Abstract: It is an object to provide a heating apparatus and semiconductor manufacturing apparatus which can carry out a fine heating temperature control easily. A heating apparatus for heating a semiconductor substrate placed on a support arranged in a reaction chamber of a semiconductor manufacturing apparatus includes a plurality of heat source units, each of which has a heat source lamp being attachable and detachable, and being attachable by changing orientations in the circumferential direction. A semiconductor manufacturing apparatus includes: a reaction chamber to which a reaction gas is supplied; a support arranged in the reaction chamber; and a heating apparatus which heats a semiconductor substrate placed on the support, wherein the heating apparatus includes a plurality of heat source units, each of which has a heat source lamp being attachable and detachable, and being attachable by changing orientations in the circumferential direction.

Abstract: An answer system for technical support comprises an web server for receiving information of an inquiry sent from a user via an internet; an inquiry-information data base for storing the inquiry information which has been received by the web server; a fire wall for preventing the information of the inquiry, which is stored in the inquiry-information data base, from being accessed by outsiders via the telecommunication network; an intranet for communicating the information of the inquiry, which is stored by the web server, to an information service furnisher; an input unit for inputting an answer to the information of the inquiry, which has been communicated via the intranet; and a mail server for sending the answer to the information of the inquiry, which has been input by the input unit.

Abstract: It is an object of the present invention to provide a support for a semiconductor substrate capable of correctly measuring a temperature in the vicinity of a semiconductor substrate. A first support plate 2 and second support plate 3 of a wafer support 1, which are made of a material having almost the same thermal conductivity, are integrally superposed. A through-hole formed in the central region of the first support plate 2 is covered with a cap 7. A silicon semiconductor wafer 9 is placed on a wafer support part 4 of the wafer support 1. A space is formed between the silicon semiconductor wafer 9 and a counterbore part 4a. In a groove 5 formed on the second support plate 3, a thermocouple 6 is arranged parallel with a placed surface of the silicon semiconductor wafer 9 in the central region and peripheral region of the support plate to measure the temperature of the silicon semiconductor wafer.

Abstract: To provide a wafer support and a semiconductor substrate processing method by which dopants released from a rear surface of a semiconductor substrate can be adequately restrained from reaching a top surface of a semiconductor substrate and a reaction gas can be restrained from reaching a rear surface of the semiconductor substrate.

Abstract: It is an object of the present invention to provide an observation unit which efficiently cools apparatus members in a reaction chamber of a semiconductor manufacturing apparatus in a high-temperature atmosphere and reduces overexposure. An observation unit comprising: an imaging apparatus for imaging the inside of a reaction chamber of a semiconductor manufacturing apparatus in an atmosphere of a high temperature; a housing case which houses the imaging apparatus and is attached with a translucent member which guides an optical image of the inside of the reaction chamber to the imaging apparatus; and a cooling medium supplying apparatus for supplying a cooling medium to the inside of the housing case, wherein the translucent member is a silica glass plate having a gold film on both sides or one side.

Abstract: The remote monitoring diagnostic system and method includes a data storage file used to collect the plant data representing the operation status of a plant and to store the plant data, a monitoring system to monitor the field plant according to the collected plant data, a database storing the past plant data associated with errors having occurred to the plant and actions taken to cope with the errors, a diagnostic system to analyze the plant data sent according to the database, and a reporting system to send a report to the user of the plant regarding the causes for the error and/or actions taken to cope with the error based on the result of the analysis. An error is judged in a combustor, when a difference in temperature of two exhaust gas temperature datum detected from adjacent combustors is larger than a predetermined value.

Abstract: The present invention comprises a data storage file used to collect the plant data representing the operation status of a plant and to store the plant data, a monitoring system to monitor the field plant according to the collected plant data, a database storing the past plant data associated with errors having occurred to the plant and actions taken to cope with the errors, a diagnostic system to analyze the plant data sent according to the database, and a reporting system to send a report to the user of the plant regarding the causes for the error and/or actions taken to cope with the error based on the result of the analysis.

Abstract: The present invention comprises a data storage file used to collect the plant data representing the operation status of a plant and to store the plant data, a monitoring system to monitor the field plant according to the collected plant data, a database storing the past plant data associated with errors having occurred to the plant and actions taken to cope with the errors, a diagnostic system to analyze the plant data sent according to the database, and a reporting system to send a report to the user of the plant regarding the causes for the error and/or actions taken to cope with the error based on the result of the analysis.

Abstract: An answer system for technical support comprises an web server for receiving information of an inquiry sent from a user via an internet; an inquiry-information data base for storing the inquiry information which has been received by the web server; a fire wall for preventing the information of the inquiry, which is stored in the inquiry-information data base, from being accessed by outsiders via the telecommunication network; an intranet for communicating the information of the inquiry, which is stored by the web server, to an information service furnisher; an input unit for inputting an answer to the information of the inquiry, which has been communicated via the intranet; and a mail server for sending the answer to the information of the inquiry, which has been input by the input unit.

Abstract: An electronic circuit board comprising a flow soldering surface and a plurality of lands is disclosed. The flow soldering surface has an upstream side, a downstream side, and a warp defining a warp direction. The plurality of lands are disposed on (i) the upstream side of the flow soldering surface and (ii) the downstream side of the flow soldering surface, and only said plurality of lands on the downstream side having extended portions extending along the warp direction.

Abstract: The present invention comprises a data storage file used to collect the plant data representing the operation status of a plant and to store said plant data, a monitoring system to monitor said field plant according to said collected plant data, a database storing the past plant data associated with errors having occurred to said plant and actions taken to cope with said errors, a diagnostic system to analyze said plant data sent according to said database, and a reporting system to send a report to the user of said plant regarding the causes for the error and/or actions taken to cope with the error based on the result of said analysis.

Abstract: An answer system for technical support comprises an web server for receiving information of an inquiry sent from a user via an internet; an inquiry-information data base for storing the inquiry information which has been received by the web server; a fire wall for preventing the information of the inquiry, which is stored in the inquiry-information data base, from being accessed by outsiders via the telecommunication network; an intranet for communicating the information of the inquiry, which is stored by the web server, to an information service furnisher; an input unit for inputting an answer to the information of the inquiry, which has been communicated via the intranet; and a mail server for sending the answer to the information of the inquiry, which has been input by the input unit.

Abstract: A combined plant comprising a gas turbine, a waste heat recovery boiler using exhaust gases of the gas turbine as a heat source and including low pressure and high pressure steam generators and a steam turbine arranged to be driven by the steam supplied from the boiler, the gas turbine and the steam turbine being connected by a single shaft. At the time of plant startup, low pressure steam from the low pressure steam generator is introduced into the steam turbine prior to the generation of high pressure steam, thereby preventing the steam turbine from being overheated due to a windage loss.

Abstract: A combined plant including a gas turbine, a steam turbine and a waste heat recovery boiler using exhaust gases of the gas turbine as a heat source for producing steam serving as a drive source of the steam turbine further includes an ancillary steam source separate from and independent of the waste heat recovery boiler. At the time of startup of the plant, steam from the ancillary steam source is introduced into the steam turbine until the conditions for feeding air to the waste heat recovery boiler are set, to thereby avoid overheating of the steam turbine due to a windage loss.