Patents Examined by Tong-Ho Kim
  • Patent number: 12096629
    Abstract: Various embodiments of the present application are directed to a method for forming an integrated circuit (IC) comprising forming a multilayer film to form a plurality of memory cell structures disposed over a substrate and a plurality of memory test structures next to the memory cell structures. A memory test structure comprises a dummy control gate separated from the substrate by a dummy floating gate. The method further comprises forming a conductive floating gate test contact via along sidewalls of the dummy control gate and the dummy floating gate.
    Type: Grant
    Filed: June 29, 2023
    Date of Patent: September 17, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hung-Ling Shih, Yong-Shiuan Tsair
  • Patent number: 12087815
    Abstract: A semiconductor device includes a substrate; a 1st transistor formed above the substrate, and having a 1st transistor stack including a plurality of 1st channel structures, a 1st gate structure surrounding the 1st channel structures, and 1st and 2nd source/drain regions at both ends of the 1st transistor stack in a 1st channel length direction; and a 2nd transistor formed above the 1st transistor in a vertical direction, and having a 2nd transistor stack including a plurality of 2nd channel structures, a 2nd gate structure surrounding the 2nd channel structures, and 3rd and 4th source/drain regions at both ends of the 2nd transistor stack in a 2nd channel length direction, wherein the 3rd source/drain region does not vertically overlap the 1st source/drain region or the 2nd source/drain region, and the 4th source/drain region does not vertically overlap the 1st source/drain region or the 2nd source/drain region.
    Type: Grant
    Filed: March 21, 2023
    Date of Patent: September 10, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hwichan Jun, Inchan Hwang, Byounghak Hong
  • Patent number: 12087825
    Abstract: A metal oxide film includes indium, M, (M is Al, Ga, Y, or Sn), and zinc and includes a region where a peak having a diffraction intensity derived from a crystal structure is observed by X-ray diffraction in the direction perpendicular to the film surface. Moreover, a plurality of crystal parts is observed in a transmission electron microscope image in the direction perpendicular to the film surface. The proportion of a region other than the crystal parts is higher than or equal to 20% and lower than or equal to 60%.
    Type: Grant
    Filed: September 8, 2023
    Date of Patent: September 10, 2024
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Yasuharu Hosaka, Toshimitsu Obonai, Yukinori Shima, Masami Jintyou, Daisuke Kurosaki, Takashi Hamochi, Junichi Koezuka, Kenichi Okazaki, Shunpei Yamazaki
  • Patent number: 12085841
    Abstract: This document describes a security camera with an angled cable attachment for an increased downward viewing angle. The security camera is battery-powered and can be magnetically coupled to a mounting device and electrically connected to another device via a cable. The cable has a cable attachment that, when coupled to the security camera, is angled toward a front of the security camera. This cable angle enables an increased downward tilt angle of the security camera by reducing interference of the cable attachment with the mounting device when the security camera is tilted downward. The security camera also has exposed contacts on a printed circuit board that connect with pins on the cable attachment.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: September 10, 2024
    Assignee: Google LLC
    Inventors: Chi-Ming Lin, Mark Benjamin Kraz, Kok Yen Cheng, Aditya Shailesh Ghadiali
  • Patent number: 12082389
    Abstract: A semiconductor structure includes first and second SRAM cells disposed over a substrate. Each first SRAM cell includes at least two first p-type transistors and four first n-type transistors. Each first p-type and n-type transistors includes a channel in a single semiconductor fin. Each second SRAM cell includes at least two second p-type transistors and four second n-type transistors. Each second p-type transistors includes a channel in a single semiconductor fin. Each second n-type transistors includes a channel in multiple semiconductor fins. The source/drain regions of the first p-type transistors are doped at a first dopant concentration, the source/drain regions of the second p-type transistors are doped at a second dopant concentration, and the first dopant concentration is greater than the second dopant concentration.
    Type: Grant
    Filed: May 19, 2023
    Date of Patent: September 3, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventor: Jhon Jhy Liaw
  • Patent number: 12080602
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate and a first fin structure and a second fin structure over the substrate. A top surface of the first fin structure and a top surface of the second fin structure are at different height levels. The semiconductor device structure also includes a first semiconductor element on the first fin structure and a second semiconductor element on the second fin structure. The first semiconductor element is wider than the second semiconductor element, and the first semiconductor element is closer to the substrate than the second semiconductor element.
    Type: Grant
    Filed: June 8, 2023
    Date of Patent: September 3, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wen-Chun Keng, Yu-Kuan Lin, Chang-Ta Yang, Ping-Wei Wang
  • Patent number: 12080766
    Abstract: A semiconductor device structure according to the present disclosure includes a source feature and a drain feature, at least one channel structure extending between the source feature and the drain feature, a gate structure wrapped around each of the at least one channel structure, a semiconductor layer over the gate structure, a dielectric layer over the semiconductor layer, a doped semiconductor feature extending through the semiconductor layer and the dielectric layer to be in contact with the source feature, a metal contact plug over the doped semiconductor feature, and a buried power rail disposed over the metal contact plug.
    Type: Grant
    Filed: April 10, 2023
    Date of Patent: September 3, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Chia-Hung Chu, Tsungyu Hung, Hsu-Kai Chang, Ding-Kang Shih, Keng-Chu Lin, Pang-Yen Tsai, Sung-Li Wang, Shuen-Shin Liang
  • Patent number: 12074111
    Abstract: Embodiments of the present disclosure provide semiconductor device structures. In one embodiment, the semiconductor device structure includes a gate dielectric layer, a gate electrode layer in contact with the gate dielectric layer, a first self-aligned contact (SAC) layer disposed over the gate electrode layer, an isolation layer disposed between the gate electrode layer and the first SAC layer, and a first sidewall spacer in contact with the gate dielectric layer, the isolation layer, and the first SAC layer.
    Type: Grant
    Filed: April 26, 2023
    Date of Patent: August 27, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Sheng-Tsung Wang, Lin-Yu Huang, Cheng-Chi Chuang, Chih-Hao Wang
  • Patent number: 12074207
    Abstract: A device comprises a substrate, a semiconductor channel over the substrate, and a gate structure over and laterally surrounding the semiconductor channel. The gate structure comprises a first dielectric layer comprising a first dielectric material including dopants. A second dielectric layer is on the first dielectric layer, and comprises a second dielectric material substantially free of the dopants. A metal fill layer is over the second dielectric layer.
    Type: Grant
    Filed: June 23, 2023
    Date of Patent: August 27, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Chung-Liang Cheng
  • Patent number: 12068321
    Abstract: A semiconductor device includes a first transistor, a division pattern, and a second transistor sequentially stacked on a substrate. The first transistor includes a first gate structure, a first source/drain layer at each of opposite sides of the first gate structure, and first semiconductor patterns spaced apart from each other in a vertical direction. Each of the first semiconductor patterns extends through the first gate structure and contacts the first source/drain layer. The division pattern includes an insulating material. The second transistor includes a second gate structure, a second source/drain layer at each of opposite sides of the second gate structure, and second semiconductor patterns spaced apart from each other in the vertical direction. Each of the second semiconductor patterns extends through the second gate structure and contacts the second source/drain layer. The first source/drain layer does not directly contact the second source/drain layer.
    Type: Grant
    Filed: July 5, 2023
    Date of Patent: August 20, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sungmin Kim, Soonmoon Jung
  • Patent number: 12068386
    Abstract: In an embodiment, a device includes: a first channel region; a second channel region; and a gate structure around the first channel region and the second channel region, the gate structure including: a gate dielectric layer; a first p-type work function metal on the gate dielectric layer, the first p-type work function metal including fluorine and aluminum; a second p-type work function metal on the first p-type work function metal, the second p-type work function metal having a lower concentration of fluorine and a lower concentration of aluminum than the first p-type work function metal; and a fill layer on the second p-type work function metal.
    Type: Grant
    Filed: May 12, 2023
    Date of Patent: August 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Yi Lee, Cheng-Lung Hung, Chi On Chui
  • Patent number: 12068327
    Abstract: A semiconductor device is provided. The semiconductor device comprises a substrate including a first region, a second region, and a connecting region placed between the first region and the second region, a plurality of first multi-channel active patterns placed in the first region of the substrate, a plurality of second multi-channel active patterns placed in the second region of the substrate, a first connecting fin type pattern which is placed in the connecting region of the substrate and extends from the first region to the second region in a first direction, and a field insulating film which is placed on the substrate and covers an upper surface of the first connecting fin type pattern, wherein a width of the first connecting fin type pattern in a second direction decreases and then increases as it goes away from the first region, and the first direction is perpendicular to the second direction.
    Type: Grant
    Filed: November 10, 2021
    Date of Patent: August 20, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Myoung-Ho Kang, Yong-Ah Kim, Dong Hyo Park, Seong-Yul Park, Chang Hyeon Lee
  • Patent number: 12068370
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes first and second source/drain epitaxial features, a first gate electrode layer disposed between the first and second source/drain epitaxial features, third and fourth source/drain epitaxial features, a second gate electrode layer disposed between the third and fourth source/drain epitaxial features, fifth and sixth source/drain epitaxial features disposed over the first and second source/drain epitaxial features, and a third gate electrode layer disposed between the fifth and sixth source/drain epitaxial features. The third gate electrode layer is electrically connected to the second source/drain epitaxial feature. The structure further includes a seventh source/drain epitaxial feature disposed over the third source/drain epitaxial feature and an eighth source/drain epitaxial feature disposed over the fourth source/drain epitaxial feature.
    Type: Grant
    Filed: April 28, 2023
    Date of Patent: August 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Yi Chuang, Cheng-Ting Chung, Hou-Yu Chen, Kuan-Lun Cheng
  • Patent number: 12062721
    Abstract: A semiconductor device according to the present disclosure includes an active region including a channel region and a source/drain region adjacent the channel region, a vertical stack of channel members over the channel region, a gate structure over and around the vertical stack of channel members, a bottom dielectric feature over the source/drain region, a source/drain feature over the bottom dielectric feature, and a germanium layer disposed between the bottom dielectric feature and the source/drain region.
    Type: Grant
    Filed: February 7, 2022
    Date of Patent: August 13, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Cheng Chen, Kuo-Cheng Chiang, Zhi-Chang Lin
  • Patent number: 12063798
    Abstract: A first transistor, a second transistor, a capacitor, and first to third conductors are included. The first transistor includes a first gate, a source, and a drain. The second transistor includes a second gate, a third gate over the second gate, first and second low-resistance regions, and an oxide sandwiched between the second gate and the third gate. The capacitor includes a first electrode, a second electrode, and an insulator sandwiched therebetween. The first low-resistance region overlaps with the first gate. The first conductor is electrically connected to the first gate and is connected to a bottom surface of the first low-resistance region. The capacitor overlaps with the first low-resistance region. The second conductor is electrically connected to the drain. The third conductor overlaps with the second conductor and is connected to the second conductor and a side surface of the second low-resistance region.
    Type: Grant
    Filed: May 31, 2023
    Date of Patent: August 13, 2024
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Takanori Matsuzaki, Yoshinobu Asami, Daisuke Matsubayashi, Tatsuya Onuki
  • Patent number: 12057486
    Abstract: The present disclosure provides a semiconductor device and a method of forming the same. The semiconductor device includes a first channel members being vertically stacked, a second channel members being vertically stacked, an n-type work function layer wrapping around each of the first channel members, a first p-type work function layer over the n-type work function layer and wrapping around each of the first channel members, a second p-type work function layer wrapping around each of the second channel members, a third p-type work function layer over the second p-type work function layer and wrapping around each of the second channel members, and a gate cap layer over a top surface of the first p-type work function layer and a top surface of the third p-type work function layer such that the gate cap layer electrically couples the first p-type work function layer and the third p-type work function layer.
    Type: Grant
    Filed: March 13, 2023
    Date of Patent: August 6, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Wei Chen, Wei Cheng Hsu, Hui-Chi Chen, Jian-Hao Chen, Kuo-Feng Yu, Shih-Hang Chiu, Wei-Cheng Wang, Yen-Ju Chen
  • Patent number: 12052858
    Abstract: Embodiments herein relate to vertical contacts for semiconductor devices. For instance, a memory device having vertical contacts can comprise a substrate including circuitry components, a vertical stack of layers formed from repeating iterations of a group of layers disposed on the substrate, the group of layers comprising a first dielectric material layer, a semiconductor material layer, and a second dielectric material layer including horizontal conductive lines formed along a horizontal plane in the second dielectric material layer, and vertical contacts coupled to the horizontal conductive lines, the vertical contacts extending along a vertical plane within the vertical stack of layers to directly electrically couple the horizontal conductive lines to the circuitry components.
    Type: Grant
    Filed: April 5, 2023
    Date of Patent: July 30, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Byung Yoon Kim, Sangmin Hwang, Kyuseok Lee
  • Patent number: 12052860
    Abstract: Various implementations described herein relate to a device with a multi-transistor logic structure for use in memory architecture. In some applications, the multi-transistor logic structure may have a pair of P-type transistors that are arranged in a P-over-P multi-transistor stack. In other applications, the multi-transistor logic structure may have a pair of N-type transistors that are arranged in an N-over-N multi-transistor stack.
    Type: Grant
    Filed: January 14, 2021
    Date of Patent: July 30, 2024
    Assignee: Arm Limited
    Inventors: Amit Chhabra, David Victor Pietromonaco
  • Patent number: 12046644
    Abstract: Semiconductor devices and methods of forming the same are provided. A semiconductor device according to the present disclosure include a source feature disposed over a backside source contact, a drain feature disposed over a backside dielectric layer, a plurality of channel members each extending between the source feature and the drain feature, and a gate structure wrapping around each of the plurality of channel members and disposed over the backside dielectric layer. The backside source contact is spaced apart from the backside dielectric layer by a gap.
    Type: Grant
    Filed: July 1, 2022
    Date of Patent: July 23, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Li-Zhen Yu, Lin-Yu Huang, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 12036636
    Abstract: A method of performing a chemical mechanical planarization (CMP) process includes holding a wafer by a retainer ring attached to a carrier, pressing the wafer against a first surface of a polishing pad, the polishing pad rotating at a first speed, dispensing a slurry on the first surface of the polishing pad, and generating vibrations at the polishing pad.
    Type: Grant
    Filed: February 24, 2023
    Date of Patent: July 16, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Hao Kung, Shang-Yu Wang, Ching-Hsiang Tsai, Hui-Chi Huang, Kei-Wei Chen