Abstract: A system and method for analyzing a three-dimensional structure of a sample includes generating a first x-ray beam having a first energy bandwidth less than 20 eV at full-width-at-half maximum and a first mean x-ray energy that is in a range of 1 eV to 1 keV higher than an absorption edge energy of a first atomic element of interest, and that is collimated to have a collimation angular range less than 7 mrad in at least one direction perpendicular to a propagation direction of the first x-ray beam; irradiating the sample with the first x-ray beam at a plurality of incidence angles relative to a substantially flat surface of the sample, the incidence angles of the plurality of incidence angles in a range of 3 mrad to 400 mrad; and simultaneously detecting a reflected portion of the first x-ray beam from the sample and detecting x-ray fluorescence x-rays and/or photoelectrons from the sample.

Abstract: A method and apparatus are provided for nonlinear energy correction of a gamma-ray detector using a calibration spectrum acquired from the background radiation of lutetium isotope 176 (Lu-176) present in scintillators in the gamma-ray detector. Further, by periodically acquiring Lu-176 spectra using the background radiation from the scintillators, the nonlinear energy correction can be monitored to detect when changes in the gamma-ray detector cause the detector to go out of calibration, and then use a newly acquired Lu-176 spectrum to update the calibration of the nonlinear energy correction as needed. The detector calibration is performed by comparing a reference histogram to a calibration histogram generated using the nonlinear energy correction, and adjusting the parameters of the nonlinear energy correction until the two histograms match.

Abstract: A hybrid imaging system is disclosed including an arcuate arm defining a first and a second end the arcuate arm including a first detector assembly for 2D x-ray imaging of a patient and a second detector assembly for CT imaging of the patient, wherein the imaging system includes an internal drive mechanism for rotating the arcuate arm (e.g. translating the arcuate arm along an arcuate path) around the patient.

Abstract: There is provided an acquiring method of a projection image of a sample whose shape is uneven with respect to a rotation center, the method comprising the steps of setting the sample S0 at a position of the rotation center C0 provided between an X-ray source 116a and a detector 117, and acquiring the projection image of the sample S0 at each different rotation angle for each different magnification ratio over a rotation angle of 180° or more by rotating the sample S0 around the rotation center C0, and by relatively changing a separation distance between the X-ray source and the rotation center, or a separation distance between the rotation center and the detector in an optical axis direction according to the shape of the sample S0 and the rotation angle of the sample S0.

Abstract: A system with a gantry of a computed tomography device and a docking station and method are for cooling a component of the gantry. In an embodiment, the system includes a gantry of a computed tomography device, the gantry including a chassis and a heat store; and a docking station. The gantry is movable via the chassis relative to the docking station. The gantry and the docking station are detachably connectable to one another such that a detachable coolant-exchange connection for exchanging a coolant and/or a detachable heat-conduction connection for heat conduction is formed between the heat store and the docking station.

Abstract: A sample holder (10) filled with a sample is held in a base member (20), and an airtight member (30) is mounted on the base member (20) so as to cover the surroundings of the sample holder (10), thereby forming a sample holding structure in a closed space. The airtight member (30) includes a fitting portion (35) which is configured to be fitted and mounted in a mounting portion (21).

Abstract: A method of analysing granular material in a slurry, the method comprising: compacting the granular material in the slurry to form one or more pucks; irradiating said pucks with X-Ray radiation and detecting X-ray energy transmitted through said one or more irradiated pucks; irradiating a reference material with X-Ray radiation, said reference material having known material characteristics and detecting X-ray energy transmitted through said reference material; comparing X-ray energy transmission through said one or more pucks with the reference material to compute, using a processing unit, one or more particle characteristics of the granular material in the one or more pucks.

Abstract: Methods and systems for improving a measurement recipe describing a sequence of measurements employed to characterize semiconductor structures are described herein. A measurement recipe is repeatedly updated before a queue of measurements defined by the previous measurement recipe is fully executed. In some examples, an improved measurement recipe identifies a minimum set of measurement options that increases wafer throughput while meeting measurement uncertainty requirements. In some examples, measurement recipe optimization is controlled to trade off measurement robustness and measurement time. This enables flexibility in the case of outliers and process excursions. In some examples, measurement recipe optimization is controlled to minimize any combination of measurement uncertainty, measurement time, move time, and target dose. In some examples, a measurement recipe is updated while measurement data is being collected.

Abstract: A sequential X-ray fluorescence spectrometer according to the present invention includes a total analysis time display unit configured to measure, for each kind of analytical sample, a standard sample which contains a component at a known content as a standard value to determine a measured intensity of each measurement line corresponding to the component. The total analysis time display unit is further configured to calculate, for each component, a counting time which gives a specified analytical precision by using the standard value and the measured intensity and to calculate a total counting time as a sum of the counting times of respective components. The total analysis time display unit is configured to calculate a total analysis time as a sum of the total counting time and a total non-counting time and to output the calculated total analysis time and the calculated counting times of the respective components.

Abstract: A thin film analyzing device includes a processing and analyzing chamber for performing processing and analyzing of a subject having a thin film on a substrate. The processing and analyzing chamber includes a sample holder arranged to hold the subject, an X-ray irradiation source arranged to irradiate the subject with X-rays, a fluorescent X-ray detector configured to detect fluorescent X-rays which are emitted from the subject, a diffracted/reflected X-ray detector configured to detect reflected X-rays and diffracted X-rays which are emitted from the subject, and a substrate remover arranged to remove the substrate.

Abstract: The present disclosure relates to a method and system for adjusting a focal point position of an X-ray tube. The method may include: obtaining a first thermal capacity and a first position of a focal point of an X-ray tube; obtaining a second thermal capacity of the X-ray tube; determining a second position of the focal point the X-ray tube based on the second thermal capacity; determining a target grid voltage difference of a focusing cup of the X-ray tube based on the first position and the second position of the focal point; and adjusting the X-ray tube based on the target grid voltage difference.

Abstract: A C-arm X-ray apparatus includes an x-ray emitter (5) and an X-ray detector (4) which are maintained on a C-arm (2) mounted on a reference plane. The x-ray emitter (5) has nanorods as electron emitters and has an elongated structure which is at least partially aligned along a surface normal of the reference plane.

Abstract: Embodiments of the present disclosure disclose a combined scanning X-ray generator, a composite inspection apparatus and an inspection method. The combined scanning X-ray generator includes: a housing; an anode arranged in the housing, the anode including a first end of the anode and a second end of the anode opposite the first end of the anode; a pencil beam radiation source arranged at the first end of the anode and configured to emit a pencil X-ray beam; and a fan beam radiation source arranged at the second end of the anode and configured to emit a fan X-ray beam; wherein the pencil beam radiation source and the fan beam radiation source are operated independently.

Abstract: An X-ray analyzer includes an X-ray source, a straight tube type multi-capillary, a flat plate spectroscopic crystal, a parallel/point focus type multi-capillary X-ray lens, and a Fresnel zone plate. A qualitative analysis is performed over an area on the sample, the flat plate spectroscopic crystal and the Fresnel zone plate are removed from the X-ray optical path, and X-rays are collected by the multi-capillary lens and the sample is irradiated. When analyzing the chemical morphology of an element, the multi-capillary lens retracts from the optical path, the source rotates, and the flat plate spectroscopic crystal and the Fresnel zone plate are inserted on the optical path. A narrow sample area is irradiated by the Fresnel zone plate with X-rays having energy extracted from the flat plate spectroscopic crystal. This makes it possible to carry out accurate qualitative analysis on the sample and perform detailed analysis of more minute parts.

Abstract: An X-ray analyzer includes: a specimen stage; a spectrometer having a spectroscopic element and an X-ray detector; a temperature measuring unit including at least one of a first temperature sensor for measuring a temperature of the specimen stage and a second temperature sensor for measuring a temperature of the spectrometer; a storage unit which stores calibration data of the spectrometer, and a previous measurement result by the temperature measuring unit at the time of execution of the calibration of the spectrometer; and a notifying unit which acquires a measurement result by the temperature measuring unit, calculates a temperature variation amount of the acquired measurement result with respect to the previous measurement result stored in the storage unit, and notifies that calibration is needed, based on the temperature variation amount.

Abstract: Methods and systems for measuring structural and material characteristics of semiconductor structures based on wavelength resolved, soft x-ray reflectometry (WR-SXR) at multiple diffraction orders are presented. WR-SXR measurements are simultaneous, high throughput measurements over multiple diffraction orders with broad spectral width. The availability of wavelength resolved signal information at each of the multiple diffraction orders improves measurement accuracy and throughput. Each non-zero diffraction order includes multiple measurement points, each different measurement point associated with a different wavelength. In some embodiments, WR-SXR measurements are performed with x-ray radiation energy in a range of 10-5,000 electron volts at grazing angles of incidence in a range of 1-45 degrees. In some embodiments, the illumination beam is controlled to have relatively high divergence in one direction and relatively low divergence in a second direction, orthogonal to the first direction.

Abstract: A shielded X-ray radiation apparatus is provided comprising an X-ray source, an X-ray attenuation shield including an elongate cavity to house the X-ray source and incorporating a region to accommodate a sample, a neutron attenuation shield, and a gamma attenuation shield. The neutron attenuation shield is situated adjacent to and substantially surrounds the X-ray attenuation shield and the gamma attenuation shield is adjacent to and substantially surrounds the neutron attenuation shield. In some embodiments a removable sample insertion means is provided to insert samples into the elongate cavity and which is composed of adjacent blocks of material, each respective block having a thickness and a composition which substantially matches the thickness and a composition of one of the X-ray attenuation, neutron attenuation and gamma-ray attenuation shields.

Abstract: A method of quantifying an antimicrobial coatings using a handheld XRF analyzer is disclosed. The method provides an estimate of the expected level of antimicrobial efficacy for a thin film comprising silicon and/or titanium by obtaining a 14Si or 22Ti peak intensity using XRF spectroscopy and converting the obtained 14Si or 22Ti peak intensity to the expected level of efficacy using a calibration curve. A properly calibrated handheld XRF analyzer allows a user to assess the viability of antimicrobial coatings in the field, such as in a hospital where various fomites may be coated with silane and/or titanium compositions.

Abstract: A digital X-ray detector is provided. The digital X-ray detector includes control circuitry. The control circuitry is configured to obtain an electromagnetic interference (EMI) frequency of an EMI signal, to receive a signal to start a scan, to ensure EMI noise is in a same phase during acquisition of offset images and read images to enable a subtraction of the EMI noise, and to start the scan.

Abstract: A radiation image capturing system includes a capturing room and a console. The capturing room includes a bucky apparatus, a radiation irradiating apparatus and a detecting unit. A plurality of portable radiation image capturing apparatuses can be loaded on the bucky apparatus. The radiation irradiating apparatus is able to simultaneously irradiate radiation to the plurality of portable radiation image capturing apparatuses. The console is associated with the capturing room and obtains capturing order information. The console allows the portable radiation image capturing apparatuses to advance to a capturing possible state when the console judges that capturing in the capturing order information is long length capturing. The console allows only one of the portable radiation image capturing apparatuses to advance to the capturing possible state when the console judges that the capturing is not the long length capturing.