Patents Examined by Tarifur R. Chowdhury
  • Patent number: 11555996
    Abstract: A method for analyzing 2D material thin film and a system for analyzing 2D material thin film are disclosed. The detection method includes the following steps: capturing sample images of 2D material thin films; measuring the 2D material thin films by a Raman spectrometer; performing a visible light hyperspectral algorithm on the sample images by a processor to generate a plurality of visible light hyperspectral images; performing a training and validation procedure, performing an image feature algorithm on the visible light hyperspectral images, and establishing a thin film prediction model based on a validation; and capturing a thin-film image to be measured by the optical microscope, performing the visible light hyperspectral algorithm, and then generating a distribution result of the thin-film image to be measured according to an analysis of the thin film prediction model.
    Type: Grant
    Filed: April 20, 2021
    Date of Patent: January 17, 2023
    Assignee: NATIONAL CHUNG CHENG UNIVERSITY
    Inventors: Hsiang-Chen Wang, Kai-Chun Li, Kai-Hsiang Ke, Chun-Wen Liang
  • Patent number: 11549860
    Abstract: A method and a system for interrogating an optical fiber includes a probe signal that has a first frequency comb at a first repetition rate (?f) injected into the optical fiber. A backscattering signal that includes the probe signal convolved with an impulse response of the optical fiber in reflection which is sensitive to at least one parameter being measured from the optical fiber is gathered. The backscattering signal is beaten with a local oscillator signal to generate a beating signal, the local oscillator signal including a second frequency comb at a second repetition rate that is offset from the first repetition rate (?f+?f) and being mutually coherent with the first frequency comb. The resulting beating signal is analysed to thereby determine the at least one parameter being measured from the optical fiber.
    Type: Grant
    Filed: May 20, 2021
    Date of Patent: January 10, 2023
    Assignee: ARAGON PHOTONICS LABS S.L.U.
    Inventors: Hugo Fidalgo Martins, Miguel Soriano Amat, María del Rosario Fernández Ruiz, Sonia Martín López, Miguel González Herráez, Javier Preciado Garbayo, Asier Villafranca Velasco
  • Patent number: 11549801
    Abstract: A three-dimensional target capable of serving as a positioning reference, including, on a useful face, a first structure and a second structure. The first structure defines a planar reference face divided up between at least a first portion whose surface is reflective according to a diffuse reflection, and a second portion whose surface is reflective according to a specular reflection, the second portion being divided up according to a series of localized zones positioned in the first portion. The second structure has an inclined face relative to the planar reference face. Applicable to three-dimensional optical measurement of the relative position between a first object and a second object.
    Type: Grant
    Filed: November 29, 2018
    Date of Patent: January 10, 2023
    Assignee: LDI FINANCES
    Inventors: Philippe Jacot, Sebastien Laporte, Frederic Perret
  • Patent number: 11549798
    Abstract: A measuring device determines a distance between a processing head for a laser processing system configured to process a workpiece with a laser beam and the workpiece. The measuring device includes an optical coherence tomograph to measure a distance between the processing head and workpiece. In the optical coherence tomograph, measuring light generated by a measuring light source and reflected by the workpiece interferes with measuring light reflected in a reference arm with two or more reference stages. The stages include a first reference stage configured such that the measuring light reflected therein travels a first optical path length, and a second reference stage configured such that the measuring light reflected therein travels a second optical path length different from the first length, wherein the measuring light reflected by the workpiece interferes with reflected measuring light of the first reference stage and reflected measuring light of the second reference stage.
    Type: Grant
    Filed: July 29, 2019
    Date of Patent: January 10, 2023
    Assignee: PRECITEC GMBH & CO. KG
    Inventor: Matthias Strebel
  • Patent number: 11549847
    Abstract: One embodiment of a method for restricting laser beams entering an aperture to a chosen dyad and measuring their separation. The method works with frequency-modulated coherent light, and one embodiment uses a moveable, variable-aperture apparatus (FIG. 1) in conjunction with a converging lens (6) and a detector (7). Key elements of other embodiments are described.
    Type: Grant
    Filed: August 19, 2020
    Date of Patent: January 10, 2023
    Inventor: Richard Fauconier
  • Patent number: 11543338
    Abstract: Holographic Video Microscopy analysis of non-spherical particles is disclosed herein. Properties of the particles are determined by application of light scattering theory to holography data. Effective sphere theory is applied to provide information regarding the reflective index of a sphere that includes a target particle. Known particles may be co-dispersed with unknown particles in a medium and the holographic video microscopy is used to determine properties, such as porosity, of the unknown particles.
    Type: Grant
    Filed: October 23, 2020
    Date of Patent: January 3, 2023
    Assignees: New York University, Spheryx, Inc.
    Inventors: David G. Grier, Mary Ann Odete, Fook Chiong Cheong, Annemarie Winters, Jesse J. Elliott, Laura A. Philips
  • Patent number: 11536648
    Abstract: The optical inspection device is used for inspecting a planar object surface for the presence of particles and/or defects. A light source supplies light to the planar object surface of the object at a grazing angle. An image sensor receives light due to scattering from particles and defects on the object surface. The optical axis of the objective is at non-zero angles with the normal to the planar object surface and a direction or directions of specular reflection of the light from the light source by the planar object surface. A detection surface of the image detection device and the optical axis of the objective is in a Scheimpflug configuration. The light source and image sensor are located outside a space extending perpendicularly from the planar object surface, on opposite sides of that space. The image sensor comprises an objective and an image detection device. The device may further comprise a microscope or spectrometer to access the object surface through said space.
    Type: Grant
    Filed: July 15, 2019
    Date of Patent: December 27, 2022
    Assignee: Nederlandse Organisatie voortoegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Bertram Adriaan Van Der Zwan, Sjoerd Oostrom, Bart Gerardus Speet
  • Patent number: 11525786
    Abstract: An apparatus and method to determine a property of a substrate by measuring, in the pupil plane of a high numerical aperture lens, an angle-resolved spectrum as a result of radiation being reflected off the substrate. The property may be angle and wavelength dependent and may include the intensity of TM- and TE-polarized radiation and their relative phase difference.
    Type: Grant
    Filed: March 4, 2021
    Date of Patent: December 13, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers, Paul Frank Luehrmann, Henricus Petrus Maria Pellemans, Maurits Van Der Schaar, Cédric Désiré Grouwstra, Markus Gerardus Martinus Maria Van Kraaij
  • Patent number: 11525670
    Abstract: Shape-sensing systems and methods for medical devices. The shape-sensing system can include a medical device, an optical interrogator, a console, and a display screen. The medical device can include an integrated optical-fiber stylet having fiber Bragg grating (“FBG”) sensors along at least a distal-end portion thereof. The optical interrogator can be configured to send input optical signals into the optical-fiber stylet and receive FBG sensor-reflected optical signals therefrom. The console can be configured to convert the reflected optical signals with the aid of filtering algorithms of some optical signal-converter algorithms into plottable data for displaying plots thereof on the display screen. The plots can include a plot of curvature vs. time for each FBG sensor of a selection of the FBG sensors for identifying a distinctive change in strain of the optical-fiber stylet as a tip of the medical device is advanced into a superior vena cava of a patient.
    Type: Grant
    Filed: November 25, 2020
    Date of Patent: December 13, 2022
    Assignee: Bard Access Systems, Inc.
    Inventors: Shayne Messerly, Anthony K. Misener, Chase Thompson
  • Patent number: 11525666
    Abstract: In an aspect, a method for imaging a target comprises steps of: performing optical coherence tomography (OCT) scanning on the target with one or more beams of source light, the one or more beams of source light comprising a plurality of wavelengths; wherein performing OCT scanning comprises: providing the source light to a reference optical path and to a sample optical path, wherein providing the source light to a sample optical path comprises illuminating the target with the source light; and recording interference data corresponding to an interaction of a light from the reference optical path and a light from the sample optical path; processing the interference data; and identifying blood or one or more blood-features in the target based on an optical attenuation of light in or associated with the sample optical path by the blood or the one or more blood-features.
    Type: Grant
    Filed: May 17, 2019
    Date of Patent: December 13, 2022
    Assignee: Northwestern University
    Inventors: James Arthur Winkelmann, Jr., Vadim Backman
  • Patent number: 11525664
    Abstract: A calibration method includes the steps of placing a structure to be measured at a first position, measuring a first distance from a laser interferometer to a reflector, and measuring first coordinates of a body to be measured, moving the structure to be measured to a second position, measuring a second distance from the laser interferometer to the reflector and measuring second coordinates of the structure to be measured with the coordinate measuring apparats, while the structure to be measured is at the second position, determining a scale error of the reference instrument, mounting the reference instrument, measuring the interval between objects to be measured, and calculating a calibration value of the interval between the objects to be measured.
    Type: Grant
    Filed: July 20, 2021
    Date of Patent: December 13, 2022
    Assignee: MITUTOYO CORPORATION
    Inventor: Masayuki Nara
  • Patent number: 11519713
    Abstract: An exemplary system for generating an image(s) of a sample(s) can include, for example, an imaging arrangement that can include a superluminescent diode (SLD) configured to generate a radiation(s) to be provided to the sample(s), and a spectrometer configured to (i) sample an A-line sampling rate of at least about 200 kHz, (ii) receive a resultant radiation from the sample(s) based on the sampling rate, and (iii) generate information based on the resultant radiation, and a computer hardware arrangement configured to generate the image(s) of the sample(s) based on the information received from the spectrometer. The imaging arrangement can be an interferometric imaging arrangement, which can be an optical coherence tomography imaging (OCT) arrangement. The computer hardware arrangement can be further configured to facilitate a plurality of b-scan acquisitions of the sample(s) and facilitate the b-scan acquisitions in order to generate the image(s).
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: December 6, 2022
    Assignee: The Trustees of Columbia University in the City of New York
    Inventors: Christine Hendon, Richard Ha, Diana Mojahed, Hanina Hibshoosh, James McLean
  • Patent number: 11521882
    Abstract: An optical system may include a light source to provide a beam of light. The optical system may include a reflector to receive and redirect the beam of light. The optical system may include a light gate having an opening to permit the beam of light, from the reflector, to travel through the opening. The optical system may include a light sensor to receive a portion of the beam of light after the beam of light travels through the opening, and convert the portion of the beam of light to a signal. The optical system may include a processing device to determine whether a notch of a wafer is in an allowable position based on the signal.
    Type: Grant
    Filed: August 20, 2020
    Date of Patent: December 6, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kai-An Chuang, Kuang-Wei Hsueh, Shih-Huan Chen, Yung-Shu Kao
  • Patent number: 11519720
    Abstract: Disclosed herein is a method for depth-profiling of samples including a target region including a lateral structural feature. The method includes obtaining measured signals of the sample and analyzing thereof to obtain a depth-dependence of at least one parameter characterizing the lateral structural feature. The measured signals are obtained by repeatedly: projecting a pump pulse on the sample, thereby producing an acoustic pulse propagating within the target region; Brillouin-scattering a probe pulse off the acoustic pulse within the target region; and detecting a scattered component of the probe pulse to obtain a measured signal. In each repetition the respective probe pulse is scattered off the acoustic pulse at a respective depth within the target region, thereby probing the target region at a plurality of depths. A wavelength of the pump pulse is at least about two times greater than a lateral extent of the lateral structural feature.
    Type: Grant
    Filed: October 12, 2020
    Date of Patent: December 6, 2022
    Assignee: Applied Materials Israel Ltd.
    Inventors: Ori Golani, Ido Almog
  • Patent number: 11512948
    Abstract: A metrology system may include an imaging sub-system to image a metrology target buried in a sample, where the sample is formed from bonded first and second substrates with a metrology target at the interface. The metrology system may further include an illumination sub-system with an illumination field stop and an illumination pupil, where the illumination field stop includes an aperture to provide that a projected size of the field-stop aperture on a measurement plane corresponding to the metrology target matches a field of view of the detector at the measurement plane, and where the illumination pupil includes a central obscuration to provide oblique illumination of the metrology target with angles greater than a cutoff angle selected to prevent illumination from the illumination source from reflecting off of the bottom surface of the sample and through the field of view of the detector at the measurement plane.
    Type: Grant
    Filed: October 13, 2020
    Date of Patent: November 29, 2022
    Assignee: KLA Corporation
    Inventors: Andrew V. Hill, Gilad Laredo, Amnon Manassen, Avner Safrani
  • Patent number: 11506496
    Abstract: The present disclosure relates to system-level integration of lasers, electronics, integrated photonics-based optical components and a rotation sensing element, which can be a fiber coil or a sensing coil/micro-resonator ring on a sensing chip. Novel waveguide design on the integrated photonics chip, acting as a front-end chip, ensures precise detection of phase change in the fiber coil or the sensing chip, where the sending chip is coupled to the front end chip. Electrical and/or thermal phase modulators are integrated with the integrated photonics chip. Additionally, implant regions are introduced around the waveguides and other optical components to block unwanted/stray light into the waveguides and optical signal leaking out of the waveguide.
    Type: Grant
    Filed: December 13, 2021
    Date of Patent: November 22, 2022
    Assignee: Anello Photonics, Inc.
    Inventors: Mario Paniccia, Qing Tan
  • Patent number: 11499914
    Abstract: A multi-channel gas sensor comprising a gas cell (101, 601), a light source (110, 210, 310, 410, 510, 610), a first interference filter (150, 250, 350, 450, 550, 650), a first detection unit (120, 220, 320, 420, 520, 620) and a second detection unit (130, 230, 330, 430, 530, 630). The light source (110, 210, 310, 410, 510, 610) is arranged to emit light radiation into the gas cell (101, 5 601). The first detection unit (120, 220, 320, 420, 520, 620) is arranged to detect light from the light source, that has propagated through at least a part of the gas cell (101, 601), and that has been transmitted through the first interference filter (150, 250, 350, 450, 550, 650).
    Type: Grant
    Filed: June 9, 2020
    Date of Patent: November 15, 2022
    Assignee: Senseair AB
    Inventors: Hans Martin, Henrik Rödjegård
  • Patent number: 11499814
    Abstract: An optical coherence tomography (OCT) system (63) is used to inspect bonding points (66A, 66B, 66C) sandwiched between two materials (layers 62, 64 of e.g. displays). The OCT differentiates between a bonding point, e.g. a weld, and air gaps between the two materials. The bonding points are identified as breaks in the air gap between the materials. By extracting various physical characteristics of the bonding points and the gap between the two materials, the present system determines whether the bonding is faulty.
    Type: Grant
    Filed: June 12, 2019
    Date of Patent: November 15, 2022
    Assignees: CARL ZEISS AG, CARL ZEISS INDUSTRIAL METROLOGY LLC, CARL ZEISS MEDITEC, INC.
    Inventors: Michael Totzeck, Marcin B. Bauza, Jochen Straub, Muzammil Arain, Matthew J. Everett
  • Patent number: 11493433
    Abstract: The present invention relates to a normal incidence ellipsometer and a method for measuring the optical properties of a sample by using same. The purpose of the present invention is to provide: a normal incidence ellipsometer in which a wavelength-dependent compensator is replaced with a wavelength-independent linear polarizer such that equipment calibration procedures are simplified while a measurement wavelength range expansion can be easily implemented; and a method for measuring the optical properties of a sample by using same.
    Type: Grant
    Filed: July 3, 2019
    Date of Patent: November 8, 2022
    Assignee: Korea Research Institute of Standards and Science
    Inventors: Yong Jai Cho, Won Chegal, Hyun Mo Cho
  • Patent number: 11486818
    Abstract: A method for coherent multidimensional spectroscopy may comprise illuminating a location in a sample with a set of m coherent light pulses, each coherent light pulse having an initial frequency ?m and an initial wave vector {right arrow over (k)}m, wherein m?2, to generate a coherent output signal having an initial frequency ?output=?±?m and an initial wavevector wave vector {right arrow over (k)}output=?±{right arrow over (k)}m; scanning a first coherent light pulse of the set of m coherent light pulses across a set of i frequency values, wherein i?2, the set of i frequency values including the first coherent light pulse having initial frequency ?1; scanning, simultaneously, a second coherent light pulse of the set of m coherent light pulses across a set of i correlated frequency values, the set of i correlated frequency values including the second coherent light pulse having initial frequency ?2, wherein each correlated frequency value is associated with a corresponding frequency value of the set of i frequ
    Type: Grant
    Filed: May 25, 2021
    Date of Patent: November 1, 2022
    Assignee: Wisconsin Alumni Research Foundation
    Inventor: John Curtis Wright