Abstract: In general, an image forming apparatus for transferring an image formed on an image carrier onto a recording sheet can attain higher-accuracy control by density control based on the patch density detected on a recording sheet after fixing than the patch density formed on the image carrier. In this case, recording sheets are wasted. Since a calibration process is executed at a predetermined timing, calibration is executed even during execution of a print job, in which calibration is not preferable. In this invention, whether a patch formed on an intermediate transfer member or recording sheet is detected is selected in accordance with a set control mode, and density control is done based on the obtained patch density, thus selectively executing density control that saves recording sheets, and more accurate density control using recording sheets. Since a print job is started after calibration is forcibly executed based on a user instruction, the calibration is never executed during the job.

Abstract: A process solution supplying apparatus including a solution source from which a process solution is supplied, a supply pipe having an upstream end and a downstream end and connected at the upstream end to the solution source, a nozzle connected to the downstream end of the supply pipe, a pump provided on the supply pipe, for supplying the process solution from the solution source to the nozzle, an upstream control valve provided on the supply pipe and located between the pump and the solution source, and a deaerating mechanism provided between the pump and the upstream control valve, for removing gases from the process solution.

Abstract: In a coating unit, a piezovalve driven by piezoelectric elements is used as an opening and closing valve 79. The use of the piezovalve which can nearly disregard delay time makes it possible to accurately control the time of working the opening and closing valve 79 and to finely control working speed thereof at the time of opening and closing the valve. Therefore, operation necessary for closing the valve can be slowly performed, thus appropriately preventing dripping of a resist solution and occurrence of bubbles in a resist solution by air which enters from a forward end of a resist nozzle 60.

Abstract: A cooling apparatus for cooling a plurality of electric devices mounted on a printed circuit board with high cooling efficiency and low cost. The cooling apparatus includes a cooling plate for receiving heat generated by said electric devices and transmitting the heat to an external area to cool the electric devices, an elastic sheet made of electrically insulating material and attached to the cooling plate for contacting surfaces of the electric devices, means for attaching the elastic sheet to the cooling plate in a manner to form a closed space therebetween, heat conductive springs provided in the closed space for pressing the elastic sheet toward the surfaces of the cooling plate, a heat distribution sheet provided between the elastic sheet and the heat conductive springs to distribute the heat received from the elastic sheet throughout the heat distribution sheet, and a layer of heat conductive grease applied between the heat distribution sheet and the heat conductive springs.

Abstract: An apparatus for forming a coating film, comprises a spin chuck for supporting a substrate with one surface facing upward and rotating the substrate about a vertical axis, a first nozzle for supplying a solvent of a coating solution on the substrate, and a second nozzle for supplying the coating solution on a central portion of the substrate. The first and second nozzles are supported by a head such that the supported nozzle moves between a dropping position above the substrate and a waiting position offset from the substrate. The solvent and coating solution are diffused along the surface of the substrate by rotating the spin chuck.

Abstract: A coating apparatus of the present invention comprises coating solution supply sources for supplying a coating solution, a mounting table for holding a substrate to allow a surface to be coated to face upward, nozzles for pouring the coating solution toward the surface of the substrate to be coated, mounted on the mounting table, a pump chamber capable of swinging its volume and having a sucking port for introducing the coating solution from the coating solution supply source and a spurting port for spurting the coating solution and to be supplied toward the nozzle, pump driving mechanisms for increasing and decreasing an inner pressure of the pump chamber to introduce and spurt the coating solution into/from the pump chamber, a filter provided inside or at the upstream side of the pump chamber for filtrating the coating solution before the coating solution is spurted out from the pump chamber through the spurting outlet, a valve provided between the pump chamber and the nozzle for regulating a flow amount of

Abstract: A method of subjecting a plurality of wafers to coating and beating treatments where a first boat is placed on a stage arranged in an interface section. The first boat is capable of containing the wafers stacked at intervals in a vertical direction. The stage is capable of moving in a horizontal direction, and has a plurality of positions for respectively placing a plurality of boats. The wafers are conveyed from a supply section to a coating section, and are subjected to a coating treatment one by one. The wafers, which have undergone the coating treatment, are conveyed to the interface section. The wafers, which have undergone the coating treatment, are loaded into the first boat placed on the stage, in the interface section. The first boat containing the wafers, which have undergone the coating treatment, is located at a transfer position by moving the stage. The first boat, located at a transfer position by moving the stage.

Abstract: A cooler-equipped printed circuit board, in which electronic devices arranged in a matrix form on the printed circuit board are covered with a sealed case held in liquidtight contact with the board and having a coolant channel from an inlet port and an outlet port made in the case. Barriers are provided in the coolant channel to change the direction of flow of the coolant to stir it and make its temperature uniform throughout it.

Abstract: In a variable timing mechanism, valve lifting characteristics are changed to meet the engine power output characteristics when the timing of valve operation is changed. The variable timing mechanism is provided for the side of at least one of an intake and an exhaust valve so that, when a running condition of an internal combustion engine is changed from a low engine speed to a high engine speed, a duration of valve opening of at least one of the intake and the exhaust valve is changed to increase an overlap period of the intake and the exhaust valve at the beginning of the changes in the running condition of the engine.

Abstract: A cooling system for an IC tester achieves an optimum temperature control in a sealed box type housing. The cooling system includes a sealed housing, a board rack for mounting a plurality of circuit boards horizontally, a back board mounted perpendicular to the floor of the sealed housing for controlling the air flow around the circuit boards wherein the back board is positioned at around the center of the sealed housing in such a way that a continuous air flow passage is formed between the back board and inner walls of the sealed housing so that the air flows circulate around the back board, a cooling tube connected to a heat exchanger in order to circulate cooling medium, a plurality of small sized fans forming a horizontal air passage between the heat exchanger and the boards within the sealed housing so that the temperature difference among the boards is minimized.

Abstract: There is provided a double-sided substrate cleaning apparatus including a carrier station for loading/unloading a carrier in which objects to be processed are stored, a convey mechanism for conveying an object taken out from the carrier station, at least one cleaning mechanism, arranged along a convey path on which the convey mechanism conveys the object, for cleaning the object, and an object reversing mechanism, arranged along the convey path, for reversing the object.

Abstract: A substrate treatment apparatus comprises an arm holder for substantially horizontally holding each of substrates, a substrate transfer mechanism, having a vertical shaft, for moving the arm holder along the vertical shaft, swinging the arm holder about the vertical shaft, and horizontally advancing and retreating the arm holder, a first liquid process unit including a casing, a substrate carry-in/carry-out port formed in the casing and permitting a first substrate to be carried therethrough together with the arm holder, and a plurality of treatment members contained in the casing for treating the first substrate with a liquid, and a second liquid process unit located adjacent to the first liquid process unit, and including the casing, a substrate carry-in/carry-out port formed in the casing and permitting a first substrate to be carried therethrough together with the arm holder, and a plurality of treatment members contained in the casing for treating the second substrate with a liquid.

Abstract: The present invention provides a test head cooling system for cooling test heads of a semiconductor IC test apparatus in an enclosed structure. A sealed housing is provided in a test head wherein an air duct is formed in a wall of the sealed box so that cooling air flow effectively. Several thousands of cables are connected to sockets of a plurality of boards. The boards are fixed in board racks by inserting the boards to sockets of the board racks. Gaps between the boards are arranged to provide good ventilation. Two heat exchangers are for circulating cooling medium. A flexible hose for circulating the cooling medium is connected to one of the heat exchangers. The flexible hose is connected to an outside cooling apparatus so as to freely control the temperature of the cooling medium circulating inside the heat exchanger.

Abstract: An apparatus for forming a coating film, comprises a spin chuck for supporting a substrate with one surface facing upward and rotating the substrate about a vertical axis, a first nozzle for supplying a solvent of a coating solution on the substrate, and a second nozzle for supplying the coating solution on a central portion of the substrate. The first and second nozzles are supported by a head such that the supported nozzle moves between a dropping position above the substrate and a waiting position offset from the substrate. The solvent and coating solution are diffused along the surface of the substrate by rotating the spin chuck.

Abstract: A method of removing a coated film from an edge surface of a substrate comprising the steps of (a) forming an insulating film for protecting a circuit pattern of a substrate by pouring an insulating resin solution on a circuit-pattern formation surface of the substrate, (b) rotating the substrate having the insulating film coated thereon, (c) removing the insulating film by pouring a solvent on the edge surface of the substrate, while the substrate is being rotated, and (d) accelerating dehydration of the insulating film by taking at least one action of spraying a gas to the edge surface of the substrate and performing a local evacuation of a region in the proximity of the edge surface of the substrate while the substrate is being rotated.

Abstract: The present invention provides a test head cooling system for cooling test heads of a semiconductor IC test apparatus in an enclosed structure. A sealed housing is provided in a test head wherein an air duct is formed in a wall of the sealed box so that cooling air flow effectively. Several thousands of cables are connected to sockets of a plurality of boards. The boards are fixed in board racks by inserting the boards to sockets of the board racks. Gaps between the boards are arranged to provide good ventilation. A cooling pipe is connected to two heat exchangers for circulating cooling medium. A flexible hose for circulating the cooling medium is connected to one of the heat exchangers. The flexible hose is connected to an outside cooling apparatus so as to freely control the temperature of the cooling medium circulating inside the heat exchanger.

Abstract: A signal level measuring apparatus measures a level of a satellite signal from a geostationary satellite as received by a receiving antenna and provides an output to determine whether the antenna is correctly directed to the satellite. The apparatus is disposed between a converter associated with the antenna for converting the satellite signal into an IF signal and a tuner for demodulating the IF signal. The apparatus distributes and divides the IF signal from an input terminal of the apparatus into two output signals. One of the output signals is coupled to an output terminal of the apparatus, which, in turn, is coupled to the tuner. The other output signal is applied to level detector. An output from the level detector is compared with a reference signal. Depending on the comparison output, the state of light emission of a light-emitting device varies.

Abstract: An apparatus for subjecting a plurality of wafers to coating and heating treatments, including a coating section for subjecting the wafers to a coating treatment one by one, a heating section for subjecting wafers which have undergone the coating treatment to a heating treatment all together, and an interface section arranged between the coating section and the heating section. The wafers are heat-treated in the heat treatment section while the wafers are stacked at intervals in a vertical direction in a boat. The wafers which have undergone the coating treatment are loaded into the boat by a conveying member in the interface section. The conveying member and the boat are surrounded by a surrounding space formed by a casing at the interface section. A circulation line is combined with an air supply and exhaust system, for circulating air in the surrounding space.

Abstract: A valve drive system of an internal combustion engine provided with a camshaft (20) adapted to be rotated by means of a crankshaft, a cam robe (38) rotatably mounted on the camshaft (20), a cam (24) formed integrally with the cam robe (38) and serving to open and close an intake valve (24) in cooperation with a valve spring (92), a viscous coupling (40) arranged between the camshaft (20) and the cam robe (38) and serving to transmit a rotatory force of the camshaft (20) to the cam robe (38), and a spiral spring (42) for connecting the camshaft (20) and the cam robe (38) and urging the cam robe (38) toward a predetermined rotational angle position with respect to the camshaft (20) .

Abstract: There is provided a double-sided substrate cleaning apparatus including a carrier station for loading/unloading a carrier in which objects to be processed are stored, a convey mechanism for conveying an object taken out from the carrier station, at least one cleaning mechanism, arranged along a convey path on which the convey mechanism conveys the object, for cleaning the object, and an object reversing mechanism, arranged along the convey path, for reversing the object.