Patents by Inventor Aihua (Steven) Chen

Aihua (Steven) Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20030161952
    Abstract: A method for depositing a tungsten nitride layer is provided. The method includes a cyclical process of alternately adsorbing a tungsten-containing compound and a nitrogen-containing compound on a substrate. The barrier layer has a reduced resistivity, lower concentration of fluorine, and can be deposited at any desired thickness, such as less than 100 angstroms, to minimize the amount of barrier layer material.
    Type: Application
    Filed: February 26, 2002
    Publication date: August 28, 2003
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Shulin Wang, Ulrich Kroemer, Lee Luo, Aihua Chen, Ming Li
  • Publication number: 20030151799
    Abstract: A Raman module comprises a detecting unit for measuring the output power of a WDM signal traveling along a fiber section, and a spectral gain estimating unit for determining an estimated vector gain Gainmeas based on the output power alone. The Raman pump signal is controlled with a gain GainRA evaluated based on the estimated gain Gainmeas so that all channels have a similar gain. The spectral gain estimating unit comprises a fiber gain model and an input signal adjust unit. The model receives the output power, assumes a predicted input power for each channel and provides a corresponding estimated output power for each channel. The input signal adjust unit adjusts the predicted input power based on an error signal provided by the model. The gain is then calculated from the predicted input powers and the estimated output powers. The detecting unit demultiplexes a fraction of the WDM signal into n sub-band and detects sub-band optical power PB1, . . . PBn.
    Type: Application
    Filed: December 24, 2002
    Publication date: August 14, 2003
    Applicant: Innovance, Inc.
    Inventors: Mark Stephen Wight, Kevan Peter Jones, Aihua Yu, Alan Glen Solheim, Clarence Kwok-Yan Kan, Josh Paul Kemp, Christian Scheerer
  • Patent number: 6604223
    Abstract: A system and method for correcting interference errors in data encoded on storage media comprising position marks disposed on a storage medium, the position marks being configured to encode a plurality of track addresses and at least four track types. A correction module detects and corrects errors in the track addresses by combining each of the track addresses with one of the track types and then recognizing incorrect addresses. The correction module replaces incorrect addresses with correct addresses using a look-up table, wherein each incorrect address is not identical to one of the correct addresses. The plurality of position marks that encode the track types are also used to generate a position error signal for position correction of a head device.
    Type: Grant
    Filed: May 20, 1999
    Date of Patent: August 5, 2003
    Assignee: Seagate Technology LLC
    Inventors: Karl A. Belser, Aihua E. Li
  • Publication number: 20030138562
    Abstract: An oxide and an oxynitride films and their methods of fabrication are described. The oxide or the oxynitride film is grown on a substrate that is placed in a deposition chamber. A silicon source gas (or a silicon source gas with a nitridation source gas) and an oxidation source gas are decomposed in the deposition chamber using a thermal energy source. A silicon oxide (or an oxynitride) film is formed above the substrate wherein total pressure for the deposition chamber is maintained in the range of 50 Torr to 350 Torr and wherein a flow ratio for the silicon source gas (or the silicon source gas with the nitridiation source gas) and the oxidation source gas is in the range of 1:50 to 1:10000 during a deposition process.
    Type: Application
    Filed: December 28, 2001
    Publication date: July 24, 2003
    Inventors: Janardhanan Anand Subramony, Yoshitaka Yokota, Ramaseshan Suryanarayanan Iyer, Lee Luo, Aihua Chen
  • Publication number: 20030124873
    Abstract: The present invention is a method of annealing an oxide film. According to the present invention, an oxide film is deposited over a substrate. The oxide film is then annealed by exposing the oxide film to an ambient containing atomic oxygen for a predetermined period of time. In an embodiment of the present invention, the ambient containing atomic oxygen (O) is formed in the chamber by reacting a hydrogen containing gas and an oxygen containing gas together. In another embodiment of the present invention, the ambient containing atomic oxygen (O) is formed by decomposing N2O.
    Type: Application
    Filed: December 28, 2001
    Publication date: July 3, 2003
    Inventors: Guangcai Xing, Lee Luo, Aihua (Steven) Chen, Errol Antonio C. Sanchez, Christopher G. Quentin, Kuan-Ting (James) Lin, Shih-Che (Jeff) Lin
  • Patent number: 6570732
    Abstract: A method and apparatus for a settling check based on a single time point is described. A settling criterion for head oscillations in a disc drive is calculated using head position data. The settling criterion is used to determine when the head position data remains within a predetermined limit based on head position data values at a single point in time. The apparatus includes an actuator in a disc drive system including a head coupled to the actuator to generate a head position signal and a servo controller to receive the head position signal to determine when the head position signal remains within a threshold. The settling criterion could either be an elliptical settling criterion in one embodiment, or a triangular settling criterion in another embodiment.
    Type: Grant
    Filed: December 10, 1999
    Date of Patent: May 27, 2003
    Assignee: Seagate Technology LLC
    Inventor: Aihua E. Li
  • Publication number: 20030073702
    Abstract: Cyclic oxyguanidine pyrazinone compounds are described, including compounds of the Formula I: 1
    Type: Application
    Filed: October 4, 2002
    Publication date: April 17, 2003
    Applicant: 3-Dimensional Pharmaceuticals, Inc.
    Inventors: Aihua Wang, Bruce Edward Tomczuk, Tianbao Lu, Richard M. Soll, John Curtis Spurlino, Roger Francis Bone
  • Publication number: 20030059535
    Abstract: A method for film deposition that includes, flowing a first reactive gas over a top surface of a wafer in a cold wall single wafer process chamber to form a first half-layer of the film on the wafer, stopping the flow of the first reactive gas, removing residual first reactive gas from the cold wall single wafer process chamber, flowing a second reactive gas over the first half-layer to form a second half-layer of the film where deposition of the second half-layer is non self-limiting, controlling a thickness of the second half-layer by regulating process parameters within the cold wall single wafer process chamber, stopping the flow of the second reactive gas; and removing residual second reactive gas from the cold wall single wafer process chamber.
    Type: Application
    Filed: September 25, 2001
    Publication date: March 27, 2003
    Inventors: Lee Luo, Sang Hoon Ahn, Aihua Chen, Ramaseshan Suryanarayanan Iyer, Shulin Wang, Randhir P. Singh Thakur
  • Publication number: 20030060629
    Abstract: The present invention provides pyrazine derivatives that inhibit tyrosine kinase activity. Certain pyrazine derivatives are selective inhibitors of vascular endothelial growth factor (VEGF) receptor tyrosine kinase. The present invention also provides pharmaceutical formulations containing the pyrazine derivatives and methods of use of these formulations as anti-tumor agents and to treat solid-tumor cancers, angiogenesis, diabetic retinopathy, rheumatoid arthritis, endometriosis and psoriasis.
    Type: Application
    Filed: September 19, 2001
    Publication date: March 27, 2003
    Inventors: Gee-Hong Kuo, Peter J. Connolly, Catherine Prouty, Alan DeAngelis, Aihua Wang, Linda Jolliffe, Steve Middleton, Stuart Emanuel
  • Patent number: 6500266
    Abstract: An apparatus of a reactor or processing chamber comprising a chamber having a resistive heater disposed within a volume of the chamber, including a stage having a surface area to support a substrate such as a wafer and a body including at least one heating element, a shaft coupled to the body, a plurality of temperature sensors coupled to the chamber, each configured to measure a temperature at separate points associated with the surface area of the stage, and a motor coupled to the shaft and configured to rotate the resistive heater about an axis through the shaft. In this manner, the temperature sensors may measure a temperature at separate points of the surface area of the stage. A method of rotating a shaft and measuring a plurality of temperatures over the surface area of the stage or over a wafer seated on the stage with the plurality of temperature sensors.
    Type: Grant
    Filed: January 18, 2000
    Date of Patent: December 31, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Henry Ho, Alexander M. Rubinchik, Aihua Chen, Abril C. Cabreros, Steven T. Li, Mark Yam, Bruce W. Peuse
  • Patent number: 6486174
    Abstract: The present invention relates to novel tetrahydroisoquinoline-3-carboxylic acid alkoxyguanidine compounds that are antagonists of alpha V (&agr;v) integrins, for example &agr;v&bgr;3 and &agr;v&bgr;5 integrins, their pharmaceutically acceptable salts, and pharmaceutical compositions thereof.
    Type: Grant
    Filed: October 3, 2001
    Date of Patent: November 26, 2002
    Assignee: 3-Dimensional Pharmaceuticals, Inc.
    Inventors: Aihua Wang, David C. U'Prichard, Victor J. Marder
  • Patent number: 6476016
    Abstract: Cyclic oxyguanidine pyrazinone compounds are described, including compounds of the Formula I: wherein R3, R4, R5, W, and A are as set forth in the specification, as well as hydrates, solvates or pharmaceutically acceptable salts thereof. The compounds of the invention are potent inhibitors of proteases, especially trypsin-like serine proteases, such as chymotrypsin, trypsin, thrombin, plasmin and factor Xa. Certain of the compounds exhibit antithrombotic activity via direct, selective inhibition of thrombin. Compositions for inhibiting loss of blood platelets, inhibiting formation of blood platelet aggregates, inhibiting formation of fibrin, inhibiting thrombus formation, and inhibiting embolus formation are described.
    Type: Grant
    Filed: July 17, 2001
    Date of Patent: November 5, 2002
    Assignee: 3-Dimensional Pharmaceuticals, Inc.
    Inventors: Aihua Wang, Bruce Edward Tomczuk, Tianbao Lu, Richard M. Soll, John Curtis Spurlino, Roger Francis Bone
  • Publication number: 20020125239
    Abstract: A heating apparatus including a stage comprising a surface having an area to support a wafer and a body, a shaft coupled to the stage, and a first and a second heating element. The first heating element is disposed within a first plane of the body of the stage. The second heating element is disposed within a second plane of the body of the stage at a greater distance from the surface of the stage than the first heating element. A reactor comprising a chamber, a resistive heater, a first temperature sensor, and a second temperature sensor. A resistive heating system for a chemical vapor deposition apparatus comprising a resistive heater.
    Type: Application
    Filed: October 19, 2001
    Publication date: September 12, 2002
    Inventors: Steven Aihua Chen, Henry Ho, Michael X. Yang, Bruce W. Peuse, Karl Littau, Yu Chang
  • Patent number: 6423949
    Abstract: A heating apparatus including a stage comprising a surface having an area to support a wafer and a body, a shaft coupled to the stage, and a first and a second heating element. The first heating element is disposed within a first plane of the body of the stage. The second heating element is disposed within a second plane of the body of the stage at a greater distance from the surface of the stage than the first heating element. A reactor comprising a chamber, a resistive heater, a first temperature sensor, and a second temperature sensor. A resistive heating system for a chemical vapor deposition apparatus comprising a resistive heater.
    Type: Grant
    Filed: May 19, 1999
    Date of Patent: July 23, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Steven Aihua Chen, Henry Ho, Michael X. Yang, Bruce W. Peuse, Karl Littau, Yu Chang
  • Publication number: 20020061885
    Abstract: The present invention relates to novel tetrahydroisoquinoline-3-carboxylic acid alkoxyguanidine compounds that are antagonists of alpha V (&agr;v) integrins, for example &agr;v&bgr;3 and &agr;v&bgr;5 integrins, their pharmaceutically acceptable salts, and pharmaceutical compositions thereof. The compounds may be used in the treatment and/or prevention of pathological conditions mediated by &agr;v&bgr;3 and &agr;v&bgr;5 integrins such as tumor growth, metastasis, restenosis, osteoporosis, inflammation, macular degeneration, diabetic retinopathy, rheumatoid arthritis, sickle cell anemia, and in treatment and/or prevention of central nervous system (CNS) related disorders such as neuronal loss associated with stroke, ischemia, CNS trauma, hypoglycemia, surgery, neurodegenerative diseases, such as Alzheimer's disease and Parkinson's disease, adverse consequences of overstimulation of one or more excitatory amino acids, anxiety, convulsions, chronic pain, psychosis, schizophrenia, anesthesia, and opiate tolerance.
    Type: Application
    Filed: October 3, 2001
    Publication date: May 23, 2002
    Inventors: Aihua Wang, David C. U'Prichard, Victor J. Marder
  • Publication number: 20020052357
    Abstract: Cyclic oxyguanidine pyrazinone compounds are described, including compounds of the Formula I: 1
    Type: Application
    Filed: July 17, 2001
    Publication date: May 2, 2002
    Applicant: 3-Dimensional Pharmaceuticals, Inc.
    Inventors: Aihua Wang, Bruce Edward Tomczuk, Tianbao Lu, Richard M. Soll, John Curtis Spurlino, Roger Francis Bone
  • Publication number: 20020037897
    Abstract: The present invention relates to novel tetrahydroisoquinoline-3-carboxylic acid alkoxyguanidine compounds that are antagonists of alpha V (&agr;v) integrins, for example &agr;v&bgr;3 and &agr;v&bgr;5 integrins, their pharmaceutically acceptable salts, and pharmaceutical compositions thereof. The compounds may be used in the treatment of pathological conditions mediated by &agr;v&bgr;3 and &agr;v&bgr;5 integrins, including conditions such as tumor growth, metastasis, restenosis, osteoporosis, inflammation, macular degeneration, diabetic retinopathy, and rheumatoid arthritis.
    Type: Application
    Filed: August 6, 2001
    Publication date: March 28, 2002
    Applicant: 3-Dimensional Pharmaceuticals, Inc.
    Inventor: Aihua Wang
  • Publication number: 20020022615
    Abstract: Cyclic oxyguanidine compounds, including compounds of Formulae I and II: 1
    Type: Application
    Filed: August 2, 2001
    Publication date: February 21, 2002
    Applicant: 3-Dimensional Pharmaceuticals, Inc.
    Inventors: Aihua Wang, Tianbao Lu, Bruce Edward Tomczuk, Richard M. Soll, John Curtis Spurlino, Roger Francis Bone
  • Patent number: 6326492
    Abstract: Described are compounds of the Formula VII: wherein Het, R1, R7 and A are set forth in the specification, as well as hydrates, solvates or pharmaceutically acceptable salts thereof, that inhibit proteolytic enzymes such as thrombin. Also described are methods for preparing such compounds. The compounds of the invention are potent inhibitors of proteases, especially trypsin-like serine proteases, such as chymotrypsin, trypsin, thrombin, plasmin and factor Xa. Certain of the compounds exhibit antithrombotic activity via direct, selective inhibition of thrombin. The invention includes a composition for inhibiting loss of blood platelets, inhibiting formation of blood platelet aggregates, inhibiting formation of fibrin, inhibiting thrombus formation, and inhibiting embolus formation in a mammal, comprising a compound of the invention in a pharmaceutically acceptable carrier.
    Type: Grant
    Filed: May 26, 2000
    Date of Patent: December 4, 2001
    Assignee: 3-Dimensional Pharmaceuticals, Inc.
    Inventors: Aihua Wang, Tianbao Lu, Bruce E. Tomczuk, Richard M. Soll, John Spurlino, Roger Bone
  • Patent number: 6303501
    Abstract: The present invention provides apparatus, systems, and methods related to the manufacture of integrated circuits. Specifically, embodiments of the present invention include apparatus designed to provide thorough and reliable fluid mixture for gases used in a semiconductor processing system. In one embodiment of the invention, the gas mixing apparatus comprises a gas mixer housing having a gas inlet, a fluid flow channel, and a gas outlet. The fluid flow channel is fluidly coupled to a plurality of gas sources. The majority of the gas mixture occurs in the fluid flow channel which comprises one or more fluid separators for separating the gas into two or more gas portions and one or more fluid collectors for allowing the gas portions to collide with each other to mix the gas portions. This separation and collection of the gas portions results in a thoroughly mixed gas.
    Type: Grant
    Filed: April 17, 2000
    Date of Patent: October 16, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Chen-An Chen, Koji Nakanishi, Aihua Chen