. In one implementation, a signal strength via map for a via is generated using signal strength data and is fit to a model to determine the BCD for the via.Type: GrantFiled: December 15, 2014Date of Patent: April 9, 2019Assignee: Nanometrics IncorporatedInventors: Ke Xiao, Brennan Peterson, Timothy A. Johnson
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Patent number: 10254438Abstract: Various embodiments include methods, apparatus, and systems to operate a tool downhole in a well, where the tool has sensing system to determine different properties of downhole structures. Such an apparatus can include a received signal that is input to a beam splitter with 5 a local oscillator signal. The beam splitter outputs light signals to first and second photodetectors that convert the respective signals to electrical signals. The electrical signals are input to differential amplifier that generates an amplitude representative of the phase difference between the two input signals. A feedback path converts that 10 amplitude to a phase adjustment signal that is couple to the local oscillator.Type: GrantFiled: May 7, 2014Date of Patent: April 9, 2019Assignee: HALLIBURTON ENERGY SERVICES, INCInventor: Satyan Gopal Bhongale
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Patent number: 10234395Abstract: Provided herein is an apparatus, including an excitation arm including excitation optics; a collection arm including collection optics, wherein the excitation arm and the collection arm are geometrically off-axis from one another for independent control of the excitation optics or the collection optics; and a full-surface spectroscopic analyzer to analyze a thin-film over an article from Raman-scattered light collected by the collection optics.Type: GrantFiled: August 24, 2015Date of Patent: March 19, 2019Assignee: Seagate Technology LLCInventors: Daniel J. Gargas, David M. Tung, Travis W. Grodt, Joachim W. Ahner
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Patent number: 10234593Abstract: An example formation fluid analysis tool includes an optical element and a detector configured to receive light passed through the optical element. The optical element is configured to receive light from a fluid sample and comprises a substrate, an integrated computational element (ICE) fabricated on a first side of the substrate, and an optical filter fabricated on a second side of the substrate opposite the first side.Type: GrantFiled: September 3, 2015Date of Patent: March 19, 2019Assignee: Halliburton Energy Services, Inc.Inventors: James M. Price, Aditya B. Nayak, Bin Dai
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Patent number: 10228332Abstract: A defect inspection method includes irradiating a sample with laser, condensing and detecting scattered light beams, processing signals that detectors have detected and extracting a defect on a sample surface, and outputting information on the extracted defect. Detection of the scattered light beams is performed by condensing the scattered light beams, adjusting polarization directions of the condensed scattered light beams, mutually separating the light beams depending on the polarization direction, and detecting the light beams by a plurality of detectors. Extraction of the defect is performed by processing output signals from the detectors by multiplying each detection signal by a gain, discriminating between a noise and the defect, and detecting the defect.Type: GrantFiled: January 22, 2015Date of Patent: March 12, 2019Assignee: Hitachi High-Technologies CorporationInventors: Toshifumi Honda, Yuta Urano, Shunichi Matsumoto, Taketo Ueno, Yuko Otani
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Patent number: 10197471Abstract: A method for measuring a mechanical property of a coating on an optical fiber may include collecting Brillouin frequency shift data of the coating on the optical fiber, and determining the mechanical property of the coating by comparing the collected Brillouin frequency shift data with correlation data that may include a set of collected sample Brillouin frequency shift data and a set of collected sample mechanical property data of a plurality of sample materials. The sample materials may include a substantially identical sample composition including one or more curable polymers, be prepared with varying processing conditions, and have different mechanical property values. The coating on the optical fiber may include a material composition substantially identical to the sample materials composition. The set of collected sample Brillouin frequency shift data may be correlated with the set of collected sample mechanical property data to determine a quantitative relationship therebetween.Type: GrantFiled: September 21, 2016Date of Patent: February 5, 2019Assignee: Corning IncorporatedInventors: Stephan Lvovich Logunov, Kevin Alton Lewis
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Patent number: 10192095Abstract: The invention provides a system and method for rapid validation of identity from tissue using registered two dimensional and optical coherence tomography (OCT) scan images. The preferred embodiment provides, for a human fingerprint, validation that the surface fingerprint matches the primary fingerprint. An alternate embodiment provides validation of “aliveness” by ascertaining blood flow. Various embodiments are taught.Type: GrantFiled: June 26, 2017Date of Patent: January 29, 2019Inventor: Joshua Noel Hogan
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Patent number: 10190994Abstract: An apparatus, a method and a computer program product for inspecting at least side faces of a semiconductor device are disclosed. A frame construction is provided, which holds a camera, defining an imaging beam path. The semiconductor device is inserted into a mirror block. The mirror block has a first mirror, a second mirror, a third mirror and a fourth mirror, wherein the mirrors are arranged such that they surround a free space in the form of a rectangle. The opposing first mirror and third mirror are fixedly mounted and the opposing second mirror and fourth mirror movably mounted. A tilted mirror directs an image of the side faces of the semiconductor substrate generated by the mirror block to the camera.Type: GrantFiled: September 14, 2016Date of Patent: January 29, 2019Assignee: KLA-Tencor CorporationInventor: Carl Truyens
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Patent number: 10184883Abstract: A meteorological tower is provided in a flux site and a solar array is positioned on the tower to provide power. A laser on the tower receives power from the solar array and produces a laser beam. A multiplicity of individual laser absorption spectroscopy gas cells positioned on the meteorological tower collect samples of the atmosphere. An optical cable connects the laser to each of individual las cell and direct the laser beam into each cell. Each cell includes a multiplicity of mirrors positioned so that the laser beam makes a multiplicity of passes through the samples. An analyzer associated with the cells receives the laser beam after the laser beam has made the multiplicity of passes through the sample of the atmosphere and the analyzer detects concentrations of isotopes of carbon dioxide in the atmosphere in concomitance of other gas concentrations.Type: GrantFiled: November 17, 2016Date of Patent: January 22, 2019Assignee: Lawrence Livermore National Security, LLCInventors: Tiziana C. Bond, Mihail Bora, Jessica L. Osuna, Sonia Wharton
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Patent number: 10184832Abstract: A spectral sensor includes a Fabry-Perot interference filter which is provided with an opening to pass light transmitted according to a distance between a first mirror and a second mirror along a facing direction; a light detector which has a light reception unit to receive the light having passed through the opening; a wiring substrate on which the light detector is mounted; and a plurality of spacers which support the filter on the wiring substrate, such that a second space continuous with a first space in the opening and including the first space when viewed from the facing direction is formed between the filter and the wiring substrate. The light detector is disposed in the second space. The light reception unit is disposed in a region corresponding to the first space in the second space, when viewed from the facing direction.Type: GrantFiled: October 31, 2014Date of Patent: January 22, 2019Assignee: HAMAMATSU PHOTONICS K.K.Inventors: Katsumi Shibayama, Takashi Kasahara, Masaki Hirose, Toshimitsu Kawai
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Patent number: 10184833Abstract: An imaging spectrometer receives a beam of light from a slit and outputs the beam of light to a focal plane. The output beam of light at the focal plane is dispersed in accordance with a spectral composition of the beam of light received from the slit. The imaging spectrometer comprises first to fourth curved reflective portions. The first to fourth curved reflective portions are arranged so that the beam of light, in its passage from the slit to the focal plane, sequentially strikes the first to fourth curved reflective portions and is reflected by the first to fourth curved reflective portions. Further, the first to fourth curved reflective portions are alternatingly concave or convex, respectively, along the passage of the beam of light. At least one of the first to fourth curved reflective portions has a reflective grating structure. Further disclosed is a method of manufacturing such imaging spectrometer.Type: GrantFiled: September 28, 2017Date of Patent: January 22, 2019Assignee: European Space AgencyInventors: Matteo Taccola, Munadi Ahmad
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Patent number: 10175037Abstract: A 3D measurement device for optically scanning and measuring an environment is provided. The device includes a measuring head having a light emitter which emits an emission light beam, a light receiver and a control and evaluation device. The light receiver receives a reception light beam that is reflected or otherwise scattered by an object in the environment of the 3D measurement device. The control and evaluation device determines at least the distance from the object for each of a plurality of measuring points. A battery pack is removably coupled to the measuring head. The battery pack includes a battery housing and a plurality of individual batteries that are circular in cross-section. The plurality of individual batteries are arranged in a plurality of rows that define a row direction. The plurality of rows include a first row offset from a second row by one-half a diameter of the individual batteries.Type: GrantFiled: December 21, 2016Date of Patent: January 8, 2019Assignee: FARO TECHNOLOGIES, INC.Inventors: Andreas Ditte, Andreas Woloschyn
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Patent number: 10161794Abstract: A spectrophotometer diagnosis system and a method for diagnosing a spectrophotometer, wherein at least one test patch is printed in proximity to at least one non-printed substrate patch, at least one value characteristic of the at least one test patch and/or the at least one substrate patch is measured using the spectrophotometer, and at least one diagnostic score for the spectrophotometer is determined based on the at least one measured value in comparison with a reference value.Type: GrantFiled: April 29, 2015Date of Patent: December 25, 2018Assignee: HP Indigo B.V.Inventors: Lena Gurevich, Nir Guttman, Ran Waidman
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Patent number: 10161741Abstract: A method and a system for the optical detection, with hyperacuity, of a contrasted target, allowing the detection of the relative position of said target in relation to said detection system and therefore the acquisition and the pursuit of such a target. One or more embodiments is applicable to the field of autonomous robotic systems, especially for the positioning of drones or robots on a target.Type: GrantFiled: May 4, 2016Date of Patent: December 25, 2018Assignees: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, UNIVERSITÉ D'AIX-MARSEILLEInventors: Stephane Viollet, Franck Ruffier, Augustin Manecy, Julien Diperi
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Patent number: 10161747Abstract: A surface texture measuring apparatus includes: a measurement sensor measuring, without contact, a surface texture of an interior wall of a cylinder portion of a measurable object while displacing in a normal direction of the interior wall at each measurement region into which the interior wall is divided in a circumferential direction of the cylinder portion; a W axis displacer displacing the measurement sensor in a W axis direction; a ? axis displacer displacing the measurement sensor in the circumferential direction, after measurement of the surface texture of a first measurement region, such that the measurement sensor faces a second measurement region adjacent to the first measurement region in the circumferential direction; and a controller adjusting a W axis direction measurement position for measuring the surface texture of the second measurement region while displacing the measurement sensor in the W axis direction.Type: GrantFiled: February 13, 2017Date of Patent: December 25, 2018Assignee: MITUTOYO CORPORATIONInventors: Hiroshi Sakai, Tetsuya Ito, Ken Motohashi
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Patent number: 10161738Abstract: An optical coherence tomography system utilizes an optical swept laser that has cavity length compensator that changes an optical length of the laser cavity for different optical frequencies to increase the length of the laser cavity for lower optical frequencies. Specifically, a spectral separation between longitudinal cavity modes of the laser cavity is shortened or alternatively lengthened as a passband of a cavity tuning element sweeps through a scanband of the swept optical signal. In some examples, the compensator is implemented as two gratings. In others, it is implemented as a chirped grating device.Type: GrantFiled: December 31, 2013Date of Patent: December 25, 2018Assignee: Axsun Technologies, Inc.Inventors: Bartley C. Johnson, Dale C. Flanders
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Patent number: 10156438Abstract: An image acquisition unit for obtaining data to generate at least one three-dimensional representation of at least one underwater structure is disclosed. The image acquisition unit includes a unit body, a plurality of cameras, a first laser light device, and a second laser light device. The first laser light device can operate based on a first illumination setting. The second laser light device can operate based a second illumination setting. The first and second cameras can be configured to capture light during the first illumination setting and generate a first set of data representative of the first laser projecting on the at least one underwater structure at a predetermined scan rate. The third and fourth cameras can be configured to capture light during the second illumination setting and generate a second set of data representative of the second laser projecting on the at least one underwater structure at the predetermined scan rate.Type: GrantFiled: August 17, 2015Date of Patent: December 18, 2018Assignee: Fugro N.V.Inventors: Olaf Booij, Evert Schippers, Hendrik Wouters, Fatemeh Karimi Nejadasl, Pawel Michalak
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Patent number: 10151910Abstract: An observation apparatus according to the present technology includes a microscope optical system, an imaging unit, a spectroscopic unit, and a detection unit. The imaging unit captures an image via the microscope optical system. The spectroscopic unit acquires an absorption spectrum or a Raman spectrum in an ultraviolet, visible, or infrared area via the microscope optical system. The detection unit detect an observation target object in an observed sample by using the absorption spectrum or the Raman spectrum.Type: GrantFiled: January 21, 2013Date of Patent: December 11, 2018Assignee: SONY CORPORATIONInventors: Suguru Dowaki, Eriko Matsui, Hirokazu Tatsuta, Masanobu Tamai, Kazuhiro Nakagawa
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Patent number: 10151986Abstract: Methods and systems for estimating values of parameters of interest of actual device structures based on optical measurements of nearby metrology targets are presented herein. High throughput, inline metrology techniques are employed to measure metrology targets located near actual device structures. Measurement data collected from the metrology targets is provided to a trained signal response metrology (SRM) model. The trained SRM model estimates the value of one or more parameters of interest of the actual device structure based on the measurements of the metrology target. The SRM model is trained to establish a functional relationship between actual device parameters measured by a reference metrology system and corresponding optical measurements of at least one nearby metrology target. In a further aspect, the trained SRM is employed to determine corrections of process parameters to bring measured device parameter values within specification.Type: GrantFiled: July 2, 2015Date of Patent: December 11, 2018Assignee: KLA-Tencor CorporationInventors: Andrei V. Shchegrov, Thaddeus Gerard Dziura, Stilian Ivanov Pandev, Leonid Poslavsky