Patents Examined by Tong-Ho Kim
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Patent number: 12230635Abstract: Gate-all-around integrated circuit structures having depopulated channel structures, and methods of fabricating gate-all-around integrated circuit structures having depopulated channel structures using a selective bottom-up approach, are described. For example, an integrated circuit structure includes a vertical arrangement of nanowires above a substrate. The vertical arrangement of nanowires has one or more active nanowires above one or more oxide nanowires. A first gate stack is over and around the one or more active nanowires. A second gate stack is over and around the one or more oxide nanowires.Type: GrantFiled: November 17, 2023Date of Patent: February 18, 2025Assignee: Intel CorporationInventors: Nicole Thomas, Ehren Mannebach, Cheng-Ying Huang, Marko Radosavljevic
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Patent number: 12224278Abstract: An integrated circuit includes first-type transistors aligned within a first-type active zone, second-type transistors aligned within a second-type active zone, a first power rail and a second power rail extending in a first direction. A first distance between the long edge of the first power rail and the first alignment boundary of the first-type active zone is different from a second distance between the long edge of the second power rail and the first alignment boundary of the second-type active zone. Each of the first distance and the second distance is along a second direction which is perpendicular to the first direction.Type: GrantFiled: November 29, 2023Date of Patent: February 11, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Guo-Huei Wu, Chih-Liang Chen, Li-Chun Tien
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Patent number: 12225768Abstract: A display panel and a display apparatus are provided. The display panel includes a base substrate including a pixel circuit and a light-emitting element. The pixel circuit includes a data writing sub-circuit, a storage sub-circuit, a driver sub-circuit and a first sub-circuit. The data writing sub-circuit is configured to transmit a data signal to a first terminal of the storage sub-circuit in response to a control signal. A control electrode of the driver sub-circuit is coupled to the storage sub-circuit, a first electrode of the driver sub-circuit is configured to receive a first power supply voltage, and a second electrode is coupled to a first electrode of the light-emitting element. The first sub-circuit includes a first transistor, where a gate and a first electrode of the first transistor are both coupled to the same electrode of the driver sub-circuit.Type: GrantFiled: February 20, 2021Date of Patent: February 11, 2025Assignee: BOE Technology Group., Co., Ltd.Inventors: Zhijian Zhu, Longfei Fan, Pengcheng Lu, Xiaochuan Chen, Qian Wu
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Patent number: 12218122Abstract: A memory circuit includes first and second read-only memory (ROM) cells aligned along a first active structure including a first shared source portion of the first and second ROM cells, third and fourth ROM cells aligned along a second active structure including a second shared source portion of the third and fourth ROM cells, a first bit line overlying the first and second ROM cells, a second bit line overlying the third and fourth ROM cells, and a reference voltage line positioned between the first and second bit lines and in a same metal layer as the first and second bit lines. A conductive structure is electrically connected to each of the first and second shared source portions and the reference voltage line and is positioned in a metal layer below the same metal layer.Type: GrantFiled: August 1, 2023Date of Patent: February 4, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Jacklyn Chang, Kuoyuan (Peter) Hsu
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Patent number: 12218013Abstract: A semiconductor device with different gate structure configurations and a method of fabricating the semiconductor device are disclosed. The method includes depositing a high-K dielectric layer surrounding nanostructured channel regions, performing a first doping with a rare-earth metal (REM)-based dopant on first and second portions of the high-K dielectric layer, and performing a second doping with the REM-based dopants on the first portions of the high-K dielectric layer and third portions of the high-K dielectric layer. The first doping dopes the first and second portions of the high-K dielectric layer with a first REM-based dopant concentration. The second doping dopes the first and third portions of the high-K dielectric layer with a second REM-based dopant concentration different from the first REM-based dopant concentration.Type: GrantFiled: November 9, 2023Date of Patent: February 4, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chun-Fai Cheng, Chang-Miao Liu, Kuan-Chung Chen
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Patent number: 12219788Abstract: A light-emitting element includes: a first electrode serving as an anode; a second electrode serving as a cathode; a light-emitting layer, of a first wavelength range, provided between the first electrode and the second electrode; an oxide layer provided between the light-emitting layer of the first wavelength range and the first electrode of the first electrode and the second electrode; and an oxide layer provided between the oxide layer and the second electrode, and having contact with the oxide layer. Either the oxide layer or the oxide layer whichever farther away from the light-emitting layer of the first wavelength range is made of a semiconductor. A density of oxygen atoms in the oxide layer is lower than a density of oxygen atoms in the oxide layer.Type: GrantFiled: August 13, 2019Date of Patent: February 4, 2025Assignee: SHARP KABUSHIKI KAISHAInventor: Kenji Kimoto
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Patent number: 12215416Abstract: Methods for depositing a molybdenum nitride film on a surface of a substrate are disclosed. The methods may include: providing a substrate into a reaction chamber; and depositing a molybdenum nitride film directly on the surface of the substrate by performing one or more unit deposition cycles of cyclical deposition process, wherein a unit deposition cycle may include, contacting the substrate with a first vapor phase reactant comprising a molybdenum halide precursor, and contacting the substrate with a second vapor phase reactant comprising a nitrogen precursor. Semiconductor device structures including a molybdenum nitride film are also disclosed.Type: GrantFiled: November 8, 2023Date of Patent: February 4, 2025Assignee: ASM IP Holding B.V.Inventors: Eric Christopher Stevens, Bhushan Zope, Shankar Swaminathan, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni
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Patent number: 12211944Abstract: Semiconductor device and the manufacturing method thereof are disclosed. An exemplary semiconductor device comprises a first semiconductor stack and a second semiconductor stack over a substrate, wherein each of the first and second semiconductor stacks includes semiconductor layers stacked up and separated from each other; a dummy spacer between the first and second semiconductor stacks, wherein the dummy spacer contacts a first sidewall of each semiconductor layer of the first and second semiconductor stacks; and a gate structure wrapping a second sidewall, a top surface, and a bottom surface of each semiconductor layer of the first and second semiconductor stacks.Type: GrantFiled: July 26, 2023Date of Patent: January 28, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Chuan Yang, Kuo-Hsiu Hsu
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Patent number: 12211919Abstract: A semiconductor device includes a plurality of semiconductor layers vertically separated from one another. Each of the plurality of semiconductor layers extends along a first lateral direction. The semiconductor device includes a gate structure that extends along a second lateral direction and comprises at least a lower portion that wraps around each of the plurality of semiconductor layers. The lower portion of the gate structure comprises a plurality of first gate sections that are laterally aligned with the plurality of semiconductor layers, respectively, and wherein each of the plurality of first gate sections has ends that each extend along the second lateral direction and present a first curvature-based profile.Type: GrantFiled: March 7, 2024Date of Patent: January 28, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shih-Yao Lin, Chih-Han Lin, Hsiao Wen Lee
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Patent number: 12213347Abstract: A display panel including: a display region including pixels and a non-display region, each pixel including an emission element including a first electrode, an emission layer, and a second electrode; a pixel definition layer including a first opening; a first encapsulation layer on the pixel definition layer and overlapping the emission element; a partition wall on the first encapsulation layer and including a second opening and a dummy opening; a light control pattern in the second opening; a second encapsulation layer on the partition wall and overlapping the light control pattern; and a color filter on the second encapsulation layer and overlapping the light control pattern, the second encapsulation layer includes: a first encapsulation inorganic layer on the partition wall; an encapsulation organic layer on the first encapsulation inorganic layer and including an edge overlapping the dummy opening; and a second encapsulation inorganic layer on the encapsulation organic layer.Type: GrantFiled: January 13, 2022Date of Patent: January 28, 2025Assignee: Samsung Display Co., Ltd.Inventors: Yujin Kim, Dasom Kang, Shin Tack Kang
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Patent number: 12211849Abstract: A super-steep switching device is provided. The super-steep switching device may include a substrate, a semiconductor channel on the substrate, a source electrode and a drain electrode, which are disposed on the semiconductor channel and spaced apart from each other, a gate electrode overlapping a portion of the semiconductor channel and not overlapping a remaining portion of the semiconductor channel, and an insulating layer disposed between the gate electrode and the semiconductor channel and covering an entire surface of the semiconductor channel.Type: GrantFiled: March 7, 2024Date of Patent: January 28, 2025Assignee: Research & Business Foundation Sungkyunkwan UniversityInventors: Hae Ju Choi, Tae Ho Kang, Chan Woo Kang, Hyeon Je Son, Jin Hong Park, Sung Joo Lee, Sung Pyo Baek
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Patent number: 12206005Abstract: A structure has stacks of semiconductor layers over a substrate and adjacent a dielectric feature. A gate dielectric is formed wrapping around each layer and the dielectric feature. A first layer of first gate electrode material is deposited over the gate dielectric and the dielectric feature. The first layer on the dielectric feature is recessed to a first height below a top surface of the dielectric feature. A second layer of the first gate electrode material is deposited over the first layer. The first gate electrode material in a first region of the substrate is removed to expose a portion of the gate dielectric in the first region, while the first gate electrode material in a second region of the substrate is preserved. A second gate electrode material is deposited over the exposed portion of the gate dielectric and over a remaining portion of the first gate electrode material.Type: GrantFiled: July 28, 2023Date of Patent: January 21, 2025Assignee: TAIWAN SEMICONDICTOR MANUFACTURING COMPANY, LTD.Inventors: Chung-Wei Hsu, Kuo-Cheng Chiang, Mao-Lin Huang, Lung-Kun Chu, Jia-Ni Yu, Kuan-Lun Cheng, Chih-Hao Wang
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Patent number: 12199099Abstract: A semiconductor device includes a first transistor in a first region of a substrate and a second transistor in a second region of the substrate. The first transistor includes multiple first semiconductor patterns; a first gate electrode; a first gate dielectric layer; a first source/drain region; and an inner-insulating spacer. The second transistor includes multiple second semiconductor patterns; a second gate electrode; a second gate dielectric layer; and a second source/drain region. The second gate dielectric layer extends between the second gate electrode and the second source/drain region and is in contact with the second source/drain region. The first source/drain region is not in contact with the first gate dielectric layer.Type: GrantFiled: April 3, 2023Date of Patent: January 14, 2025Assignee: Samsung Electronics Co., Ltd.Inventors: Jung-Gil Yang, Geum-Jong Bae, Dong-Il Bae, Seung-Min Song, Woo-Seok Park
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Patent number: 12199151Abstract: A method of fabricating a semiconductor structure includes selective use of a cladding layer during the fabrication process to provide critical dimension uniformity. The cladding layer can be formed before forming a recess in an active channel structure or can be formed after filling a recess in an active channel structure with dielectric material. These techniques can be used in semiconductor structures such as gate-all-around (GAA) transistor structures implemented in an integrated circuit.Type: GrantFiled: January 30, 2024Date of Patent: January 14, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuei-Yu Kao, Shih-Yao Lin, Chen-Ping Chen, Chih-Han Lin, Ming-Ching Chang, Chao-Cheng Chen
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Patent number: 12191251Abstract: A method includes forming a redistribution structure on a carrier, attaching an integrated passive device on a first side of the redistribution structure, attaching an interconnect structure to the first side of the redistribution structure, the integrated passive device interposed between the redistribution structure and the interconnect structure, depositing an underfill material between the interconnect structure and the redistribution structure, and attaching a semiconductor device on a second side of the redistribution structure that is opposite the first side of the redistribution structure.Type: GrantFiled: June 14, 2023Date of Patent: January 7, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Jiun Yi Wu, Chen-Hua Yu, Chien-Hsun Chen
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Patent number: 12193297Abstract: Embodiments of the present disclosure provide a display panel and a display device. The display panel includes a base substrate, a plurality of pixel units and a plurality of gate line groups. At least one pixel unit includes a plurality of sub-pixels. At least one sub-pixel includes a sensing transistor and a driving transistor. Each gate line group includes a first gate line and a second gate line; for the first gate line and the second gate line corresponding to the sub-pixels in the same row, the positions of the sensing transistors are closer to the second gate lines, and the positions of the driving transistors are closer to the first gate line, For two sub-pixels close to each other and located in different pixel units in the same row, at least one signal line has a double-layer alignment structure, and the double-layer alignments are electrically connected with each other.Type: GrantFiled: October 23, 2023Date of Patent: January 7, 2025Assignees: Hefei BOE Joint Technology Co., Ltd., BOE Technology Group Co., Ltd.Inventors: Zhongyuan Wu, Yongqian Li, Can Yuan, Zhidong Yuan, Meng Li, Dacheng Zhang, Lang Liu
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Patent number: 12183678Abstract: Nanostructure field-effect transistors (nano-FETs) including isolation layers formed between epitaxial source/drain regions and semiconductor substrates and methods of forming the same are disclosed. In an embodiment, a semiconductor device includes a power rail, a dielectric layer over the power rail, a first channel region over the dielectric layer, a second channel region over the first channel region, a gate stack over the first channel region and the second channel region, where the gate stack is further disposed between the first channel region and the second channel region and a first source/drain region adjacent the gate stack and electrically connected to the power rail.Type: GrantFiled: November 1, 2023Date of Patent: December 31, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuo-Cheng Chiang, Shi Ning Ju, Chih-Chao Chou, Wen-Ting Lan, Chih-Hao Wang
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Patent number: 12183790Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a source/drain epitaxial feature having a first semiconductor material, a first semiconductor layer having a first doped region and a first undoped region adjacent the first doped region, and the first doped region is in contact with the first semiconductor material. The structure further includes a second semiconductor layer disposed over the first semiconductor layer, and the second semiconductor layer includes a second doped region and a second undoped region adjacent the second doped region. The second doped region is in contact with the first semiconductor material. The structure further includes a gate electrode layer surrounding at least the first undoped region and the second undoped region.Type: GrantFiled: August 2, 2023Date of Patent: December 31, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventor: Shahaji B. More
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Patent number: 12170335Abstract: The present disclosure describes a semiconductor device and methods for forming the same. The semiconductor device includes nanostructures on a substrate and a source/drain region in contact with the nanostructures. The source/drain region includes epitaxial end caps, where each epitaxial end cap is formed at an end portion of a nanostructure of the nanostructures. The source/drain region also includes an epitaxial body in contact with the epitaxial end caps and an epitaxial top cap formed on the epitaxial body. The semiconductor device further includes gate structure formed on the nanostructures.Type: GrantFiled: February 27, 2023Date of Patent: December 17, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Shahaji B. More
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Patent number: 12170331Abstract: A titanium precursor is used to selectively form a titanium silicide (TiSix) layer in a semiconductor device. A plasma-based deposition operation is performed in which the titanium precursor is provided into an opening, and a reactant gas and a plasma are used to cause silicon to diffuse to a top surface of a transistor structure. The diffusion of silicon results in the formation of a silicon-rich surface of the transistor structure, which increases the selectivity of the titanium silicide formation relative to other materials of the semiconductor device. The titanium precursor reacts with the silicon-rich surface to form the titanium silicide layer. The selective titanium silicide layer formation results in the formation of a titanium silicon nitride (TiSixNy) on the sidewalls in the opening, which enables a conductive structure such as a metal source/drain contact to be formed in the opening without the addition of another barrier layer.Type: GrantFiled: February 16, 2022Date of Patent: December 17, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Cheng-Wei Chang, Chia-Hung Chu, Hsu-Kai Chang, Sung-Li Wang, Kuan-Kan Hu, Shuen-Shin Liang, Kao-Feng Lin, Hung Pin Lu, Yi-Ying Liu, Chuan-Hui Shen