Patents Examined by William Coleman
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Patent number: 11063069Abstract: A method for manufacturing a display substrate is provided to include: forming an amorphous silicon layer on a base substrate; irradiating at least part of the display region through a mask plate with a laser, to convert a portion of the amorphous silicon layer in the irradiated part of the display region corresponding to channel regions of active layers of transistors into polycrystalline silicon by a laser annealing process; irradiating at least part of the peripheral region with a laser, to convert the amorphous silicon layer in the irradiated part of the peripheral region into polycrystalline silicon; and forming the active layers of the transistors from the amorphous silicon layer which is converted to polycrystalline silicon by a patterning process.Type: GrantFiled: September 20, 2019Date of Patent: July 13, 2021Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Feng Guan, Chen Xu, Zhi Wang, Liwei Liu, Lei Chen, Xueyong Wang, Yan Chen
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Patent number: 11063107Abstract: A display apparatus includes: a thin-film transistor including a source electrode, a drain electrode, and a gate electrode; a data line in a layer different from the source electrode, the drain electrode, and the gate electrode, wherein the data line is configured to transmit a data signal; and a shield layer between the data line and a component of the thin-film transistor.Type: GrantFiled: September 2, 2020Date of Patent: July 13, 2021Assignee: Samsung Display Co., Ltd.Inventors: Yangwan Kim, Wonkyu Kwak, Jaedu Noh, Jaeyong Lee
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Patent number: 11047048Abstract: There is provided a technique that includes providing a substrate; and forming a film on the substrate by performing: supplying a first inert gas from a first supplier to the substrate; supplying a second inert gas from a second supplier to the substrate; and supplying a first processing gas from a third supplier, which is installed on an opposite side of the first supplier across a straight line passing through the second supplier and a center of the substrate, to the substrate, wherein in the act of forming the film, a substrate in-plane film thickness distribution of the film formed on the substrate is adjusted by controlling a balance between a flow rate of the first inert gas supplied from the first supplier and a flow rate of the second inert gas supplied from the second supplier.Type: GrantFiled: January 30, 2020Date of Patent: June 29, 2021Assignee: KOKUSAI ELECTRIC CORPORATIONInventors: Masahito Kitamura, Hiroaki Hiramatsu, Tetsuya Takahashi
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Patent number: 11049720Abstract: A method of using removable opaque coating for accurate optical topography measurements on top surfaces of transparent films includes: depositing a highly reflective coating onto a top surface of a wafer, measuring topography on the highly reflective coating, and removing the highly reflective coating from the wafer. The highly reflective coating includes an organic material. The highly reflective coating comprises a refractive index value between one and two. The highly reflective coating comprises a complex wavelength greater than one at six-hundred and thirty-five nanometers. The highly reflective coating reflects at least twenty percent of incident light. The highly reflective coating when deposited maintains an underlayer pattern topography at a resolution of forty by forty micrometers. The highly reflective coating does not cause destructive stress to the wafer.Type: GrantFiled: October 9, 2019Date of Patent: June 29, 2021Assignee: KLA CorporationInventors: Dieter Mueller, Prasanna Dighe, Xiaomeng Shen, Jason Saito
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Patent number: 11049847Abstract: A semiconductor device includes a first semiconductor structure comprising a substrate and a circuit element, and a second semiconductor structure connected to the first semiconductor structure. The second semiconductor structure includes a base layer, a first memory cell structure, a second memory cell structure, and common bit lines between the first memory cell structure and the second memory cell structure. The first memory cell structure includes first gate electrodes, first channel structures, and first string select channel structures. The second memory cell structure includes second gate electrodes, second channel structures, second string select channel structures, and connection regions between the second channel structures and the second string select channel structures.Type: GrantFiled: January 6, 2020Date of Patent: June 29, 2021Assignee: Samsung Electronics Co., Ltd.Inventors: Kohji Kanamori, Yongseok Kim, Kyunghwan Lee, Junhee Lim, Jeehoon Han
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Patent number: 11049804Abstract: An array of memory cells individually comprising a capacitor and a transistor comprises, in a first level, alternating columns of digitlines and conductive shield lines. In a second level above the first level there are rows of transistor wordlines. In a third level above the second level there are rows and columns of capacitors. In a fourth level above the third level there are rows of transistor wordlines. In a fifth level above the fourth level there are alternating columns of digitlines and conductive shield lines. Other embodiments and aspects are disclosed, including method.Type: GrantFiled: August 26, 2020Date of Patent: June 29, 2021Assignee: Micron Technology, Inc.Inventor: Durai Vishak Nirmal Ramaswamy
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Patent number: 11043385Abstract: A semiconductor device includes a semiconductor fin, a gate structure, a source epitaxy structure and a drain epitaxy structure. The semiconductor fin extends along a first direction above a substrate. The gate structure extends across the semiconductor fin along a second direction different from the first direction. The gate structure includes a gate dielectric layer wrapping around the semiconductor fin and a chlorine-containing N-work function metal layer wrapping around the gate dielectric layer. The source epitaxy structure and the drain epitaxy structure are on opposite sides of the gate structure, respectively.Type: GrantFiled: September 4, 2020Date of Patent: June 22, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Li-Jung Liu, Chun-Sheng Liang, Shu-Hui Wang
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Patent number: 11018056Abstract: A method of coupling a first semiconductor device to a second semiconductor device can include encapsulating solder balls on a first surface of a first substrate of the first semiconductor device with an encapsulant material. In some embodiments, the method includes removing a portion of the encapsulant material and a portion the solder balls to form a mating surface. The method can include reflowing the solder balls. In some embodiments, the method includes inserting exposed conductive pillars of the second semiconductor device into the reflowed solder balls.Type: GrantFiled: November 1, 2019Date of Patent: May 25, 2021Assignee: Micron Technology, Inc.Inventors: Kyle K. Kirby, Owen R. Fay
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Method and apparatus for determining width-to-length ratio of channel region of thin film transistor
Patent number: 11011437Abstract: The present disclosure provides a method for determining a width-to-length ratio of a channel region of a thin film transistor (TFT). The method includes: S1, setting an initial width-to-length ratio of the channel region; S2, manufacturing a TFT by using a mask plate according to the initial width-to-length ratio; S3, testing the TFT manufactured according to the initial width-to-length ratio; S4, determining whether or not the test result satisfies a predetermined condition, performing S5 if the test result satisfies the predetermined condition, and performing S6 if the test result does not satisfy the predetermined condition; S5, determining the initial width-to-length ratio as the width-to-length ratio of the channel region of the TFT; S6, changing the value of the initial width-to-length ratio, adjusting a position of the mask plate according to the changed initial width-to-length ratio, and performing S2 to S4 again.Type: GrantFiled: June 26, 2019Date of Patent: May 18, 2021Assignees: HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD., BOE TECHNOLOGY GROUP CO., LTD.Inventors: Yingbin Hu, Ce Zhao, Yuankui Ding, Wei Song, Jun Wang, Yang Zhang, Wei Li, Liangchen Yan -
Patent number: 11011703Abstract: This invention provides a semiconductor device and a manufacturing method thereof. The semiconductor device comprises a substrate; a bitline, suspended on the substrate; a bottom electrode, wrapped around the bitline; a resistive layer, wrapped around the bottom electrode; a top electrode, wrapped around the resistive layer; and a wordline electrode, disposed around the top electrode and connected to the top electrode.Type: GrantFiled: November 13, 2019Date of Patent: May 18, 2021Assignee: SiEn (QingDao) Integrated Circuits Co., Ltd.Inventors: Qiang Ma, Yanlei Ping, Tianhui Li
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Patent number: 11004975Abstract: A semiconductor device includes a memory circuit and a logic circuit. The memory circuit includes a word line, a bit line, a common line and a memory transistor having a gate coupled to the word line, a drain coupled to the bit line and a source coupled to the common line. The logic circuit includes a field effect transistor (FET) having a gate, a drain and a source. The memory transistor has a gate electrode layer formed on a gate dielectric layer, and the gate dielectric layer includes a first insulating layer and a first ferroelectric (FE) material layer. The FET has a gate electrode layer formed on a gate dielectric layer, and the gate dielectric layer includes a second insulating layer and a second FE material layer.Type: GrantFiled: July 27, 2020Date of Patent: May 11, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuo-Chi Tu, Jen-Sheng Yang, Sheng-Hung Shih, Tong-Chern Ong, Wen-Ting Chu
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Patent number: 10991851Abstract: Provided are a light emitting diode (LED) in which a conductive barrier layer surrounding a reflective metal layer is defined by a protective insulating layer, and a method of manufacturing the same. A reflection pattern including a reflective metal layer and a conductive barrier layer is formed on an emission structure in which a first semiconductor layer, an active layer, and a second semiconductor layer are formed. The conductive barrier layer prevents diffusion of a reflective metal layer and extends to a protective insulating layer recessed under a photoresist pattern having an overhang structure during a forming process. Accordingly, a phenomenon where the conductive barrier layer is in contact with sidewalls of the photoresist pattern having an over-hang structure and the reflective metal layer forms points is prevented. Thus, LED modules having various shapes may be manufactured.Type: GrantFiled: June 1, 2020Date of Patent: April 27, 2021Assignee: SEOUL VIOSYS CO., LTD.Inventors: Jong Hyeon Chae, Jong Min Jang, Won Young Roh, Dae Woong Suh, Min Woo Kang, Joon Sub Lee, Hyun A. Kim
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Patent number: 10985072Abstract: A method of forming first and second fin field effect transistors (finFETs) on a substrate includes forming first and second fin structures of the first and second finFETs, respectively, on the substrate and forming first and second oxide regions having first and second thicknesses on top surfaces of the first and second fin structures, respectively. The method further includes forming third and fourth oxide regions having third and fourth thicknesses on sidewalls on the first and second fin structures, respectively. The first and second thicknesses are greater than the third and fourth thicknesses, respectively. The method further includes forming a first polysilicon structure on the first and third oxide regions and forming a second polysilicon structure on the second and fourth oxide regions.Type: GrantFiled: May 18, 2020Date of Patent: April 20, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Kuo-Cheng Chiang, Chih-Hao Wang, Kuan-Ting Pan
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Patent number: 10985238Abstract: A capacitor includes a plurality of lower bottom electrodes, a lower supporter supporting the lower bottom electrodes and including a plurality of lower supporter openings, upper bottom electrodes formed on the lower bottom electrodes, respectively, and an upper supporter supporting the upper bottom electrodes and including a plurality of upper supporter openings, wherein the lower supporter openings and the upper supporter openings do not vertically overlap each other.Type: GrantFiled: November 8, 2019Date of Patent: April 20, 2021Assignee: SK hynix Inc.Inventor: Seung-Muk Kim
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Patent number: 10978664Abstract: A display panel and a method for manufacturing the same and a display device are disclosed. The display substrate includes: a base substrate having a plurality of pixel areas, at least one of the plurality of pixel areas including a first electrode layer, an organic functional layer and a second electrode layer stacked in sequence on the base substrate; and a third electrode layer on a side of the second electrode layer facing away from the base substrate; wherein the third electrode layer is electrically connected to the second electrode layer.Type: GrantFiled: May 10, 2019Date of Patent: April 13, 2021Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Yan Fan, Xing Fan, Hao Gao, Xiangmin Wen
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Patent number: 10978343Abstract: An interconnect structure includes an interlayer dielectric (ILD) having a cavity extending therethrough along a first direction. A first electrically conductive strip is formed on a substrate and within the cavity. The first electrically conductive strip extends along the first direction and across an upper surface of the substrate. A second electrically conductive strip is on an upper surface of the ILD and extends along a second direction opposite the first direction. A fully aligned via (FAV) extends between the first and second electrically conductive strips such that all sides of the FAV are co-planar with opposing sides of the first electrically conductive strip and opposing sides of the second electrically conductive strip thereby providing a FAV that is fully aligned with the first electrically conductive strip and the second electrically conductive strip.Type: GrantFiled: August 16, 2019Date of Patent: April 13, 2021Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Chanro Park, Nicholas Anthony Lanzillo, Christopher J. Penny, Lawrence A. Clevenger, Balasubramanian Pranatharthiharan
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Patent number: 10978347Abstract: A device chip for mounting on a board is provided. The device chip includes a top surface, an undersurface located on an opposite side from the top surface and having a larger area than the top surface, a slope inclined with respect to the top surface and the undersurface and exposed to the top surface side, a circuit portion on the top surface side, the circuit portion including an electronic circuit, and a wiring portion on which wiring electrically connecting the circuit portion and the board to each other is to be formed, the wiring portion including the slope in a part of the wiring portion.Type: GrantFiled: September 16, 2019Date of Patent: April 13, 2021Assignee: DISCO CORPORATIONInventor: Devin Martin
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Patent number: 10971371Abstract: A device includes a first chip is embedded in a molding compound layer, wherein the first chip is shifted toward a first direction, a second chip over the first chip and embedded in the molding compound layer, wherein the second chip is shifted toward a second direction opposite to the first direction and a plurality of bumps between the first chip and the second chip.Type: GrantFiled: May 22, 2020Date of Patent: April 6, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Hua Yu, Der-Chyang Yeh
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Patent number: 10967480Abstract: A method for CMP is provided. The method includes the following operations. A semiconductor wafer is received. The semiconductor wafer is polished. In some embodiments, a residue is generated during polishing the semiconductor wafer and the residue attaches to a surface of a conditioning disk disposed on a dresser head. The dresser head and the conditioning disk are moved back and forth between a refuge position and a working region by the dresser arm during polishing the semiconductor wafer. The surface of the conditioning disk is scanned to remove the residue using a laser scanner when the dresser head and the conditioning disk are in refuge position.Type: GrantFiled: October 15, 2019Date of Patent: April 6, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Ya-Hsin Tseng, Ren-Hao Jheng
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Patent number: 10971492Abstract: Disclosed embodiments include an embedded thin-film capacitor and a magnetic inductor that are assembled in two adjacent build-up layers of a semiconductor package substrate. The thin-film capacitor is seated on a surface of a first of the build-up layers and the magnetic inductor is partially disposed in a recess in the adjacent build up layer. The embedded thin-film capacitor and the integral magnetic inductor are configured within a die shadow that is on a die side of the semiconductor package substrate.Type: GrantFiled: April 22, 2020Date of Patent: April 6, 2021Assignee: Intel CorporationInventors: Cheng Xu, Rahul Jain, Seo Young Kim, Kyu Oh Lee, Ji Yong Park, Sai Vadlamani, Junnan Zhao