Abstract: A time delay valve includes a switching valve that switches between a first position and a second position; an urging member that urges the switching valve toward the first position; a driving mechanism that urges the switching valve toward the second position located opposite the first position in the presence of the pressure of a pilot fluid being supplied; a pilot flow channel that introduces the pilot fluid to the driving mechanism; and a delaying mechanism that delays the switching timing of the switching valve. The delaying mechanism includes a first throttle valve provided on the pilot flow channel, a compensation mechanism that urges the switching valve toward the first position in the presence of the pressure of the pilot fluid being supplied, and a compensation flow channel that is branched from the pilot flow channel to introduce a portion of the pilot fluid to the compensation mechanism.

Abstract: A time delay valve includes a switching valve that switches between a first position and a second position; an urging member that urges the switching valve toward the first position; a driving mechanism that urges the switching valve toward the second position located opposite the first position in the presence of the pressure of a pilot fluid being supplied: a pilot flow channel that introduces the pilot fluid to the driving mechanism; and a delaying mechanism that delays the switching timing of the switching valve. The delaying mechanism includes a first throttle valve provided on the pilot flow channel, a compensation mechanism that urges the switching valve toward the first position in the presence of the pressure of the pilot fluid being supplied, and a compensation flow channel that is branched from the pilot flow channel to introduce a portion of the pilot fluid to the compensation mechanism.

Abstract: An ionizer includes a fan for blowing air, the fan being provided in an air blowing port which opens in a case, and a plurality of discharge electrodes for generating positive and negative ions by corona discharge, the discharge electrodes being provided in the case at positions facing the air blowing port. The ionizer also includes a plurality of discharge electrode pairs each constituted by two discharge electrodes for generating ions of different polarities. When a tip-center distance denotes a distance from the electrode tip to the center of the air blowing port, the tip-center distances of the two discharge electrodes in the discharge electrode pairs are different from each other.

Abstract: Discharge electrodes for generating ion and a member for cleaning the discharge electrodes are mounted on an electrode support frame, which is detachably attached to the case of an ionizer. When the electrode support frame is attached to the case, the cleaning member occupies a retraction position where the cleaning member does not shut off or disturb air that is supplied from a fan. Upon the detachment of the electrode support frame from the case, the cleaning member becomes moveable. Then, the cleaning member is moved while being brought into contact with the discharging parts of the discharge electrodes one after another. As a result, the cleaning member sweeps dust or other particles off the discharging parts thereof.

Abstract: An ionizer is formed by coupling a fan unit provided with a discharge electrode and a fan and a control unit provided with an indicator and an adjuster to each other, and both units are changeable between a normal coupling condition, where both are directed in the same direction, and an opposite coupling condition, where they are directed in opposite directions to each other, and in addition, a power/signal arrangement of the connection terminals of the separate connector is bilaterally symmetrical such that same power and signals ale transmitted and received between the separate connectors of both units connected to each other in either coupling condition of aforementioned both units.

Abstract: A semiconductor manufacturing method and apparatus is provided that can improve uniformity of processing time of oxidation thickness. When starting a heat oxidation process, a time for optimum oxidation processing in the process management system is calculated based on atmospheric pressure data, a target thickness of that process, oxidization time, thickness data and atmospheric pressure data in the immediately preceding process under the same oxidization processing job. The optimum system comprises a process management system such as a host computer, a device having a barometer, a heat oxidation-processing device and a thickness-measuring device. The host computer, the barometer, the heat oxidation processing device and the thickness-measuring device are connected via a network so as to transmit data to and from each device.

Abstract: Discharge electrodes for generating ion and a member for cleaning the discharge electrodes are mounted on an electrode support frame, which is detachably attached to the case of an ionizer. When the electrode support frame is attached to the case, the cleaning member occupies a retraction position where the cleaning member does not shut off or disturb air that is supplied from a fan. Upon the detachment of the electrode support frame from the case, the cleaning member becomes moveable. Then, the cleaning member is moved while being brought into contact with the discharging parts of the discharge electrodes one after another. As a result, the cleaning member sweeps dust or other particles off the discharging parts thereof.

Abstract: An ionizer includes a fan for blowing air, the fan being provided in an air blowing port which opens in a case, and a plurality of discharge electrodes for generating positive and negative ions by corona discharge, the discharge electrodes being provided in the case at positions facing the air blowing port. The ionizer also includes a plurality of discharge electrode pairs each constituted by two discharge electrodes for generating ions of different polarities. When a tip-center distance denotes a distance from the electrode tip to the center of the air blowing port, the tip-center distances of the two discharge electrodes in the discharge electrode pairs are different from each other.