Patents Examined by Walter Lindsay
  • Patent number: 7361518
    Abstract: A nitride semiconductor growth layer is laid on a substrate having an engraved region provided with a depressed portion.
    Type: Grant
    Filed: May 26, 2005
    Date of Patent: April 22, 2008
    Assignee: Sharp Kabushiki Kaisha
    Inventor: Takeshi Kamikawa
  • Patent number: 7358134
    Abstract: A split gate flash memory cell includes a substrate having a device isolation structure; a selective gate structure disposed on the substrate; an interlayer dielectric layer having an opening disposed on the substrate, wherein the opening exposes a portion of the selective gate structure, the substrate and the device isolation structure; a floating gate disposed in the opening and extended to cover a surface of the interlayer dielectric layer; a tunneling dielectric layer disposed between the floating gate and the selective gate structure; a gate dielectric layer disposed between the floating gate and the control gate; a source region disposed in the substrate on one side of the control gate that is not adjacent to the selective gate structure, and a drain region disposed in the substrate on one side of the selective gate that is not adjacent to the control gate.
    Type: Grant
    Filed: April 15, 2005
    Date of Patent: April 15, 2008
    Assignee: Powerchip Semiconductor Corp.
    Inventors: Sheng Wu, Tsai-Yu Huang
  • Patent number: 7358101
    Abstract: The present invention relates to a method for preparing an optical active layer with 1˜10 nm distributed silicon quantum dots, it adopts high temperature processing and atmospheric-pressure chemical vapor deposition (APCVD), and directly deposit to form a silicon nitrite substrate containing 1˜10 nm distributed quantum dots, said distribution profile of quantum dot size from large to small is corresponding to from inner to outer layers of film respectively, and obtain a 400˜700 nm range of spectrum and white light source under UV photoluminescence or electro-luminescence.
    Type: Grant
    Filed: September 6, 2005
    Date of Patent: April 15, 2008
    Assignee: Institute of Nuclear Energy Research
    Inventors: Tsun Neng Yang, Shan Ming Lan
  • Patent number: 7354871
    Abstract: Nanowires methods for producing the nanowires are provided. The nanowires include a plurality of metal nanodots uniformly disposed therein, and a core portion, wherein each of the plurality of metal nanodots is coupled to the core portion. According to the method, metal nanodots can be uniformly disposed in the nanowires, and nanowires having various physical properties can be produced by controlling the size and interval of the nanodots. Therefore, the nanowires can be effectively used in a variety of applications, including electronic devices, such as field effect transistors (FETs), sensors, photodetectors, light emitting diodes (LEDs), and laser diodes (LDs).
    Type: Grant
    Filed: August 17, 2006
    Date of Patent: April 8, 2008
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Eun Kyung Lee, Byoung Lyong Choi
  • Patent number: 7354821
    Abstract: Trench capacitors that have insulating layer collars in undercut regions and methods of fabricating such trench capacitors are provided. Some methods of fabricating a trench capacitor include forming a first layer on a substrate. A second layer is formed on the first layer opposite to the substrate. A mask is formed that has an opening on top of the first and second layers. A first trench is formed by removing a portion of the first and second layers through the opening in the mask. A portion of the first layer under the second layer is removed to form an undercut region under the second layer. An insulating layer collar is formed in the undercut region under the second layer. A second trench is formed that extends from the first trench by removing a portion of the substrate through the opening in the mask. A buried plate is formed in the substrate along the second trench. A dielectric layer is formed on an inner wall and bottom of the second trench.
    Type: Grant
    Filed: January 18, 2005
    Date of Patent: April 8, 2008
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Suk-jin Chung, Seung-hwan Lee, Sung-tae Kim, Young-sun Kim, Jae-soon Lim, Young-geun Park
  • Patent number: 7351599
    Abstract: A light emitting device includes a first semiconductor layer of a first conductivity type, an active region, and a second semiconductor layer of a second conductivity type. First and second contacts are connected to the first and second semiconductor layers. In some embodiments at least one of the first and second contacts has a thickness greater than 3.5 microns. In some embodiments, a first heat extraction layer is connected to one of the first and second contacts. In some embodiments, one of the first and second contacts is connected to a submount by a solder interconnect having a length greater than a width. In some embodiments, an underfill is disposed between a submount and one of the first and second interconnects.
    Type: Grant
    Filed: December 19, 2005
    Date of Patent: April 1, 2008
    Assignee: Philips Lumileds Lighting Company LLC
    Inventors: Yu-Chen Shen, Daniel A. Steigerwald, Paul S. Martin
  • Patent number: 7351637
    Abstract: A method of forming a channel in a semiconductor device including forming an opening in a masking layer to expose a portion of an underlying semiconductor layer through the opening is provided. The method further includes disposing a screening layer and implanting a first type of ions in the portion of the underlying semiconductor layer through the screening layer and through the opening in the masking layer. A second type of ions are implanted in the portion of the underlying semiconductor layer through the screening layer and through the opening in the masking layer at an oblique ion implantation angle wherein a lateral spread of second type ions is greater than a lateral spread of first type ions. Semiconductor devices fabricated in accordance to above said method is also provided.
    Type: Grant
    Filed: April 10, 2006
    Date of Patent: April 1, 2008
    Assignee: General Electric Company
    Inventor: Jesse Berkley Tucker
  • Patent number: 7351602
    Abstract: A process for producing a thin film with MEMS probe circuits by using semiconductor process technology comprises steps of providing a flatted process substrate; forming a separable interface on the flatted process substrate; forming a probe circuit thin film with electric circuits, probes and circuit contacts on the separable interface; forming a raised probe supported-spacer on the probe circuit thin film; separating the probe circuit thin film from the process substrate; and processing a subsequent microstructure working to obtain a thin film with MEMS probe circuits which use the raised probe supported-spacer to form a buffer to prevent the probes from being exposed to much pressure.
    Type: Grant
    Filed: December 29, 2005
    Date of Patent: April 1, 2008
    Inventor: Wen-Chang Dong
  • Patent number: 7345350
    Abstract: A method for forming a conductive via in a semiconductor component is disclosed. The method includes providing a substrate having a first surface and an opposing, second surface. At least one hole is formed in the substrate extending between the first surface and the opposing, second surface. A seed layer is formed on a sidewall defining the at least one hole of the substrate and coated with a conductive layer, and a conductive or nonconductive filler material is introduced into the remaining space within the at least one hole. A method of forming a conductive via through a substrate using a blind hole is also disclosed. Semiconductor components and electronic systems having substrates including the conductive via of the present invention are also disclosed.
    Type: Grant
    Filed: September 23, 2003
    Date of Patent: March 18, 2008
    Assignee: Micron Technology, Inc.
    Inventor: Nishant Sinha
  • Patent number: 7344906
    Abstract: A method and structure for forming a spring structure that avoids undesirable kinks in the spring is described. The method converts a portion of a release layer such that the converted portion resists etching. The converted portion then serves as an anchor region for a spring structure deposited over the release layer. When the non-converted portions of the release layer are etched, the spring curls out of the plane of a plane.
    Type: Grant
    Filed: December 15, 2005
    Date of Patent: March 18, 2008
    Assignee: Palo Alto Research Center Incorporated
    Inventors: Christopher L. Chua, David K. Fork, Koenraed F. Van Schuylenbergh
  • Patent number: 7341906
    Abstract: The present invention is generally directed to a method of manufacturing sidewall spacers on a memory device, and a memory device comprising such sidewall spacers. In one illustrative embodiment, the method includes forming sidewall spacers on a memory device comprised of a memory array and at least one peripheral circuit by forming a first sidewall spacer adjacent a word line structure in the memory array, the first sidewall spacer having a first thickness and forming a second sidewall spacer adjacent a transistor structure in the peripheral circuit, the second sidewall spacer having a second thickness that is greater than the first thickness, wherein the first and second sidewall spacers comprise material from a single layer of spacer material.
    Type: Grant
    Filed: May 19, 2005
    Date of Patent: March 11, 2008
    Assignee: Micron Technology, Inc.
    Inventors: David K. Hwang, Kunal Parekh, Michael Willett, Jigish Trivedi, Suraj Mathew, Greg Peterson
  • Patent number: 7338869
    Abstract: A semiconductor device and a method of manufacturing the device using a (000-1)-faced silicon carbide substrate are provided. A SiC semiconductor device having a high voltage resistancehigh blocking voltage and high channel mobility is manufactured by optimizing the heat-treatment method used following the gate oxidation. The method of manufacturing a semiconductor device includes the steps of forming a gate insulation layer on a semiconductor region formed of silicon carbide having a (000-1) face orientation, forming a gate electrode on the gate insulation layer, forming an electrode on the semiconductor region, cleaning the semiconductor region surface. The gate insulation layer is formed in an atmosphere containing 1% or more H2O (water) vapor at a temperature of from 800° C. to 1150° C. to reduce the interface trap density of the interface between the gate insulation layer and the semiconductor region.
    Type: Grant
    Filed: June 26, 2003
    Date of Patent: March 4, 2008
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventors: Kenji Fukuda, Junji Senzaki
  • Patent number: 7338867
    Abstract: Semiconductor devices have gate structures on a semiconductor substrate with first spacers on sidewalls of the respective gate structures. First contact pads are positioned between the gate structures and have heights lower than the heights of the gate structures. Second spacers are disposed on sidewalls of the first spacers and on exposed sidewalls of the first contact pads. Second contact pads are disposed on the first contact pads.
    Type: Grant
    Filed: December 30, 2003
    Date of Patent: March 4, 2008
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Deok-Hyung Lee, Si-Young Choi, Byeong-Chan Lee, Chul-Sung Kim, In-Soo Jung, Jong-Ryeol Yoo
  • Patent number: 7335521
    Abstract: A Method for manufacturing an optical disc substrate comprises a first substrate with at least one structured surface, on which an anti-adhesive layer, preferably carbon, is deposited and first layer on top of said anti-adhesive layer. On a second substrate with a structured surface also a layer is deposited. Both substrates are bonded together with the layers facing each other. The separation now easily can take place afterwards alongside the adhesive layer. This way the first layer from the first substrate is being transferred to the second substrate.
    Type: Grant
    Filed: June 28, 2005
    Date of Patent: February 26, 2008
    Assignee: OC Oerlikon Balzers AG
    Inventors: Martin Dubs, Wolfgang Nutt, Helfried Weinzerl, Thomas Eisenhammer
  • Patent number: 7335550
    Abstract: Methods for fabricating semiconductor memory devices may include forming a first conductive layer for a first electrode on a semiconductor substrate, forming a dielectric layer on the first conductive layer, and forming a second conductive layer for a second electrode on the dielectric layer. Portions of the second conductive layer and the dielectric layer can be removed, and a thermal process can be performed on the second conductive layer and the dielectric layer. The thermal process can reduce interface stress between the second conductive layer and the dielectric layer and/or cure the dielectric layer. In addition, the dielectric layer may be maintained in an amorphous state during and after the thermal process.
    Type: Grant
    Filed: December 19, 2006
    Date of Patent: February 26, 2008
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jae-hyoung Choi, Wan-don Kim, Cha-young Yoo, Suk-jin Chung
  • Patent number: 7335557
    Abstract: A non-volatile memory semiconductor device includes a first insulation layer, two diffusion regions, a memory gate oxide layer, a first control gate, a second insulation layer, a floating gate of polysilicon, a third insulation layer and a second control gate. The first insulation layer is formed on a semiconductor substrate. The two diffusion regions are formed on a surface of the substrate. The memory gate oxide layer is formed over the two diffusion regions on the substrate. The first control gate including a diffusion region is formed on the surface of the substrate. The second insulation layer is formed on the first control gate. The floating gate of polysilicon is formed over the memory gate oxide layer, the first insulation layer, and the second insulation layer. The third insulation layer is formed on the floating gate. The second control gate is disposed on the floating gate.
    Type: Grant
    Filed: July 20, 2005
    Date of Patent: February 26, 2008
    Assignee: Ricoh Company, Ltd.
    Inventors: Masaaki Yoshida, Hiroaki Nakanishi
  • Patent number: 7332368
    Abstract: A new method to form an image sensor device is achieved. The method comprises forming an image sensing array in a substrate comprising a plurality of light detecting diodes with spaces between the diodes. A first dielectric layer is formed overlying the diodes but not the spaces. The first dielectric layer has a first refractive index. A second dielectric layer is formed overlying the spaces but not the diodes. The second dielectric layer has a second refractive index that is larger than the first refractive index. A new image sensor device is disclosed.
    Type: Grant
    Filed: November 22, 2005
    Date of Patent: February 19, 2008
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Dun-Nian Yaung, Shou-Gwo Wuu, Ho-Ching Chien, Chien-Hsien Tseng
  • Patent number: 7332386
    Abstract: A fin field effect transistor (FinFET) includes a substrate, a fin, a gate electrode, a gate insulation layer, and source and drain regions in the fin. The fin is on and extends laterally along and vertically away from the substrate. The gate electrode covers sides and a top of a portion of the fin. The gate insulation layer is between the gate electrode and the fin. The source region and the drain region in the fin and adjacent to opposite sides of the gate electrode. The source region of the fin has a different width than the drain region of the fin.
    Type: Grant
    Filed: March 21, 2005
    Date of Patent: February 19, 2008
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chul Lee, Min-Sang Kim, Dong-gun Park, Choong-ho Lee, Chang-woo Oh, Jae-man Yoon, Dong-won Kim, Jeong-dong Choe, Ming Li, Hye-jin Cho
  • Patent number: 7329898
    Abstract: A light-emitting device comprising a pair of electrodes and one or more organic layers disposed between the electrodes, the one or more organic layers comprising a light-emitting layer. At least one of the organic layers comprises a transition metal complex containing a moiety represented by the following formula (1): wherein M11 represents a transition metal ion; and R11, R12, R13, R14, R5, R16 and R17 represent a substituent or a single bond, respectively, or a tautomer thereof.
    Type: Grant
    Filed: April 8, 2005
    Date of Patent: February 12, 2008
    Assignee: FUJIFILM Corporation
    Inventor: Tatsuya Igarashi
  • Patent number: 7326622
    Abstract: A method of manufacturing a metal-oxide-semiconductor (MOS) transistor device is disclosed. A semiconductor substrate having a main surface is prepared. A gate dielectric layer is formed on the main surface. A gate electrode is patterned on the gate dielectric layer. The gate electrode has vertical sidewalls and a top surface. A liner is formed on the vertical sidewalls of the gate electrode. A silicon nitride spacer is formed on the liner. The main surface is then ion implanted using the gate electrode and the silicon nitride spacer as an implantation mask, thereby forming a source/drain region of the MOS transistor device in the main surface. The silicon nitride spacer is removed. A silicon nitride cap layer that borders the liner is deposited. The silicon nitride cap layer has a specific stress status.
    Type: Grant
    Filed: November 8, 2005
    Date of Patent: February 5, 2008
    Assignee: United Microelectronics Corp.
    Inventors: Yi-Cheng Liu, Jiunn-Ren Hwang, Wei-Tsun Shiau, Cheng-Tung Huang, Kuan-Yang Liao