Abstract: There are provided a susceptor having a recessed wafer mounting section, in which a semiconductor wafer is mounted and which is configured to include a circular bottom portion and a side wall portion, on an upper surface, a reaction chamber in which the susceptor is provided, an imaging unit that is provided above the reaction chamber and images the semiconductor wafer and the wafer mounting section, and an image analysis unit that analyzes the deviation of the semiconductor wafer from the wafer mounting section on the basis of an image captured by the imaging unit.

Abstract: A method provide high-purity nitric oxide by preserving quality of the nitric oxide by suitably inhibiting the disproportionation reaction of the nitric oxide that is transported in a state of being stored in a high-pressure gas cylinder, and decreasing the amount of nitrous oxide and nitrogen dioxide that are produced during the transportation. When the nitric oxide is transported in a state of being stored in the high-pressure gas cylinder, the nitric oxide is filled into the high-pressure gas cylinder at a gauge pressure between 1.96 MPa to 3.5 MPa to be stored, and is transported in a state in which the exterior surface temperature of the high-pressure gas cylinder is held in a range from ?15° C. to 5° C.

Abstract: A semiconductor wafer position display system, a semiconductor wafer position display method, and a semiconductor wafer position display program with which a deviation from an appropriate placement position of a semiconductor wafer mounted in a wafer mounting part can be displayed to a user in an easily understood manner are provided.

Abstract: Embodiments described herein relate to a lower side wall for use in a processing chamber. In one embodiment, the lower side wall includes an annular body. The annular body as an inner circumference, an outer circumference, a plurality of flanges projecting from the inner circumference, and a first concave portion formed in the outer circumference. The outer circumference has a plurality of grooves arranged in a circumferential direction of the lower side wall. In another embodiment, the annular body further includes a top surface having a mounting surface formed thereon and a second concave portion formed opposite the first concave portion. The second concave portion has a plurality of purge holes. In another embodiment, each groove of the plurality of grooves formed in the first concave portion has an arc shape.

Abstract: A ceiling portion for use in a processing apparatus and an epitaxial growth apparatus having the ceiling portion are disclosed herein. In one embodiment the ceiling portion includes a ring shaped support and a ceiling plate. The ring shaped support includes an inner surface having a first slope portion decreasing from a top surface of the ring shaped support towards a center of the ring shaped support and a protrusion, protruding from the inner surface, having a second slope portion decreasing in a protruding direction towards the center of the ring shaped support. The ceiling plate is coupled to the support. In another embodiment, the first slope portion and the second slope portion meet at a point, wherein an angle formed by the first slope portion and the second slope portion is less than 90 degrees.

Abstract: A susceptor support portion of the present invention includes a susceptor shaft and a substrate lift portion. The susceptor shaft includes a support column and a plurality of arms that extend radially from the support column, the substrate lift portion includes a support column and a plurality of arms that extend radially from the support column, the arm of the susceptor shaft includes a first arm, a second arm coupled to the first arm, and a third arm coupled to the second arm, from the support column side of the susceptor shaft, the second arm being provided with a through hole which passes through the second arm in a vertical direction, and a width of the first arm of the susceptor shaft is smaller than a width of the second arm of the susceptor shaft.

Abstract: A susceptor support portion of the present invention includes a susceptor shaft and a substrate lift portion. The susceptor shaft includes a support column and a plurality of arms that extend radially from the support column, the substrate lift portion includes a support column and a plurality of arms that extend radially from the support column, the arm of the susceptor shaft includes a first arm, a second arm coupled to the first arm, and a third arm coupled to the second arm, from the support column side of the susceptor shaft, the second arm being provided with a through hole which passes through the second arm in a vertical direction, and a width of the first arm of the susceptor shaft is smaller than a width of the second arm of the susceptor shaft.

Abstract: An electric motor includes: a ring-shaped stator attached to an inside of a tubular body part; a rotor rotatably arranged inside in a radial direction of the stator; and a tabular member attached to one end of the body part and including a power supply cable through-hole through which a power supply cable pierces, the power supply cable being pulled out from a coil included by the stator, wherein the stator and the tabular member are rotatable around a rotation center axis of the rotor, and a position of the power supply cable pulled out from the coil and a position of the power supply cable through-hole can be changed in a circumferential direction of the body part.

Abstract: A motor having an annular stator mounted to an inner side of a tubular housing and a rotor core disposed inward of the stator in a radial direction of the stator, includes: a shaft which is mounted to the rotor core, and which extends in a direction of a rotation center axis of the rotor core, a gear being able to be mounted on one end side of the shaft; a bearing which rotatably supports the shaft to the housing on a side of the gear than the rotor core; a tubular collar which is mounted to an outer peripheral section of the shaft and between the bearing and the gear; and a bearing mounting member which is mounted to an inner side of the housing from a side of the rotor core and mounts the bearing to the housing.

Abstract: An interlock mechanism of a motor, includes a terminal box configured to store a terminal used to connect a power supply cable to the motor; a lid configured to close the terminal box; a fixing member configured to fix the lid to the terminal box; a first connector attached to the lid; a second connector capable of being coupled with the first connector and configured to cover the fixing member in a state that the second connector is coupled with the first connector.

Abstract: An electrical motor that includes a circular stator attached to an inner side of a housing and a rotor disposed at an inner side of the stator in a radial direction, the electrical motor includes: a terminal connected to a power supply cable drawn from a coil of the stator; a terminal box that is attached to the housing and stores the terminal; and an insulating material that is disposed between the terminal box and the terminal and separable from the terminal.

Abstract: A susceptor support portion of the present invention includes a susceptor shaft and a substrate lift portion. The susceptor shaft includes a support column and a plurality of arms that extend radially from the support column, the substrate lift portion includes a support column and a plurality of arms that extend radially from the support column, the arm of the susceptor shaft includes a first arm, a second arm coupled to the first arm, and a third arm coupled to the second arm, from the support column side of the susceptor shaft, the second arm being provided with a through hole which passes through the second arm in a vertical direction, and a width of the first arm of the susceptor shaft is smaller than a width of the second arm of the susceptor shaft.

Abstract: A susceptor support portion of the present invention includes a susceptor shaft and a substrate lift portion. The susceptor shaft includes a support column and a plurality of arms that extend radially from the support column, the substrate lift portion includes a support column and a plurality of arms that extend radially from the support column, the arm of the susceptor shaft includes a first arm, a second arm coupled to the first arm, and a third arm coupled to the second arm, from the support column side of the susceptor shaft, the second arm being provided with a through hole which passes through the second arm in a vertical direction, and a width of the first arm of the susceptor shaft is smaller than a width of the second arm of the susceptor shaft.

Abstract: When a reaction chamber defined and formed by a ceiling plate as a top face, a substrate mounting portion as a bottom face, and a side wall as a lateral face is constructed, the ceiling plate is supported by a support at the circumferential edge of the ceiling plate from the upper side and the outer side of the circumferential edge, and the reactant gas is rectified in a reactant gas supply path disposed in the side wall so that a horizontal component in a flow direction of the reactant gas in the reaction chamber corresponds to a horizontal component in a direction extending from the center of an opening of the reactant gas supply path facing the reaction chamber to the center of the reaction chamber.

Abstract: There are provided a susceptor having a recessed wafer mounting section, in which a semiconductor wafer is mounted and which is configured to include a circular bottom portion and a side wall portion, on an upper surface, a reaction chamber in which the susceptor is provided, an imaging unit that is provided above the reaction chamber and images the semiconductor wafer and the wafer mounting section, and an image analysis unit that analyzes the deviation of the semiconductor wafer from the wafer mounting section on the basis of an image captured by the imaging unit.

Abstract: An epitaxial growth device comprises a reaction chamber defined by a substrate setting portion, a ceiling board and a sidewall portion, a heating member and reactant gas-introduction member. The ceiling board is fixed to a ring-like support portion having a through-hole as viewed from above. A diameter of the through-hole becomes reduced gradually toward a substrate-side. The ceiling board is fixed to an end portion of the substrate-side of the through-hole.

Abstract: A susceptor device includes: a placement section on which a substrate is placed; a lift pin which is provided in the placement section and protrudes further to the upper side than the placement section at the time of carrying-in or carrying-out of the substrate, thereby supporting the substrate placed on the placement section; and lift pin moving means for moving the lift pin up and down. At the time of carrying-in or carrying-out of the substrate, the substrate is moved up and down by moving the lift pin up and down by the lift pin moving means in a state where the substrate is supported by the lift pin, and the susceptor device further includes a control section which controls the lift pin moving means so as to reduce a movement speed immediately before the substrate and the lift pin come into contact with each other, in a case of moving the lift pin.

Abstract: A motor cooling structure for cooling a motor, which includes a shaft transmitting power and a rotor core attached to an outside of the shaft, by a cooling medium, includes: a cooling medium supply passage that extends to an inside of the shaft in an axial direction of the shaft and passes the cooling medium through the cooling medium supply passage; and a plurality of cooling medium passages that are branched from the cooling medium supply passage to cool the rotor core while flowing the cooling medium without branching the cooling medium in the axial direction and then eject the cooling medium from a plurality of ejection holes opened to a surface of the rotor core, wherein distances from a cooling medium inlet, through which the cooling medium flows into the cooling medium supply passage, to the respective ejection holes are equal between the plurality of cooling medium passages.

Abstract: It is an object of the present invention to provide an observation unit which efficiently cools apparatus members in a reaction chamber of a semiconductor manufacturing apparatus in a high-temperature atmosphere and reduces overexposure. An observation unit comprising: an imaging apparatus for imaging the inside of a reaction chamber of a semiconductor manufacturing apparatus in an atmosphere of a high temperature; a housing case which houses the imaging apparatus and is attached with a translucent member which guides an optical image of the inside of the reaction chamber to the imaging apparatus; and a cooling medium supplying apparatus for supplying a cooling medium to the inside of the housing case, wherein the translucent member is a silica glass plate having a gold film on both sides or one side.