Patents Examined by Tong-Ho Kim
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Patent number: 12294013Abstract: Provided is a highly-sensitive image-capture element and an image capture device that can be simply manufactured, have little polarization dependency, and have micro-spectroscopic elements capable of separating incident light into three wavelength ranges integrated facing a pixel array. An image capture element has a transparent layer having a low refractive index made of SiO2 or the like and a plurality of micro-lenses laminated on a pixel array in which pixels each including a photoelectric conversion element are disposed in an array. Inside the transparent layer having the low refractive index, micro-spectroscopic elements composed of a plurality of microstructures having constant thickness (length in a direction perpendicular to the pixel array) formed of a material such as SiN having a higher refractive index than that of the transparent layer is embedded.Type: GrantFiled: March 13, 2024Date of Patent: May 6, 2025Assignee: NIPPON TELEGRAPH AND TELEPHONE CORPORATIONInventors: Masashi Miyata, Mitsumasa Nakajima, Toshikazu Hashimoto
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Patent number: 12288814Abstract: Semiconductor devices and methods of manufacturing are presented in which inner spacers for nanostructures are manufactured. In embodiments a dielectric material is deposited for the inner spacer and then treated. The treatment may add material and cause an expansion in volume in order to close any seams that can interfere with subsequent processes.Type: GrantFiled: January 24, 2024Date of Patent: April 29, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wan-Yi Kao, Hung Cheng Lin, Che-Hao Chang, Yung-Cheng Lu, Chi On Chui
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Patent number: 12288752Abstract: A semiconductor package includes a first die and a through via. The through via is electrically connected to the first die. The through via includes a first conductive layer having a first width, a second conductive layer having a second width different from the first width and a first seed layer disposed aside an interface between the first conductive layer and the second conductive layer.Type: GrantFiled: July 5, 2023Date of Patent: April 29, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Fa Chen, Nien-Fang Wu, Sung-Feng Yeh, Tzuan-Horng Liu, Chao-Wen Shih
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Patent number: 12283546Abstract: An integrated circuit includes a strip structure having a front side and a back side. The integrated circuit includes a gate structure on the front side of the strip structure. The integrated circuit includes an isolation structure surrounding the strip structure. The integrated circuit includes a backside via in the isolation structure. The integrated circuit includes a contact over the strip structure, wherein a first portion of the contact extends into the isolation structure and contacts the backside via. The integrated circuit includes a backside power rail on the back side of the strip structure and in contact with the backside via.Type: GrantFiled: April 20, 2023Date of Patent: April 22, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shih-Wei Peng, Wei-Cheng Lin, Cheng-Chi Chuang, Jiann-Tyng Tzeng
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Patent number: 12283521Abstract: Semiconductor devices including air spacers formed in a backside interconnect structure and methods of forming the same are disclosed. In an embodiment, a device includes a first transistor structure; a front-side interconnect structure on a front-side of the first transistor structure; and a backside interconnect structure on a backside of the first transistor structure, the backside interconnect structure including a first dielectric layer on the backside of the first transistor structure; a first via extending through the first dielectric layer, the first via being electrically coupled to a first source/drain region of the first transistor structure; a first conductive line electrically coupled to the first via; and an air spacer adjacent the first conductive line, the first conductive line defining a first side boundary of the air spacer.Type: GrantFiled: January 23, 2024Date of Patent: April 22, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Li-Zhen Yu, Huan-Chieh Su, Lin-Yu Huang, Cheng-Chi Chuang, Chih-Hao Wang
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Patent number: 12283612Abstract: A novel metal oxide is provided. One embodiment of the present invention is a crystalline metal oxide. The metal oxide includes a first layer and a second layer; the first layer has a wider bandgap than the second layer; the first layer and the second layer form a crystal lattice; and in the case where a carrier is excited in the metal oxide, the carrier is transferred through the second layer. Furthermore, the first layer contains an element M (M is one or more selected from Al, Ga, Y, and Sn) and Zn, and the second layer contains In.Type: GrantFiled: February 2, 2024Date of Patent: April 22, 2025Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 12283613Abstract: A device includes a first nanostructure; a second nanostructure over the first nanostructure; a first high-k gate dielectric around the first nanostructure; a second high-k gate dielectric around the second nanostructure; and a gate electrode over the first and second high-k gate dielectrics. The gate electrode includes a first work function metal; a second work function metal over the first work function metal; and a first metal residue at an interface between the first work function metal and the second work function metal, wherein the first metal residue has a metal element that is different than a metal element of the first work function metal.Type: GrantFiled: January 22, 2024Date of Patent: April 22, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hsin-Yi Lee, Cheng-Lung Hung, Chi On Chui
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Patent number: 12283631Abstract: In a method of manufacturing a semiconductor device, a fin structure is formed. The fin structure includes a stacked layer of first semiconductor layers and second semiconductor layers disposed over a bottom fin structure, and a hard mask layer over the stacked layer. An isolation insulating layer is formed so that the hard mask layer and the stacked layer are exposed from the isolation insulating layer. A sacrificial cladding layer is formed over at least sidewalls of the exposed hard mask layer and stacked layer. A first dielectric layer is formed, and a second dielectric layer made of a different material than the first dielectric layer is formed over the first dielectric layer. The second dielectric layer is recessed, and a third dielectric layer made of a different material than the second dielectric layer is formed on the recessed second dielectric layer, thereby forming a wall fin structure.Type: GrantFiled: February 9, 2024Date of Patent: April 22, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shahaji B. More, Chun Hsiung Tsai
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Patent number: 12278238Abstract: A semiconductor device includes a first transistor and a second transistor. The first transistor is of a first type in a first layer and includes a gate extending in a first direction and a first active region extending in a second direction perpendicular to the first direction. The second transistor is of a second type arranged in a second layer over the first layer and includes the gate and a second active region extending in the second direction. The semiconductor device further includes a first conductive line in a third layer between the first and second layers. The first conductive line electrically connects a first source/drain region of the first active region to a second source/drain region of the second active region. The gate comprises an intermediate portion disposed between the first active region and the second active region, wherein the first conductive line crosses the gate at the intermediate portion.Type: GrantFiled: January 4, 2024Date of Patent: April 15, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Shih-Wei Peng, Te-Hsin Chiu, Wei-Cheng Lin, Jiann-Tyng Tzeng
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Patent number: 12272755Abstract: A semiconductor structure includes several semiconductor stacks over a substrate, and each of the semiconductor stacks extends in a first direction, wherein adjacent semiconductor stacks are spaced apart from each other in a second direction, which is different from the first direction. Each of the semiconductor stacks includes channel layers above the substrate and a gate structure across the channel layers. The channel layers are spaced apart from each other in the third direction. The gate structure includes gate dielectric layers around the respective channel layers, and a gate electrode along sidewalls of the gate dielectric layers and a top surface of the uppermost gate dielectric layer. The space in the third direction between the two lowermost channel layers is greater than the space in the third direction between the two uppermost channel layers in the same semiconductor stack.Type: GrantFiled: January 23, 2024Date of Patent: April 8, 2025Assignee: MEDIATEK INC.Inventors: Cheng-Tien Wan, Ming-Cheng Lee
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Patent number: 12272649Abstract: A semiconductor device includes a first conductive line extending in a first direction on a front side of a semiconductor wafer, a first power rail extending in the first direction on a back side of the semiconductor wafer, and a first transistor including a first gate structure extending in a second direction perpendicular to the first direction, first and second active regions adjacent to the first gate structure, and a first channel region extending between the first and second active regions through the first gate structure. A first via is positioned between and electrically connects the first active region and the first conductive line, and a second via is positioned between and electrically connects the second active region and the first power rail.Type: GrantFiled: November 29, 2023Date of Patent: April 8, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventor: Chung-Hui Chen
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Patent number: 12272727Abstract: Gate-all-around integrated circuit structures having embedded GeSnB source or drain structures, and methods of fabricating gate-all-around integrated circuit structures having embedded GeSnB source or drain structures, are described. For example, an integrated circuit structure includes a vertical arrangement of horizontal nanowires above a fin, the fin including a defect modification layer on a first semiconductor layer, and a second semiconductor layer on the defect modification layer. A gate stack is around the vertical arrangement of horizontal nanowires. A first epitaxial source or drain structure is at a first end of the vertical arrangement of horizontal nanowires, and a second epitaxial source or drain structure is at a second end of the vertical arrangement of horizontal nanowires.Type: GrantFiled: February 13, 2024Date of Patent: April 8, 2025Assignee: Intel CorporationInventors: Cory Bomberger, Anand Murthy, Susmita Ghose, Siddharth Chouksey
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Patent number: 12272737Abstract: Gate-all-around integrated circuit structures having adjacent structures for sub-fin electrical contact are described. For example, an integrated circuit structure includes a semiconductor island on a semiconductor substrate. A vertical arrangement of horizontal nanowires is above a fin protruding from the semiconductor substrate. A channel region of the vertical arrangement of horizontal nanowires is electrically isolated from the fin. The fin is electrically coupled to the semiconductor island. A gate stack is over the vertical arrangement of horizontal nanowires.Type: GrantFiled: September 14, 2023Date of Patent: April 8, 2025Assignee: Intel CorporationInventors: Biswajeet Guha, William Hsu, Chung-Hsun Lin, Kinyip Phoa, Oleg Golonzka, Tahir Ghani
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Patent number: 12261220Abstract: A semiconductor device includes channels, a gate structure, and a source/drain layer. The channels are stacked in a vertical direction. Each channel extends in a first direction. The gate structure extends in a second direction. The gate structure covers the channels. The source/drain layer is connected to each of opposite sidewalls in the first direction of the channels on the substrate, and includes a doped semiconductor material. The source/drain layer includes first and second epitaxial layers having first and second impurity concentrations, respectively. The first epitaxial layer covers a lower surface and opposite sidewalls in the first direction of the second epitaxial layer. A portion of each of opposite sidewalls in the first direction of the gate structure protrudes in the first direction from opposite sidewalls in the first direction of the channels to partially penetrate through the first epitaxial layer but not to contact the second epitaxial layer.Type: GrantFiled: March 6, 2024Date of Patent: March 25, 2025Assignee: Samsung Electronics Co., Ltd.Inventors: Woocheol Shin, Sunggi Hur, Sangwon Baek, Junghan Lee
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Patent number: 12261208Abstract: An integrated circuit device includes a fin-type active region disposed on a substrate and extending in a first horizontal direction, a gate line disposed on the fin-type active region and extending in a second horizontal direction intersecting the first horizontal direction, the gate line including, a connection protrusion portion including a protrusion top surface at a first vertical level from the substrate, and a main gate portion including a recess top surface extending in the second horizontal direction from the connection protrusion portion, the recess top surface being at a second vertical level lower than the first vertical level, a gate contact disposed on the gate line and connected to the connection protrusion portion, a source/drain region disposed on the fin-type active region and disposed adjacent to the gate line, and a source/drain contact disposed on the source/drain region.Type: GrantFiled: December 13, 2023Date of Patent: March 25, 2025Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Yonghee Park, Myunggil Kang, Uihui Kwon, Seungkyu Kim, Ahyoung Kim, Youngseok Song
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Patent number: 12255245Abstract: A manufacturing method of a semiconductor device includes the following steps. A first transistor is formed on a substrate. The first transistor includes a first semiconductor channel structure and two first source/drain structures. The first semiconductor channel structure includes first horizontal portions and a first vertical portion. The first horizontal portions are stacked in a vertical direction and separated from one another. Each of the first horizontal portions is elongated in a horizontal direction. The first vertical portion is elongated in the vertical direction and connected with the first horizontal portions. The two first source/drain structures are disposed at two opposite sides of each of the first horizontal portions in the horizontal direction respectively. The two first source/drain structures are connected with the first horizontal portions. A top surface of the first vertical portion in and a top surface of one of the first horizontal portions are coplanar.Type: GrantFiled: February 29, 2024Date of Patent: March 18, 2025Assignee: UNITED MICROELECTRONICS CORP.Inventor: Po-Yu Yang
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Patent number: 12249656Abstract: A transistor includes a first gate structure, a channel layer, and source/drain contacts. The first gate structure includes metallic nanosheets. Each of the metallic nanosheets includes a top surface, a bottom surface opposite to the top surface, and sidewalls connecting the top surface and the bottom surface. The channel layer surrounds the top surfaces, the bottom surfaces, and the sidewalls of the metallic nanosheets. The source/drain contacts are electrically connected to the channel layer. A portion of the channel layer is located between the source/drain contacts and the metallic nanosheets.Type: GrantFiled: May 16, 2024Date of Patent: March 11, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Marcus Johannes Henricus Van Dal
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Patent number: 12249593Abstract: An electronic device includes an interconnect layer, a second chip and a third chip provided on a first side of the interconnect layer, and a first chip provided on a second side of the interconnect layer. The interconnect layer includes conductive members connecting between the first chip and the second chip, and connecting between the first chip and the third chip, respectively. The interconnect layer does not include a conductive member directly connecting between the second chip and the third chip.Type: GrantFiled: September 14, 2023Date of Patent: March 11, 2025Assignee: NAGASE & CO., LTD.Inventor: Yoichiro Kurita
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Patent number: 12243937Abstract: The disclosure concerns a device which comprises a stack of two high electron mobility transistors, referred to as first and second transistor, separated by an insulating layer and each provided with a stack of semiconductor layers respectively referred to as first stack and second stack, the first and the second stack each comprising, from the insulating layer to, respectively, a first and a second surface, a barrier layer and a channel layer, the first and the second transistor respectively comprising a first set of electrodes and a second set of electrodes, the first and the second set of electrodes each comprising a source electrode, a drain electrode, and a gate electrode which are arranged so that the first and the second transistor are electrically connected head-to-tail.Type: GrantFiled: April 1, 2022Date of Patent: March 4, 2025Assignees: STMicroelectronics France, STMicroelectronics International N.V.Inventors: Matthieu Nongaillard, Thomas Oheix
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Patent number: 12243880Abstract: A display panel and a display apparatus are provided. The display panel includes a substrate, binding pins provided at a side of the substrate, and insulating layers. The substrate has a display region and a binding region that are arranged along a first direction. The binding pins are arranged along a second direction and are located in the binding region of the substrate. The insulating layers and the binding pins are arranged on a same side of the substrate. At least one insulating layer includes at least one first aperture provided at a side of the binding region away from the display region. An orthographic projection of the first aperture on the substrate overlaps with an orthographic projection of the binding pin on the substrate in the first direction.Type: GrantFiled: May 31, 2022Date of Patent: March 4, 2025Assignees: Wuhan Tianma Microelectronics Co., Ltd. Shanghai Branch, Wuhan Tianma Microelectronics Co., Ltd.Inventors: Yingying Wu, Peng Zhang