Abstract: Provided is a method of manufacturing a semiconductor device including a high-k dielectric thin layer formed using an interfacial reaction. The method includes the steps of: forming an oxide layer on a silicon substrate; depositing a metal layer on the oxide layer to form a metal silicate layer using an interfacial reaction between the oxide layer and the metal layer; forming a metal gate by etching the metal silicate layer and the metal layer; and forming a lightly doped drain (LDD) region and source and drain regions in the silicon substrate after forming the metal gate. In this method, a semiconductor device having high quality and performance can be manufactured by a simpler process at lower cost.
Type:
Grant
Filed:
March 11, 2008
Date of Patent:
May 11, 2010
Assignee:
Electronics and Telecommunications Research Institute
Inventors:
Chel Jong Choi, Moon Gyu Jang, Yark Yeon Kim, Myung Sim Jun, Tae Youb Kim
Abstract: A pixel structure and a fabrication method thereof are provided. The pixel comprises a substrate, a gate, a gate insulating layer, a channel layer, a first source/drain, a second source/drain, a dielectric layer, a first pixel electrode, and a second pixel electrode. The gate is disposed on the substrate and is covered by the gate insulating layer. The channel layer is disposed on the gate insulating layer above the gate. The first source/drain and the second source/drain are disposed on the channel layer. The channel layer has different thicknesses respectively corresponding to the first drain/source and the second drain/source. The dielectric layer covers the substrate and exposes the first and the second drains. The first and the second pixel electrodes are disposed on the dielectric layer, and are electrically connected to the first and the second drains respectively.
Abstract: The invention relates to a detector arrangement (100), a method for the detection of electrical charge carriers and use of an ONO field effect transistor for detection of an electrical charge. The detector arrangement (100) has an ONO field effect transistor embodied on and/or in a substrate (101), for the detection of electrical charge carriers, such that the electrical charge carrier (103) for detection may be introduced into die ONO field effect transistor layer sequence (102), a recording unit (104), coupled to the ONO field effect transistor, for recording an electrical signal characteristic of the amount and/or the charge carrier type for the electrical charge carrier (103) introduced into the ONO layer sequence (102) and an analytical unit for determining the amount and/or the charge carrier type of the electrical charge carrier (103) introduced into the ONO layer sequence (102) from the characteristic electrical signal.
Abstract: A field effect transistor (FET) device includes a gate conductor formed over a semiconductor substrate, a source region having a source extension that overlaps and extends under the gate conductor, and a drain region having a drain extension that overlaps and extends under the gate conductor only at selected locations along the width of the gate conductor.
Type:
Grant
Filed:
July 15, 2008
Date of Patent:
May 4, 2010
Assignee:
International Business Machines Corporation
Abstract: Phase-changeable memory devices and method of fabricating phase-changeable memory devices are provided that include a phase-changeable material pattern of a phase-changeable material that includes nitrogen atoms. First and second electrodes are electrically connected to the phase-changeable material pattern and provide an electrical signal thereto. The phase-changeable material pattern may have a polycrystalline structure.
Abstract: Embodiments relate to a method of manufacturing a transistor having a metal silicide layer. In embodiments, the method may include sequentially forming a gate insulating layer pattern and a gate conductive layer pattern on a semiconductor substrate, forming a first metal silicide layer on the gate conductive layer pattern and a second metal silicide layer on the semiconductor substrate, forming a spacer layer on side-walls of the gate insulating layer pattern and the gate conductive layer pattern, and forming a source/drain region in the semiconductor substrate below the second metal silicide layer by performing ion implantation.
Abstract: A method for fabricating a thin film transistor array substrate is provided. Wherein, a plurality of contact holes and recesses are formed in a protection layer disposed upon thin film transistors. Each recess comprises an under-cut profile while each contact hole exposes a drain-metal layer of a corresponding thin film transistor. Then, a transparent conductor layer is formed on the protection layer, which in turn fills in the contact holes so as to be electrically connected to the drain-metal layer. Besides, the transparent conductor layer automatically segregates at the recesses to form a plurality of pixel electrodes, whereby the plurality of pixel electrodes can be formed without the utilization of photolithography and etching processes and thus fabricating cost is lowered.
Abstract: An NFET containing a first high-k dielectric portion and a PFET containing a second high-k gate dielectric portion are formed on a semiconductor substrate. A gate sidewall nitride is formed on the gate of the NFET, while the sidewalls of the PFET remain free of the gate sidewall nitride. An oxide spacer is formed directly on the sidewalls of a PFET gate stack and on the gate sidewall nitride on the NFET. After high temperature processing, the first and second dielectric portions contain a non-stoichiometric oxygen deficient high-k dielectric material. The semiconductor structure is subjected to an anneal in an oxygen environment, during which oxygen diffuses through the oxide spacer into the second high-k dielectric portion. The PFET comprises a more stoichiometric high-k dielectric material and the NFET comprises a less stoichiometric high-k dielectric material. Threshold voltages of the PFET and the NFET are optimized by the present invention.
Type:
Grant
Filed:
June 14, 2007
Date of Patent:
April 13, 2010
Assignee:
International Business Machines Corporation
Inventors:
Huiming Bu, Eduard A. Cartier, Bruce B. Doris, Young-Hee Kim, Barry Linder, Vijay Narayanan, Vamsi K. Paruchuri, Michelle L. Steen
Abstract: Methods are provided for pulsed chemical vapor deposition (CVD) of complex nitrides, such as ternary metal nitrides. Pulses of metal halide precursors are separated from one another and nitrogen-containing precursor is provided during the metal halide precursor pulses as well as between the metal halide precursor pulses. Two different metal halide precursors can be provided in simultaneous pulses, alternatingly, or in a variety of sequences. The nitrogen-containing precursor, such as ammonia, can be provided in pulses simultaneously with the metal halide precursors and between the metal halide precursors, or continuously throughout the deposition. Temperatures can be kept between about 300° C. and about 700° C.
Type:
Grant
Filed:
June 21, 2007
Date of Patent:
April 6, 2010
Assignee:
ASM International N.V.
Inventors:
Suvi P. Haukka, Tanja Claasen, Peter Zagwijn
Abstract: A solid-state imaging device comprises a housing in which a base and ribs forming a rectangular frame are formed in one piece by a resin; a plurality of metal lead pieces embedded in the housing, each of which has an internal terminal portion facing an internal space of the housing and an external terminal portion exposed at an outer portion of the housing; an imaging element arranged on the base in the internal space of the housing; connecting members connecting electrodes of the imaging element to the internal terminal portions of the metal lead pieces; and a transparent plate fastened to an upper face of the ribs. The upper face of the ribs is provided with a lower step portion that is lowered along an external periphery, and the transparent plate is fastened to the upper face of the ribs by an adhesive filled at least into the lower step portion.
Abstract: One aspect of this disclosure relates to a method for creating proximity gettering sites in a silicon on insulator (SOI) wafer. In various embodiments of this method, a relaxed silicon germanium region is formed over an insulator region of the SOI to be proximate to a device region. The relaxed silicon germanium region generates defects to getter impurities from the device region. Other aspects are provided herein.
Abstract: A fabricating method of nitride semiconductor substrate is provided. First, a first substrate including a first base material, a nitride semiconductor template layer stacked on the first base material, and a first dielectric layer stacked on the nitride semiconductor template layer is provided. Then, the first dielectric layer and the nitride semiconductor template layer are patterned, and a second substrate including a second base material and a second dielectric layer stacked on the second base material is provided. Next, the nitride semiconductor template layer and the first dielectric layer of the first substrate are transferred onto the second dielectric layer of the second substrate through bonding and transferring processes, and then a nitride semiconductor thick film is grown from the nitride semiconductor template layer through an epitaxy process. After that, the nitride semiconductor thick film and the second substrate are separated.
Type:
Grant
Filed:
August 25, 2006
Date of Patent:
March 30, 2010
Assignee:
Industrial Technology Research Institute
Abstract: In a thin-film transistor substrate including a substrate, a thin-film transistor semiconductor layer, a source/drain electrode, and a transparent pixel electrode, the source/drain electrode includes a thin film of an aluminum alloy containing 0.1 to 6 atomic percent of nickel as an alloy element, and the aluminum alloy thin film is directly connected to the thin-film transistor semiconductor layer.
Abstract: Deep trench isolation structures and methods of formation thereof are disclosed. Several methods of and structures for increasing the threshold voltage of a parasitic transistor formed proximate deep trench isolation structures are described, including implanting a channel stop region into the bottom surface of the deep trench isolation structures, partially filling a bottom portion of the deep trench isolation structures with an insulating material, and/or filling at least a portion of the deep trench isolation structures with a doped polysilicon material.
Type:
Grant
Filed:
March 3, 2006
Date of Patent:
March 16, 2010
Assignee:
Infineon Technologies AG
Inventors:
Armin Tilke, Danny Pak-Chum Shum, Laura Pescini, Ronald Kakoschke, Karl Robert Strenz, Martin Stiftinger
Abstract: A semiconductor structure having a plurality of gate stacks on a semiconductor substrate provided with a gate dielectric. The gate stacks have a lower first layer made of polysilicon, an overlying second layer made of a metal silicide, and an upper third layer made of an insulating material, and a sidewall oxide on the sidewalls of the first and second layers. The sidewall oxide is thinned or removed on one of the sidewalls, and the gate stacks have sidewall spacers made of the insulating material.
Type:
Grant
Filed:
August 31, 2006
Date of Patent:
March 16, 2010
Assignee:
Qimonda, AG
Inventors:
Jurgen Amon, Jurgen Faul, Thomas Ruder, Thomas Schuster
Abstract: In an LED housing, a heat conducting part has a chip mounting area, a heat connecting area opposed to the chip mounting area and a groove formed adjacent to the heat connecting area. An electrical connecting part has a wiring area placed adjacent to the chip mounting area and an external power connecting area led to the wiring area. A housing body is made of molding resin, and integrally holds the heat conducting part and the electrical connecting part while isolating the electrical connecting part from the heat conducting part. The housing body is provided with a recess extended from a portion of the groove of the heat conducting part to a side of the housing body.
Abstract: An image sensor contains a semiconductor substrate, a plurality of pixels defined on the semiconductor substrate, a photo conductive layer and a transparent conductive layer formed on the pixel electrodes of the pixels in order, and a shield device positioned between any two adjacent pixel electrodes. The shield device has a shield electrode and an isolation structure surrounding the shield electrode so that the shield electrode is isolated from the pixel electrodes and the photo conductive layer by the isolation structure.
Type:
Grant
Filed:
March 15, 2007
Date of Patent:
March 2, 2010
Assignee:
Powerchip Semiconductor Corp.
Inventors:
Hsin-Heng Wang, Chiu-Tsung Huang, Shih-Siang Lin
Abstract: A method of forming at least a portion of a dual bit memory core array upon a semiconductor substrate, the method comprising performing front end processing, performing a first bitline implant, or pocket implants, or both into the first bitline spacings to establish buried first bitlines within the substrate, depositing a layer of the spacer material over the charge trapping dielectric and the polysilicon layer features, forming a sidewall spacer adjacent to the charge trapping dielectric and the polysilicon layer features to define second bitline spacings between adjacent memory cells, performing a deep arsenic implant into the second bitline spacings to establish a second bitline within the structure that is deeper than the first bit line, removing the sidewall spacers and performing back end processing.
Type:
Grant
Filed:
December 26, 2006
Date of Patent:
March 2, 2010
Assignee:
Spansion LLC
Inventors:
Timothy Thurgate, Yi He, Ming-Sang Kwan, Zhizheng Liu, Xuguang Wang
Abstract: One aspect of this disclosure relates to a method for creating proximity gettering sites in a silicon on insulator (SOI) wafer. In various embodiments of this method, a relaxed silicon germanium region is formed over an insulator region of the SOI to be proximate to a device region. The relaxed silicon germanium region generates defects to getter impurities from the device region. Other aspects are provided herein.
Abstract: A flip chip type LED lighting device manufacturing method includes the step of providing a strip, the step of providing a submount, the step of forming a metal bonding layer on the strip or submount, the step of bonding the submount to the strip, and the step of cutting the structure thus obtained into individual flip chip type LED lighting devices.