Abstract: A substrate processing apparatus generates an electric field in a processing space between a lower electrode to which a high frequency power is supplied and an upper electrode facing the lower electrode and performs plasma processing on a substrate mounted on the lower electrode by using a plasma generated by the electric field. Distribution of a plasma density in the processing space is controlled by a magnetic field generated by controlling a plurality of electromagnets provided at a top surface of the upper electrode which is provided to be opposite to the processing space.

Abstract: Provided is a plasma processing apparatus that performs a processing on a processing target substrate by applying plasma of a processing gas on the processing target substrate. The plasma processing apparatus includes: a processing container configured to accommodate the processing target substrate; a lower electrode disposed in the processing container to mount the processing target substrate thereon; an upper electrode disposed in the processing container to face the lower electrode with a processing space being interposed therebetween; a high frequency power source configured to apply a high frequency power between the upper electrode and the lower electrode; a main magnet unit including one or more annular main electromagnetic coils arranged around a central axis; and an auxiliary magnet unit configured to form a magnetic field that perpendicularly or obliquely crosses the central axis in the processing space.

Abstract: A plasma processing apparatus for performing a plasma process on a substrate includes: a mounting table configured to mount thereon the substrate; an electromagnet including a core member and a plurality of coils; a current source connected to both ends of the coils for supplying currents to the coils; and a control unit configured to control the current source to start or stop and to control a current value of the current source. The core member is made of a magnetic material and has a structure including a column-shaped member, multiple cylindrical members, and a base member. The plurality of coils are accommodated in grooves and wound around an outer peripheral surface of the column-shaped member and the cylindrical members, and the grooves are formed between the column-shaped member and one of the cylindrical members and between the cylindrical members.

Abstract: A substrate processing apparatus can easily control a plasma intensity distribution in a processing space. A substrate processing apparatus 10 generates an electric field E in a processing space S between a susceptor 12 to which a high frequency power is applied and an upper electrode 13 provided to face the susceptor 12, and also performs a plasma process on a wafer W mounted on the susceptor 12 with plasma generated by the electric field E. The substrate processing apparatus 10 includes multiple electromagnets 20 arranged on a top surface 13a of the upper electrode 13 opposite to the processing space S, and each of the electromagnets 20 is radially arranged with respect to a central portion C of the upper electrode 13 facing a central portion of the wafer W.

Abstract: In an etching method of a multilayer film including a first oxide film and a second oxide film, a high frequency power in etching an organic film is set to be higher than those in etching a first and second oxide films, and high frequency bias powers in the etching of the first and second oxide films are set to be higher than that in the etching of the organic film. In the etching of the first and second oxide films and the organic film, a magnetic field is generated such that horizontal magnetic field components in a radial direction with respect to a central axis line of a target object have an intensity distribution having a peak value at a position far from the central axis line, and a position of the peak value in the etching of the organic film is closer to the central axis line.

Abstract: There is provided a plasma processing apparatus including: a shower head installed within a processing chamber for processing a substrate and facing a mounting table for mounting the substrate; a multiple number of gas exhaust holes formed through the shower head to be extended from a facing surface of the shower head to an opposite surface to the facing surface; a multiple number of openable and closable trigger holes formed through the shower head to be extended from the facing surface of the shower head to the opposite surface, and configured to allow plasma leakage from the facing surface to the opposite surface; and a partition wall installed in a gas exhaust space provided on the side of the opposite surface of the shower head to divide the gas exhaust space into a multiple number of regions, each region communicating with one or more trigger holes.

Abstract: In an etching method of a multilayer film including a first oxide film and a second oxide film, a high frequency power in etching an organic film is set to be higher than those in etching a first and second oxide films, and high frequency bias powers in the etching of the first and second oxide films are set to be higher than that in the etching of the organic film. In the etching of the first and second oxide films and the organic film, a magnetic field is generated such that horizontal magnetic field components in a radial direction with respect to a central axis line of a target object have an intensity distribution having a peak value at a position far from the central axis line, and a position of the peak value in the etching of the organic film is closer to the central axis line.

Abstract: There is provided a plasma processing apparatus including: a shower head installed within a processing chamber for processing a substrate and facing a mounting table for mounting the substrate; a multiple number of gas exhaust holes formed through the shower head to be extended from a facing surface of the shower head to an opposite surface to the facing surface; a multiple number of openable and closable trigger holes formed through the shower head to be extended from the facing surface of the shower head to the opposite surface, and configured to allow plasma leakage from the facing surface to the opposite surface; and a partition wall installed in a gas exhaust space provided on the side of the opposite surface of the shower head to divide the gas exhaust space into a multiple number of regions, each region communicating with one or more trigger holes.

Abstract: A data transfer method, a data transfer apparatus, a data sending apparatus, and a data receiving apparatus for encrypting and transferring data and in particular, a data transfer method, a data transfer apparatus, a data sending apparatus and a data receiving apparatus capable of transferring data in safety. In a data transfer method for transferring data from a sender to a receiver, a calculation algorithm for encrypting the data supplied from the sender to the receiver is encrypted at the receiver and transmitted from the receiver to a sender.

Abstract: The present invention relates to, for transmitting information by a server from an information gathering device to a terminal device, an information exchange method, an information processor, a communication method, a communication system, an intermediary device, and a communication device. It is directed to provide an information exchange method, an information processor, a communication method, a communication system, an intermediary device, and a communication device with which pieces of streaming video information gathered by a number of information gathering devices can be exchanged efficiently.

Abstract: A calculation apparatus outputting a calculation result in accordance with an input condition and capable of increasing the processing speed. As a data of an address corresponding to an input condition of an calculation formula, its calculation result is stored in a memory and when the input condition is input to the memory, the calculation result is output. Moreover, the calculation apparatus executes calculation of a predetermined calculation formula and by learning, can output a calculation result at a high speed with a simple configuration. Storage means for outputting data corresponding to an address stores a calculation formula in which input is correlated to an address and output is correlated to data, and the calculation formula is selectively stored in accordance with the use frequency of the calculation formula.

Abstract: The present invention enables relatively easy animation display without requiring a special resource, and facilitates easy generation of the animation. When an image to be displayed as animation is constructed with a background, leg, body and head, these images are distributed as a layer. For each layer, a timing schedule is set with attribute data which includes display update timing and display effects. According to the schedule, display for each layer is updated at the scheduled timing.

Abstract: The present invention relates to, for transmitting information by a server from an information gathering device to a terminal device, an information exchange method, an information processor, a communication method, a communication system, an intermediary device, and a communication device. It is directed to provide an information exchange method, an information processor, a communication method, a communication system, an intermediary device, and a communication device with which pieces of streaming video information gathered by a number of information gathering devices can be exchanged efficiently.

Abstract: Disclosed is a gaming machine 1. The gaming machine 1 comprises a liquid crystal display unit 2b for notifying the information about the timing at which a player should conduct the stop operation, and an image control MICOM 81 for determining whether the stop operation is carried out at the timing at which a player should conduct the stop operation, and updating a value of point, on condition that it is determined that the stop operation is continuously carried out at the corresponding timing. The image control MICOM 81 carries out a game over 100 times, in which the internal winning combination determined by the main control means 71 corresponds to the effect data determined by the effect mode determining means by one-to-one, on condition that the value of point is ?50?.

Abstract: A projection lens unit includes a main body; a lens fixed to the main body; and a hood disposed to one end of the main body close to a screen. The hood defines the outermost boundary of a view angle stretching with respect to the center of the lens and includes a light-shielding plate and a light-shielding barrel. When the shielding height of the light-shielding plate and the length of the light-shielding barrel are respectively represented by H and L, the shielding height H and the length L are set so as to satisfy the equation tan(?/2)=H/L, in relation to the view angle ?. More particularly, these dimensions are set so as to satisfy the condition that the ratio H/L lies in a range from 0.74 to 0.94. The inner surface of the light-shielding barrel is subjected to surface treatment so as to absorb unnecessary light thereby, reflect it thereat, or scatter it thereat. To be more specific, the light-shielding barrel has scattering grooves disposed on the inner surface thereof.

Abstract: The present invention relates to a processing device performing a series of operations on an input and producing an output. An objective of the invention is to provide a processing device that can perform high-speed and flexible processing. According to the invention, the processing device includes multiple arithmetic cells, each selecting a predetermined one of multiple inputs, performing a reserved operation, and producing an output. The output of each arithmetic cell is supplied to one of the inputs of multiple arithmetic cells.

Abstract: The present invention relates to, for transmitting information by a server from an information gathering device to a terminal device, an information exchange method, an information processor, a communication method, a communication system, an intermediary device, and a communication device. It is directed to provide an information exchange method, an information processor, a communication method, a communication system, an intermediary device, and a communication device with which pieces of streaming video information gathered by a number of information gathering devices can be exchanged efficiently.

Abstract: An invention of a communication apparatus, a communication system, a communication method, in which communications are performed with a communication partner with data enciphered, and an information processing apparatus, an information processing system, an information processing method and service providing method is characterized in that, upon communications of data with the communication partner, the data is converted with a function of protocol which is common with the communication partner, and the function or protocol in converting means is updated in response to a communication operation with the communication partner.

Abstract: A projection lens unit includes a main body; a lens fixed to the main body; and a hood disposed to one end of the main body close to a screen. The hood defines the outermost boundary of a view angle stretching with respect to the center of the lens and includes a light-shielding plate and a light-shielding barrel. When the shielding height of the light-shielding plate and the length of the light-shielding barrel are respectively represented by H and L, the shielding height H and the length L are set so as to satisfy the equation tan(&agr;/2)=H/L, in relation to the view angle &agr;. More particularly, these dimensions are set so as to satisfy the condition that the ratio H/L lies in a range from 0.74 to 0.94. The inner surface of the light-shielding barrel is subjected to surface treatment so as to absorb unnecessary light thereby, reflect it thereat, or scatter it thereat. To be more specific, the light-shielding barrel has scattering grooves disposed on the inner surface thereof.

Abstract: A calculation apparatus outputting a calculation result in accordance with an input condition and capable of increasing the processing speed. As a data of an address corresponding to an input condition of an calculation formula, its calculation result is stored in a memory and when the input condition is input to the memory, the calculation result is output. Moreover, the calculation apparatus executes calculation of a predetermined calculation formula and by learning, can output a calculation result at a high speed with a simple configuration. Storage means for outputting data corresponding to an address stores a calculation formula in which input is correlated to an address and output is correlated to data, and the calculation formula is selectively stored in accordance with the use frequency of the calculation formula.