Patents Examined by Tong-Ho Kim
  • Patent number: 11855167
    Abstract: A semiconductor device structure and a method for forming a semiconductor device structure are provided. The semiconductor device structure includes a stack of channel structures over a semiconductor fin and a gate stack wrapped around the channel structures. The semiconductor device structure also includes a source/drain epitaxial structure adjacent to the channel structures and multiple inner spacers. Each of the inner spacers is between the gate stack and the source/drain epitaxial structure. The semiconductor device structure further includes an isolation structure between the semiconductor fin and the source/drain epitaxial structure.
    Type: Grant
    Filed: July 8, 2021
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Cheng Wang, Ting-Yeh Chen, De-Fang Chen, Wei-Yang Lee
  • Patent number: 11849617
    Abstract: Embodiments of the present disclosure provide a display panel and a display device. The display panel includes a base substrate, a plurality of pixel units and a plurality of gate line groups. At least one pixel unit includes a plurality of sub-pixels. At least one sub-pixel includes a sensing transistor and a driving transistor. Each gate line group includes a first gate line and a second gate line; for the first gate line and the second gate line corresponding to the sub-pixels in the same row, the positions of the sensing transistors are closer to the second gate lines, and the positions of the driving transistors are closer to the first gate line, For two sub-pixels close to each other and located in different pixel units in the same row, at least one signal line has a double-layer alignment structure, and the double-layer alignments are electrically connected with each other.
    Type: Grant
    Filed: November 29, 2019
    Date of Patent: December 19, 2023
    Assignees: Hefei BOE Joint Technology Co., Ltd., BOE Technology Group Co., Ltd.
    Inventors: Zhongyuan Wu, Yongqian Li, Can Yuan, Zhidong Yuan, Meng Li, Dacheng Zhang, Lang Liu
  • Patent number: 11842964
    Abstract: A semiconductor device includes a substrate having an active region, a first group of standard cells arranged in a first row on the active region of the substrate and having a first height defined in a column direction, a second group of standard cells arranged in a second row on the active region of the substrate, and having a second height, and a plurality of power lines extending in a row direction and respectively extending along boundaries of the first and the second groups of standard cells. The first and second groups of standard cells each further include a plurality of wiring lines extending in the row direction and arranged in the column direction, and at least some of wiring lines in at least one standard cell of the first and second groups of standard cells are arranged at different spacings and/or pitches.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: December 12, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jungho Do, Sanghoon Baek
  • Patent number: 11842963
    Abstract: A semiconductor structure is disclosed, including a first conductive line and a first power rail and a first transistor structure arranged between the first conductive line and the first power rail. The first conductive line and the first power rail are separated from each other in a first direction. The first transistor structure includes a first active region coupled to the first conductive line by a first via; a second active region coupled to the first power rail by a second via; and a first gate structure interposed between the first active region and the second active region, and configured to receive a first control signal. The first transistor structure transmits a signal between the first conductive line and the first power rail in response to the first control signal.
    Type: Grant
    Filed: April 8, 2021
    Date of Patent: December 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventor: Chung-Hui Chen
  • Patent number: 11842965
    Abstract: Nanostructure field-effect transistors (nano-FETs) including isolation layers formed between epitaxial source/drain regions and semiconductor substrates and methods of forming the same are disclosed. In an embodiment, a semiconductor device includes a power rail, a dielectric layer over the power rail, a first channel region over the dielectric layer, a second channel region over the first channel region, a gate stack over the first channel region and the second channel region, where the gate stack is further disposed between the first channel region and the second channel region and a first source/drain region adjacent the gate stack and electrically connected to the power rail.
    Type: Grant
    Filed: February 28, 2022
    Date of Patent: December 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng Chiang, Shi Ning Ju, Chih-Chao Chou, Wen-Ting Lan, Chih-Hao Wang
  • Patent number: 11843000
    Abstract: A semiconductor device that reduces the occurrence of a leakage current by forming a doped layer in each of an NMOS region and a PMOS region on an SOI substrate, and completely separating the doped layer of the NMOS region from the doped layer of the PMOS region using the element isolation layer is provided. The semiconductor device includes a first region and a second region adjacent to the first region, a substrate including a first layer, an insulating layer on the first layer, and a second layer on the insulating layer, a first doped layer on the second layer in the first region and including a first impurity, a second doped layer on the second layer in the second region and including a second impurity different from the first impurity, and an element isolation layer configured to separate the first doped layer from the second doped layer, and in contact with the insulating layer.
    Type: Grant
    Filed: June 2, 2021
    Date of Patent: December 12, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Beom Jin Park, Myung Gil Kang, Dong Won Kim, Keun Hwi Cho
  • Patent number: 11837660
    Abstract: A semiconductor device and method of manufacture are provided which utilizes metallic seeds to help crystallize a ferroelectric layer. In an embodiment a metal layer and a ferroelectric layer are formed adjacent to each other and then the metal layer is diffused into the ferroelectric layer. Once in place, a crystallization process is performed which utilizes the material of the metal layer as seed crystals.
    Type: Grant
    Filed: February 17, 2022
    Date of Patent: December 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Chi On Chui
  • Patent number: 11837648
    Abstract: Thin film transistor structures and processes are disclosed that include stacked nanowire bodies to mitigate undesirable short channel effects, which can occur as gate lengths scale down to sub-100 nanometer (nm) dimensions, and to reduce external contact resistance. In an example embodiment, the disclosed structures employ a gate-all-around architecture, in which the gate stack (including a high-k dielectric layer) wraps around each of the stacked channel region nanowires (or nanoribbons) to provide improved electrostatic control. The resulting increased gate surface contact area also provides improved conduction. Additionally, these thin film structures can be stacked with relatively small spacing (e.g., 1 to 20 nm) between nanowire bodies to increase integrated circuit transistor density. In some embodiments, the nanowire body may have a thickness in the range of 1 to 20 nm and a length in the range of 5 to 100 nm.
    Type: Grant
    Filed: March 15, 2022
    Date of Patent: December 5, 2023
    Assignee: Intel Corporation
    Inventors: Seung Hoon Sung, Abhishek A. Sharma, Van H. Le, Gilbert Dewey, Jack T. Kavalieros, Tahir Ghani
  • Patent number: 11837638
    Abstract: A semiconductor device includes first and second isolation regions, a first active region extending in a first direction between the first and second isolation regions, a first fin pattern on the first active region, nanowires on the first fin pattern, a gate electrode in a second direction on the first fin pattern, the gate electrode surrounding the nanowires, a first source/drain region on a side of the gate electrode, the first source/drain region being on the first active region and in contact with the nanowires, and a first source/drain contact on the first source/drain region, the first source/drain contact including a first portion on a top surface of the first source/drain region, and a second portion extending toward the first active region along a sidewall of the first source/drain region, an end of the first source/drain contact being on one of the first and second isolation regions.
    Type: Grant
    Filed: June 1, 2021
    Date of Patent: December 5, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sang Hoon Lee, Chang Woo Sohn, Keun Hwi Cho, Sang Won Baek
  • Patent number: 11832484
    Abstract: A display device includes a substrate, a display area disposed on the substrate and including a plurality of pixels and data lines, a peripheral area disposed outside the display area of the substrate, a pad portion disposed in the peripheral area, an encapsulation layer disposed in the peripheral area and the display area, and disposed on the plurality of pixels of the display area, a crack detection circuit disposed in the peripheral area, and a first crack detection line connected with the pad portion and the crack detection circuit. The first crack detection line is disposed on the encapsulation layer.
    Type: Grant
    Filed: June 14, 2021
    Date of Patent: November 28, 2023
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Kyong Tae Park, Chul-Hwan Park, Sun-Kyo Jung, Sung Ho Cho
  • Patent number: 11830742
    Abstract: Embodiments disclosed herein relate generally to capping processes and structures formed thereby. In an embodiment, a conductive feature, formed in a dielectric layer, has a metallic surface, and the dielectric layer has a dielectric surface. The dielectric surface is modified to be hydrophobic by performing a surface modification treatment. After modifying the dielectric surface, a capping layer is formed on the metallic surface by performing a selective deposition process. In another embodiment, a surface of a gate structure is exposed through a dielectric layer. A capping layer is formed on the surface of the gate structure by performing a selective deposition process.
    Type: Grant
    Filed: June 29, 2022
    Date of Patent: November 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Chien Chi, Pei-Hsuan Lee, Hung-Wen Su, Hsiao-Kuan Wei, Jui-Fen Chien, Hsin-Yun Hsu
  • Patent number: 11830854
    Abstract: Methods for forming packaged semiconductor devices including backside power rails and packaged semiconductor devices formed by the same are disclosed. In an embodiment, a device includes a first integrated circuit device including a first transistor structure in a first device layer; a front-side interconnect structure on a front-side of the first device layer; and a backside interconnect structure on a backside of the first device layer, the backside interconnect structure including a first dielectric layer on the backside of the first device layer; and a first contact extending through the first dielectric layer to a source/drain region of the first transistor structure; and a second integrated circuit device including a second transistor structure in a second device layer; and a first interconnect structure on the second device layer, the first interconnect structure being bonded to the front-side interconnect structure by dielectric-to-dielectric and metal-to-metal bonds.
    Type: Grant
    Filed: January 31, 2022
    Date of Patent: November 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chi-Yi Chuang, Hou-Yu Chen, Kuan-Lun Cheng
  • Patent number: 11830912
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a source/drain epitaxial feature having a first semiconductor material, a first semiconductor layer having a first doped region and a first undoped region adjacent the first doped region, and the first doped region is in contact with the first semiconductor material. The structure further includes a second semiconductor layer disposed over the first semiconductor layer, and the second semiconductor layer includes a second doped region and a second undoped region adjacent the second doped region. The second doped region is in contact with the first semiconductor material. The structure further includes a gate electrode layer surrounding at least the first undoped region and the second undoped region.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: November 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventor: Shahaji B. More
  • Patent number: 11830869
    Abstract: An integrated circuit includes a first transistor, a second transistor, a third transistor, and a fourth transistor. The first transistor includes a first active area extending in a first direction in a first layer. The second transistor includes a second active area that is disposed in a second layer below the first layer and overlaps the first active area. The third transistor includes at least two third active areas extending in the first direction in the first layer. In the first direction, a boundary line of one of the at least two third active areas is aligned with boundary lines of the first and second active areas. The fourth transistor includes at least two fourth active areas that are disposed in the second layer and overlap the at least two third active areas.
    Type: Grant
    Filed: August 19, 2021
    Date of Patent: November 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jian-Sing Li, Guo-Huei Wu, Hui-Zhong Zhuang, Chih-Liang Chen, Li-Chun Tien
  • Patent number: 11827978
    Abstract: Methods for depositing a molybdenum nitride film on a surface of a substrate are disclosed. The methods may include: providing a substrate into a reaction chamber; and depositing a molybdenum nitride film directly on the surface of the substrate by performing one or more unit deposition cycles of cyclical deposition process, wherein a unit deposition cycle may include, contacting the substrate with a first vapor phase reactant comprising a molybdenum halide precursor, and contacting the substrate with a second vapor phase reactant comprising a nitrogen precursor. Semiconductor device structures including a molybdenum nitride film are also disclosed.
    Type: Grant
    Filed: March 7, 2022
    Date of Patent: November 28, 2023
    Assignee: ASM IP Holding B.V.
    Inventors: Eric Christopher Stevens, Bhushan Zope, Shankar Swaminathan, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni
  • Patent number: 11824106
    Abstract: A transistor device having fin structures, source and drain terminals, channel layers and a gate structure is provided. The fin structures are disposed on a material layer. The fin structures are arranged in parallel and extending in a first direction. The source and drain terminals are disposed on the fin structures and the material layer and cover opposite ends of the fin structures. The channel layers are disposed respectively on the fin structures, and each channel layer extends between the source and drain terminals on the same fin structure. The gate structure is disposed on the channel layers and across the fin structures. The gate structure extends in a second direction perpendicular to the first direction. The materials of the channel layers include a transition metal and a chalcogenide, the source and drain terminals include a metallic material, and the channel layers are covalently bonded with the source and drain terminals.
    Type: Grant
    Filed: January 26, 2022
    Date of Patent: November 21, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Chieh Lu, Chao-Ching Cheng, Tzu-Ang Chao, Lain-Jong Li
  • Patent number: 11810961
    Abstract: In an embodiment, a device includes: a p-type transistor including: a first channel region; a first gate dielectric layer on the first channel region; a tungsten-containing work function tuning layer on the first gate dielectric layer; and a first fill layer on the tungsten-containing work function tuning layer; and an n-type transistor including: a second channel region; a second gate dielectric layer on the second channel region; a tungsten-free work function tuning layer on the second gate dielectric layer; and a second fill layer on the tungsten-free work function tuning layer.
    Type: Grant
    Filed: April 1, 2021
    Date of Patent: November 7, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hsin-Yi Lee, Weng Chang, Chi On Chui
  • Patent number: 11804472
    Abstract: A semiconductor package includes a first semiconductor chip and a second semiconductor chip stacked on the first semiconductor chip. The first semiconductor chip includes a substrate having a first via hole, an insulation interlayer formed on the substrate and having a first bonding pad in an outer surface thereof and a second via hole connected to the first via hole and exposing the first bonding pad, and a plug structure formed within the first and second via holes to be connected to the first bonding pad. The second semiconductor chip includes a second bonding pad bonded to the plug structure which is exposed from a surface of the substrate of the first semiconductor chip.
    Type: Grant
    Filed: March 2, 2021
    Date of Patent: October 31, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hak-Seung Lee, Kwang-Jin Moon, Tae-Seong Kim, Dae-Suk Lee, Dong-Chan Lim
  • Patent number: 11799009
    Abstract: Gate-all-around integrated circuit structures having adjacent structures for sub-fin electrical contact are described. For example, an integrated circuit structure includes a semiconductor island on a semiconductor substrate. A vertical arrangement of horizontal nanowires is above a fin protruding from the semiconductor substrate. A channel region of the vertical arrangement of horizontal nanowires is electrically isolated from the fin. The fin is electrically coupled to the semiconductor island. A gate stack is over the vertical arrangement of horizontal nanowires.
    Type: Grant
    Filed: December 17, 2019
    Date of Patent: October 24, 2023
    Assignee: Intel Corporation
    Inventors: Biswajeet Guha, William Hsu, Chung-Hsun Lin, Kinyip Phoa, Oleg Golonzka, Tahir Ghani
  • Patent number: 11799036
    Abstract: A semiconductor device including a substrate including a division region extending in a first direction, first and second active patterns on the substrate with the division region interposed therebetween, the first and the second active patterns being spaced apart from each other in a second direction perpendicular to the first direction, gate electrodes extending in the first direction and crossing the first and second active patterns, a first channel pattern on the first active pattern, and a second channel pattern on the second active pattern may be provided. The smallest width of the first active pattern may be smaller than the smallest width of the second active pattern, in the first direction. An end portion of the first channel pattern adjacent to the division region may include a protruding portion extending in the first direction, and the protruding portion may have a triangle shape in a plan view.
    Type: Grant
    Filed: July 8, 2021
    Date of Patent: October 24, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seungmin Song, Taeyong Kwon, Jaehyeoung Ma, Namhyun Lee